JPWO2020068345A5 - - Google Patents

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JPWO2020068345A5
JPWO2020068345A5 JP2021515551A JP2021515551A JPWO2020068345A5 JP WO2020068345 A5 JPWO2020068345 A5 JP WO2020068345A5 JP 2021515551 A JP2021515551 A JP 2021515551A JP 2021515551 A JP2021515551 A JP 2021515551A JP WO2020068345 A5 JPWO2020068345 A5 JP WO2020068345A5
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spectrum
monitoring system
situ
window
measured
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JP2021515551A
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JP2022501207A (en
JP7472111B2 (en
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例１
インシトゥモニタリングシステム１００は、分光モニタリングシステムでありうる。同一のウインドウ３６が、この分光モニタリングシステムとインシトゥ撮像システム１５０のセンサによって使用されうる。基板１０のスペクトルが収集された部分の二次元画像を再構築するために、インシトゥ撮像システム１５０のラインスキャンカメラからのデータのウインドウであって、インシトゥモニタリングシステム１００によるスペクトルの取得時間を中心とするウインドウが、使用されうる。
Example 1
In situ monitoring system 100 may be a spectroscopic monitoring system. The same window 36 can be used by the sensors of this spectroscopic monitoring system and the in-situ imaging system 150 . To reconstruct a two-dimensional image of the portion of the substrate 10 for which the spectrum was collected, a window of data from the linescan camera of the in-situ imaging system 150, centered around the acquisition time of the spectrum by the in-situ monitoring system 100. window can be used.

分類は、変換アルゴリズムモジュール２２０によって使用されうる。例えば、コントローラ９０は、各参照スペクトルが関連測定値（例えば指標値）を有している、参照スペクトルの複数のライブラリを格納しうる。コントローラ９０は、ニューラルネットワーク２１０から受信した分類に基づいて、ライブラリのうちの１つを選択しうる。次いで、例えば、測定スペクトルとの差の二乗の最小和を有する参照スペクトルを見出すことによって、選択されたライブラリから、測定スペクトルと最も良く一致する参照スペクトルが特定されうる。この最も良く一致する参照スペクトルの指標値が次いで、測定値として使用されうる。
The classification may be used by transform algorithm module 220 . For example, controller 90 may store multiple libraries of reference spectra, each reference spectrum having an associated measurement value (eg, index value). Controller 90 may select one of the libraries based on the classification received from neural network 210 . A reference spectrum that best matches the measured spectrum can then be identified from the selected library, eg, by finding the reference spectrum that has the lowest sum of squared differences from the measured spectrum. The index value of this best matching reference spectrum can then be used as the measured value.

JP2021515551A 2018-09-24 2019-08-28 Machine Vision as Input to CMP Process Control Algorithms Active JP7472111B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862735772P 2018-09-24 2018-09-24
US62/735,772 2018-09-24
PCT/US2019/048636 WO2020068345A1 (en) 2018-09-24 2019-08-28 Machine vision as input to a cmp process control algorithm

Publications (3)

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JP2022501207A JP2022501207A (en) 2022-01-06
JPWO2020068345A5 true JPWO2020068345A5 (en) 2022-09-07
JP7472111B2 JP7472111B2 (en) 2024-04-22

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US (2) US11577356B2 (en)
JP (1) JP7472111B2 (en)
KR (1) KR20210052559A (en)
CN (2) CN112823080B (en)
TW (1) TW202027908A (en)
WO (1) WO2020068345A1 (en)

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