JPWO2019226958A5 - - Google Patents

Claims (15)

It ’s a capacitive sensor.
At least two conductors isolated from each other by at least one spatial gap, each of which interacts with the at least two conductors and an electrostatic field occupying a region close to the at least one spatial gap. With at least two conductors that are electrically responsive to the perturbations of the electrostatic field,
A displaceable element having a movement axis having a directional component intersecting the spatial gap and perturbing the static electric field corresponding to the movement, which selectively responds to the sensed conditions. The electric field does not substantially alter the responsiveness of the displaceable element to the sensed conditions over the range of movement of the displaceable element, or substantially reduces pull-in instability. Capacitive sensor with displaceable elements that do not cause. The at least two conductors have a fixed conductor pair separated by a linear spatial gap, and each of the fixed conductor pairs is maintained at their respective potentials, the difference between the respective potentials of the fixed conductor pairs. Depending on, the static electric field is generated in the space above the fixed conductor pair, which has a major electric field vector component oriented throughout the linear spatial gap.
The displaceable element comprises a charged element and
The capacitive sensor of claim 1, wherein the force applied to the displaceable element due to the electrostatic field is insensitive to the state of movement of the displaceable element in response to the sensed conditions. It ’s a sensor,
Two conductors in which each conductor of the two conductors has a planar surface,
Displaceable electrodes configured to move relative to the two conductors in response to perceived external conditions.
A voltage source configured to supply a bias voltage that establishes an electrostatic field between an electrode in which the bias voltage is displaceable and the planar surface of the two conductors. It is equipped with
The displaceable electrode has a thickness in the direction along the movement and a length in the direction orthogonal to the movement.
The length and the thickness are selected so that the displaceable electrode is compliant.
Further, the two conductors and the displaceable electrodes are sensors in which the lengths of the displaceable electrodes are oriented so as to be orthogonal to the planar surface of the two electrodes. The displaceable electrode is oriented relative to the two conductors so that the electrostatic force generated by the electrostatic field acts as a restoring force to return the displaceable electrode to the equilibrium position. The sensor according to claim 3. The sensor according to any one of claims 3 and 4, further comprising an additional conductor disposed between the two conductors. The two conductors are biased through the voltage source at a voltage different from that of the displaceable electrode.
The sensor according to claim 5, wherein the additional conductor is biased at an intermediate potential via the voltage source. The two conductors are biased through the voltage source so that the net electrostatic force is the attractive force exerted on the displaceable electrode.
The sensor of claim 5, wherein the additional conductor is biased to establish a repulsive force exerted on the displaceable electrode. The sensor according to any one of claims 3 to 7, wherein the displaceable electrode is movably supported by a hinge. The displaceable electrode comprises a planar diaphragm and
Also, any of claims 3 to 8, wherein the planar diaphragm comprises the plurality of openings so that the perceived external condition includes the viscous drag of air flowing through the plurality of openings. The sensor described in item 1. The sensor according to any one of claims 3 to 9, wherein the planar surfaces of the two conductors are on the same plane. The two conductors are separated by a gap
The sensor according to any one of claims 3 to 10, wherein the displaceable electrode has an equilibrium position arranged in the gap. The sensor according to any one of claims 3 to 11, wherein the length of the displaceable electrode is orthogonal to the planar surface of the two conductors at the equilibrium position of the displaceable electrode. .. The sensor according to any one of claims 3 to 12, wherein the bias voltage is applied to the two conductors. The sensor according to any one of claims 3 to 13, further comprising an amplifier configured to generate a signal corresponding to the movement. It ’s a way to detect vibration,
To provide at least two separated conductive surfaces and said deflectable element having a deflection axis perpendicular to the force generated by the at least two separated conductive surfaces on the deflectable element. When,
Inducing an electric potential on the deflectable element with respect to the at least two conductive surfaces.
Sensing the change in induced charge on the at least two conductive surfaces due to the deflection of the deflectable element along the deflection axis, the at least two separated on the deflectable element. A method comprising sensing that the force generated by a conductive surface does not substantially alter the deflection of the deflectable element.