JPWO2020152866A1 - - Google Patents

Info

Publication number
JPWO2020152866A1
JPWO2020152866A1 JP2020567346A JP2020567346A JPWO2020152866A1 JP WO2020152866 A1 JPWO2020152866 A1 JP WO2020152866A1 JP 2020567346 A JP2020567346 A JP 2020567346A JP 2020567346 A JP2020567346 A JP 2020567346A JP WO2020152866 A1 JPWO2020152866 A1 JP WO2020152866A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020567346A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020152866A1 publication Critical patent/JPWO2020152866A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
JP2020567346A 2019-01-25 2019-01-25 Pending JPWO2020152866A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/002541 WO2020152866A1 (en) 2019-01-25 2019-01-25 Image inspection device

Publications (1)

Publication Number Publication Date
JPWO2020152866A1 true JPWO2020152866A1 (en) 2020-07-30

Family

ID=71736708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020567346A Pending JPWO2020152866A1 (en) 2019-01-25 2019-01-25

Country Status (4)

Country Link
JP (1) JPWO2020152866A1 (en)
KR (1) KR20210118063A (en)
TW (1) TW202028729A (en)
WO (1) WO2020152866A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI751734B (en) * 2020-10-08 2022-01-01 鴻績工業股份有限公司 Detection device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003297888A (en) * 2002-03-26 2003-10-17 Isoa Inc Optical inspecting method and optical inspection system
JP2004354097A (en) * 2003-05-27 2004-12-16 Starlabo Corp Spectral imaging apparatus
JP2007322209A (en) * 2006-05-31 2007-12-13 Tokyo Seimitsu Co Ltd Visual examination device and method
JP2008076218A (en) * 2006-09-21 2008-04-03 Olympus Corp Visual inspection apparatus
JP2017009383A (en) * 2015-06-19 2017-01-12 アスモ株式会社 Device and method for imaging exterior appearance
EP3339998A1 (en) * 2016-12-21 2018-06-27 G.D. S.p.A System and method of inspection of a wrapping material
JP2018185269A (en) * 2017-04-27 2018-11-22 Ckd株式会社 Inspection device, ptp packaging machine, and method for manufacturing ptp sheet

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005274155A (en) * 2004-03-22 2005-10-06 Olympus Corp Flaw inspection device
JP2006165352A (en) * 2004-12-08 2006-06-22 Dkk Toa Corp Visual external inspection apparatus for semiconductor
JP6425939B2 (en) 2014-08-08 2018-11-21 東京エレクトロン株式会社 Inspection apparatus and inspection method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003297888A (en) * 2002-03-26 2003-10-17 Isoa Inc Optical inspecting method and optical inspection system
JP2004354097A (en) * 2003-05-27 2004-12-16 Starlabo Corp Spectral imaging apparatus
JP2007322209A (en) * 2006-05-31 2007-12-13 Tokyo Seimitsu Co Ltd Visual examination device and method
JP2008076218A (en) * 2006-09-21 2008-04-03 Olympus Corp Visual inspection apparatus
JP2017009383A (en) * 2015-06-19 2017-01-12 アスモ株式会社 Device and method for imaging exterior appearance
EP3339998A1 (en) * 2016-12-21 2018-06-27 G.D. S.p.A System and method of inspection of a wrapping material
JP2018185269A (en) * 2017-04-27 2018-11-22 Ckd株式会社 Inspection device, ptp packaging machine, and method for manufacturing ptp sheet

Also Published As

Publication number Publication date
WO2020152866A1 (en) 2020-07-30
TW202028729A (en) 2020-08-01
KR20210118063A (en) 2021-09-29

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