JPWO2020092668A5 - - Google Patents
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- JPWO2020092668A5 JPWO2020092668A5 JP2021523853A JP2021523853A JPWO2020092668A5 JP WO2020092668 A5 JPWO2020092668 A5 JP WO2020092668A5 JP 2021523853 A JP2021523853 A JP 2021523853A JP 2021523853 A JP2021523853 A JP 2021523853A JP WO2020092668 A5 JPWO2020092668 A5 JP WO2020092668A5
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Claims (46)
フレームと、
前記フレームに接続される駆動セクションであって、前記駆動セクションが、少なくとも１つの駆動軸を有する、駆動セクションと、
基板を保持するように構成されるエンドエフェクタを有する、少なくとも１つのアームであって、前記少なくとも１つのアームが、トランスミッションリンクによって前記駆動セクションに接続され、前記少なくとも１つのアームに対して、前記エンドエフェクタの伸長および収縮をもたらす、少なくとも１つの自由度軸を有する、少なくとも１つのアームと、
前記フレームおよび前記エンドエフェクタに接続される軸受であって、前記軸受が、前記少なくとも１つの自由度軸を画定するガイドウェイを画定する、軸受と
を備え、
前記軸受は、
少なくとも１つの転がり負荷軸受要素であって、前記軸受の軸受ケースにおいて、軸受レールに沿って、前記軸受ケースを循環するように配置され、前記少なくとも１つのアームによって前記軸受に付与されるアームの負荷を支持するように、前記軸受ケースの軸受レースウェイと前記軸受レールとの間をインターフェース接続し、前記少なくとも１つのアームによって、前記軸受レールに沿う、前記軸受ケースの摺動をもたらす、少なくとも１つの転がり負荷軸受要素と、
少なくとも１つの実質的に無負荷の軸受の転がりスペーサ要素であって、前記少なくとも１つの転がり負荷軸受要素の各々と前記転がり負荷軸受要素の別の１つとの間に介在し、前記少なくとも１つの転がり負荷軸受要素の各々を前記転がり負荷軸受要素の別の１つと離間させて、前記軸受ケースに並んで配置され、前記少なくとも１つの実質的に無負荷の軸受の転がりスペーサ要素が、前記軸受レースウェイと前記軸受レールとの間をインターフェース接続し、前記少なくとも１つの実質的に無負荷の軸受の転がりスペーサ要素が、前記少なくとも１つのアームの各運動に対して発生する前記アームの負荷によって、前記軸受の全体にわたって、実質的に連続的に負荷が加えられないように構成される、少なくとも１つの実質的に無負荷の軸受の転がりスペーサ要素と
を備え、
前記少なくとも１つの実質的に無負荷の軸受の転がりスペーサ要素は、指定された所定の使用期間中の２６０℃を超える温度の真空雰囲気における、前記真空基板搬送装置の所定の半導体プロセスの使用デューティに相応する、持続的な実質的に無制限の使用に対して適合可能である犠牲緩衝材料からなる、
真空基板搬送装置。 A vacuum substrate transfer apparatus,
a frame;
a drive section connected to the frame, the drive section having at least one drive shaft;
at least one arm having an end effector configured to hold a substrate, said at least one arm being connected to said drive section by a transmission link; at least one arm having at least one axis of freedom that effects extension and retraction of the effector;
a bearing connected to the frame and the end effector, the bearing defining a guideway defining the at least one axis of freedom;
The bearing is
at least one rolling load bearing element arranged in a bearing case of said bearing, along a bearing rail, so as to circulate through said bearing case and arm load imparted to said bearing by said at least one arm; interfaced between the bearing raceway of the bearing case and the bearing rails to support sliding of the bearing case along the bearing rails by the at least one arm; a rolling load bearing element;
at least one substantially unloaded bearing rolling spacer element interposed between each of said at least one rolling load bearing element and another one of said rolling load bearing elements, said at least one rolling a rolling spacer element of said at least one substantially unloaded bearing disposed alongside said bearing case with each of said load bearing elements spaced apart from another one of said rolling load bearing elements; and said bearing rail, wherein said at least one substantially unloaded bearing rolling spacer element is actuated by said arm load for each movement of said at least one arm, causing said bearing at least one substantially unloaded bearing rolling spacer element configured to be substantially continuously unloaded throughout the
The at least one substantially unloaded bearing rolling spacer element is compliant with a predetermined semiconductor process use duty of the vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature exceeding 260° C. during a specified predetermined period of use. commensurate with a sacrificial cushioning material that is adaptable for sustained, substantially unlimited use;
Vacuum substrate transfer device.
請求項１記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one substantially unloaded bearing rolling spacer element is a ball;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one substantially unloaded bearing rolling spacer element is a roller;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 The at least one substantially unloaded bearing wherein the sacrificial cushioning material of the rolling spacer element of the at least one substantially unloaded bearing wears sacrificially against the at least one rolling load bearing element. forming a sacrificial wear surface for the rolling spacer elements of
2. The vacuum substrate transfer apparatus according to claim 1.
前記潤滑性のある材料表面は、潤滑剤を含む、
請求項１記載の真空基板搬送装置。 said at least one substantially unloaded bearing rolling spacer element having a lubricious material surface with respect to said at least one rolling load bearing element;
wherein the lubricious material surface comprises a lubricant;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 the sacrificial cushioning material of the at least one substantially unloaded bearing rolling spacer element is polyimide (PI);
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 the sacrificial cushioning material of the at least one substantially unloaded bearing rolling spacer element is polyamideimide (PAI);
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 The specified predetermined period of use exceeds the number of years of use duty of the predetermined semiconductor process of the vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature exceeding 260 ° C.
2. The vacuum substrate transfer apparatus according to claim 1.
請求項８記載の真空基板搬送装置。 The vacuum atmosphere is a high vacuum compatible with a high vacuum substrate manufacturing process.
The vacuum substrate transfer apparatus according to claim 8.
請求項１記載の真空基板搬送装置。 the at least one substantially unloaded bearing rolling spacer element is of a common material throughout the at least one substantially unloaded bearing rolling spacer element;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 wherein the predetermined duty of use of the vacuum substrate transfer device corresponds to a life of a specified predetermined usage period of the vacuum substrate transfer device;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 The at least one substantially unloaded bearing rolling spacer element provides relative motion between each rolling load bearing element and the other rolling load bearing element as the bearing case slides along the bearing rails. interfacing between each rolling load bearing element and the other rolling load bearing element to dampen the
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１記載の真空基板搬送装置。 the rolling spacer elements of the at least one substantially unloaded bearing, such that the bearing has a reduced number of the at least one rolling load bearing element relative to bearings of all rolling load bearing elements; arranged in the bearing case to occupy the position of a rolling load bearing element in the bearing case;
2. The vacuum substrate transfer apparatus according to claim 1.
請求項１３記載の真空基板搬送装置。 The bearing provides reduced sliding resistance commensurate with the bearing of the reduced load bearing element with reduced vibration response commensurate with the bearing of the all rolling load bearing element. for a given load capacity of a reduced load bearing element bearing,
14. The vacuum substrate transfer apparatus according to claim 13.
フレームと、
前記フレームに接続される駆動セクションであって、前記駆動セクションが、少なくとも１つの駆動軸を有する、駆動セクションと、
基板を保持するように構成されるエンドエフェクタを有する、少なくとも１つのアームであって、前記少なくとも１つのアームが、トランスミッションリンクによって前記駆動セクションに接続され、前記少なくとも１つのアームに対して、前記エンドエフェクタの伸長および収縮をもたらす、少なくとも１つの自由度軸を有する、少なくとも１つのアームと、
前記フレームおよび前記エンドエフェクタに接続される軸受であって、前記軸受が、前記少なくとも１つの自由度軸を画定するガイドウェイを画定する、軸受と
を備え、
前記軸受は、
少なくとも１つの転がり負荷軸受要素であって、前記軸受の軸受ケースにおいて、軸受レールに沿って、ケースを循環するように配置され、前記少なくとも１つのアームによって前記軸受に付与されるアームの負荷を支持するように、前記軸受ケースの軸受レースウェイと軸受レールとの間をインターフェース接続し、前記少なくとも１つのアームによって、前記軸受レールに沿う、前記軸受ケースの摺動をもたらす、少なくとも１つの転がり負荷軸受要素と、
少なくとも１つのプラスチックの転がりスペーサ要素であって、レースウェイにおいて、前記少なくとも１つの転がり負荷軸受要素の各々と並んで転動し、前記少なくとも１つの転がり負荷軸受要素の各々を前記転がり負荷軸受要素の別の１つと離間させて、前記軸受レースウェイに配置される、少なくとも１つのプラスチックの転がりスペーサ要素と
を備え、
前記少なくとも１つのプラスチックの転がりスペーサ要素は、指定された所定の使用期間中の２６０℃を超える温度の真空雰囲気における、前記真空基板搬送装置の所定の使用デューティに相応する、持続的な実質的に無制限の使用に適合可能である、真空基板搬送装置。 A vacuum substrate transfer apparatus,
a frame;
a drive section connected to the frame, the drive section having at least one drive shaft;
at least one arm having an end effector configured to hold a substrate, said at least one arm being connected to said drive section by a transmission link; at least one arm having at least one axis of freedom that effects extension and retraction of the effector;
a bearing connected to the frame and the end effector, the bearing defining a guideway defining the at least one axis of freedom;
The bearing is
at least one rolling load bearing element arranged in a bearing case of the bearing along the bearing rails in circulation through the case to support an arm load imparted to the bearing by the at least one arm; at least one rolling load bearing interfacing between a bearing raceway of said bearing case and a bearing rail such that said at least one arm provides for sliding of said bearing case along said bearing rail; element and
at least one plastic rolling spacer element for rolling alongside each of said at least one rolling load bearing element in a raceway and forcing each of said at least one rolling load bearing element against said rolling load bearing element; at least one plastic rolling spacer element positioned on said bearing raceway, spaced apart from another one;
Said at least one plastic rolling spacer element is substantially sustained, commensurate with a predetermined duty of use of said vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature above 260° C. for a specified predetermined period of use. A vacuum substrate transfer apparatus that is adaptable for unlimited use.
請求項１５記載の真空基板搬送装置。 said at least one plastic rolling spacer element is generated for each movement of said at least one arm such that said at least one plastic rolling spacer element provides a substantially unloaded bearing; wherein the interface connection between the way and the bearing rail is configured such that it is substantially continuously unloaded throughout the bearing by an arm load applied to the bearing case. is a no-load bearing element in
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 said at least one plastic rolling spacer element forms a sacrificial wear surface for at least one rolling load bearing element;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１７記載の真空基板搬送装置。 the sacrificial wear surface of the at least one plastic rolling spacer element wears sacrificially against the at least one rolling load bearing element;
18. The vacuum substrate transfer apparatus according to claim 17.
請求項１７記載の真空基板搬送装置。 the sacrificial wear surface of the at least one plastic rolling spacer element is polyimide (PI);
18. The vacuum substrate transfer apparatus according to claim 17.
請求項１７記載の真空基板搬送装置。 the sacrificial wear surface of the at least one plastic rolling spacer element is polyamideimide (PAI);
18. The vacuum substrate transfer apparatus according to claim 17.
請求項１５記載の真空基板搬送装置。 said at least one plastic rolling spacer element having a lubricious material surface with respect to said at least one rolling load bearing element;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one plastic rolling spacer element is a ball;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one plastic rolling spacer element is a roller;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 The specified predetermined period of use exceeds the number of years at the predetermined duty of use of the vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature exceeding 260°C.
16. The vacuum substrate transfer apparatus according to claim 15.
請求項２４記載の真空基板搬送装置。 The vacuum atmosphere is a high vacuum compatible with a high vacuum substrate manufacturing process.
25. The vacuum substrate transfer apparatus according to claim 24.
請求項１５記載の真空基板搬送装置。 said at least one plastic rolling spacer element is of a common material throughout said at least one plastic rolling spacer element;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 wherein the predetermined duty of use of the vacuum substrate transfer device corresponds to a life of a specified predetermined usage period of the vacuum substrate transfer device;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 the at least one plastic rolling spacer element dampens relative motion between each rolling load bearing element and the other rolling load bearing element as the bearing case slides along the bearing rails; interfacing between each rolling load bearing element and other rolling load bearing elements;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項１５記載の真空基板搬送装置。 The at least one plastic rolling spacer element rolls in the bearing case such that the bearing has a reduced number of the at least one rolling load bearing element relative to bearings of all rolling load bearing elements. arranged in the bearing case to occupy the position of a load bearing element;
16. The vacuum substrate transfer apparatus according to claim 15.
請求項２９記載の真空基板搬送装置。 The bearing provides reduced sliding resistance commensurate with the bearing of the reduced load bearing element with reduced vibration response commensurate with the bearing of the all rolling load bearing element. for a given load capacity of a reduced load bearing element bearing,
30. A vacuum substrate transfer apparatus according to claim 29.
フレームと、
前記フレームに接続される駆動セクションであって、前記駆動セクションが、少なくとも１つの駆動軸を有する、駆動セクションと、
基板を保持するように構成されるエンドエフェクタを有する、少なくとも１つのアームであって、前記少なくとも１つのアームが、トランスミッションリンクによって前記駆動セクションに接続され、前記少なくとも１つのアームに対して、前記エンドエフェクタの伸長および収縮をもたらす、少なくとも１つの自由度軸を有する、少なくとも１つのアームと、
前記フレームおよび前記エンドエフェクタに接続される軸受であって、前記軸受が、前記少なくとも１つの自由度軸を画定するガイドウェイを画定する、軸受と
を備え、
前記軸受は、
少なくとも１つの転がり負荷軸受要素であって、前記軸受の軸受ケースにおいて、軸受レールに沿って、ケースを循環するように配置され、前記少なくとも１つのアームによって前記軸受に付与されるアームの負荷を支持するように、前記軸受ケースの軸受レースウェイと前記軸受レールとの間をインターフェース接続し、前記少なくとも１つのアームによって、前記軸受レールに沿う、前記軸受ケースの摺動をもたらす、少なくとも１つの転がり負荷軸受要素と、
少なくとも１つの転がり緩衝要素であって、前記軸受ケースが前記軸受レールに沿って摺動するとともに、各転がり負荷軸受要素と他の転がり負荷軸受要素との間の相対運動を緩衝するように、前記軸受ケースにおいて、前記少なくとも１つの転がり負荷軸受要素の各々と並んで転動し、前記少なくとも１つの転がり負荷軸受要素の各々を前記転がり負荷軸受要素の別の１つとの間をインターフェース接続して、前記軸受レースウェイに配置される、少なくとも１つの転がり緩衝要素と
を備え、
前記少なくとも１つの転がり緩衝要素は、指定された所定の使用期間中の２６０℃を超える温度の真空雰囲気における、前記真空基板搬送装置の所定の半導体プロセスの使用デューティに相応する、持続的な実質的に無制限の使用に対して適合可能である、
真空基板搬送装置。 A vacuum substrate transfer apparatus,
a frame;
a drive section connected to the frame, the drive section having at least one drive shaft;
at least one arm having an end effector configured to hold a substrate, said at least one arm being connected to said drive section by a transmission link; at least one arm having at least one axis of freedom that effects extension and retraction of the effector;
a bearing connected to the frame and the end effector, the bearing defining a guideway defining the at least one axis of freedom;
The bearing is
at least one rolling load bearing element arranged in a bearing case of said bearing along the bearing rails so as to circulate through the case to support arm loads imparted to said bearing by said at least one arm; at least one rolling load interfacing between the bearing raceway of the bearing case and the bearing rail to effect sliding of the bearing case along the bearing rail by the at least one arm, a bearing element;
at least one rolling damping element, such that the bearing case slides along the bearing rails and dampens relative motion between each rolling load bearing element and the other rolling load bearing element; rolling alongside each of said at least one rolling load bearing element in a bearing case and interfacing each of said at least one rolling load bearing element with another one of said rolling load bearing elements; at least one rolling damping element positioned in said bearing raceway;
The at least one rolling damping element is substantially continuous, commensurate with a prescribed semiconductor process duty of the vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature above 260° C. during a specified prescribed period of use. is adaptable for unlimited use in
Vacuum substrate transfer device.
請求項３１記載の真空基板搬送装置。 The at least one rolling damping element is generated for each movement of the at least one arm such that the at least one rolling damping element is a substantially unloaded bearing, and comprises the bearing raceway and the bearing. A substantially no-load interface connection between the rail and the rail is configured such that the load of the arm applied to the bearing case is substantially continuously unloaded throughout the bearing . is a bearing element,
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 said at least one rolling damping element forms a sacrificial wear surface for at least one rolling load bearing element;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３３記載の真空基板搬送装置。 the sacrificial wear surface of the at least one rolling damping element wears sacrificially to the at least one rolling load bearing element;
34. The vacuum substrate transfer apparatus of claim 33.
請求項３３記載の真空基板搬送装置。 the sacrificial wear surface of the at least one rolling cushioning element is polyimide (PI);
34. The vacuum substrate transfer apparatus of claim 33.
請求項３３記載の真空基板搬送装置。 the sacrificial wear surface of the at least one rolling cushioning element is polyamideimide (PAI);
34. The vacuum substrate transfer apparatus of claim 33.
請求項３１記載の真空基板搬送装置。 said at least one rolling damping element has a lubricious material surface with respect to said at least one rolling load bearing element;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one rolling cushioning element is a ball;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 each of said at least one rolling load bearing element and said at least one rolling cushioning element is a roller;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 The specified predetermined period of use exceeds the number of years of use duty of the predetermined semiconductor process of the vacuum substrate transfer apparatus in a vacuum atmosphere at a temperature exceeding 260 ° C.
32. The vacuum substrate transfer apparatus of claim 31.
請求項４０記載の真空基板搬送装置。 The vacuum atmosphere is a high vacuum compatible with a high vacuum substrate manufacturing process.
41. The vacuum substrate transfer apparatus of claim 40.
請求項３１記載の真空基板搬送装置。 said at least one rolling cushioning element is of a common material throughout said at least one rolling cushioning element;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 wherein the predetermined duty of use of the vacuum substrate transfer device corresponds to a life of a specified predetermined usage period of the vacuum substrate transfer device;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 The at least one rolling damping element is adapted for each rolling load bearing element such that the bearing case slides along the bearing rails and dampens relative motion between each rolling load bearing element and the other rolling load bearing element. interfacing between the load bearing element and other rolling load bearing elements;
32. The vacuum substrate transfer apparatus of claim 31.
請求項３１記載の真空基板搬送装置。 The at least one rolling damping element is mounted in a rolling load bearing in the bearing case such that the bearing has a reduced number of the at least one rolling load bearing element relative to a bearing of all rolling load bearing elements. arranged in the bearing case to occupy the position of an element;
32. The vacuum substrate transfer apparatus of claim 31.
請求項４５記載の真空基板搬送装置。 The bearing provides reduced sliding resistance commensurate with the bearing of the reduced load bearing element with reduced vibration response commensurate with the bearing of the all rolling load bearing element. for a given load capacity of a reduced load bearing element bearing,
46. The vacuum substrate transfer apparatus of claim 45.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023100795A JP2023120354A (en) | 2018-11-01 | 2023-06-20 | Transport apparatus with linear bearing and method therefor |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862754465P | 2018-11-01 | 2018-11-01 | |
| US62/754,465 | 2018-11-01 | ||
| US16/668,290 US11545380B2 (en) | 2018-11-01 | 2019-10-30 | Transport apparatus with linear bearing |
| US16/668,290 | 2019-10-30 | ||
| PCT/US2019/059001 WO2020092668A1 (en) | 2018-11-01 | 2019-10-31 | Transport apparatus with linear bearing and method therefor |
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| JP2023100795A Division JP2023120354A (en) | 2018-11-01 | 2023-06-20 | Transport apparatus with linear bearing and method therefor |
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| Publication Number | Publication Date |
|---|---|
| JP2022506461A JP2022506461A (en) | 2022-01-17 |
| JPWO2020092668A5 true JPWO2020092668A5 (en) | 2022-11-08 |
| JP7301129B2 JP7301129B2 (en) | 2023-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2021523853A Active JP7301129B2 (en) | 2018-11-01 | 2019-10-31 | Conveying device with linear bearings and method therefor |
| JP2023100795A Pending JP2023120354A (en) | 2018-11-01 | 2023-06-20 | Transport apparatus with linear bearing and method therefor |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023100795A Pending JP2023120354A (en) | 2018-11-01 | 2023-06-20 | Transport apparatus with linear bearing and method therefor |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US11545380B2 (en) |
| JP (2) | JP7301129B2 (en) |
| KR (2) | KR20230084321A (en) |
| CN (2) | CN113227594B (en) |
| TW (2) | TWI828789B (en) |
| WO (1) | WO2020092668A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11545380B2 (en) | 2018-11-01 | 2023-01-03 | Brooks Automation Us Llc | Transport apparatus with linear bearing |
| US20220372621A1 (en) * | 2021-05-18 | 2022-11-24 | Mellanox Technologies, Ltd. | Cvd system with substrate carrier and associated mechanisms for moving substrate therethrough |
| TWI817889B (en) * | 2023-01-09 | 2023-10-01 | 澤米科技股份有限公司 | Method of automatic case loading of an optical |
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|---|---|---|---|---|
| SU481721A2 (en) * | 1971-05-05 | 1975-08-25 | Rolling bearing with cylindrical rollers for linear movement | |
| FR2514088A1 (en) * | 1981-10-02 | 1983-04-08 | Migaud Claude | ROLLING SKATE |
| JP3344131B2 (en) * | 1994-12-16 | 2002-11-11 | 日本精工株式会社 | Self-lubricating linear guide device |
| JP3624998B2 (en) | 1996-09-30 | 2005-03-02 | 光洋精工株式会社 | Rolling bearing |
| JPH10141372A (en) * | 1996-11-12 | 1998-05-26 | Toshiba Corp | Linear guide device |
| US20010014268A1 (en) * | 1998-10-28 | 2001-08-16 | Charles S. Bryson | Multi-axis transfer arm with an extensible tracked carriage |
| DE59911191D1 (en) * | 1999-01-19 | 2005-01-05 | Schneeberger Holding Ag Roggwi | Linear motion guide |
| AUPS028002A0 (en) * | 2002-02-01 | 2002-02-28 | Ausman Engineering And Associates Pty Ltd | A bearing assembly |
| KR20040111370A (en) * | 2002-02-27 | 2004-12-31 | 톰슨 인더스트리즈 인코포레이티드 | Segmented ball/roller guide for a linear motion bearing |
| TWI278578B (en) * | 2003-04-16 | 2007-04-11 | Hiwin Tech Corp | Ball spacer and rolling device using it |
| DE10329098B4 (en) * | 2003-06-27 | 2006-12-28 | Hiwin Technologies Corp. | Ball spacer and ball device |
| DE602004026581D1 (en) * | 2003-07-01 | 2010-05-27 | Iguchi Kiko Co Ltd | |
| AU2005245044B2 (en) * | 2004-05-21 | 2011-02-03 | Wrh Walter Reist Holding Ag | Roller element |
| KR20070049679A (en) | 2004-09-30 | 2007-05-11 | 티에치케이 가부시끼가이샤 | Rolling guide device |
| US8283813B2 (en) * | 2007-06-27 | 2012-10-09 | Brooks Automation, Inc. | Robot drive with magnetic spindle bearings |
| TWI492826B (en) * | 2007-06-27 | 2015-07-21 | Brooks Automation Inc | Robot drive with magnetic spindle bearings |
| JP4766274B2 (en) | 2007-07-18 | 2011-09-07 | 株式会社安川電機 | Substrate transfer robot and semiconductor manufacturing apparatus having the same |
| DE102008016356A1 (en) * | 2008-03-29 | 2009-10-01 | Schaeffler Kg | Circulation guide for rolling elements and thus equipped linear guide unit |
| DE102008035949A1 (en) * | 2008-07-31 | 2010-02-04 | Etel S.A. | Clean room suitable linear guide |
| WO2010137755A1 (en) * | 2009-05-28 | 2010-12-02 | (주)팜코 | Adjustable preload type linear guide system |
| US8689742B2 (en) * | 2009-11-24 | 2014-04-08 | Hyundai Motor Company | Integrated coolant flow control and heat exchanger device |
| US9656386B2 (en) * | 2010-10-08 | 2017-05-23 | Brooks Automation, Inc. | Coaxial drive vacuum robot |
| TWI586500B (en) * | 2010-10-08 | 2017-06-11 | 布魯克斯自動機械公司 | Robotic transport apparatus and substrate processing apparatus |
| CN102052395B (en) | 2010-10-19 | 2013-09-11 | 上海斐赛轴承科技有限公司 | Rolling bearing taking carbon graphite or electrographite as integral holder and manufacturing method thereof |
| KR20140056318A (en) | 2012-01-19 | 2014-05-09 | 닛본 세이고 가부시끼가이샤 | Self-lubricating composite material and rolling bearing, linear motion device, ball screw device, linear motion guide device, and transport device using same |
| TWI657524B (en) * | 2013-12-17 | 2019-04-21 | 美商布魯克斯自動機械公司 | Substrate transport apparatus |
| KR102381412B1 (en) * | 2014-01-17 | 2022-03-31 | 브룩스 오토메이션 인코퍼레이티드 | Substrate transport apparatus |
| US11545380B2 (en) | 2018-11-01 | 2023-01-03 | Brooks Automation Us Llc | Transport apparatus with linear bearing |
-
2019
- 2019-10-30 US US16/668,290 patent/US11545380B2/en active Active
- 2019-10-31 TW TW108139483A patent/TWI828789B/en active
- 2019-10-31 KR KR1020237018129A patent/KR20230084321A/en not_active Application Discontinuation
- 2019-10-31 KR KR1020217016802A patent/KR102539207B1/en active Search and Examination
- 2019-10-31 WO PCT/US2019/059001 patent/WO2020092668A1/en active Application Filing
- 2019-10-31 CN CN201980087404.XA patent/CN113227594B/en active Active
- 2019-10-31 JP JP2021523853A patent/JP7301129B2/en active Active
- 2019-10-31 CN CN202310572983.5A patent/CN116845017A/en active Pending
- 2019-10-31 TW TW112148682A patent/TW202417359A/en unknown
-
2022
- 2022-12-22 US US18/145,164 patent/US20230129289A1/en active Pending
-
2023
- 2023-06-20 JP JP2023100795A patent/JP2023120354A/en active Pending
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