JPWO2019163484A1 - Semiconductor devices and their manufacturing methods - Google Patents

Abstract

A semiconductor element in which a first electrode and an electrolytically-free plating layer are sequentially formed on at least one electrode of a front-back conductive substrate having a front-side electrode and a back-side electrode, and the first electrode is formed on the first electrode. A semiconductor element containing an element nobler than the metal forming the electrode, and the area of the first electrode is smaller than the area of the electrode on which the first electrode is formed.

Description

The present invention relates to a semiconductor device and a method for manufacturing the same. More specifically, the present invention relates to front and back conductive semiconductor devices, particularly power semiconductor devices for power conversion represented by IGBTs (insulated gate bipolar transistors), diodes, and the like, and methods for manufacturing the same.

Conventionally, when a front-back conduction type semiconductor element is mounted on a module, the back-side electrode of the semiconductor element is soldered to a substrate or the like, and the front-side electrode of the semiconductor element is wire-bonded. However, in recent years, from the viewpoint of shortening the manufacturing time and reducing the material cost, a mounting method in which a metal electrode is directly soldered to the front electrode of a semiconductor element is often used. Since the front electrode of a semiconductor element is generally formed of aluminum or an aluminum alloy, it is necessary to form a nickel film, gold film, etc. with a thickness of several μm on the front electrode of the semiconductor element in order to perform soldering. Needed.

However, when a nickel film or the like is formed by a vacuum film forming method such as thin film deposition or sputtering, usually only a thickness of about 1.0 μm can be obtained. Further, if an attempt is made to thicken the nickel film, the manufacturing cost will increase. Therefore, plating technology is attracting attention as a film forming method capable of forming a thick film at low cost and at high speed.

As a plating technique, there is an electroless plating method capable of selectively forming a plating layer on the surface of an electrode (hereinafter sometimes abbreviated as "Al electrode") formed of aluminum or an aluminum alloy. As the electroless plating method, a palladium catalyst method and a zincate method are generally used. In the palladium catalyst method, palladium is precipitated as a catalyst nucleus on the surface of the Al electrode to form an electroless plating layer. Further, in the zincate method, zinc is substituted with Al on the surface of the Al electrode to precipitate as a catalyst nucleus, and an electroless plating layer is formed. The zincate solution used in this method is inexpensive and is being widely adopted.

For example, in Patent Document 1, a protective film made of polyimide is formed on the side surface of an Al electrode on a semiconductor substrate, and a nickel plating layer and its surface are subjected to an electroless plating method on the surface of the Al electrode on which the protective film is not formed. A method for manufacturing a semiconductor element has been proposed, which comprises selectively forming an electroless plating layer composed of a gold plating layer laminated on the top.

Japanese Unexamined Patent Publication No. 2005-51084

Since no chemical bond is formed between the protective film and the electroless plating layer, there is a gap between them. If this gap is large, the electroless plating treatment takes a long time, or the high temperature treatment is performed, the chemical solution may invade through this gap and corrode the Al electrode. When corrosion of the Al electrode occurs, the adhesive force between the Al electrode and the electroless plating layer for bonding decreases, and the electroless plating layer may swell and peel off during soldering or wire bonding.

The present invention has been made to solve the above problems, and is a front-back conductive type having high bonding reliability in which the electroless plating layer does not swell and peel off during soldering or wire bonding. An object of the present invention is to provide a semiconductor device and a method for manufacturing the same.

As a result of diligent research to solve the above problems, the present inventors have found that the front electrode or the back electrode contains an element nobler than the metal forming the electrode and has a smaller area than the electrode. It was found that by forming one electrode and forming an electroless plating layer on the first electrode, it is possible to prevent a decrease in the adhesive force between the electrode and the electroless plating layer due to damage to the electrode. , The present invention has been completed.

That is, the present invention is a semiconductor element in which a first electrode and an electrolytic plating layer are sequentially formed on at least one electrode of a front-back conductive substrate having a front-side electrode and a back-side electrode, and the first electrode is the said. A semiconductor element containing an element nobler than the metal forming the electrode on which the first electrode is formed, and the area of the first electrode is smaller than the area of the electrode on which the first electrode is formed. Is.

Further, in the present invention, a step of forming a front side electrode on one side of a front and back conductive substrate and an element nobler than the metal forming the front side electrode are precipitated on a part of the front side electrode by an electroless plating method. A method for manufacturing a semiconductor element, which comprises a step of forming a first electrode and a step of forming an electroless plating layer on the first electrode by using an electroless plating method using the first electrode as a catalyst. is there.

According to the present invention, it is possible to provide a front-back conductive semiconductor element having high bonding reliability and a method for manufacturing the same, in which the electroless plating layer does not swell and peel off during soldering or wire bonding.

It is a schematic cross-sectional view of the semiconductor element according to Embodiment 1. FIG. It is a schematic plan view of the semiconductor element according to Embodiment 1. It is a schematic sectional view of another semiconductor element according to Embodiment 1. FIG. It is a schematic cross-sectional view of the semiconductor element according to Embodiment 2. It is a schematic cross-sectional view of another semiconductor element according to Embodiment 2. It is a schematic cross-sectional view of the semiconductor element according to Embodiment 3. It is a schematic cross-sectional view of another semiconductor element according to Embodiment 3.

Embodiment 1.
FIG. 1 is a schematic cross-sectional view of the semiconductor device according to the first embodiment. FIG. 2 is a schematic plan view of the semiconductor element according to the first embodiment.
In FIGS. 1 and 2, the semiconductor element 1 of the present embodiment includes a front-back conductive substrate 2, a front-side electrode 3a formed on one main surface (front surface) of the front-back conductive substrate 2, and a front-back conductive substrate. It includes a back side electrode 3b formed on the other main surface (back surface) of 2, a first electrode 4 formed on the front side electrode 3a, and an electroless plating layer 5 formed on the first electrode 4. The electroless plating layer 5 includes an electroless plating layer 6 for first bonding formed on the first electrode 4 and an electroless plating layer 7 for second bonding formed on the electroless plating layer 6 for first bonding. And have. The first electrode 4 contains an element nobler than the metal forming the front electrode 3a. The first electrode 4 is formed so that the area of the upper surface of the first electrode 4 is smaller than the area of the upper surface of the front electrode 3a. The first electrode 4 functions as an electrode for preventing corrosion (corrosion prevention electrode). Further, a protective film 8 is provided on the front electrode 3a on which the electroless plating layer 5 is not formed so as to surround the electroless plating layer 5. FIG. 3 is a schematic cross-sectional view of another semiconductor element according to the first embodiment. The semiconductor element 1 shown in FIG. 3 has the same structure as that of the semiconductor element 1 shown in FIG. 1 except that the side surface of the front electrode 3a is covered with the protective film 8, and thus the description thereof will be omitted.

The front-back conductive substrate 2 is not particularly limited, and a semiconductor substrate known in the art such as a Si substrate, a SiC substrate, a GaAs substrate, and a GaN substrate can be used. The front-back conductive substrate 2 has a diffusion layer (not shown), and has a function of controlling the operation of the semiconductor element 1 such as a PN junction and a gate electrode.

The front side electrode 3a and the back side electrode 3b are not particularly limited, and can be formed from materials known in the art such as aluminum, aluminum alloy, copper, nickel, and gold. In the present embodiment, from the viewpoint of excellent bondability, the front electrode 3a is preferably formed of aluminum or an aluminum alloy, and the back electrode 3b is preferably formed of nickel or gold.

The aluminum alloy is not particularly limited, but preferably contains an element nobler than aluminum. By containing an element nobler than aluminum, when the first electrode 4 is formed, electrons easily flow from the aluminum existing around the element, so that the dissolution of aluminum is promoted. Then, zinc is concentrated and deposited on the portion where the aluminum is dissolved, and the amount of zinc deposited, which is the starting point for the formation of the first electrode 4, is increased, so that the first electrode 4 is easily formed.

The element nobler than aluminum is not particularly limited, and examples thereof include iron, nickel, tin, lead, silicon, copper, silver, gold, tungsten, cobalt, platinum, palladium, iridium, and rhodium. Among these elements, copper, silicon, iron, nickel, silver and gold are preferable. Further, these elements may be contained alone or in combination of two or more.
The content of an element nobler than aluminum in the aluminum alloy is not particularly limited, but is preferably 5% by mass or less, more preferably 0.05% by mass or more and 3% by mass or less, and most preferably 0.1% by mass or more. It is 2% by mass or less.

The thickness of the front electrode 3a is not particularly limited, but is generally 1 μm or more and 8 μm or less, preferably 2 μm or more and 7 μm or less, and more preferably 3 μm or more and 6 μm or less.

The thickness of the back side electrode 3b is not particularly limited, but is generally 0.1 μm or more and 4 μm or less, preferably 0.5 μm or more and 3 μm or less, and more preferably 0.8 μm or more and 2 μm or less.

The first electrode 4 may contain an element nobler than the metal forming the front side electrode 3a or the back side electrode 3b, and in consideration of the materials for forming the front side electrode 3a and the back side electrode 3b described above, the electroless palladium plating layer or It is preferably composed of an electroless gold plating layer. The reason why the layer formed by the electroless plating method is preferable is that palladium and gold have a high melting point and a low vapor pressure, so that these metals are subjected to a vacuum deposition method, a sputtering method, an electron beam method, a thermal spraying method, or the like. When forming a layer containing, it is necessary to heat the temperature of the front and back conductive substrate 2 to 500 ° C. or higher, or to apply high energy to the metal target, which may cause fluctuations in the characteristics of the semiconductor element 1. Because. Further, in these forming methods, the yield of the material is about several%, which is often disadvantageous in terms of cost. Further, since the area of the first electrode 4 is smaller than the area of the front electrode 3a, the amount of expensive precious metals such as palladium and gold used can be reduced. Therefore, in the semiconductor element 1 of the present embodiment, the cost increase can be minimized.
Further, in the semiconductor element 1 of the present embodiment, since the lower surface of the protective film 8 and the upper surface of the first electrode 4 are not in contact with each other, the adhesive force between the protective film 8 and the front electrode 3a is improved. The reason is that the protective film 8 is often formed of a non-metal or an organic substance having poor reactivity with a noble metal, and therefore, when the lower surface of the protective film 8 and the upper surface of the first electrode 4 are in contact with each other, the adhesive force is applied. Is likely to be low.

The concentration of the noble element in the first electrode 4 is not particularly limited, but is generally 85% by mass or more, preferably 88% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 98% by mass or less.

From the viewpoint of corrosion prevention effect and cost control, the thickness of the first electrode 4 is preferably 0.05 μm or more and 0.8 μm or less, more preferably 0.1 μm or more and 0.6 μm or less, and most preferably 0.2 μm or more and 0. It is .55 μm or less.

The electroless plating layer 6 for the first bonding and the electroless plating layer 7 for the second bonding may contain a metal having excellent bondability at the time of soldering or wire bonding. Since the electroless plating layer 6 for the first bonding is formed by precipitating metal using the first electrode 4 as a catalyst, it is preferably composed of an electroless nickel plating layer or an electroless copper plating layer. Further, the electroless plating layer 7 for the second bonding is preferably composed of an electroless gold plating layer, an electroless palladium plating layer, an electroless copper plating layer or an electroless nickel plating layer. In the semiconductor element 1 according to the present embodiment, the electroless plating layer 7 for second bonding may not be formed, but may be a single layer electroless plating layer for bonding, or the electroless plating layer for second bonding may be used. An electroless plating layer for bonding may be further formed on the top 7 to form a three-layer electroless plating layer for bonding. When the electroless plating layer for bonding is a single layer, it is preferably an electroless nickel plating layer or an electroless copper plating layer. When the electroless plating layer for bonding has two layers, it is preferable to use two layers, an electroless nickel plating layer and an electroless gold plating layer formed in order from the first electrode 4 side. When the electroless plating layer for bonding is composed of three layers, the electroless nickel plating layer, the electroless palladium plating layer, and the electroless gold plating layer formed in order from the first electrode 4 side may be formed. preferable.

The thickness of the electroless plating layer 6 for the first bonding is not particularly limited, but is generally 2 μm or more and 10 μm or less, preferably 3 μm or more and 9 μm or less, and more preferably 4 μm or more and 8 μm or less.

The thickness of the electroless plating layer 7 for the second bonding is not particularly limited, but is generally 0.1 μm or less, preferably 0.01 μm or more and 0.08 μm or less, and more preferably 0.015 μm or more and 0.05 μm or less.

The protective film 8 is not particularly limited, and a protective film known in the art can be used. Examples of the protective film 8 include a glass-based film containing polyimide, silicon, or the like from the viewpoint of excellent heat resistance.

The semiconductor device 1 having the above-mentioned structure can be manufactured according to a method known in the art except for the step of forming the first electrode 4 and the electroless plating layer 5.

Specifically, the semiconductor element 1 is manufactured as follows.
First, the front side electrode 3a and the back side electrode 3b are formed on the front and back conductive substrate 2. The method of forming the front side electrode 3a and the back side electrode 3b on the front and back conductive substrate 2 is not particularly limited, and can be performed according to a method known in the art.
Next, the protective film 8 is formed on a part of the front electrode 3a. The method for forming the protective film 8 is not particularly limited, and can be performed according to a method known in the art.

Subsequently, the front side electrodes 3a and the back side electrodes 3b formed on the front and back conductive substrates 2 are plasma-cleaned. Plasma cleaning removes organic residues, nitrides or oxides firmly adhered to the front side electrode 3a and the back side electrode 3b by oxidative decomposition with plasma, etc., and the front side electrode 3a and the pretreatment liquid or plating liquid for plating are used. This is done to ensure reactivity and adhesion between the back side electrode 3b and the protective film. Plasma cleaning is performed on both the front side electrode 3a and the back side electrode 3b, but it is preferable that the front side electrode 3a is mainly performed. The order of plasma cleaning is not particularly limited, but it is preferable to perform plasma cleaning of the front side electrode 3a after plasma cleaning of the back side electrode 3b. The reason is that a protective film 8 composed of an organic substance exists on the front side of the semiconductor element 1 together with the front side electrode 3a, and the residue of the protective film 8 often adheres to the front side electrode 3a. is there.
It is necessary to perform plasma cleaning so that the protective film 8 does not disappear.

The conditions of the plasma cleaning step are not particularly limited, but generally, argon gas flow rate: 10 cc / min or more and 300 cc / min or less, applied voltage: 200 W or more and 1000 W or less, vacuum degree: 10 Pa or more and 100 Pa or less, processing time: 1 minute or more and 10 Less than a minute.

Next, a protective film is attached to the plasma-cleaned back electrode 3b so that the back electrode 3b does not come into contact with the electroless plating solution. After forming the electroless plating layer 5, the protective film may be peeled off by drying the semiconductor element 1 at a temperature of 60 ° C. or higher and 150 ° C. or lower for 15 minutes or longer and 60 minutes or shorter. The protective film is not particularly limited, and a known ultraviolet release type tape used for protection in the plating process can be used.

After the protective film is attached to the plasma-cleaned back side electrode 3b, the first electrode 4 and the electroless plating layer 5 are sequentially formed on the front side electrode 3a of the remaining portion where the protective film 8 is not formed. This process is generally carried out by a degreasing step, a pickling step, a first ginkating step, a ginkating stripping step, a second ginkating step and an electroless plating step. It is important to wash thoroughly with water between each step so that the treatment liquid or residue of the previous step is not brought into the next step.

In the degreasing step, the front electrode 3a is degreased. Degreasing is performed to remove mild organic substances, oils and fats, and an oxide film adhering to the surface of the front electrode 3a. Generally, degreasing is performed using an alkaline chemical solution having a strong etching force on the front electrode 3a. The fats and oils are saponified by the degreasing step. As for the non-saponified substance, the alkali-soluble substance is dissolved in the chemical solution, and the non-alkali-soluble substance is lifted off by etching the front electrode 3a.

The conditions of the degreasing step are not particularly limited, but generally, the pH of the alkaline chemical solution is 7.5 or more and 10.5 or less, the temperature is 45 ° C or more and 75 ° C or less, and the treatment time is 30 seconds or more and 10 minutes or less.

In the pickling step, the front electrode 3a is pickled. Pickling is performed to neutralize the surface of the front electrode 3a with sulfuric acid or the like and roughen it by etching to increase the reactivity of the treatment liquid in the subsequent step and improve the adhesive force of the plating.

The conditions of the pickling step are not particularly limited, but are generally: temperature: 10 ° C. or higher and 30 ° C. or lower, and treatment time: 30 seconds or longer and 2 minutes or shorter.

In the first zincate treatment step, the front electrode 3a is zincate-treated. The zincate treatment is a treatment of etching the surface of the front electrode 3a to remove the oxide film and forming a zinc film. In general, when the front electrode 3a is immersed in an aqueous solution (zincate treatment solution) in which zinc is dissolved, the standard oxidation-reduction potential of zinc is higher than that of the aluminum or aluminum alloy constituting the front electrode 3a. , Aluminum dissolves as ions. Due to the electrons generated at this time, zinc ions receive electrons on the surface of the front electrode 3a, and a zinc film is formed on the surface of the front electrode 3a.

In the zincate peeling step, the front electrode 3a having a zinc film formed on the surface is immersed in nitric acid to dissolve zinc.

In the second gincate treatment step, the front electrode 3a obtained by the gincate peeling step is immersed again in the gincate treatment liquid. As a result, a zinc film is formed on the surface of the front electrode 3a while removing aluminum and its oxide film.
The reason for performing the above-mentioned gincate peeling step and second gincate treatment step is to smooth the surface of the front electrode 3a. As the number of repetitions of the gincate treatment step and the gincate peeling step is increased, the surfaces of the front side electrode 3a and the back side electrode 3b become smooth, and a uniform first electrode 4 and an electroless plating layer 5 are formed. However, considering the balance between surface smoothness and productivity, it is preferable to carry out the zincate treatment twice or more, and more preferably three times.

The electroless plating treatment step includes a step of forming the first electrode 4, a step of forming the electroless plating layer 6 for the first bonding, and a step of forming the electroless plating layer 7 for the second bonding.

In the step of forming the first electrode 4, the electroless palladium plating layer as the first electrode 4 is formed by immersing the front electrode 3a on which the zinc film is formed, for example, in an electroless palladium plating solution.

When the front electrode 3a on which the zinc film is formed is immersed in the electroless palladium plating solution, palladium is initially deposited on the front electrode 3a because the standard oxidation-reduction potential of zinc is lower than that of palladium. Subsequently, when the surface is covered with palladium, palladium is autocatalytically precipitated by the action of the reducing agent contained in the electroless palladium plating solution. At the time of this autocatalytic precipitation, the component of the reducing agent is incorporated into the plating layer, so that the electroless palladium plating layer as the first electrode 4 may be an alloy. As the reducing agent for the electroless palladium plating solution, hypophosphorous acid, formic acid and the like are generally used. When hypophosphorous acid is used as a reducing agent, phosphorus is incorporated into the electroless palladium plating layer. When formic acid is used as a reducing agent, no specific element is incorporated into the electroless palladium plating layer. Further, since the electroless palladium plating layer as the first electrode 4 is chemically extremely stable and is not easily damaged by corrosion or the like, the subsequent electroless plating layer forming step for the first bonding and the second bonding It is possible to prevent the front electrode 3a from corroding in the electroless plating layer forming step. Further, since the initial precipitation rate of electroless palladium plating is as high as about 0.5 μm / min, the surface of the front electrode 3a can be covered in a short time. The electroless palladium plating solution is not particularly limited, and those known in the art can be used.

The palladium concentration in the electroless palladium plating solution is not particularly limited, but is generally 0.3 g / L or more and 2.0 g / L or less, preferably 0.5 g / L or more and 1.5 g / L or less.
The hydrogen ion concentration (pH) of the electroless palladium plating solution is not particularly limited, but is generally 7.0 or more and 8.0 or less, preferably 7.3 or more and 7.8 or less.
The temperature of the electroless palladium plating solution may be appropriately set according to the type of the electroless palladium plating solution and the plating conditions, but is generally 40 ° C. or higher and 80 ° C. or lower, preferably 45 ° C. or higher and 75 ° C. or lower.
The plating time may be appropriately set according to the plating conditions and the thickness of the electroless palladium plating layer, but is generally 2 minutes or more and 30 minutes or less, preferably 5 minutes or more and 20 minutes or less.

In the step of forming the electroless plating layer 6 for the first bonding, the front electrode 3a on which the first electrode 4 containing palladium or the like is formed is immersed in, for example, an electroless nickel plating solution to perform electroless plating for the first bonding. An electroless nickel plating layer is formed as the layer 6.

When the front electrode 3a on which the first electrode 4 containing palladium or the like is formed is immersed in the electroless nickel plating solution, the reducing agent contained in the electroless nickel plating solution causes the palladium or the like contained in the first electrode 4 to be removed. As a catalyst, electrons emitted from the reducing agent are supplied to nickel ions to precipitate nickel. At the time of this precipitation, the component of the reducing agent is incorporated into the plating layer, so that the electroless nickel plating layer as the electroless plating layer 6 for the first bonding may be an alloy. Hypophosphorous acid or the like is generally used as the reducing agent for the electroless nickel plating solution. When hypophosphorous acid is used as a reducing agent, phosphorus is incorporated into the electroless nickel plating layer. Further, even if there is a gap between the front electrode 3a, the protective film 8 and the first electrode 4 in the previous steps, in this step, nickel is rapidly deposited around the first electrode 4 to create a gap. Since it can be buried, the front electrode 3a will not be corroded in the subsequent steps. The electroless nickel plating solution is not particularly limited, and those known in the art can be used.

The nickel concentration of the electroless nickel plating solution is not particularly limited, but is generally 4.0 g / L or more and 7.0 g / L or less, preferably 4.5 g / L or more and 6.5 g / L or less. The hydrogen ion concentration (pH) of the electroless nickel plating solution is not particularly limited, but is generally 4.0 or more and 6.0 or less, preferably 4.5 or more and 5.5 or less.
The temperature of the electroless nickel plating solution may be appropriately set according to the type of the electroless nickel plating solution and the plating conditions, but is generally 70 ° C. or higher and 90 ° C. or lower, preferably 80 ° C. or higher and 90 ° C. or lower.
The plating time may be appropriately set according to the plating conditions and the thickness of the electroless nickel plating layer, but is generally 5 minutes or more and 40 minutes or less, preferably 10 minutes or more and 30 minutes or less.

In the step of forming the electroless plating layer 7 for the second bonding, the front side electrode 3a on which the electroless plating layer 6 for the first bonding is formed is immersed in, for example, an electroless gold plating solution to perform electroless plating for the second bonding. An electroless gold plating layer is formed as the layer 7. The electroless gold plating process is generally performed by a method called a replacement type. The replacement type electroless gold plating treatment is performed by replacing nickel in the electroless nickel plating layer with gold by the action of a complexing agent contained in the electroless gold plating solution. As described above, since the gap between the front electrode 3a, the protective film 8 and the first electrode 4 is filled, the electroless gold plating solution does not come into contact with the front electrode 3a, and the front side in the electroless gold plating process. Corrosion does not occur in the electrode 3a. In the electroless gold plating treatment, it is difficult to thicken the electroless gold plating layer because the reaction stops when the surface of the electroless nickel plating layer is covered with gold. Therefore, the maximum thickness of the electroless gold plating layer formed is 0.08 μm, generally about 0.05 μm. However, when used for soldering, the thickness of the electroless gold plating layer is not too small even with the above values. The electroless gold plating solution is not particularly limited, and those known in the art can be used.

The gold concentration in the electroless gold plating solution is not particularly limited, but is generally 0.3 g / L or more and 2.0 g / L or less, preferably 0.5 g / L or more and 2.0 g / L or less.
The pH of the electroless gold plating solution is not particularly limited, but is generally 6.0 or more and 9.0 or less, preferably 6.5 or more and 8.0 or less.
The temperature of the electroless gold plating solution may be appropriately set according to the type of the electroless gold plating solution and the plating conditions, but is generally 70 ° C. or higher and 90 ° C. or lower, preferably 80 ° C. or higher and 90 ° C. or lower.
The plating time may be appropriately set according to the plating conditions and the thickness of the electroless gold plating layer, but is generally 5 minutes or more and 30 minutes or less, preferably 10 minutes or more and 20 minutes or less.

According to the first embodiment, the first electrode 4 and the electroless plating layer 5 formed on the front side electrode 3a do not swell and peel off during soldering or wire bonding, and the front and back sides have high bonding reliability. A type semiconductor element and a method for manufacturing the same can be provided.

Embodiment 2.
FIG. 4 is a schematic cross-sectional view of the semiconductor device according to the second embodiment.
In FIG. 4, the semiconductor element 1 of the present embodiment has a front-back conductive substrate 2, a front-side electrode 3a formed on one main surface (front surface) of the front-back conductive substrate 2, and the other of the front-back conductive substrate 2. The back side electrode 3b formed on the main surface (back surface) of the above, the first electrode 4a formed on the front side electrode 3a, the first electrode 4b formed on the back side electrode 3b, the first electrode 4a and the first electrode. A non-electrolytic plating layer 5 formed on each of the electrodes 4b is provided. The electroless plating layer 5 includes an electroless plating layer 6 for first bonding formed on the first electrode 4a and the first electrode 4b, and an electroless plating layer 6 for second bonding formed on the electroless plating layer 6 for first bonding. It has an electroless plating layer 7. The first electrode 4a and the first electrode 4b contain an element nobler than the metal forming the front side electrode 3a and the back side electrode 3b. The first electrode 4a is formed so that the area of the upper surface of the first electrode 4a is smaller than the area of the upper surface of the front electrode 3a. Since the area of the upper surface of the first electrode 4a is smaller than the area of the upper surface of the front electrode 3a, the amount of expensive precious metals such as palladium and gold used can be reduced. Therefore, in the semiconductor element 1 of the present embodiment, the cost increase can be minimized. The first electrode 4a and the first electrode 4b function as electrodes for preventing corrosion (corrosion prevention electrodes). Further, a protective film 8 is provided on the front electrode 3a on which the electroless plating layer 5 is not formed so as to surround the electroless plating layer 5 formed on the first electrode 4a. That is, the semiconductor element 1 of the present embodiment is different from the first embodiment in that the first electrode 4b and the electroless plating layer 5 are sequentially formed on the back side electrode 3b. FIG. 5 is a schematic cross-sectional view of another semiconductor element according to the second embodiment. The semiconductor element 1 shown in FIG. 5 has the same structure as the semiconductor element 1 shown in FIG. 4, except that the side surface of the front electrode 3a is covered with the protective film 8, and thus the description thereof will be omitted.
Further, in the semiconductor element 1 of the present embodiment, since the lower surface of the protective film 8 and the upper surface of the first electrode 4a are not in contact with each other, the adhesive force between the protective film 8 and the front electrode 3a is improved. The reason is that the protective film 8 is often formed of a non-metal or an organic substance having poor reactivity with a noble metal, and therefore, when the lower surface of the protective film 8 and the upper surface of the first electrode 4a are in contact with each other, the adhesive force is applied. Is likely to be low.

As a method of forming the first electrode 4a on the front side electrode 3a and forming the first electrode 4b on the back side electrode 3b, both the front side electrode 3a and the back side electrode 3b are formed without attaching a protective film to the back side electrode 3b. At the same time, electroless plating may be performed. By forming an electroless palladium plating layer on both the front side electrode 3a and the back side electrode 3b, the front side electrode 3a and the electroless plating layer forming step for the first bonding and the electroless plating layer forming step for the second bonding follow. It is possible to prevent the back side electrode 3b from corroding. The process of forming the first electrode 4a, the first electrode 4b, and the electroless plating layer 5 is the same as the process described in the first embodiment, that is, a degreasing step, a pickling step, a first zincate treatment step, a zincate peeling step, Since it is performed by the second zincate treatment step and the electrolytic plating treatment, the description thereof will be omitted.

According to the second embodiment, the first electrode 4a, the first electrode 4b, and the electroless plating layer 5 formed on the front side electrode 3a and the back side electrode 3b may swell and peel off during soldering or wire bonding. It is possible to provide a front-back conductive semiconductor element having high bonding reliability and a method for manufacturing the same.

Embodiment 3.
FIG. 6 is a schematic cross-sectional view of the semiconductor device according to the third embodiment.
In FIG. 6, the semiconductor element 1 of the present embodiment has a front-back conductive substrate 2, a front-side electrode 3a formed on one main surface (front surface) of the front-back conductive substrate 2, and the other of the front-back conductive substrate 2. The back side electrode 3b formed on the main surface (back surface) of the above, the first electrode 4a formed on the front side electrode 3a, the first electrode 4b formed on the back side electrode 3b, the first electrode 4a and the first electrode. A non-electrolytic plating layer 5 formed on each of the electrodes 4b is provided. The electroless plating layer 5 includes an electroless plating layer 6 for first bonding formed on the first electrode 4a and the first electrode 4b, and an electroless plating layer 6 for second bonding formed on the electroless plating layer 6 for first bonding. It has an electroless plating layer 7. The first electrode 4a and the first electrode 4b contain an element nobler than the metal forming the front side electrode 3a and the back side electrode 3b. The first electrode 4a is formed so that the area of the upper surface of the first electrode 4a is smaller than the area of the upper surface of the front electrode 3a. Since the area of the upper surface of the first electrode 4a is smaller than the area of the upper surface of the front electrode 3a, the amount of expensive precious metals such as palladium and gold used can be reduced. Therefore, in the semiconductor element 1 of the present embodiment, the cost increase can be minimized. The first electrode 4a and the first electrode 4b function as electrodes for preventing corrosion (corrosion prevention electrodes). Further, a protective film 8 is provided on the front electrode 3a on which the electroless plating layer 5 is not formed so as to surround the electroless plating layer 5 formed on the first electrode 4a. Further, the upper surface of the first electrode 4a formed on the front electrode 3a has a region in contact with the electroless plating layer 6 for first bonding and a region in contact with the protective film 8. That is, the semiconductor element 1 of the present embodiment is different from the first embodiment and the second embodiment in that the first electrode 4a is formed so as to extend to the lower surface of the protective film 8. FIG. 7 is a schematic cross-sectional view of another semiconductor element according to the third embodiment. The semiconductor element 1 shown in FIG. 7 has the same structure as the semiconductor element 1 shown in FIG. 6 except that the side surface of the front electrode 3a is covered with the protective film 8, and thus the description thereof will be omitted.

As a method of forming the first electrode 4a on the lower surface of the protective film 8, micro-etching may be performed after the degreasing step of the front electrode 3a in the process of forming the first electrode 4 and the electroless plating layer 5. Since the subsequent steps are the same as those in the first embodiment, the description thereof will be omitted.

In the micro-etching step, the degreased front side electrode 3a is immersed in a micro-etching liquid containing a surfactant having a low surface tension, so that the micro-etching liquid is formed in a minute gap between the front side electrode 3a and the protective film 8. Can be penetrated by capillarity to remove mild metal oxides in the portion and enhance the water wettability and reactivity of the portion. Examples of the surfactant having a low surface tension include polyol ether and sodium alkyl sulfonate. The micro-etching solution is not particularly limited, and those known in the art can be used. By performing micro-etching, an electroless palladium-plated layer as the first electrode 4a can be deposited even in a minute gap between the front electrode 3a and the protective film 8. By forming the first electrode 4a on the lower surface of the protective film 8 in this way, the contact area between the front electrode 3a and the first electrode 4a is increased, and the contact area between the front electrode 3a and the first electrode 4a is attached. Increased force.

The length of the first electrode 4a formed on the lower surface of the protective film 8 in the plane direction is preferably 0.5 times or more and 3.0 times or less, more preferably about 1.5 times the thickness of the first electrode 4a. is there.

According to the third embodiment, the first electrode 4a and the electroless plating layer 5 formed on the front side electrode 3a during soldering or wire bonding do not swell and peel off, and the front and back sides have higher joining reliability. It is possible to provide a conductive semiconductor element and a method for manufacturing the same.

The semiconductor element 1 of each of the above embodiments may be manufactured by performing each plating process on a chip (front and back conductive substrate 2) obtained by dicing a semiconductor wafer, or may be manufactured. From the viewpoint of productivity and the like, the semiconductor wafer may be manufactured by performing each plating treatment and then dicing. In particular, in recent years, from the viewpoint of improving the electrical characteristics of the semiconductor element 1, it has been required to reduce the thickness of the front-back conductive substrate 2, and handling is performed unless the thickness of the outer peripheral portion is larger than that of the central portion. Can be difficult. Even for semiconductor wafers having different thicknesses between the central portion and the outer peripheral portion, it is possible to form a desired plating layer by using each of the above plating treatments.

In the semiconductor element 1 of each of the above embodiments, an electroless palladium plating layer as the first electrode 4, the first electrode 4a and the first electrode 4b, and an electroless nickel layer as the electroless plating layer 6 for the first bonding And the combination with the electroless gold plating layer as the electroless plating layer 7 for the second bonding has been mainly described, but the same effect can be expected by the combination with other plating layers as shown in Table 1 below. By using a combination of these plating layers, various bonding methods such as soldering, wire bonding, gold bonding, silver bonding, and nanoparticle bonding can be supported.

In the above-described first to third embodiments, the case where the first electrode and the electroless plating layer are formed after the front side electrode and the back side electrode are formed on the front and back conductive substrates has been described, but the time when the back side electrode is formed Is not particularly limited. The effect of the present invention can be obtained regardless of when the back electrode is formed. For example, the front side electrode may be formed on one side of the front and back conductive type substrate, the first electrode and the electroless plating layer may be formed on the front side electrode, and then the back side electrode may be formed on the remaining one side of the front and back conductive type substrate. ..

Hereinafter, the details of the present invention will be described with reference to Examples, but the present invention is not limited thereto.
[Example 1]
In Example 1, a semiconductor device 1 having the structure shown in FIG. 1 was manufactured.
First, a Si substrate (14 mm × 14 mm × 70 μm) was prepared as the front-back conductive substrate 2.
Next, an aluminum alloy electrode (silicon content: about 1% by mass, thickness: 5.0 μm) as the front electrode 3a is formed on the surface of the Si substrate, and aluminum as the back electrode 3b is formed on the back surface of the Si substrate. An alloy electrode (silicon content: about 1% by mass, thickness: 1.3 μm) was formed. Then, a protective film 8 (polyimide, thickness: 8 μm) was formed on a part of the front electrode 3a.
Next, by performing each step under the conditions shown in Table 2 below, the first electrode 4 and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and electroless plating for the second bonding) are placed on the front electrode 3a. The plating layers 7) were sequentially formed to obtain a semiconductor element 1. In addition, water washing with pure water was performed between each step.

The first electrode 4 (electroless palladium plating layer), the electroless plating layer 6 for the first bonding (electroless nickel phosphorus plating layer), and the electroless plating layer 7 for the second bonding (electroless plating) formed on the front electrode 3a. The thickness of the gold-plated layer) was measured using a commercially available fluorescent X-ray film thickness measuring device. As a result, the thickness of the first electrode 4 is 0.50 μm, the thickness of the first bonding electroless plating layer 6 is 5.2 μm, and the thickness of the second bonding electroless plating layer 7 is 0. It was .047 μm.

The adhesion of the electroless plating layer 5 of the obtained semiconductor element 1 was evaluated by a tape test. As a result, it was confirmed that the electroless plating layer 5 has sufficient adhesive force without peeling from the surface of the aluminum alloy electrode. Further, when the semiconductor element 1 was heat-treated at 150 ° C. in order to simulate the mounting process, the electroless plating layer 5 did not swell. Further, when the cross section of the obtained semiconductor element 1 was observed, no corrosion of the aluminum alloy electrode was observed.
From the above, it is considered that the semiconductor element 1 having high bonding reliability could be manufactured.

[Example 2]
In Example 2, a semiconductor device 1 having the structure shown in FIG. 4 was manufactured.
First, a Si substrate (14 mm × 14 mm × 70 μm) was prepared as the front-back conductive substrate 2.
Next, an aluminum alloy electrode (silicon content: about 1% by mass, thickness: 5.0 μm) as the front electrode 3a is formed on the surface of the Si substrate, and aluminum as the back electrode 3b is formed on the back surface of the Si substrate. An alloy electrode (silicon content: about 1% by mass, thickness: 1.3 μm) was formed. Then, a protective film 8 (polyimide, thickness: 8 μm) was formed on a part of the front electrode 3a.
Next, by performing each step under the conditions shown in Table 3 below, the first electrode 4a and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and none for the second bonding) are placed on the front electrode 3a. The electrolytic plating layer 7) is sequentially formed, and the first electrode 4b and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and electroless plating layer 7 for the second bonding) are sequentially formed on the back side electrode 3b. , The semiconductor element 1 was obtained. In addition, water washing with pure water was performed between each step.

First electrode 4a and first electrode 4b (electroless palladium plating layer), electroless plating layer 6 for first bonding (electroless nickel phosphorus plating layer) and electroless plating layer 7 for second bonding (electroless gold plating layer) ) Each thickness was measured using a commercially available fluorescent X-ray film thickness measuring device. As a result, the thickness of the first electrode 4a formed on the front electrode 3a is 0.50 μm, the thickness of the electroless plating layer 6 for the first bonding is 5.1 μm, and the electroless plating layer for the second bonding is electroless. The thickness of the plating layer 7 was 0.047 μm. The thickness of the first electrode 4b formed on the back side electrode 3b is 0.45 μm, the thickness of the first bonding electroless plating layer 6 is 4.9 μm, and the thickness of the second bonding electroless plating is 4.9 μm. The thickness of the layer 7 was 0.046 μm.

The adhesion of the electroless plating layer 5 of the obtained semiconductor element 1 was evaluated by a tape test. As a result, it was confirmed that all of the electroless plating layers 5 had sufficient adhesive force without peeling from the surface of the aluminum alloy electrode. Further, when the semiconductor element 1 was heat-treated at 150 ° C. in order to simulate the mounting process, the electroless plating layer 5 did not swell. Further, when the cross section of the obtained semiconductor element 1 was observed, no corrosion of the aluminum alloy electrode was observed. From the above, it is considered that the semiconductor element 1 having high bonding reliability could be manufactured.

[Example 3]
In Example 3, a semiconductor device 1 having the structure shown in FIG. 6 was produced.
First, a Si substrate (14 mm × 14 mm × 70 μm) was prepared as the front-back conductive substrate 2.
Next, an aluminum alloy electrode (silicon content: about 1% by mass, thickness: 5.0 μm) as the front electrode 3a is formed on the surface of the Si substrate, and aluminum as the back electrode 3b is formed on the back surface of the Si substrate. An alloy electrode (silicon content: about 1% by mass, thickness: 1.3 μm) was formed. Then, a protective film 8 (polyimide, thickness: 8 μm) was formed on a part of the front electrode 3a.
Next, by performing each step under the conditions shown in Table 4 below, the first electrode 4a and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and none for the second bonding) are placed on the front electrode 3a. The electrolytic plating layer 7) is sequentially formed, and the first electrode 4b and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and electroless plating layer 7 for the second bonding) are sequentially formed on the back side electrode 3b. , The semiconductor element 1 was obtained. In addition, water washing with pure water was performed between each step.

First electrode 4a and first electrode 4b (electroless palladium plating layer), electroless plating layer 6 for first bonding (electroless nickel phosphorus plating layer) and electroless plating layer 7 for second bonding (electroless gold plating layer) ) Each thickness was measured using a commercially available fluorescent X-ray film thickness measuring device. As a result, the thickness of the first electrode 4a formed on the front electrode 3a is 0.51 μm, the thickness of the first bonding electroless plating layer 6 is 5.0 μm, and the thickness of the second bonding electroless plating layer 6 is 5.0 μm. The thickness of the plating layer 7 was 0.048 μm. Further, the thickness of the first electrode 4b formed on the back side electrode 3b is 0.47 μm, the thickness of the electroless plating layer 6 for the first bonding is 4.7 μm, and the electroless plating for the second bonding. The thickness of the layer 7 was 0.044 μm. Further, the length of the first electrode 4a formed on the lower surface of the protective film 8 in the plane direction was measured using a cross-sectional observation image by a scanning electron microscope (SEM) and found to be 0.88 μm.

The adhesion of the electroless plating layer 5 of the obtained semiconductor element 1 was evaluated by a tape test. As a result, it was confirmed that all of the electroless plating layers 5 had sufficient adhesive force without peeling from the surface of the aluminum alloy electrode. Further, when the semiconductor element 1 was heat-treated at 150 ° C. in order to simulate the mounting process, the electroless plating layer 5 did not swell. Further, when the cross section of the obtained semiconductor element 1 was observed, no corrosion of the aluminum alloy electrode was observed. From the above, it is considered that the semiconductor element 1 having high bonding reliability could be manufactured.

[Example 4]
In Example 4, a semiconductor element having a three-layer structure of the electroless plating layer for bonding of the semiconductor element 1 shown in FIG. 6 was produced.
First, a Si substrate (14 mm × 14 mm × 70 μm) was prepared as the front-back conductive substrate 2.
Next, an aluminum alloy electrode (silicon content: about 1% by mass, thickness: 5.0 μm) as the front electrode 3a is formed on the surface of the Si substrate, and aluminum as the back electrode 3b is formed on the back surface of the Si substrate. An alloy electrode (silicon content: about 1% by mass, thickness: 1.3 μm) was formed. Then, a protective film 8 (polyimide, thickness: 8 μm) was formed on a part of the front electrode 3a.
Next, by performing each step under the conditions shown in Table 5 below, the first electrode 4a and the electroless plating layer 5 (electroless plating layer 6 for the first bonding and none for the second bonding) are placed on the front electrode 3a. Electroless plating layer 7 and electroless plating layer for third bonding) are sequentially formed, and the first electrode 4b and electroless plating layer 5 (electroless plating layer 6 for first bonding and none for second bonding) are formed on the back electrode 3b. The electrolytic plating layer 7 and the electroless plating layer for the third bonding) were sequentially formed to obtain a semiconductor element 1. In addition, water washing with pure water was performed between each step.

First electrode 4a and first electrode 4b (electroless palladium plating layer), electroless plating layer 6 for first bonding (electroless nickel phosphorus plating layer), electroless plating layer 7 for second bonding (electroless palladium plating layer) ) And the thickness of each of the electroless plating layer for the third bonding (electroless gold plating layer) was measured using a commercially available fluorescent X-ray film thickness measuring device. As a result, the thickness of the first electrode 4a formed on the front electrode 3a is 0.55 μm, the thickness of the first bonding electroless plating layer 6 is 4.9 μm, and the thickness of the second bonding electroless plating layer 6 is 4.9 μm. The thickness of the plating layer 7 was 0.51 μm, and the thickness of the electroless plating layer for the third bonding was 0.047 μm. The thickness of the first electrode 4b formed on the back side electrode 3b is 0.50 μm, the thickness of the electroless plating layer 6 for the first bonding is 4.9 μm, and the electroless plating for the second bonding is electroless plating. The thickness of the layer 7 was 0.48 μm, and the thickness of the electroless plating layer for the third bonding was 0.046 μm. Further, the length of the first electrode 4a formed on the lower surface of the protective film 8 in the plane direction was measured using a cross-sectional observation image by a scanning electron microscope (SEM) and found to be 0.88 μm.

The adhesion of the electroless plating layer 5 of the obtained semiconductor element 1 was evaluated by a tape test. As a result, it was confirmed that all of the electroless plating layers 5 had sufficient adhesive force without peeling from the surface of the aluminum alloy electrode. Further, when the semiconductor element 1 was heat-treated at 150 ° C. in order to simulate the mounting process, the electroless plating layer 5 did not swell. Furthermore, when the cross section of the obtained semiconductor element was observed, no corrosion of the aluminum alloy electrode was observed. From the above, it is considered that the semiconductor element 1 having high bonding reliability could be manufactured.

[Example 5]
In Example 5, a semiconductor element having a single-layer structure of the electroless plating layer for bonding of the semiconductor element 1 shown in FIG. 6 was produced.
First, a Si substrate (14 mm × 14 mm × 70 μm) was prepared as the front-back conductive substrate 2.
Next, an aluminum alloy electrode (silicon content: about 1% by mass, thickness: 5.0 μm) as the front electrode 3a is formed on the surface of the Si substrate, and aluminum as the back electrode 3b is formed on the back surface of the Si substrate. An alloy electrode (silicon content: about 1% by mass, thickness: 1.3 μm) was formed. Then, a protective film 8 (polyimide, thickness: 8 μm) was formed on a part of the front electrode 3a.
Next, by performing each step under the conditions shown in Table 6 below, the first electrode 4a and the electroless plating layer 5 (electroless plating layer 6 for first bonding) are sequentially formed on the front electrode 3a. A first electrode 4b and an electroless plating layer 5 (electroless plating layer 6 for first bonding) were sequentially formed on the back side electrode 3b to obtain a semiconductor element 1. In addition, water washing with pure water was performed between each step.

The thickness of each of the first electrode 4a and the first electrode 4b (electroless palladium plating layer) and the electroless plating layer 6 for first bonding (electroless copper plating layer) was determined by using a commercially available fluorescent X-ray film thickness measuring device. Was measured. As a result, the thickness of the first electrode 4a formed on the front electrode 3a was 0.55 μm, and the thickness of the electroless plating layer 6 for the first bonding was 24.9 μm. The thickness of the first electrode 4b formed on the back side electrode 3b was 0.51 μm, and the thickness of the electroless plating layer 6 for the first bonding was 23.8 μm. Further, the length of the first electrode 4a formed on the lower surface of the protective film 8 in the plane direction was measured using a cross-sectional observation image by a scanning electron microscope (SEM) and found to be 0.78 μm.

The adhesion of the electroless plating layer 5 of the obtained semiconductor element 1 was evaluated by a tape test. As a result, it was confirmed that all of the electroless plating layers 5 had sufficient adhesive force without peeling from the surface of the aluminum alloy electrode. Further, when the semiconductor element 1 was heat-treated at 150 ° C. in order to simulate the mounting process, the electroless plating layer 5 did not swell. Furthermore, when the cross section of the obtained semiconductor element was observed, no corrosion of the aluminum alloy electrode was observed. From the above, it is considered that the semiconductor element 1 having high bonding reliability could be manufactured.

[Comparative Example 1]
An attempt is made to form an electroless plating layer 6 (electroless copper plating layer) for first bonding on an aluminum alloy electrode without providing the first electrode 4a and the first electrode 4b (electroless palladium plating layer) in Example 5. did. As a result, the aluminum alloy electrode was completely melted during the formation of the electroless plating layer 6 (electroless copper plating layer) for the first bonding, and the semiconductor element could not be manufactured.

This international application claims priority based on Japanese Patent Application No. 2018-0229378 filed on February 22, 2018, and the entire contents of this Japanese patent application are incorporated into this international application. To do.

1 Semiconductor element, 2 Front and back conductive substrate, 3a Front side electrode, 3b Back side electrode, 4, 4a, 4b First electrode, 5 Electroless plating layer, 6 Electroless plating layer for first bonding, 7 Electroless plating for second bonding Plating layer, 8 protective film

Claims (10)

A semiconductor device in which a first electrode and an electroless plating layer are sequentially formed on at least one electrode of a front-back conductive substrate having a front-side electrode and a back-side electrode.
The first electrode contains an element nobler than the metal forming the electrode on which the first electrode is formed.
A semiconductor device in which the area of the first electrode is smaller than the area of the electrode on which the first electrode is formed. The semiconductor element according to claim 1, wherein the first electrode is a corrosion prevention electrode that prevents corrosion. The semiconductor device according to claim 1 or 2, further comprising a protective film formed on the electrode on which the first electrode is formed so as to surround the electroless plating layer. The semiconductor device according to claim 3, wherein the upper surface of the first electrode has a region in contact with the electroless plating layer and a region in contact with the protective film. The front electrode and the back electrode are made of aluminum or an aluminum alloy.
The first electrode is composed of an electroless palladium plating layer or an electroless gold plating layer.
The electroless plating layer is a single layer of an electroless nickel plating layer, a single layer of an electroless copper plating layer, and two layers of an electroless nickel plating layer and an electroless gold plating layer formed in this order from the first electrode side. The semiconductor element according to any one of claims 1 to 4, further comprising three layers of an electroless nickel plating layer, an electroless palladium plating layer, and an electroless gold plating layer formed in order from the first electrode side. .. The process of forming the front side electrode on one side of the front and back conductive substrate, and
A step of forming a first electrode by precipitating an element nobler than the metal forming the front electrode on a part of the front electrode using an electroless plating method.
A method for manufacturing a semiconductor device, which comprises a step of forming an electroless plating layer on the first electrode using the electroless plating method as a catalyst. The method for manufacturing a semiconductor device according to claim 6, wherein a protective film is formed on a part of the front electrode, and then the first electrode is formed on the remaining part of the front electrode. The method for manufacturing a semiconductor device according to claim 7, wherein after forming the protective film, the remaining portion on the front electrode is micro-etched to form the first electrode. The front electrode is made of aluminum or an aluminum alloy.
The first electrode is formed of an electroless palladium plating layer or an electroless gold plating layer after the front electrode is zincated.
The electroless plating layer is a single layer of an electroless nickel plating layer, a single layer of an electroless copper plating layer, and two layers of an electroless nickel plating layer and an electroless gold plating layer formed in this order from the first electrode side. The semiconductor element according to any one of claims 6 to 8, further comprising three layers of an electroless nickel plating layer, an electroless palladium plating layer, and an electroless gold plating layer formed in order from the first electrode side. Manufacturing method. The method for manufacturing a semiconductor element according to any one of claims 6 to 9, further comprising a step of forming a back side electrode on the remaining one side of the front and back conductive substrate.

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