JPWO2020179897A1 - - Google Patents
Info
- Publication number
- JPWO2020179897A1 JPWO2020179897A1 JP2021503658A JP2021503658A JPWO2020179897A1 JP WO2020179897 A1 JPWO2020179897 A1 JP WO2020179897A1 JP 2021503658 A JP2021503658 A JP 2021503658A JP 2021503658 A JP2021503658 A JP 2021503658A JP WO2020179897 A1 JPWO2020179897 A1 JP WO2020179897A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J201/00—Adhesives based on unspecified macromolecular compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022101922A JP7141566B2 (ja) | 2019-03-07 | 2022-06-24 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019041886 | 2019-03-07 | ||
JP2019041886 | 2019-03-07 | ||
PCT/JP2020/009580 WO2020179897A1 (ja) | 2019-03-07 | 2020-03-06 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022101922A Division JP7141566B2 (ja) | 2019-03-07 | 2022-06-24 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020179897A1 true JPWO2020179897A1 (ja) | 2020-09-10 |
JP7141515B2 JP7141515B2 (ja) | 2022-09-22 |
Family
ID=72337854
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021503658A Active JP7141515B2 (ja) | 2019-03-07 | 2020-03-06 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
JP2022101922A Active JP7141566B2 (ja) | 2019-03-07 | 2022-06-24 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022101922A Active JP7141566B2 (ja) | 2019-03-07 | 2022-06-24 | ダイボンディングシート、及びフィルム状接着剤付き半導体チップの製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP7141515B2 (ja) |
KR (1) | KR20210134905A (ja) |
CN (1) | CN113518814B (ja) |
TW (1) | TWI825282B (ja) |
WO (1) | WO2020179897A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220156513A (ko) | 2020-03-27 | 2022-11-25 | 린텍 가부시키가이샤 | 반도체 장치 제조용 시트의 제조 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011174042A (ja) * | 2010-02-01 | 2011-09-08 | Nitto Denko Corp | 半導体装置製造用フィルム及び半導体装置の製造方法 |
JP2014011273A (ja) * | 2012-06-28 | 2014-01-20 | Furukawa Electric Co Ltd:The | ウェハ加工用粘着テープ |
JP2014135467A (ja) * | 2012-12-10 | 2014-07-24 | Nitto Denko Corp | ダイシングテープ一体型接着シート、ダイシングテープ一体型接着シートを用いた半導体装置の製造方法、及び、半導体装置 |
JP5946650B2 (ja) * | 2012-02-21 | 2016-07-06 | 積水化学工業株式会社 | ダイシング−ダイボンディングテープ及び粘接着剤層付き半導体チップの製造方法 |
WO2018083982A1 (ja) * | 2016-11-01 | 2018-05-11 | リンテック株式会社 | ダイシングダイボンディングシート、及び半導体チップの製造方法 |
JP2018113356A (ja) * | 2017-01-12 | 2018-07-19 | リンテック株式会社 | 半導体加工用シートおよび半導体装置の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946650B2 (ja) * | 1976-05-18 | 1984-11-14 | 株式会社サンノ− | 家畜ふん尿固液分離装置 |
JP2009231699A (ja) * | 2008-03-25 | 2009-10-08 | Furukawa Electric Co Ltd:The | ウエハ加工用テープ |
WO2017072901A1 (ja) * | 2015-10-29 | 2017-05-04 | 古河電気工業株式会社 | 半導体ウエハ表面保護用粘着テープおよび半導体ウエハの加工方法 |
-
2020
- 2020-03-06 JP JP2021503658A patent/JP7141515B2/ja active Active
- 2020-03-06 TW TW109107378A patent/TWI825282B/zh active
- 2020-03-06 WO PCT/JP2020/009580 patent/WO2020179897A1/ja active Application Filing
- 2020-03-06 KR KR1020217028070A patent/KR20210134905A/ko active IP Right Grant
- 2020-03-06 CN CN202080018319.0A patent/CN113518814B/zh active Active
-
2022
- 2022-06-24 JP JP2022101922A patent/JP7141566B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011174042A (ja) * | 2010-02-01 | 2011-09-08 | Nitto Denko Corp | 半導体装置製造用フィルム及び半導体装置の製造方法 |
JP5946650B2 (ja) * | 2012-02-21 | 2016-07-06 | 積水化学工業株式会社 | ダイシング−ダイボンディングテープ及び粘接着剤層付き半導体チップの製造方法 |
JP2014011273A (ja) * | 2012-06-28 | 2014-01-20 | Furukawa Electric Co Ltd:The | ウェハ加工用粘着テープ |
JP2014135467A (ja) * | 2012-12-10 | 2014-07-24 | Nitto Denko Corp | ダイシングテープ一体型接着シート、ダイシングテープ一体型接着シートを用いた半導体装置の製造方法、及び、半導体装置 |
WO2018083982A1 (ja) * | 2016-11-01 | 2018-05-11 | リンテック株式会社 | ダイシングダイボンディングシート、及び半導体チップの製造方法 |
JP2018113356A (ja) * | 2017-01-12 | 2018-07-19 | リンテック株式会社 | 半導体加工用シートおよび半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2022125110A (ja) | 2022-08-26 |
CN113518814B (zh) | 2023-05-23 |
CN113518814A (zh) | 2021-10-19 |
TWI825282B (zh) | 2023-12-11 |
TW202044424A (zh) | 2020-12-01 |
WO2020179897A1 (ja) | 2020-09-10 |
KR20210134905A (ko) | 2021-11-11 |
JP7141566B2 (ja) | 2022-09-22 |
JP7141515B2 (ja) | 2022-09-22 |
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