JPWO2020085388A1 - Fluid module - Google Patents

Abstract

An object of the present invention is to provide a fluid module that is less likely to leak cooling water when the tool plate is removed from the master plate and can be miniaturized. In the fluid module of the present invention, the master side unit has a vertical flow path that opens on the lower surface side thereof, a horizontal flow path that opens on the side surface side thereof and communicates with the vertical flow path, and a core whose tip protrudes from the opening of the vertical flow path. A vertical flow path that includes a rod, a movable member that is movable in the thickness direction of the vertical flow path, and an urging member that urges the movable member downward, and a tool-side unit opens to the upper surface side thereof. And a claw that pushes up the movable member relatively upward, and when the tool plate is attached to the master plate, the vertical flow path of the tool side unit fits tightly with the outer peripheral surface of the movable member on the master side. A columnar portion that is configured to communicate with the vertical flow path of the unit, is watertightly fitted with the inner peripheral surface of the movable member when the tool plate is removed from the master plate, and has a side peripheral surface extending in the thickness direction. The core rod is equipped.

Description

The present invention relates to a fluid module.

Robot arms used in industrial equipment such as factories are equipped with various tools (end effectors) such as welding tools at the tip to perform production work. A tool exchange device is known as a device for facilitating the exchange of such tools. This tool exchange device consists of a combination of a master plate attached to the tip of a robot arm and a plurality of tool plates to which various tools are attached. Each tool plate is formed so as to be matable with the master plate. By exchanging the tool plate, the tool exchange device can easily exchange the tool of the robot arm.

When welding is performed by attaching, for example, a welding tool as a tool to such a robot arm, the welding gun becomes extremely hot, so it is necessary to supply cooling water from the robot arm side to suppress the temperature rise of the welding gun. There is. Therefore, the tool exchange device is equipped with a fluid module. The tool exchange device uses this fluid module to supply cooling water from the robot arm side and recover the used cooling water (see, for example, Japanese Patent Application Laid-Open No. 2016-34681).

The fluid module needs to be formed with a flow path for supplying and recovering cooling water between the master plate and the tool plate when the tool plate is attached to the master plate. Further, in the fluid module, it is necessary to stop the flow paths of the master plate and the tool plate so that the cooling water does not leak when the tool plate is removed from the master plate.

A conventional fluid module has, for example, a master side unit arranged on a master plate and a tool side unit arranged on a tool plate in order to satisfy the above requirements. The conventional fluid module is configured to form a flow path (vertical flow path) that communicates in the thickness direction (vertical direction) when the tool plate is attached to the master plate. Further, in the above-mentioned conventional fluid module, a mechanism for sealing each vertical flow path is provided when the tool plate is removed from the master plate, and cooling water is provided outside in the thickness direction of the vertical flow path. There is an opening for supplying or collecting the fluid. Therefore, in the above-mentioned conventional fluid module, the flow path in the thickness direction tends to be long, and the size tends to be large.

Further, as this sealing mechanism, a water stop valve that controls the sealing and release of the flow path by moving in the flow path in the thickness direction is used. If foreign matter contained in the cooling water is caught between the water stop valve and the side wall of the flow path when the water stop valve operates to seal the flow path, the cooling water cannot be sufficiently stopped and the tool plate is used. Cooling water may leak when removed from the master plate.

Japanese Unexamined Patent Publication No. 2016-34681

The present invention has been made in view of such inconveniences, and an object of the present invention is to provide a fluid module that is less likely to leak cooling water when the tool plate is removed from the master plate and can be miniaturized.

The invention made to solve the above problems is a fluid module mounted on a tool exchange device having a master plate attached to a robot arm and a tool plate detachably attached to the master plate to which a tool is attached. The master side unit has a plate-shaped master side unit arranged on the master plate and a plate-shaped tool side unit arranged on the tool plate, and the master side unit opens on the lower surface side thereof. Between a vertical flow path extending in the thickness direction, a horizontal flow path that opens on the side surface side thereof and communicates with the vertical flow path, and a side peripheral surface of the vertical flow path whose tip protrudes from the opening of the vertical flow path. It has a tubular shape located between the core rod fixed so as to generate a gap and the vertical flow path and the core rod in a plan view, and maintains watertightness between the outer peripheral surface thereof and the side peripheral surface of the vertical flow path. A vertical member that includes a movable member that is movable in the thickness direction and an urging member that urges the movable member downward, and the tool-side unit opens on the upper surface side thereof and extends in the thickness direction. It is provided with a flow path and a claw portion that pushes the movable member relatively upward by abutting against the movable member when the tool plate is attached to the master plate, and the tool plate is attached to the master plate. At that time, the vertical flow path of the tool side unit is configured to be able to communicate with the vertical flow path of the master side unit while being watertightly fitted with the outer peripheral surface of the movable member, and the tool plate is removed from the master plate. At that time, the core rod includes a columnar portion that is watertightly fitted to the inner peripheral surface of the movable member and has a side peripheral surface extending in the thickness direction.

The core rod of the fluid module is provided with a columnar portion having a side peripheral surface that is watertightly fitted to the inner peripheral surface of the movable member when the tool plate is removed from the master plate and extends in the thickness direction. ing. That is, when the tool plate is removed from the master plate, the inner peripheral surface of the movable member and the side peripheral surface (outer peripheral surface) of the columnar portion are fitted while being in contact with each other. Therefore, even if foreign matter contained in the cooling water adheres to the inner peripheral surface of the movable member that fits with the side peripheral surface of the columnar portion, the foreign matter is present when the movable member and the columnar portion are fitted. It is easy to be pushed out by the side peripheral surface of the columnar part. Therefore, in the fluid module, foreign matter is unlikely to be caught between the inner peripheral surface of the movable member and the side peripheral surface of the columnar portion, so that when the tool plate is removed from the master plate, the cooling water leaks due to the foreign matter. It is hard to occur. Further, in the fluid module, a flow path is configured so that cooling water flows outside the core rod. Therefore, in the fluid module, a flow path through which the cooling water flows can be secured even if the horizontal flow path communicates with the vertical flow path at a position lower than the upper end of the core rod. Therefore, the fluid module can be miniaturized because the flow path in the thickness direction can be shortened.

It is preferable that the side wall forming the vertical flow path of the master side unit and the side wall forming the vertical flow path of the tool side unit are made of resin. By making the side wall forming the vertical flow path of the master side unit and the side wall forming the vertical flow path of the tool side unit made of resin in this way, weight reduction can be achieved. Further, even when the cooling water contains a chemical, the side wall of the flow path is unlikely to be dissolved, so that the durability is excellent.

It is preferable that the master side unit is further provided with a metal plate-shaped cover on the side surface, and the opening of the lateral flow path of the master side unit is arranged in the cover. A cooling water supply tube and a recovery tube are connected to the opening of the lateral flow path. By arranging the opening of the lateral flow path of the master side unit in the metal cover in this way, it is easy to secure the strength for connecting these tubes.

A screw that connects the metal rod and the cover to a metal rod in which the master side unit is embedded in a side wall forming a vertical flow path of the master side unit so that its central axis faces the surface of the cover. It is better to have more. By screwing the cover to the metal rod embedded in the side wall forming the vertical flow path of the master side unit in this way, the side wall forming the vertical flow path can be made difficult to crack. Therefore, it is easy to secure the strength for connecting the cooling water supply tube and the recovery tube. The phrase "the central axis of the metal rod faces the surface of the cover" means that the central axis of the metal rod is not parallel to the surface of the cover and the angle formed by the central axis is 30 ° or less.

It is preferable that the tool-side unit further includes a floating portion that is movable in the horizontal direction, and the floating portion is provided with an opening for a vertical flow path of the tool-side unit. By arranging the opening of the vertical flow path of the tool side unit in the floating portion in this way, the opening of the vertical flow path of the tool side unit can move in the horizontal direction when the tool plate is attached to the master plate. The vertical flow path of the tool side unit and the vertical flow path of the master side unit can be easily communicated. Here, the "horizontal direction" is a direction substantially orthogonal to the above-mentioned "thickness direction (vertical direction)".

It is preferable that the side peripheral surface of the upper end of the vertical flow path of the tool side unit is formed in a reverse taper shape in which the diameter increases toward the opening of the vertical flow path. By forming the side peripheral surface of the upper end of the vertical flow path of the tool side unit in a reverse taper shape in which the diameter increases toward the opening of the vertical flow path in this way, the vertical flow path of the tool side unit becomes the master side unit. The floating portion can be easily moved so as to communicate with the vertical flow path.

As described above, the fluid module of the present invention is less likely to leak cooling water when the tool plate is removed from the master plate, and can be miniaturized.

FIG. 1 is a schematic perspective view showing a master-side unit of a fluid module according to an embodiment of the present invention. FIG. 2 is a schematic perspective view showing a tool-side unit of the fluid module according to the embodiment of the present invention. FIG. 3 is a schematic perspective view showing a tool plate on which the tool-side unit of FIG. 2 is arranged. FIG. 4 is a schematic cross-sectional view taken along the line IV-IV of the master unit of FIG. FIG. 5 is a schematic cross-sectional view taken along the line VV of the master unit of FIG. FIG. 6 is a schematic cross-sectional view taken along the line VI-VI of the tool-side unit of FIG. FIG. 7 is a schematic cross-sectional view taken along the line VII-VII of the tool-side unit of FIG. FIG. 8 is a schematic cross-sectional view showing a fitted state between the master side unit of FIG. 4 and the tool side unit of FIG. 6 when the tool plate is attached to the master plate.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

The fluid module according to an embodiment of the present invention is mounted on a tool exchange device.

[Tool exchange device]
The tool exchange device has a master plate attached to the robot arm and a tool plate detachably attached to the master plate to which the tool is attached. By attaching and detaching the master plate and the tool plate by operation, various tools can be exchanged and attached to the robot arm.

The attachment / detachment configuration of the tool exchange device is not particularly limited, but for example, the tool plate may have an insertion recess on the upper surface, and the master plate may have a tubular portion that can be inserted into the insertion recess.

[Fluid module]
The fluid module has a plate-shaped master side unit 1 shown in FIG. 1 and a plate-shaped tool side unit 2 shown in FIG. The master side unit 1 is arranged on the master plate. Further, the tool side unit 2 is arranged on the tool plate. FIG. 3 shows a state in which the tool side unit 2 is arranged on the tool plate T. In this way, the tool side unit 2 is incorporated as one of the tools by fixing it to the tool plate T with the mounting screws 21, so that the tool plate T is formed into a plate shape as a whole. Similarly, the master side unit 1 is incorporated by fixing it to the master plate with mounting screws 11, and the master plate as a whole is formed in a plate shape.

<Master side unit>
As shown in FIG. 4, the master side unit 1 includes a first vertical flow path 12, a first horizontal flow path 13, a core rod 14, a first movable member 15, and a first urging member 16.

In the master side unit 1, a flow path for supplying or recovering cooling water is configured by a first vertical flow path 12, a first horizontal flow path 13, a core rod 14, a first movable member 15, and a first urging member 16. The number of flow paths for supplying or recovering the cooling water is appropriately determined according to the type and number of tools that require cooling. Since the cooling water supplied from the master plate side to the tool plate side is usually collected on the master plate side, the number of flow paths arranged is preferably 2 or more, and more preferably an even number. For example, in the master plate of FIG. 1, six flow paths are configured.

Hereinafter, each configuration of the master unit 1 will be described in detail.

(1st vertical flow path)
The first vertical flow path 12 opens on the lower surface side of the master side unit 1 (has an opening 12a in FIG. 4) and extends in the thickness direction. Further, the lower end portion 12c of the first vertical flow path 12 is configured so that the inner diameter thereof is smaller than the inner diameter of the upper end portion.

A cap 17 is provided at the upper end of the first vertical flow path 12 to prevent the cooling water flowing in the first vertical flow path 12 from leaking from the upper surface side of the master side unit 1. Further, the cap 17 also serves as a fixing pedestal for the core rod 14, which will be described later.

The cap 17 is preferably configured to be removable. By making the cap 17 removable, the core rod 14 and the first movable member 15 can be easily cleaned and replaced. In this case, when the cap 17 is removed, the master side unit 1 opens the upper surface side of the master side unit 1, that is, the upper end of the first vertical flow path 12, and the first movable member 15 described later is the master side unit 1. It is configured so that it can be inserted into the first vertical flow path 12 from the upper surface side. By providing the cap 17 in this way, in order to insert the first movable member 15 into the first vertical flow path 12, for example, it is not necessary to configure the master side unit 1 to be vertically divided, and the master side unit 1 can be made smaller. Easy to change.

Further, the cap 17 can be integrally formed with a plurality of flow paths, but as shown in FIG. 1, it is preferable that one cap 17 is provided for one flow path. By providing one cap 17 for one flow path in this way, maintenance of each flow path can be performed independently, so that the maintainability of the master side unit 1 can be improved.

The side wall forming the first vertical flow path 12 of the master side unit 1 is preferably made of resin. By making the side wall made of resin in this way, the weight of the master side unit 1 and eventually the fluid module can be reduced. Further, even when the cooling water contains a chemical, dissolution of the side wall of the flow path is unlikely to occur, so that the fluid module has excellent durability.

This side wall may be provided independently for each flow path, but as shown in FIG. 1, it is preferable that the side wall also serves as the side wall of the first lateral flow path 13 described later. That is, it is preferable that the master side unit 1 has a structure in which the first vertical flow path 12 and the first horizontal flow path 13 are provided on the resin body 18. With such a configuration, the fluid module can be made compact and have excellent durability.

(1st lateral flow path)
The first horizontal flow path 13 opens on the side surface side of the master side unit 1 (has an opening 13a in FIG. 4) and communicates with the first vertical flow path 12.

The opening 13a of the first transverse flow path 13 is provided at a height that overlaps with the core rod 14 in a side view, that is, at a relatively low position. Further, the first horizontal flow path 13 may extend diagonally downward from the opening 13a and communicate with the first vertical flow path 12, but it is preferable that the first horizontal flow path 13 extends in the horizontal direction and communicates with the first vertical flow path 12. By positioning the opening 13a in this way and extending the first lateral flow path 13 in the horizontal direction, the master side unit 1 can be made thinner.

It is preferable that the master side unit 1 is further provided with a metal plate-shaped first cover 19 on the side surface, and an opening 13a of the first lateral flow path 13 of the master side unit 1 is arranged in the first cover 19. A cooling water supply tube and a recovery tube are connected to the opening 13a of the first transverse flow path 13. By arranging the opening 13a of the first lateral flow path 13 of the master side unit 1 in the first metal cover 19 in this way, it is easy to secure the strength for connecting these tubes.

The structure for fixing the first cover 19 to the side surface of the master side unit 1 is not particularly limited. As the fixed structure, the master side unit 1 faces the side wall (the resin main body 18 of the master side unit 1) constituting the first vertical flow path 12, and its central axis faces the surface of the first cover 19. It is preferable that the metal rod 31 to be embedded and the screw 32 connecting the metal rod 31 and the first cover 19 are further provided. The screw 32 fixes the first cover 19 to the metal rod 31 via the main body 18. In particular, when the main body 18 of the master side unit 1 is made of lightweight resin, the resin main body 18 is made difficult to crack by screwing the first cover 19 to the metal rod 31 embedded in the main body 18 in this way. be able to. Therefore, it is easy to secure the strength of the fluid module for connecting the cooling water supply tube and the recovery tube.

A specific configuration example will be described with reference to FIG. 5, but the structure for fixing the first cover 19 to the side surface of the master side unit 1 is not limited to this. As shown in FIG. 5, the metal rod 31 can be, for example, a columnar or a prismatic shape, and is embedded in a resin main body 18 in the thickness direction. The metal rod 31 is preferably parallel to the surface of the first cover 19.

Further, the metal rod 31 is formed with a screw hole 31a into which the screw 32 is screwed. The screw hole 31a is preferably formed so that the screw 32 can be screwed in the horizontal direction from a position where the screw 32 overlaps the metal rod 31 of the first cover 19 in the side view of the master side unit 1. Further, the screw 32 penetrates a part of the first cover 19 and the main body 18 in this order, and the tip portion is screwed into the screw hole 31a of the metal rod 31, so that the first cover 19 is made of the metal rod 31 and the first. Firmly fixed to the cover 19.

The number of screws 32 may be one for one metal rod 31, but it may be a plurality of screws (two in FIG. 5). By using a plurality of screws 32 for one metal rod 31, the fixing strength of the first cover 19 is improved, and rattling of the first cover 19, for example, in the thickness direction can be suppressed.

The number of metal rods 31 to be buried may be one, but it is preferable to use a plurality of metal rods 31 (4 in FIG. 1) from the viewpoint of improving the fixing strength.

(Core rod)
The tip of the core rod 14 projects from the opening 12a of the first vertical flow path 12. The core rod 14 has a cap 17 at the other end (the end opposite to the protruding side) so that a gap is formed between the core rod 14 and the inner side peripheral surface (inner peripheral surface) 12b of the first vertical flow path 12. It is fixed to.

The core rod 14 also serves as a fixing portion that relatively downwardly pushes down the second movable member 26 of the tool side unit 2, which will be described later, when the tool plate is attached to the master plate. Therefore, the core rod 14 needs to have a certain strength, and is made of metal, for example.

Since the gap between the side peripheral surface of the core rod 14 and the side peripheral surface 12b of the first vertical flow path 12 is a flow path through which the cooling water flows, the thickness thereof is the diameter of the first vertical flow path 12 and the flow. It is appropriately determined according to the amount of cooling water and the like.

The core rod 14 includes a columnar portion 14a. The columnar portion 14a has a side peripheral surface that is watertightly fitted with the inner peripheral surface 15b of the first movable member 15 and extends in the thickness direction when the tool plate is removed from the master plate.

A specific configuration example of the columnar portion 14a will be described with reference to FIG. 4, but the configuration of the columnar portion 14a is not limited to this. As shown in FIG. 4, the columnar portion 14a is formed at the tip end portion of the core rod 14 so as to be thicker (larger cross-sectional area) than the other portions. The side peripheral surface of the columnar portion 14a is configured to fit with the inner peripheral surface 15b of the first movable member 15 in a state where the tool plate is removed from the master plate (state in FIG. 4). Further, an O-ring 41 is provided on the inner peripheral surface 15b of the first movable member 15 that fits with the outer peripheral surface (outer peripheral surface) of the columnar portion 14a, and the side peripheral surface of the columnar portion 14a and the first. The space between the movable member 15 and the inner peripheral surface 15b is watertight.

The length of the side peripheral surface of the columnar portion 14a in the central axis direction (length in the thickness direction) is such that when the tool plate is attached to the master plate, the side peripheral surface of the columnar portion 14a is moved by the movement of the first movable member 15. It is determined that the first movable member 15 is not in contact with the inner peripheral surface 15b (see FIG. 8). That is, the length of the side peripheral surface of the columnar portion 14a in the central axis direction is determined so that the cooling water can be supplied or recovered from the lower surface side of the master plate by attaching the tool plate to the master plate. ..

(1st movable member)
The first movable member 15 has a tubular shape located between the first vertical flow path 12 and the core rod 14 in a plan view, and the outer peripheral surface 15a and the side peripheral surface 12b of the first vertical flow path 12 are watertight. It is configured to be movable in the thickness direction while maintaining it.

The upper end portion 15c of the first movable member 15 is located above the lower end portion 12c of the first vertical flow path 12, and its outer diameter is larger than the inner diameter of the lower end portion 12c of the first vertical flow path 12. .. Therefore, the upper end portion 15c of the first movable member 15 is caught by the lower end portion 12c of the first vertical flow path 12 from above, thereby preventing the first movable member 15 from falling downward from the master side unit 1. There is.

The watertight structure between the outer peripheral surface 15a of the first movable member 15 and the side peripheral surface 12b of the first vertical flow path 12 is not particularly limited, but as shown in FIG. 4, for example, the first vertical flow path 12 An O-ring 42 provided on the side peripheral surface 12b can be used.

Further, the inner peripheral surface 15b of the first movable member 15 is formed in a two-stage tubular shape having a large inner diameter at the upper end portion, and the lower end of the first urging member 16 described later can be fixed at a position where the inner diameter changes. It has become like.

(1st urging member)
The first urging member 16 urges the first movable member 15 downward. As shown in FIG. 4, for example, as the first urging member 16, the upper end thereof is fixed to the cap 17 and arranged so as to surround the core rod 14, and the upper surface of the first movable member 15 is attached downward by the lower end thereof. A vigorous coil spring can be used.

The urging force of the first urging member 16 (restoring force of the coil spring) is such that when the tool plate is removed from the master plate, the inner peripheral surface 15b of the first movable member 15 is the side peripheral surface of the columnar portion 14a of the core rod 14. It is adjusted so that it can be fixed in a watertightly fitted state.

<Tool side unit>
As shown in FIG. 6, the tool-side unit 2 includes a floating portion 22. Further, the tool side unit 2 has a protruding portion 23, a second vertical flow path 24, a second horizontal flow path 25, a second movable member 26, a second urging member 27, and a claw on the floating portion 22. A unit 28 is provided.

In the tool side unit 2, a flow path for supplying or recovering cooling water is configured by a protrusion 23, a second vertical flow path 24, a second horizontal flow path 25, a second movable member 26, and a second urging member 27. When the tool plate is attached to the master plate, the flow paths formed in the tool side unit 2 are arranged so as to communicate with the flow paths formed in the master side unit 1, respectively. That is, the number of arrangements of the flow paths of the tool side unit 2 is the same as the number of arrangements of the flow paths of the master side unit 1.

Hereinafter, each configuration of the tool-side unit 2 will be described in detail.

(Floating part)
The floating portion 22 is configured to be movable in the horizontal direction.

The movable mechanism of the floating portion 22 is not particularly limited, but can be configured as shown in FIG. 7, for example. In the movable mechanism shown in FIG. 7, the tool-side unit 2 is screwed into a screw-fastening 20a provided on a base 20 which is a non-movable portion of the tool-side unit 2 in a tubular shape and inside the screw-fastening 20a. A screw 20b is provided. Further, the floating portion 22 has a through hole 22a into which a tubular screw fastening 20a can be fitted so as to cover the outer peripheral surface thereof.

The inner diameter of the through hole 22a is larger than the outer diameter of the screw fastening 20a and smaller than the outer diameter of the head of the screw 20b. When the inner diameter of the through hole 22a is set to such a diameter, the inner diameter of the through hole 22a is larger than the outer diameter of the screwed 20a, so that the floating portion 22 can move in the horizontal direction within the range of the difference in diameter. Further, since the inner diameter of the through hole 22a is smaller than the outer diameter of the head of the screw 20b, when the floating portion 22 is fitted into the tubular screw fastening 20a and screwed with the screw 20b, the floating portion 22 is attached to the tool side unit 2. Movement in the thickness direction (vertical direction) is restricted, and it is possible to prevent the floating portion 22 from falling off from the base 20. The horizontal movement of the floating portion 22 is not restricted even if it is screwed with the screw 20b. The method of not restricting the horizontal movement of the floating portion 22 is not particularly limited, and examples thereof include a method of adjusting the screwing of the screw 20b and a method of making the screw fastening 20a higher than the surface of the through hole 22a.

The difference between the inner diameter of the through hole 22a and the outer diameter of the screwed 20a is appropriately determined according to the required movable amount, and can be, for example, 1 mm or more and 5 mm or less. That is, the movable amount of the floating portion 22 is preferably 1 mm or more and 5 mm or less.

(Protruding part)
The projecting portion 23 is columnar and is provided so as to project from the upper surface of the tool-side unit 2.

The protruding portion 23 has an opening 23a on the upper surface thereof, and constitutes an opening of a second vertical flow path 24, which will be described later. When the tool plate is attached to the master plate as described above, the flow paths formed in the tool side unit 2 are arranged so as to communicate with the flow paths formed in the master side unit 1, so that the protrusions are formed. 23 is arranged at a position corresponding to the flow path formed by the master side unit 1 when the tool plate is attached to the master plate.

(Second vertical flow path)
The second vertical flow path 24 extends in the thickness direction from the opening 23a of the protrusion 23. That is, the second vertical flow path 24 opens on the upper surface side of the tool side unit 2 and extends in the thickness direction.

The inner diameter of the second vertical flow path 24 is determined so that it can be fitted with the first movable member 15 of the master side unit 1. Further, an O-ring 43 is provided on the inner peripheral surface of the second vertical flow path 24 that fits with the first movable member 15. With this configuration, when the tool plate is attached to the master plate, the second vertical flow path 24 of the tool side unit 2 is watertightly fitted with the outer peripheral surface of the first movable member 15. Since the first movable member 15 is pushed up by the claw portion 28 formed on the inner peripheral surface of the second vertical flow path 24, which will be described later, the first movable member 15 of the inner peripheral surfaces of the second vertical flow path 24 It is the inner peripheral surface above the claw portion 28 that fits with 15. Therefore, the O-ring 43 is arranged above the claw portion 28.

Further, in the second vertical flow path 24 of the tool side unit 2, when the tool plate is attached to the master plate, the first movable member 15 is relatively pushed up by the claw portion 28, and the first movable member 15 of the master side unit 1 is pushed up. It is configured to be able to communicate with the vertical flow path 12.

Since the protruding portion 23 and the second vertical flow path 24 are configured in the floating portion 22 as described above, the opening 23a of the second vertical flow path 24 of the tool side unit 2 is arranged in the floating portion 22. There is. By arranging the opening 23a of the second vertical flow path 24 in the floating portion 22 in this way, the opening 23a of the second vertical flow path 24 of the tool side unit 2 is horizontal when the tool plate is attached to the master plate. Since it can be moved in the direction, the second vertical flow path 24 of the tool side unit 2 and the first vertical flow path 12 of the master side unit 1 can be easily communicated with each other.

The second vertical flow path 24 of the tool-side unit 2 is preferably formed in a reverse taper shape in which the inner peripheral surface of the upper end portion 24a expands in diameter toward the opening 23a of the second vertical flow path 24. By forming the inner peripheral surface of the upper end portion 24a in a reverse taper shape in this way, the floating portion so that the second vertical flow path 24 of the tool side unit 2 communicates with the first vertical flow path 12 of the master side unit 1. 22 can be easily moved.

The side wall forming the second vertical flow path 24 of the tool side unit 2, that is, the floating portion 22, is preferably made of resin. By making the side wall made of resin in this way, it is possible to reduce the weight of the tool side unit 2 and eventually the fluid module. Further, even when the cooling water contains a chemical, dissolution of the side wall of the flow path is unlikely to occur, so that the fluid module has excellent durability.

(Second horizontal flow path)
The second horizontal flow path 25 opens on the side surface side of the tool side unit 2 (has an opening 25a in FIG. 6) and communicates with the second vertical flow path 24.

The opening 25a of the second transverse flow path 25 is provided at a height that overlaps with the second movable member 26 of the tool side unit 2 in a side view, that is, at a relatively low height position. Further, the second horizontal flow path 25 may extend diagonally upward from the opening 25a and communicate with the second vertical flow path 24, but it is preferable that the second horizontal flow path 25 extends in the horizontal direction and communicates with the second vertical flow path 24. By positioning the opening 25a at a relatively low height position and extending the second lateral flow path 25 in the horizontal direction in this way, the tool-side unit 2 can be made thin.

It is preferable that the tool-side unit 2 is further provided with a metal plate-shaped second cover 29 on the side surface, and the opening 25a of the second lateral flow path 25 of the tool-side unit 2 is arranged in the second cover 29. Specifically, the second cover 29 may be arranged on the side surface of the floating portion 22. A cooling water supply tube and a recovery tube are connected to the opening 25a of the second transverse flow path 25. By arranging the opening 25a of the second transverse flow path 25 of the tool side unit 2 in the metal second cover 29 in this way, it is easy to secure the strength for connecting these tubes.

The structure for fixing the second cover 29 to the side surface of the tool side unit 2 is not particularly limited. As the fixing structure, the tool side unit 2 is embedded in the side wall (floating portion 22 made of resin) constituting the second vertical flow path 24 so that its central axis faces the surface of the second cover 29. It may be further provided with a rod and a screw connecting the metal rod and the second cover 29. The screw fixes the second cover 29 to the metal rod via the floating portion 22. In particular, when the floating portion 22 of the tool side unit 2 is made of lightweight resin, the resin floating portion 22 is cracked by screwing the second cover 29 to the metal rod embedded in the floating portion 22 in this way. It can be difficult. Therefore, it is easy to secure the strength of the fluid module for connecting the cooling water supply tube and the recovery tube. As a specific configuration, a structure similar to the structure for fixing the first cover 19 of the master side unit 1 can be used.

(Second movable member)
The second movable member 26 is arranged in the second vertical flow path 24 and is configured to be movable in the thickness direction. When the tool plate is removed from the master plate, the second movable member 26 watertightly seals the second vertical flow path 24 of the tool side unit 2, and the upper surface of the second movable member 26 is the tool side unit 2. It is configured to be located below the upper surface of. Here, the "upper surface of the tool-side unit 2" refers to the surface around the protruding portion 23.

As a specific configuration of the second movable member 26, the second movable member 26 is a columnar column having a head capable of contacting, for example, a claw portion 28, which will be described later, from below so as to seal the second vertical flow path 24. Can be done. As shown in FIG. 6, the head may have a tapered shape that shrinks in diameter upward. By making the head tapered, the second vertical flow path 24 can be easily sealed. The configuration for watertightly sealing the second vertical flow path 24 is not particularly limited, and examples thereof include a configuration in which an O-ring 44 is used at a position in contact with the claw portion 28 at the tapered portion of the head.

Further, the second movable member 26 has a recess on the lower surface into which the second urging member 27, which will be described later, can be inserted. By inserting the second urging member 27 into this recess, the upper end of the second urging member 27, which will be described later, can be fixed.

The second movable member 26 is configured such that its outer diameter is smaller than the inner diameter of the second vertical flow path 24 when its head is moved to a position where it does not contact the claw portion 28 (see FIG. 8). ing. That is, in a state where the head is moved to a position where it is not in contact with the claw portion 28, a flow path through which cooling water flows between the inner peripheral surface of the second vertical flow path 24 and the outer peripheral surface of the second movable member 26. Is formed, and cooling water can be supplied or recovered from the opening 23a of the second vertical flow path 24.

In the fluid module, the upper surface of the second movable member 26 is configured to be located below the upper surface of the tool side unit 2, so that the second movable member 26 watertightly seals the second vertical flow path 24. In the state (see FIG. 6), a recess is formed above the upper surface of the second movable member 26. When the tool plate is removed from the master plate, a small amount of cooling water that leaks out of the flow path due to dripping or the like falls to the tool plate below, that is, the tool side unit 2, and can be stored in this recess. it can. Therefore, in the fluid module, it is possible to prevent the leaked cooling water from flowing on the upper surface of the tool side unit 2 and wetting other modules mounted on the tool plate, for example.

The lower limit of the height position difference (height difference) between the upper surface of the tool-side unit 2 and the upper surface of the second movable member 26 is preferably 1 mm, more preferably 2 mm. On the other hand, as the upper limit of the height difference, 5 mm is preferable, and 4 mm is more preferable. If the height difference is less than the lower limit, the volume of the recess may be insufficient and the effect of accumulating the leaked cooling water may be insufficient, or the height of the protrusion 23 may be increased to secure the volume of the recess. There is a risk that the tool side unit 2 will become large. On the contrary, if the height difference exceeds the upper limit, it is necessary to lengthen the second vertical flow path 24, and the tool-side unit 2 may become large.

(Second urging member)
The second urging member 27 urges the second movable member 26 upward. As the second urging member 27, for example, as shown in FIG. 6, the lower end thereof is fixed to the recess provided at the lower end of the second vertical flow path 24 and inserted into the recess on the lower surface of the second movable member 26. A coil spring that urges the second movable member 26 by the upper end can be used.

The urging force of the second urging member 27 (restoring force of the coil spring) is such that when the tool plate is removed from the master plate, the head of the second movable member 26 comes into contact with the claw portion 28 from below, and the second vertical flow path. The 24 is adjusted so that it can be fixed in a watertightly sealed state.

(Nail part)
When the tool plate is attached to the master plate, the claw portion 28 comes into contact with the first movable member 15 of the master side unit 1 to push up the first movable member 15 relatively upward (see FIG. 8). Further, the claw portion 28 abuts on the head of the second movable member 26 from above as described above to watertightly seal the second vertical flow path 24.

As shown in FIG. 6, the claw portion 28 is provided so as to project inward over the entire circumference of the inner peripheral surface of the second vertical flow path 24, for example. The shape of the claw portion 28 is not particularly limited, but the upper surface may be horizontal so that the first movable member 15 can be easily pushed upward. Further, the lower surface of the claw portion 28 may be in contact with the head of the second movable member 26 and may have a shape corresponding to the head of the second movable member 26 so as to easily seal the second vertical flow path 24. .. For example, when the head of the second movable member 26 has a tapered shape in which the diameter is reduced upward, the lower surface of the claw portion 28 is upward at an angle equivalent to the taper angle of the head of the second movable member 26. It is preferable to use a tapered shape that reduces the diameter.

<Formation of flow path>
When the tool plate is attached to the master plate as described above, the first vertical flow path 12 of the master side unit 1 and the second vertical flow path 24 of the tool side unit 2 communicate with each other, and the first of the master side unit 1 A flow path connecting the opening 13a of the 1 horizontal flow path 13 and the opening 25a of the second horizontal flow path 25 of the tool side unit 2 is formed. The formation of the flow path when the tool plate is attached to the master plate will be described with reference to FIG.

The core rod 14 of the master side unit 1 protrudes from the opening 12a of the first vertical flow path 12 and is fixed. Therefore, when the tool plate is attached to the master plate, the core rod 14 relatively downwardly pushes down the second movable member 26 that watertightly seals the second vertical flow path 24 of the tool side unit 2. As a result, a flow path is formed between the opening 25a of the second horizontal flow path 25 and the opening 23a of the second vertical flow path 24 of the tool side unit 2.

Further, when the tool plate is attached to the master plate, when the tool plate is first inserted into the master plate, the outer peripheral surface 15a of the first movable member 15 of the master side unit 1 is the second longitudinal flow of the tool side unit 2. It fits tightly with the inner peripheral surface of the road 24. As a result, the first vertical flow path 12 of the master side unit 1 and the second vertical flow path 24 of the tool side unit 2 are watertightly connected.

When the tool plate is further inserted, as shown in FIG. 8, the first movable member 15 is pushed up relatively upward by the claw portion 28 while being watertightly fitted to the inner peripheral surface of the second vertical flow path 24. When the attachment of the tool plate to the master plate is completed, the side peripheral surface of the columnar portion 14a does not come into contact with the inner peripheral surface 15b of the first movable member 15 due to the movement of the first movable member 15, so that the master side A flow path is formed between the opening 13a of the first horizontal flow path 13 of the unit 1 and the opening 12a of the first vertical flow path 12.

As described above, the first vertical flow path 12 of the master side unit 1 and the second vertical flow path 24 of the tool side unit 2 are watertightly connected, and the first vertical flow path 12 and the second vertical flow path 24 are connected. Since the first movable member 15 and the second movable member 26, which have been sealed, move to release the seal, the opening 13a of the first transverse flow path 13 of the master side unit 1 and the second transverse flow of the tool side unit 2 respectively. A flow path connecting the opening 25a of the road 25 is formed.

When the tool plate is removed from the master plate, as shown in FIG. 6, the core rod 14 of the master side unit 1 releases the push-down of the second movable member 26 of the tool side unit 2. At this time, the second movable member 26 is pushed upward by the second urging member 27 and comes into contact with the claw portion 28 from below so as to seal the second vertical flow path 24.

Further, when the tool plate is removed from the master plate, the claw portion 28 of the tool side unit 2 releases the push-up of the first movable member 15 of the master side unit 1. At this time, the first movable member 15 is pushed downward by the first urging member 16, and the inner peripheral surface 15b of the first movable member 15 is watertightly fitted with the side peripheral surface of the columnar portion 14a. As a result, the first vertical flow path 12 is sealed.

Therefore, when the tool plate is attached to the master plate, the first vertical flow path 12 of the master side unit 1 and the second vertical flow path 24 of the tool side unit 2 communicate with each other and cool between the master plate and the tool plate. Water can be supplied and recovered. On the other hand, when the tool plate is removed from the master plate, the first vertical flow path 12 and the second vertical flow path 24 are sealed, respectively, and leakage of cooling water can be prevented.

<Advantage>
In the fluid module, when the tool plate is removed from the master plate, a columnar portion 14a that is watertightly fitted with the inner peripheral surface 15b of the first movable member 15 and has a side peripheral surface extending in the thickness direction is formed as a core rod. 14 is provided. That is, when the tool plate is removed from the master plate, the inner peripheral surface 15b of the first movable member 15 and the side peripheral surface of the columnar portion 14a are fitted while being in contact with each other. Therefore, even if foreign matter contained in the cooling water adheres to the inner peripheral surface 15b of the first movable member 15 that fits with the side peripheral surface of the columnar portion 14a, the foreign matter is still attached to the first movable member 15. When the columnar portion 14a is fitted, it is easily pushed out by the side peripheral surface of the columnar portion 14a. Therefore, in the fluid module, foreign matter is unlikely to be caught between the inner peripheral surface 15b of the first movable member 15 and the side peripheral surface of the columnar portion 14a, which is caused by the foreign matter when the tool plate is removed from the master plate. Leakage of cooling water is unlikely to occur. Further, in the fluid module, a flow path is configured so that cooling water flows outside the core rod 14. Therefore, in the fluid module, a flow path through which the cooling water flows can be secured even if the first horizontal flow path 13 communicates with the first vertical flow path 12 at a position lower than the upper end of the core rod 14. Therefore, the fluid module can be miniaturized because the flow path in the thickness direction can be shortened.

[Other Embodiments]
The present invention is not limited to the above-described embodiment, and can be implemented in various modifications and improvements in addition to the above-described embodiment.

In the above embodiment, the case where the metal rod is embedded along the thickness direction in the side wall forming the vertical flow path of the master side unit has been described, but in the embedding direction of the metal rod, the central axis thereof is the first cover. As long as it faces the surface, it is not limited to the thickness direction. For example, it is possible to bury a metal rod in the horizontal direction. The same applies to the metal rod embedded in the side wall constituting the vertical flow path of the tool side unit.

In the above embodiment, the case where the tool-side unit includes the protrusion is described, but the protrusion is not an essential configuration requirement and can be omitted. In this case, the opening of the vertical flow path of the tool-side unit can be arranged, for example, on the upper surface of the tool-side unit.

In the above embodiment, the case where the upper end of the second movable member of the tool side unit is configured to be located below the upper surface of the tool side unit has been described. For example, the upper end of the second movable member is on the tool side. It can also be configured flush with the top surface of the unit. A fluid module having such a configuration is also an object of the present invention.

Further, in the above embodiment, the case where the tool side unit includes the second movable member has been described, but the second movable member is not an indispensable constituent requirement. For example, when the cooling water is supplied from the master side unit to the tool side unit, the second movable member may be omitted if the water leakage in the supplied tool side unit is small. In this case, since the second urging member is also unnecessary, it can be omitted at the same time.

In the above embodiment, the case where the tool side unit includes the second transverse flow path has been described, but the second transverse flow path is not an indispensable constituent requirement. For example, an opening may be provided on the lower surface of the tool-side unit, and a second vertical flow path may be provided between the opening on the upper surface and the opening on the lower surface of the tool-side unit.

The fluid module of the present invention is less likely to leak cooling water when the tool plate is removed from the master plate, and can be miniaturized.

1 Master side unit 11 Mounting screw 12 1st vertical flow path 12a Opening 12b Side peripheral surface 12c Lower end 13 1st horizontal flow path 13a Opening 14 Core rod 14a Columnar portion 15 1st movable member 15a Outer peripheral surface 15b Inner peripheral surface 15c Upper end 16 1st urging member 17 Cap 18 Main body 19 1st cover 2 Tool side unit 20 Base 20a Screw fastening 20b Screw 21 Mounting screw 22 Floating part 22a Through hole 23 Protruding part 23a Opening 24 2nd vertical flow path 24a Upper end part 25 2nd transverse flow path 25a Opening 26 2nd movable member 27 2nd urging member 28 Claw 29 2nd cover 31 Metal rod 31a Screw hole 32 Screw 41, 42, 43, 44 O-ring T tool plate

Claims (6)

A fluid module mounted on a tool exchange device having a master plate attached to a robot arm and a tool plate detachably attached to the master plate to which a tool is attached.
It has a plate-shaped master side unit arranged on the master plate and a plate-shaped tool side unit arranged on the tool plate.
The above master side unit
A vertical flow path that opens on the lower surface side and extends in the thickness direction,
A horizontal flow path that opens on the side surface side and communicates with the vertical flow path,
A core rod whose tip protrudes from the opening of the vertical flow path and is fixed so as to form a gap between the tip and the side peripheral surface of the vertical flow path.
It has a tubular shape located between the vertical flow path and the core rod in a plan view, and is configured to be movable in the thickness direction while maintaining watertightness between the outer peripheral surface thereof and the side peripheral surface of the vertical flow path. Movable members and
It is provided with an urging member that urges the movable member downward.
The above tool side unit
A vertical flow path that opens on the upper surface side and extends in the thickness direction,
When the tool plate is attached to the master plate, it is provided with a claw portion that pushes the movable member relatively upward by abutting against the movable member.
When the tool plate is attached to the master plate, the vertical flow path of the tool side unit is configured to be able to communicate with the vertical flow path of the master side unit while being watertightly fitted with the outer peripheral surface of the movable member.
A fluid module in which the core rod includes a columnar portion having a side peripheral surface that is watertightly fitted to the inner peripheral surface of the movable member and extends in the thickness direction when the tool plate is removed from the master plate. The fluid module according to claim 1, wherein the side wall forming the vertical flow path of the master side unit and the side wall forming the vertical flow path of the tool side unit are made of resin. The master side unit is further provided with a metal plate-shaped cover on the side surface.
The fluid module according to claim 2, wherein the opening of the lateral flow path of the master side unit is arranged in the cover. The above master side unit
A metal rod embedded in a side wall constituting the vertical flow path of the master side unit so that its central axis faces the surface of the cover.
The fluid module according to claim 3, further comprising a metal rod and a screw connecting the cover. The tool-side unit further includes a horizontally movable floating portion.
The fluid module according to any one of claims 1 to 4, wherein an opening for a vertical flow path of the tool-side unit is provided in the floating portion. The fluid module according to claim 5, wherein the side peripheral surface of the upper end portion of the vertical flow path of the tool side unit is formed in a reverse taper shape in which the diameter increases toward the opening of the vertical flow path.

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