JPWO2019078206A1 - Manufacturing method for substrates with multilayer reflective films, reflective mask blanks, reflective masks, and semiconductor devices - Google Patents

Abstract

A method for manufacturing a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a semiconductor device that can prevent the surface of the multilayer reflective film from being contaminated even when a reference mark is formed on the multilayer reflective film. I will provide a. The substrate with a multilayer reflective film (10) includes a substrate (12) and a multilayer reflective film (14) formed on the substrate to reflect EUV light. The reference mark (20) is formed in a concave shape on the surface of the substrate with the multilayer reflective film. The reference mark has a groove (21) or a protrusion (23) substantially at the center. The shape of the groove or protrusion in a plan view is similar to or substantially similar to the shape of the reference mark.

Description

The present invention relates to a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device.

With the recent demand for higher density and higher precision of VLSI devices, EUV lithography, which is an exposure technique using extreme ultraviolet (hereinafter referred to as EUV) light, is promising. Here, EUV light refers to light in a wavelength band of a soft X-ray region or a vacuum ultraviolet region, and specifically, light having a wavelength of about 0.2 to 100 nm. A reflective mask has been proposed as a mask used in EUV lithography. In the reflective mask, a multilayer reflective film that reflects exposure light is formed on a substrate such as glass or silicon, and an absorber film pattern that absorbs exposure light is formed on the multilayer reflective film. In the exposure machine that performs pattern transfer, the light incident on the reflective mask mounted on the exposure machine is absorbed by the portion having the absorber film pattern and reflected by the multilayer reflective film in the portion without the absorber film pattern. Then, the reflected light image is transferred onto a semiconductor substrate such as a silicon wafer via the reflection optical system.

As the demand for miniaturization in the lithography process increases, the problems in the lithography process are becoming more prominent. One of the problems is a problem related to defect information of a mask blank substrate or the like used in a lithography process.

Conventionally, in blank inspection or the like, the existing position of a defect on a substrate is specified by the distance from the origin using the coordinates managed by the defect inspection apparatus with the center of the substrate as the origin (0,0). For this reason, the standard of absolute value coordinates is not clear, the position accuracy is low, and the detection varies between devices. Further, even when patterning on a thin film for pattern formation while avoiding defects at the time of pattern drawing, it is difficult to avoid defects on the order of μm. For this reason, defects have been avoided by changing the transfer direction of the pattern or roughly shifting the transfer position on the order of mm.

Under such circumstances, it has been proposed to form a reference mark on, for example, a mask blank substrate, and to specify the position of a defect with reference to the reference mark. By forming the reference mark on the mask blank substrate, it is possible to prevent the reference for identifying the position of the defect from being deviated for each device.

In a reflective mask that uses EUV light as the exposure light, it is particularly important to accurately locate defects on the multilayer reflective film. This is because the defects present in the multilayer reflective film are almost impossible to correct and can be serious topological defects on the transfer pattern.

In order to accurately identify the position of a defect on the multilayer reflective film, it is preferable to acquire the position information of the defect by performing a defect inspection after forming the multilayer reflective film. For that purpose, it is preferable to form a reference mark on the multilayer reflective film formed on the substrate.

Patent Document 1 discloses a reference mark formed in a concave shape by removing a part of the multilayer reflective film. As a method for removing a part of the multilayer reflective film, a laser ablation method and a FIB (focused ion beam method) are disclosed.

International release WO2013 / 031863

However, when a concave reference mark is formed on the surface of the multilayer reflective film by a laser ablation method, the surface of the multilayer reflective film may be contaminated by dust generated during laser processing. If the surface of the multilayer reflective film is contaminated, new foreign matter defects may occur. When a new foreign matter defect occurs, if it becomes an exposure defect, a serious problem may occur when the reflective mask is manufactured.

The multilayer reflective film may be etched in the depth direction in order to form a concave reference mark on the multilayer reflective film. When the multilayer reflective film is etched in the depth direction, the Mo / Si film, which is the material of the multilayer reflective film, may be exposed on the side surface of the recess formed by the etching. At the bottom of the recess created by etching, the Mo film may be exposed to the surface. In addition, the etching reaction product may adhere to the side surface or the bottom surface. When the material contained in the multilayer reflective film is exposed, the cleaning resistance of the substrate deteriorates. The manufacturing process of the reflective mask blank or the reflective mask includes a substrate cleaning step. When the cleaning resistance of the substrate deteriorates, the material on the side and / or bottom of the reference mark elutes in the substrate cleaning process, resulting in deterioration of position accuracy such as fluctuation of mark shape and increase of edge roughness, and film from the etched surface. Problems such as peeling may occur. In addition, there is a risk that the deposits will come off and reattach due to the cleaning process.

When a concave reference mark is formed on the surface of the multilayer reflective film by the FIB method, the processing speed of the FIB method is slow, so that the processing time is long. Therefore, it becomes difficult to prepare a reference mark having a required length (for example, 550 μm).

Therefore, the present invention provides a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, which can prevent the surface of the multilayer reflective film from being contaminated even when a reference mark is formed on the multilayer reflective film. And a method for manufacturing a semiconductor device. Another object of the present invention is to provide a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device, which can prevent the cleaning resistance of the substrate from deteriorating. Another object of the present invention is to provide a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device, which can shorten the time required for processing a reference mark.

In order to solve the above problems, the present invention has the following configurations.
(Structure 1)
A substrate with a multilayer reflective film including a substrate and a multilayer reflective film formed on the substrate that reflects EUV light.
A reference mark formed in a concave shape on the surface of the substrate with a multilayer reflective film is provided.
The reference mark has a groove or a protrusion at a substantially center, and has a groove or a protrusion.
A substrate with a multilayer reflective film, characterized in that the shape of the groove or protrusion in a plan view is similar to or substantially similar to the shape of the reference mark.

(Structure 2)
The bottom of the reference mark is a shrink region in which at least a part of the plurality of films included in the multilayer reflective film is shrunk, and at least a part of the films included in the multilayer reflective film are formed on each other. Including an integrated mixing area
The substrate with a multilayer reflective film according to Configuration 1, wherein the groove or protrusion contains a relatively large amount of the mixing region as compared with the bottom of the reference mark excluding the groove or protrusion.

(Structure 3)
The substrate with a multilayer reflective film according to Configuration 1 or 2, wherein the depth of the groove or the height of the protrusion is 20 nm or more.

(Structure 4)
The substrate with a multilayer reflective film according to any one of Structures 1 to 3, wherein the width of the groove or the protrusion is 200 nm or more and 10 μm or less.

(Structure 5)
The substrate with a multilayer reflective film according to any one of Structures 1 to 4, wherein the depth of the reference mark is 30 nm or more and 50 nm or less.

(Structure 6)
Including a protective film formed on the multilayer reflective film,
The substrate with a multilayer reflective film according to any one of configurations 1 to 5, wherein the reference mark is formed on the surface of the protective film.

(Structure 7)
The substrate with a multilayer reflective film according to any one of configurations 1 to 6, wherein the surface layer of the multilayer reflective film on the opposite side to the substrate is a layer containing Si.

(Structure 8)
A reflective mask blank having a substrate with a multilayer reflective film according to any one of configurations 1 to 7 and an absorber film that absorbs EUV light formed on the substrate with a multilayer reflective film. ,
A reflective mask blank in which the shape of the reference mark is transferred to the absorber film.

(Structure 9)
A reflective mask having a substrate with a multilayer reflective film according to any one of configurations 1 to 7 and an absorber film pattern that absorbs EUV light formed on the substrate with a multilayer reflective film. ,
A reflective mask in which the shape of the reference mark is transferred to the absorber film pattern.

(Structure 10)
A method for manufacturing a semiconductor device, comprising a step of forming a transfer pattern on a semiconductor substrate using the reflective mask according to the configuration 9.

According to the present invention, a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, which can prevent the surface of the multilayer reflective film from being contaminated even when a reference mark is formed on the multilayer reflective film, And a method for manufacturing a semiconductor device can be provided. Further, it is possible to provide a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device, which can prevent the cleaning resistance of the substrate from deteriorating. Further, it is possible to provide a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device, which can shorten the time required for processing the reference mark.

It is a schematic diagram which shows the cross section of the substrate with a multilayer reflective film. It is a top view of the substrate with a multilayer reflective film, and is the enlarged view of the reference mark. FIG. 2 is a cross-sectional view taken along the line BB of the reference mark shown in FIG. It is sectional drawing of the substrate with the multilayer reflective film which the protrusion was formed substantially at the center of the reference mark. It is a top view which shows the reference mark and another example of a groove (or a protrusion). It is a TEM image which shows the cross section of the reference mark formed concave on the surface of the substrate with a multilayer reflective film. It is a schematic diagram which shows the cross section of the reflective mask blank. It is a schematic diagram which shows the manufacturing method of a reflective mask. The pattern transfer device is shown.

Hereinafter, embodiments of the present invention will be described in detail.
[Substrate with multilayer reflective film]
FIG. 1 is a schematic view showing a cross section of the substrate with a multilayer reflective film of the present embodiment.
As shown in FIG. 1, the substrate 10 with a multilayer reflective film includes a substrate 12, a multilayer reflective film 14 that reflects EUV light as exposure light, and a protective film 18 for protecting the multilayer reflective film 14. There is. A multilayer reflective film 14 is formed on the substrate 12, and a protective film 18 is formed on the multilayer reflective film 14.

In addition, in this specification, "on" of a substrate or a film includes not only the case of contacting the upper surface of the substrate or the film but also the case of not contacting the upper surface of the substrate or the film. That is, the term "above" the substrate or film includes the case where a new film is formed above the substrate or film, the case where another film is interposed between the substrate or film, and the like. .. Further, "on" does not necessarily mean the upper side in the vertical direction, but merely indicates the relative positional relationship between the substrate and the film.

<Board>
In the case of EUV exposure, the substrate 12 used for the substrate 10 with the multilayer reflective film of the present embodiment has a low heat within the range of 0 ± 5 ppb / ° C in order to prevent distortion of the absorber film pattern due to heat during exposure. Those having an expansion coefficient are preferably used. As a material having a low coefficient of thermal expansion in this range, for example, SiO _2- TiO _2- based glass, multi-component glass ceramics, or the like can be used.

The main surface on the side on which the transfer pattern of the substrate 12 (the absorber film pattern described later corresponds to this) is formed is preferably processed in order to increase the flatness. By increasing the flatness of the main surface of the substrate 12, the position accuracy and transfer accuracy of the pattern can be improved. For example, in the case of EUV exposure, the flatness is preferably 0.1 μm or less, more preferably 0.05 μm or less, particularly preferably 0.05 μm or less in the region of 132 mm × 132 mm on the main surface on the side where the transfer pattern of the substrate 12 is formed. It is preferably 0.03 μm or less. The main surface on the side opposite to the side on which the transfer pattern is formed is a surface fixed to the exposure apparatus by an electrostatic chuck, and the flatness is 1 μm or less, more preferably 0 in the 142 mm × 142 mm region. It is 5.5 μm or less, particularly preferably 0.03 μm or less. In the present specification, the flatness is a value representing the warp (deformation amount) of the surface indicated by TIR (Total Indicated Reading), and the plane defined by the least squares method with respect to the substrate surface is defined as the focal plane. It is the absolute value of the height difference between the highest position of the substrate surface above the plane and the lowest position of the substrate surface below the focal plane.

In the case of EUV exposure, the surface roughness of the main surface of the substrate 12 on the side where the transfer pattern is formed is preferably 0.1 nm or less in terms of root mean square roughness (RMS). The surface roughness can be measured with an atomic force microscope.

The substrate 12 preferably has high rigidity in order to prevent deformation of the film (multilayer reflective film 14 and the like) formed on the substrate 12 due to film stress. In particular, the substrate 12 preferably has a high Young's modulus of 65 GPa or more.

<Multilayer reflective film>
The substrate 10 with a multilayer reflective film includes a substrate 12 and a multilayer reflective film 14 formed on the substrate 12. The multilayer reflective film 14 is composed of, for example, a multilayer film in which elements having different refractive indexes are periodically laminated. The multilayer reflective film 14 has a function of reflecting EUV light.

In general, the multilayer reflective film 14 is formed by a thin film of a light element or a compound thereof (a high refractive index layer) which is a high refractive index material and a thin film of a heavy element or a compound thereof which is a low refractive index material (low refractive index layer). ) And are alternately laminated for about 40 to 60 cycles.
In order to form the multilayer reflective film 14, the high refractive index layer and the low refractive index layer may be laminated in this order for a plurality of cycles from the substrate 12 side. In this case, the laminated structure of one (high refractive index layer / low refractive index layer) has one cycle.
In order to form the multilayer reflective film 14, the low refractive index layer and the high refractive index layer may be laminated in this order for a plurality of cycles from the substrate 12 side. In this case, the laminated structure of one (low refractive index layer / high refractive index layer) has one cycle.

The uppermost layer of the multilayer reflective film 14, that is, the surface layer of the multilayer reflective film 14 opposite to the substrate 12, is preferably a high refractive index layer. When the high refractive index layer and the low refractive index layer are laminated in this order from the substrate 12 side, the uppermost layer becomes the low refractive index layer. However, when the low refractive index layer is the surface of the multilayer reflective film 14, the low refractive index layer is easily oxidized and the reflectance of the multilayer reflective film is reduced, so that the low refractive index layer is placed on the low refractive index layer. A high refractive index layer is formed. On the other hand, when the low refractive index layer and the high refractive index layer are laminated in this order from the substrate 12 side, the uppermost layer becomes the high refractive index layer. In that case, the uppermost high-refractive index layer becomes the surface of the multilayer reflective film 14.

In the present embodiment, the high refractive index layer may be a layer containing Si. The high refractive index layer may contain Si alone or a Si compound. The Si compound may contain Si and at least one element selected from the group consisting of B, C, N, and O. By using the layer containing Si as the high refractive index layer, a multilayer reflective film having excellent reflectance of EUV light can be obtained.

In the present embodiment, the low refractive index material is at least one element selected from the group consisting of Mo, Ru, Rh, and Pt, or at least selected from the group consisting of Mo, Ru, Rh, and Pt. Alloys containing one element can be used.

For example, as the multilayer reflective film 14 for EUV light having a wavelength of 13 to 14 nm, a Mo / Si multilayer film in which Mo films and Si films are alternately laminated for about 40 to 60 cycles can be preferably used. In addition, as the multilayer reflective film used in the EUV light region, for example, Ru / Si periodic multilayer film, Mo / Be periodic multilayer film, Mo compound / Si compound periodic multilayer film, Si / Nb periodic multilayer film, Si / Mo / Ru periodic multilayer films, Si / Mo / Ru / Mo periodic multilayer films, Si / Ru / Mo / Ru periodic multilayer films, and the like can be used. The material of the multilayer reflective film can be selected in consideration of the exposure wavelength.

The reflectance of such a multilayer reflective film 14 alone is, for example, 65% or more. The upper limit of the reflectance of the multilayer reflective film 14 is, for example, 73%. The thickness and period of the layers contained in the multilayer reflective film 14 can be selected so as to satisfy Bragg's law.

The multilayer reflective film 14 can be formed by a known method. The multilayer reflective film 14 can be formed by, for example, an ion beam sputtering method.

For example, when the multilayer reflective film 14 is a Mo / Si multilayer film, a Mo film having a thickness of about 3 nm is formed on the substrate 12 by using an ion beam sputtering method using a Mo target. Next, a Si film having a thickness of about 4 nm is formed using the Si target. By repeating such an operation, a multilayer reflective film 14 in which Mo / Si films are laminated for 40 to 60 cycles can be formed. At this time, the surface layer of the multilayer reflective film 14 on the opposite side of the substrate 12 is a layer containing Si (Si film). The thickness of the Mo / Si film in one cycle is 7 nm.

<Protective film>
The substrate 10 with a multilayer reflective film of the present embodiment may include a protective film 18 formed on the multilayer reflective film 14. The protective film 18 has a function of protecting the multilayer reflective film 14 when patterning or modifying the pattern of the absorber film. The protective film 18 is provided between the multilayer reflective film 14 and the absorber film described later.

Examples of the material of the protective film 18 include Ru, Ru- (Nb, Zr, Y, B, Ti, La, Mo, Co or Re) compound, Si- (Ru, Rh, Cr or B) compound, Si, Materials such as Zr, Nb, La, and B can be used. In addition, compounds to which nitrogen, oxygen or carbon are added can be used. Of these, when a material containing ruthenium (Ru) is applied, the reflectance characteristics of the multilayer reflective film become better. Specifically, the material of the protective film 18 is preferably Ru or a Ru- (Nb, Zr, Y, B, Ti, La, Mo, Co or Re) compound. The thickness of the protective film 18 is, for example, 1 nm to 5 nm. The protective film 18 can be formed by a known method. The protective film 18 can be formed by, for example, a magnetron sputtering method or an ion beam sputtering method.

The substrate 10 with a multilayer reflective film may further have a back surface conductive film on the main surface of the substrate 12 opposite to the side on which the multilayer reflective film 14 is formed. The back surface conductive film is used when the substrate 10 with the multilayer reflective film or the reflective mask blank is adsorbed by the electrostatic chuck.

The substrate 10 with a multilayer reflective film may have a base film formed between the substrate 12 and the multilayer reflective film 14. The base film is formed, for example, for the purpose of improving the smoothness of the surface of the substrate 12. The undercoat film is formed for the purpose of reducing defects, improving the reflectance of the multilayer reflective film, correcting the stress of the multilayer reflective film, and the like.

<Standard mark>
FIG. 2 is a plan view of the substrate 10 with a multilayer reflective film of the present embodiment.
As shown in FIG. 2, reference marks 20 that can be used as a reference for defect positions in defect information are formed in the vicinity of the four corners of the substantially rectangular substrate 10 with a multilayer reflective film. Although an example in which four reference marks 20 are formed is shown, the number of reference marks 20 is not limited to four, and may be three or less, or five or more.

In the substrate 10 with a multilayer reflective film shown in FIG. 2, the region inside the broken line A (region of 132 mm × 132 mm) is a pattern forming region in which an absorber film pattern is formed when a reflective mask is manufactured. The region outside the broken line A is the region where the absorber film pattern is not formed when the reflective mask is manufactured. The reference mark 20 is preferably formed in a region where the absorber membrane pattern is not formed, that is, a region outside the broken line A.

As shown in FIG. 2, the reference mark 20 has a substantially cross-shaped shape. The width W1 of one line of the reference mark 20 having a substantially cross shape is, for example, 1000 nm or more and 10 μm or less. The length L of one line of the reference mark 20 is, for example, 100 μm or more and 1500 μm or less. FIG. 2 shows an example of the reference mark 20 having a substantially cross-shaped shape, but the shape of the reference mark 20 is not limited to this. The shape of the reference mark 20 may be, for example, substantially L-shaped in a plan view.

As shown in FIG. 2, the reference mark 20 has a groove 21 at a substantially center. The shape of the groove 21 in a plan view is similar to or substantially similar to the shape of the reference mark 20. Specifically, the shape of the groove 21 in a plan view is a substantially cross shape. The width W2 of one line of the groove portion 21 having a substantially cross shape is preferably 200 nm or more and 10 μm or less, and more preferably 300 nm or more and 2000 nm or less. The width W2 of the groove 21 is smaller than the width W1 of the reference mark 20. The term "similar or substantially similar" as used herein includes not only geometrically similar shapes but also shapes that are not exactly geometrically similar but are similar as a whole.

FIG. 3 is a cross-sectional view taken along the line BB of the reference mark 20 shown in FIG. 2, and schematically shows the cross-sectional structure of the reference mark 20.
As shown in FIG. 3, in the substrate 10 with a multilayer reflective film of the present embodiment, when the cross section of the substrate 10 with a multilayer reflective film (cross section perpendicular to the main surface of the substrate 10 with a multilayer reflective film) is viewed, the reference mark is used. 20 is formed in a concave shape on the surface of the substrate 10 with a multilayer reflective film. The term "concave" as used herein means that when the cross section of the substrate 10 with a multilayer reflective film is viewed, the reference mark 20 is recessed downward from the surface of the substrate 10 with a multilayer reflective film, for example, in a stepped shape or a curved shape. It means that it is formed.

Further, a groove 21 is formed in a concave shape at substantially the center of the reference mark 20. The term "concave" as used herein means that when the cross section of the substrate 10 with the multilayer reflective film is viewed, the groove 21 is formed so as to be recessed downward from the surface 20a of the reference mark 20, for example, in a stepped shape or a curved shape. Means to be.

The surface layer 22 of the reference mark 20 may contain the same element as at least one element among the elements contained in the protective film 18. For example, the surface layer 22 of the reference mark 20 contains at least one element selected from the group consisting of Ru, Nb, Zr, Y, B, Ti, La, Mo, Co, Re, Si, Rh, and Cr. May be. The surface layer 22 of the reference mark 20 preferably contains ruthenium (Ru), which is the same element as the element contained in the protective film 18. The type of element contained in the surface layer 22 of the reference mark 20 can be specified by, for example, EDX (Energy Dispersive X-ray Analysis).

The surface layer 22 of the reference mark 20 may contain an oxide of the same element as at least one element among the elements contained in the protective film 18. For example, on the surface layer 22 of the reference mark 20, Ru, Ru- (Nb, Zr, Y, B, Ti, La, Mo, Co or Re) compound, Si- (Ru, Rh, Cr or B) compound, Si , Zr, Nb, La, and B may contain oxides of at least one element or compound selected from the group.

When the protective film 18 contains Ru or RuNb and the reference mark 20 is formed on the protective film 18, the surface layer 22 of the reference mark 20 may contain an oxide of Ru or RuNb. For example, the surface layer 22 of the reference mark 20 may contain at least one of RuO and RuNbO.

The “surface layer 22” of the reference mark 20 means, for example, a region from the surface of the reference mark 20 to a depth of 2 nm.

When the protective film 18 contains Ru or a Ru compound, the surface layer 14a of the multilayer reflective film 14 opposite to the substrate 12 is preferably a layer containing Si (Si film). This is because Ru and Si react with each other on the surface layer 22 of the reference mark 20 to form RuSi due to the heat generated when the reference mark 20 is laser-machined, so that the cleaning resistance of the substrate 10 with the multilayer reflective film is improved.

When the protective film 18 contains Ru or a Ru compound and the surface layer 14a of the multilayer reflective film 14 is a layer containing Si and the reference mark 20 is formed on the protective film 18, the surface layer 22 of the reference mark 20 May contain, for example, at least one of RuSi and RuSiO.

As shown in FIG. 3, at the bottom of the reference mark 20, a shrink region 24 in which at least a part of the plurality of films included in the multilayer reflective film 14 is contracted is formed. The bottom portion of the reference mark 20 means a region below the concave surface layer 22 and up to the upper surface of the substrate 12.

In the shrink region 24, the thickness of at least a part of the plurality of films contained in the multilayer reflective film 14 is contracted. For example, when the multilayer reflective film 14 is a Mo / Si multilayer film in which a Mo film having a thickness of 3 nm and a Si film having a thickness of 4 nm are periodically laminated, the thickness of the Mo / Si film in one cycle is 7 nm. is there. In the shrink region 24, for example, the thickness of the Mo / Si film in one cycle shrinks from 7 nm to 6 nm. In this case, since the thickness before shrinkage is 7 nm and the thickness after shrinkage is 6 nm, the shrinkage rate of the thickness of the multilayer reflective film 14 is about 86%. In the shrink region 24, the shrinkage rate of the thickness of the multilayer reflective film 14 is preferably 75% or more and 95% or less, and more preferably 80% or more and 90% or less.

In the shrink region 24, at least a part of the plurality of films included in the multilayer reflective film 14 is contracted, but the laminated structure of the multilayer reflective film 14 is maintained. The fact that the laminated structure of the multilayer reflective film 14 is maintained can be easily confirmed by, for example, a TEM image of a cross section of the substrate 10 with the multilayer reflective film.

As shown in FIG. 3, at least a part of the plurality of films included in the multilayer reflective film 14 is integrated with each other near the central portion of the bottom of the reference mark 20 and above the shrink region 24. A mixing region 26 is formed. In the mixing region 26, a plurality of films included in the multilayer reflective film 14 react with each other by the heat generated when the reference mark 20 is laser-machined and are integrated. For example, when the multilayer reflective film 14 is a Mo / Si multilayer film, the Mo film and the Si film react with each other in the mixing region 26 to generate MoSi.

The mixing region 26 is likely to be formed near the central portion of the bottom of the reference mark 20, but may be formed in a portion other than the central portion. The thickness of the mixing region is preferably 200 nm or less, more preferably 150 nm or less. The thickness of the mixing region 26 referred to here means the maximum value of the vertical thickness of the mixing region 26. Further, although FIG. 3 shows an example in which the mixing region 26 is formed, the mixing region 26 may not be formed depending on the laser processing conditions and the like.

In the mixing region 26, since the plurality of films included in the multilayer reflective film 14 are integrated, the laminated structure of the multilayer reflective film 14 is not maintained. The fact that the plurality of films included in the multilayer reflective film 14 are integrated can be easily confirmed by, for example, a TEM image of a cross section of the substrate 10 with the multilayer reflective film.

As shown in FIG. 3, the depth D1 of the reference mark 20 formed in a concave shape is preferably 30 nm or more and 50 nm or less. The depth D1 means the vertical distance from the surface of the substrate 10 with the multilayer reflective film to the deepest position of the bottom of the reference mark 20.

As shown in FIG. 3, the depth D2 of the concave groove portion 21 is preferably 20 nm or more, and more preferably 30 nm or more. The depth D2 means the vertical distance from the surface of the reference mark 20 to the deepest position of the bottom of the groove 21.

As shown in FIG. 3, the inclination angle θ of the concave reference mark 20 is preferably less than 25 degrees, more preferably 3 degrees or more and 10 degrees or less. The inclination angle θ means the angle formed by the extension line 22a of the surface layer 22 of the reference mark 20 and the surface 10a of the substrate 10 with the multilayer reflective film when the cross section of the reference mark 20 is viewed.

The method of forming the reference mark 20 is not particularly limited. The reference mark 20 can be formed, for example, by laser processing on the surface of the substrate 10 with a multilayer reflective film. The conditions of laser processing are as follows, for example.
Laser type (wavelength): Ultraviolet to visible light range. For example, a semiconductor laser having a wavelength of 405 nm.
Laser output: 1-120 mW
Scan speed: 0.1 to 20 mm / s
Pulse frequency: 1-100 MHz
Pulse width: 3ns to 1000s

The laser used for laser processing the reference mark 20 may be a continuous wave or a pulse wave. When a pulse wave is used, the width W1 of the reference mark 20 can be made smaller than that of the continuous wave even if the depth D1 of the reference mark 20 is about the same. Further, when a pulse wave is used, it is possible to increase the inclination angle θ of the reference mark 20 as compared with a continuous wave. Therefore, when a pulse wave is used, it is possible to form a reference mark 20 which has a higher contrast than a continuous wave and is easily detected by a defect inspection device or an electron beam drawing device.

The groove portion 21 can be formed at the same time when the reference mark 20 is formed by laser processing. For example, when the reference mark 20 is formed by laser processing, a part of the bottom of the reference mark 20 is removed by heat. As a result, a concave groove 21 is formed at the bottom of the reference mark 20. The groove 21 can be formed by adjusting the laser output and / or the pulse frequency.

FIG. 4 is a cross-sectional view of the substrate 10 with a multilayer reflective film in which the protrusion 23 is formed substantially at the center of the reference mark 20.
As shown in FIG. 4, a protrusion 23 may be formed at the substantially center of the reference mark 20 instead of the groove 21 described above. The protrusion 23 projects upward from the surface of the reference mark 20. The shape of the protrusion 23 in a plan view is similar to or substantially similar to the shape of the reference mark 20, and is substantially cross-shaped. The width W2 of one line of the protrusion 23 is preferably 200 nm or more and 10 μm or less, and more preferably 300 nm or more and 2000 nm or less. The width W2 of the protrusion 23 is smaller than the width W1 of the reference mark 20. The height H1 of the protrusion 23 is 15 nm or more, preferably 20 nm or more, and more preferably 30 nm or more. The height H1 means the vertical distance from the surface of the reference mark 20 to the highest position of the top of the protrusion 23. The depth D1 of the reference mark 20 shown in FIG. 4 is preferably 30 nm or more and 50 nm or less.

The protrusion 23 can be formed at the same time when the reference mark 20 is formed by laser processing. For example, when the reference mark 20 is formed by laser processing, a part of the bottom portion of the reference mark 20 moves and protrudes upward. As a result, a convex protrusion 23 is formed on the bottom of the reference mark 20. The protrusion 23 can be formed by adjusting the laser output and / or the pulse frequency.

As described above, the bottom of the reference mark 20 is a shrink region 24 in which at least a part of the plurality of films contained in the multilayer reflective film 14 is shrunk, and at least one of the plurality of films contained in the multilayer reflective film 14. Includes a mixing region 26 in which some membranes are integrated with each other. As shown in FIG. 3, when the groove portion 21 is formed at the bottom of the reference mark 20, the groove portion 21 includes a relatively large amount of the mixing region 26 as compared with the bottom portion of the reference mark 20 excluding the groove portion 21. As shown in FIG. 4, when the protrusion 23 is formed on the bottom of the reference mark 20, the protrusion 23 has a relatively large mixing region 26 as compared with the bottom of the reference mark 20 excluding the protrusion 23. Including. “Comparing a relatively large amount of the mixing region” means that, for example, the ratio of the thickness of the mixing region 26 in the film thickness direction of the groove 21 or the protrusion 23 is the ratio of the thickness of the mixing region 26 to the bottom of the reference mark 20 other than the groove 21 or the protrusion 23. It is said to be larger than the ratio of the thickness of the mixing region 26.

FIG. 5 is a plan view showing another example of the reference mark 20 and the groove 21 (or protrusion 23).
As shown in FIG. 5A, when the shape of the reference mark 20 is a substantially cross shape, the shape of the groove portion 21 or the protrusion 23 is a substantially cross shape similar to or substantially similar to the reference mark 20.
As shown in FIG. 5B, when the shape of the reference mark 20 is substantially I-shaped, the shape of the groove portion 21 or the protrusion 23 is substantially I-shaped, which is similar to or substantially similar to the reference mark 20.
As shown in FIG. 5C, when the shape of the reference mark 20 is substantially L-shaped, the shape of the groove portion 21 or the protrusion 23 is substantially L-shaped which is similar to or substantially similar to the reference mark 20.
As shown in FIG. 5D, when the shape of the reference mark 20 is substantially circular, the shape of the groove portion 21 or the protrusion 23 is substantially circular, which is similar to or substantially similar to the reference mark 20.

FIG. 6 is a TEM image showing a cross section of the reference mark 20 formed in a concave shape on the surface of the substrate 10 with a multilayer reflective film. The shape of the reference mark 20 shown in FIG. 6 in a plan view is substantially circular. A convex protrusion 23 is formed on the bottom of the reference mark 20. The shape of the protrusion 23 in a plan view is a substantially circular shape similar to or substantially similar to the reference mark 20.

As shown in FIG. 6, at the bottom of the reference mark 20, a shrink region 24 in which at least a part of the plurality of films included in the multilayer reflective film 14 is contracted is formed. A mixing region 26 in which at least a part of the plurality of films included in the multilayer reflective film 14 is integrated with each other is formed near the central portion of the bottom of the reference mark 20 and above the shrink region 24. There is. The protrusion 23 includes a relatively large amount of the mixing region 26 as compared with the bottom of the reference mark 20 excluding the protrusion 23.

The reference mark 20 can be formed on the surface of the multilayer reflective film 14 by laser processing. In this case, the reference mark 20 may be formed on the surface of the multilayer reflective film 14, and then the protective film 18 may be formed on the surface of the reference mark 20.
The reference mark 20 can also be formed by laser processing on the surface of the protective film 18 after forming the protective film 18 on the surface of the multilayer reflective film 14.

The reference mark 20 can be used as, for example, an FM (fiducial mark). FM is a mark used as a reference of defect coordinates when drawing a pattern by an electron beam writing apparatus. The FM usually has a cross shape as shown in FIG.

For example, when the reference mark 20 is formed on the substrate 10 with the multilayer reflective film, the coordinates of the reference mark 20 and the coordinates of the defect are acquired with high accuracy by the defect inspection device. Next, an absorber film is formed on the protective film 18 of the substrate 10 with the multilayer reflective film. Next, a resist film is formed on the absorber film. A hard mask film (or etching mask film) may be formed between the absorber film and the resist film. The concave reference mark 20 formed on the surface of the substrate 10 with the multilayer reflective film is transferred to the absorber film and the resist film, or is transferred to the absorber film, the hard mask film and the resist film. Then, when drawing a pattern on the resist film by the electron beam drawing apparatus, the reference mark 20 transferred to the resist film is used as the FM which is the reference of the defect position.

Therefore, the reference mark 20 formed on the substrate 10 with the multilayer reflective film needs to have a high contrast that can be detected by the defect inspection device. Examples of the defect inspection device include a mask / substrate / blank defect inspection device “MAGICSM7360” manufactured by Lasertech Co., Ltd. for EUV exposure having an inspection light source wavelength of 266 nm, and an EUV manufactured by KLA-Tencor Co., Ltd. having an inspection light source wavelength of 193 nm. -There are mask / blank defect inspection devices "Teron 600 series, for example, Teron 610", and ABI (Actinic Blank Inspection) devices whose inspection light source wavelength is the same as the exposure light source wavelength of 13.5 nm. Further, the reference mark 20 transferred to the absorber film and the resist film on the absorber film needs to have a high contrast that can be detected by an electron beam drawing apparatus. Further, the reference mark 20 preferably has a high contrast that can be detected by the coordinate measuring instrument. The coordinate measuring instrument can convert the coordinates of the defect acquired by the defect inspection device into the reference coordinates of the electron beam drawing device. Therefore, the user who is provided with the substrate 10 with the multilayer reflective film can easily and highly accurately collate the defect position specified by the defect inspection device with the drawing data based on the reference mark 20.

By using the reference mark 20 as FM, the defect coordinates can be managed with high accuracy. For example, by detecting FM with an electron beam drawing device, defect coordinates can be converted into the coordinate system of the electron beam drawing device. Then, for example, the drawing data of the pattern drawn by the electron beam drawing apparatus can be corrected so that the defect is arranged below the absorber film pattern. This can reduce the effect of defects on the final produced reflective mask (this technique is called the defect mitigation process).

The reference mark 20 can also be used as an AM (alignment mark). AM is a mark that can be used as a reference for defect coordinates when a defect inspection device inspects a defect on the multilayer reflective film 14. However, AM is not directly used when drawing a pattern by an electron beam lithography system. The AM can be in the shape of a circle, a quadrangle, a cross, or the like.

When AM is formed on the multilayer reflective film 14, it is preferable to form FM on the absorber film on the multilayer reflective film 14 and partially remove the absorber film on AM. AM can be detected by a defect inspection device and a coordinate measuring instrument. FM can be detected by a coordinate measuring instrument and an electron beam drawing device. By managing the coordinates relative to each other between AM and FM, the defect coordinates can be managed with high accuracy.

[Reflective mask blank]
FIG. 7 is a schematic view showing a cross section of the reflective mask blank 30 of the present embodiment. The reflective mask blank 30 of the present embodiment can be manufactured by forming the absorber film 28 that absorbs EUV light on the protective film 18 of the substrate 10 with the multilayer reflective film described above.

The absorber film 28 has a function of absorbing EUV light, which is exposure light. That is, the difference between the reflectance of the multilayer reflective film 14 for EUV light and the reflectance of the absorber film 28 for EUV light is a predetermined value or more. For example, the reflectance of the absorber membrane 28 to EUV light is 0.1% or more and 40% or less. There may be a predetermined phase difference between the light reflected by the multilayer reflection film 14 and the light reflected by the absorber film 28. In this case, the absorber film 28 in the reflective mask blank 30 may be called a phase shift film.

It is preferable that the absorber film 28 has a function of absorbing EUV light and can be removed by etching or the like. It is preferable that the absorber film 28 can be etched by dry etching with a chlorine (Cl) -based gas or a fluorine (F) -based gas. As long as the absorber membrane 28 has such a function, the material of the absorber membrane 28 is not particularly limited.

The absorber membrane 28 may be a single layer or may have a laminated structure. When the absorber film 28 has a laminated structure, a plurality of films made of the same material may be laminated, or a plurality of films made of different materials may be laminated. When the absorber membrane 28 has a laminated structure, the material and composition may change stepwise and / or continuously in the thickness direction of the membrane.

The material of the absorber membrane 28 is preferably, for example, tantalum (Ta) alone or a material containing Ta. The materials containing Ta include, for example, a material containing Ta and B, a material containing Ta and N, a material containing Ta and B, and at least one of O and N, a material containing Ta and Si, and Ta and Si. A material containing N, a material containing Ta and Ge, a material containing Ta, Ge and N, a material containing Ta and Pd, a material containing Ta and Ru, a material containing Ta and Ti, and the like.

The absorber membrane 28 is, for example, a simple substance of Ni, a material containing Ni, a simple substance of Cr, a material containing Cr, a simple substance of Ru, a material containing Ru, a simple substance of Pd, a material containing Pd, a simple substance of Mo, and a material containing Mo. It may contain at least one selected from the group consisting of.

The thickness of the absorber membrane 28 is preferably 30 nm to 100 nm.
The absorber membrane 28 can be formed by a known method, for example, a magnetron sputtering method, an ion beam sputtering method, or the like.

In the reflective mask blank 30 of the present embodiment, the resist film 32 may be formed on the absorber film 28. FIG. 7 shows this aspect. A resist pattern can be formed by drawing and exposing a pattern on the resist film 32 with an electron beam drawing apparatus and then undergoing a developing step. A pattern can be formed on the absorber film 28 by performing dry etching on the absorber film 28 using this resist pattern as a mask.

The resist film 32 above the reference mark 20 may be locally removed so that the concave reference mark 20 formed on the surface of the substrate 10 with the multilayer reflective film can be easily detected by the electron beam drawing apparatus. The mode of removal is not particularly limited. Further, for example, the resist film 32 and the absorber film 28 above the reference mark 20 may be removed.

In the reflective mask blank 30 of the present embodiment, a hard mask film may be formed between the absorber film 28 and the resist film 32. The hard mask film is used as a mask when patterning the absorber film 28. The hard mask film and the absorber film 28 are formed of materials having different etching selectivity. When the material of the absorber film 28 contains tantalum or a tantalum compound, the material of the hard mask film preferably contains chromium or a chromium compound. The chromium compound preferably comprises Cr and at least one selected from the group consisting of N, O, C, and H.

[Reflective mask]
The reflective mask 40 of the present embodiment can be manufactured by using the reflective mask blank 30 of the present embodiment. Hereinafter, a method for manufacturing the reflective mask 40 will be described.

FIG. 8 is a schematic view showing a method of manufacturing the reflective mask 40.
As shown in FIG. 8, first, the substrate 12, the multilayer reflective film 14 formed on the substrate 12, the protective film 18 formed on the multilayer reflective film 14, and the protective film 18 are formed. A reflective mask blank 30 having the absorber film 28 is prepared (FIG. 8A). Next, a resist film 32 is formed on the absorber film 28 (FIG. 8 (b)). A pattern is drawn on the resist film 32 by an electron beam drawing apparatus, and a resist pattern 32a is formed by further undergoing a developing and rinsing process (FIG. 8C).

The absorber film 28 is dry-etched using the resist pattern 32a as a mask. As a result, the portion of the absorber film 28 that is not covered by the resist pattern 32a is etched to form the absorber film pattern 28a (FIG. 8 (d)).

As the etching gas, for example, chlorine-based gas such as Cl ₂ , SiCl ₄ , CHCl ₃ , CCl ₄ , mixed gas containing these chlorine-based gas and O ₂ in a predetermined ratio, chlorine-based gas and He are predetermined. Mixed gas containing in proportion, mixed gas containing chlorine gas and Ar in a predetermined proportion, CF ₄ , CHF ₃ , C ₂ F ₆ , C ₃ F ₆ , C ₄ F ₆ , C ₄ F ₈ , CH ₂ F ₂ , CH ₃ F, C ₃ F ₈ , SF ₆ , F and other fluorine-based gases, mixed gas containing these fluorine-based gas and O ₂ in a predetermined ratio, mixed gas containing fluorine-based gas and He in a predetermined ratio, A mixed gas or the like containing a fluorine-based gas and Ar in a predetermined ratio can be used.

After the absorber membrane pattern 28a is formed, the resist pattern 32a is removed, for example, with a resist stripping solution. After removing the resist pattern 32a, the reflective mask 40 of the present embodiment is obtained by undergoing a wet cleaning step using an acidic or alkaline aqueous solution (FIG. 8 (e)).

[Manufacturing method of semiconductor devices]
A transfer pattern can be formed on the semiconductor substrate by lithography using the reflective mask 40 of the present embodiment. This transfer pattern has a shape in which the absorber film pattern 28a of the reflective mask 40 is transferred. A semiconductor device can be manufactured by forming a transfer pattern on a semiconductor substrate with a reflective mask 40.

A method of transferring a pattern to the resisted semiconductor substrate 56 by EUV light will be described with reference to FIG.

FIG. 9 shows the pattern transfer device 50. The pattern transfer device 50 includes a laser plasma X-ray source 52, a reflective mask 40, a reduction optical system 54, and the like. An X-ray reflection mirror is used as the reduction optical system 54.

The pattern reflected by the reflective mask 40 is usually reduced to about 1/4 by the reduction optical system 54. For example, a wavelength band of 13 to 14 nm is used as the exposure wavelength, and the optical path is preset so as to be in a vacuum. Under such conditions, the EUV light generated by the laser plasma X-ray source 52 is incident on the reflective mask 40. The light reflected by the reflective mask 40 is transferred onto the resisted semiconductor substrate 56 via the reduction optical system 54.

The light incident on the reflective mask 40 is absorbed by the absorber film and is not reflected at a certain portion of the absorber film pattern 28a. On the other hand, the light incident on the portion without the absorber film pattern 28a is reflected by the multilayer reflection film 14.

The light reflected by the reflective mask 40 is incident on the reduction optical system 54. The light incident on the reduction optical system 54 forms a transfer pattern on the resist layer on the resisted semiconductor substrate 56. By developing the exposed resist layer, a resist pattern can be formed on the resisted semiconductor substrate 56. By etching the semiconductor substrate 56 using the resist pattern as a mask, for example, a predetermined wiring pattern can be formed on the semiconductor substrate. A semiconductor device is manufactured through such a process and other necessary steps.

According to the substrate 10 with a multilayer reflective film of the present embodiment, it is possible to prevent the surface of the multilayer reflective film 14 from being contaminated by dust generated when the reference mark 20 is laser-processed. This is considered to be because the surface of the multilayer reflective film 14 is not removed by laser ablation.

Further, since the groove portion 21 or the protrusion portion 23 is formed substantially at the center of the reference mark 20, the contrast of the reference mark 20 with respect to the electron beam or the inspection light can be maintained high. Therefore, even when the inclination angle θ of the reference mark 20 is small, the reference mark 20 can be detected by the electron beam drawing apparatus or the defect inspection apparatus.

According to the substrate 10 with the multilayer reflective film of the present embodiment, it is possible to prevent the material of the multilayer reflective film 14 from being exposed on the surface of the reference mark 20. Therefore, it is possible to manufacture the substrate 10 with a multilayer reflective film having excellent cleaning resistance, the reflective mask blank 30, and the reflective mask 40.

According to the substrate 10 with a multilayer reflective film of the present embodiment, it is possible to shorten the time required for processing the reference mark as compared with the case where the FIB method is used.

Hereinafter, more specific examples of the present invention will be described.
(Example 1)
A SiO _2- TiO ₂ system glass substrate (6 inch square, thickness 6.35 mm) was prepared. The end face of this glass substrate was chamfered and ground, and further rough-polished with a polishing liquid containing cerium oxide abrasive grains. The glass substrate after these treatments was set in the carrier of the double-sided polishing apparatus, and precision polishing was performed under predetermined polishing conditions using an alkaline aqueous solution containing colloidal silica abrasive grains as the polishing liquid. After the precision polishing was completed, the glass substrate was cleaned. The surface roughness of the main surface of the obtained glass substrate was 0.10 nm or less in terms of root mean square roughness (RMS). The flatness of the main surface of the obtained glass substrate was 30 nm or less in the measurement region 132 mm × 132 mm.

A back surface conductive film made of CrN was formed on the back surface of the above glass substrate by a magnetron sputtering method under the following conditions.
(Conditions): Cr target, Ar + N ₂ gas atmosphere (Ar: N ₂ = 90%: 10%), film composition (Cr: 90 atomic%, N: 10 atomic%), film thickness 20 nm

A multilayer reflective film was formed by periodically laminating a Mo film / Si film on the main surface opposite to the side on which the back surface conductive film of the glass substrate was formed.

Specifically, the Mo target and the Si target were used, and the Mo film and the Si film were alternately laminated on the substrate by ion beam sputtering (using Ar). The thickness of the Mo film is 2.8 nm. The thickness of the Si film is 4.2 nm. The thickness of the Mo / Si film in one cycle is 7.0 nm. Such Mo / Si films were laminated for 40 cycles, and finally a Si film was formed with a film thickness of 4.0 nm to form a multilayer reflective film.

A protective film containing a Ru compound was formed on the multilayer reflective film. Specifically, a protective film made of a RuNb film is formed on a multilayer reflective film by DC magnetron sputtering in an Ar gas atmosphere using a RuNb target (Ru: 80 atomic%, Nb: 20 atomic%). did. The thickness of the protective film was 2.5 nm.

A reference mark was formed on the protective film by laser processing.
The conditions for laser machining were as follows.
Laser type: Semiconductor laser with a wavelength of 405 nm Laser output: 30 mW (continuous wave)
Spot size: 430 nmφ

The shape and dimensions of the reference mark were as follows.
Shape: Approximately cross-shaped Depth D1: 40nm
Width W1: 2 μm
Length L: 1mm
Tilt angle θ: 5.7 degrees

A groove was formed at the substantially center of the reference mark. The shape and dimensions of the groove were as follows.
Shape: Approximately cross-shaped (similar to the reference mark)
Depth D2: 30 nm
Width W2: 450 nm
Length L: 1mm

A cross section of the reference mark was taken with a transmission electron microscope (TEM). As a result, at the bottom of the concave reference mark, a shrink region in which at least a part of the plurality of films contained in the multilayer reflective film was shrunk was formed. Further, in the groove portion at the bottom of the reference mark and its vicinity, above the shrink region, a mixing region in which at least a part of the plurality of films contained in the multilayer reflective film is integrated with each other was formed. .. In the shrink region, the thickness of the one-cycle Mo / Si film contained in the multilayer reflective film was reduced from 7.0 nm to 6.0 nm. In addition, the ratio of the thickness of the mixing region in the film thickness direction of the groove portion was larger than the ratio of the thickness of the mixing region at the bottom of the reference mark other than the groove portion.
The surface layer of the reference mark was analyzed by EDX (Energy Dispersive X-ray Analysis). As a result, the surface layer of the shrink region of the reference mark contained Ru and Nb, which are the same elements as those contained in the protective film. In addition, since oxygen (O) was also detected, it is considered that RuNbO is contained in the surface layer of the reference mark. Further, since the surface layer of the mixing region including the groove portion of the reference mark contained Ru, Nb, Si, Mo, and O, it is considered that RuNbO, RuSi, MoSi, and the like were contained.

A defect inspection device (ABI, manufactured by Lasertec Co., Ltd.) was used to inspect the substrate with a multilayer reflective film for defects. In the defect inspection, the position of the defect was identified with reference to the reference mark formed in a concave shape on the protective film. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

An absorber film was formed on the protective film of the substrate with a multilayer reflective film to manufacture a reflective mask blank. Specifically, an absorber film composed of a laminated film of TaBN (thickness 56 nm) and TaBO (thickness 14 nm) was formed by DC magnetron sputtering. The TaBN film was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and N ₂ gas using a TaB target. The TaBO membrane was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and O ₂ gas using a TaB target.

The concave reference mark transferred to the absorber film was detected by an electron beam drawing apparatus. As a result, it was possible to detect the reference mark, and it was confirmed that the reference mark transferred to the absorber film had sufficient contrast to be detectable by the electron beam drawing apparatus.

Defect inspection on the absorber membrane was performed using a defect inspection device (M8350, manufactured by Lasertec Co., Ltd.). In the defect inspection, the position of the defect was identified with reference to the reference mark transferred concavely on the absorber membrane. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

A resist film was formed on the absorber film of the reflective mask blank produced above. A pattern was drawn on the resist film based on the defect information obtained by the defect inspection using an electron beam drawing apparatus. After drawing the pattern, a predetermined development process was performed to form a resist pattern on the absorber film.

A pattern was formed on the absorber membrane using the resist pattern as a mask. Specifically, the upper TaBO film was dry-etched with a fluorine-based gas (CF ₄ gas), and then the lower TaBN film was dry-etched with a chlorine-based gas (Cl ₂ gas).

By removing the resist pattern remaining on the absorber film pattern with hot sulfuric acid, the reflective mask according to Example 1 was obtained. When the reflective mask thus obtained is set in an exposure apparatus and pattern transfer is performed on a semiconductor substrate on which a resist film is formed, good pattern transfer can be performed without any defect of the transfer pattern caused by the reflective mask. it can.

(Example 2)
A SiO _2- TiO ₂ system glass substrate (6 inch square, thickness 6.35 mm) was prepared. The end face of this glass substrate was chamfered and ground, and further rough-polished with a polishing liquid containing cerium oxide abrasive grains. The glass substrate after these treatments was set in the carrier of the double-sided polishing apparatus, and precision polishing was performed under predetermined polishing conditions using an alkaline aqueous solution containing colloidal silica abrasive grains as the polishing liquid. After the precision polishing was completed, the glass substrate was cleaned. The surface roughness of the main surface of the obtained glass substrate was 0.10 nm or less in terms of root mean square roughness (RMS). The flatness of the main surface of the obtained glass substrate was 30 nm or less in the measurement region 132 mm × 132 mm.

A back surface conductive film made of CrN was formed on the back surface of the above glass substrate by a magnetron sputtering method under the following conditions.
(Conditions): Cr target, Ar + N ₂ gas atmosphere (Ar: N ₂ = 90%: 10%), film composition (Cr: 90 atomic%, N: 10 atomic%), film thickness 20 nm

A multilayer reflective film was formed by periodically laminating a Mo film / Si film on the main surface opposite to the side on which the back surface conductive film of the glass substrate was formed.

Specifically, the Mo target and the Si target were used, and the Mo film and the Si film were alternately laminated on the substrate by ion beam sputtering (using Ar). The thickness of the Mo film is 2.8 nm. The thickness of the Si film is 4.2 nm. The thickness of the Mo / Si film in one cycle is 7.0 nm. Such Mo / Si films were laminated for 40 cycles, and finally a Si film was formed with a film thickness of 4.0 nm to form a multilayer reflective film.

A protective film containing a Ru compound was formed on the multilayer reflective film. Specifically, a protective film made of a RuNb film is formed on a multilayer reflective film by DC magnetron sputtering in an Ar gas atmosphere using a RuNb target (Ru: 80 atomic%, Nb: 20 atomic%). did. The thickness of the protective film was 2.5 nm.

A reference mark was formed on the protective film by laser processing.
The conditions for laser machining were as follows.
Laser type: Semiconductor laser with a wavelength of 405 nm Laser output: 60 mW (pulse wave: 500 kHz)
Spot size: 430 nmφ

The shape and dimensions of the reference mark were as follows.
Shape: Approximately cross-shaped Depth D1: 40nm
Width W1: 2 μm
Length L: 1mm
Tilt angle θ: 5.9 degrees

A protrusion was formed at substantially the center of the reference mark. The shape and dimensions of the protrusions were as follows.
Shape: Approximately cross-shaped (similar to the reference mark)
Height H1: 20 nm
Width W2: 300 nm
Length L: 1mm

A cross section of the reference mark was taken with a transmission electron microscope (TEM). As a result, at the bottom of the concave reference mark, a shrink region in which at least a part of the plurality of films contained in the multilayer reflective film was shrunk was formed. Further, a mixing region in which at least a part of the plurality of films included in the multilayer reflective film is integrated with each other is formed above the protrusion at the bottom of the reference mark and its vicinity. It was. In the shrink region, the thickness of the one-cycle Mo / Si film contained in the multilayer reflective film was reduced from 7.0 nm to 6.0 nm. In addition, the ratio of the thickness of the mixing region in the film thickness direction of the protrusion was larger than the ratio of the thickness of the mixing region at the bottom of the reference mark other than the protrusion.
The surface layer of the reference mark was analyzed by EDX (Energy Dispersive X-ray Analysis). As a result, the surface layer of the shrink region of the reference mark contained Ru and Nb, which are the same elements as those contained in the protective film. In addition, since oxygen (O) was also detected, it is considered that RuNbO is contained in the surface layer of the reference mark. Further, since the surface layer of the mixing region including the protrusion of the reference mark contained Ru, Nb, Si, Mo, and O, it is considered that RuNbO, RuSi, MoSi, and the like were contained.

A defect inspection device (ABI, manufactured by Lasertec Co., Ltd.) was used to inspect the substrate with a multilayer reflective film for defects. In the defect inspection, the position of the defect was identified with reference to the reference mark formed in a concave shape on the protective film. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

An absorber film was formed on the protective film of the substrate with a multilayer reflective film to manufacture a reflective mask blank. Specifically, an absorber film composed of a laminated film of TaBN (thickness 56 nm) and TaBO (thickness 14 nm) was formed by DC magnetron sputtering. The TaBN film was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and N ₂ gas using a TaB target. The TaBO membrane was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and O ₂ gas using a TaB target.

The concave reference mark transferred to the absorber film was detected by an electron beam drawing apparatus. As a result, it was possible to detect the reference mark, and it was confirmed that the reference mark transferred to the absorber film had sufficient contrast to be detectable by the electron beam drawing apparatus.

Defect inspection on the absorber membrane was performed using a defect inspection device (M8350, manufactured by Lasertec Co., Ltd.). In the defect inspection, the position of the defect was identified with reference to the reference mark transferred concavely on the absorber membrane. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

A resist film was formed on the absorber film of the reflective mask blank produced above. A pattern was drawn on the resist film based on the defect information obtained by the defect inspection using an electron beam drawing apparatus. After drawing the pattern, a predetermined development process was performed to form a resist pattern on the absorber film.

A pattern was formed on the absorber membrane using the resist pattern as a mask. Specifically, the upper TaBO film was dry-etched with a fluorine-based gas (CF ₄ gas), and then the lower TaBN film was dry-etched with a chlorine-based gas (Cl ₂ gas).

By removing the resist pattern remaining on the absorber film pattern with hot sulfuric acid, the reflective mask according to Example 2 was obtained. When the reflective mask thus obtained is set in an exposure apparatus and pattern transfer is performed on a semiconductor substrate on which a resist film is formed, good pattern transfer can be performed without any defect of the transfer pattern caused by the reflective mask. it can.

(Example 3)
A SiO _2- TiO ₂ system glass substrate (6 inch square, thickness 6.35 mm) was prepared. The end face of this glass substrate was chamfered and ground, and further rough-polished with a polishing liquid containing cerium oxide abrasive grains. The glass substrate after these treatments was set in the carrier of the double-sided polishing apparatus, and precision polishing was performed under predetermined polishing conditions using an alkaline aqueous solution containing colloidal silica abrasive grains as the polishing liquid. After the precision polishing was completed, the glass substrate was cleaned. The surface roughness of the main surface of the obtained glass substrate was 0.10 nm or less in terms of root mean square roughness (RMS). The flatness of the main surface of the obtained glass substrate was 30 nm or less in the measurement region 132 mm × 132 mm.

A back surface conductive film made of CrN was formed on the back surface of the above glass substrate by a magnetron sputtering method under the following conditions.
(Conditions): Cr target, Ar + N ₂ gas atmosphere (Ar: N ₂ = 90%: 10%), film composition (Cr: 90 atomic%, N: 10 atomic%), film thickness 20 nm

A multilayer reflective film was formed by periodically laminating a Mo film / Si film on the main surface opposite to the side on which the back surface conductive film of the glass substrate was formed.

Specifically, the Mo target and the Si target were used, and the Mo film and the Si film were alternately laminated on the substrate by ion beam sputtering (using Ar). The thickness of the Mo film is 2.8 nm. The thickness of the Si film is 4.2 nm. The thickness of the Mo / Si film in one cycle is 7.0 nm. Such Mo / Si films were laminated for 40 cycles, and finally a Si film was formed with a film thickness of 4.0 nm to form a multilayer reflective film.

A reference mark was formed by laser processing on a multilayer reflective film made of a Mo / Si multilayer film.
The conditions for laser machining were as follows.
Laser type: Semiconductor laser with a wavelength of 405 nm Laser output: 30 mW (continuous wave)
Spot size: 430 nmφ

The shape and dimensions of the reference mark were as follows.
Shape: Approximately cross-shaped Depth D1: 40nm
Width W1: 2 μm
Length L: 1mm
Tilt angle θ: 5.7 degrees

A groove was formed at the substantially center of the reference mark. The shape and dimensions of the groove were as follows.
Shape: Approximately cross-shaped (similar to the reference mark)
Depth D2: 30 nm
Width W2: 450 nm
Length L: 1mm

A cross section of the reference mark was taken with a transmission electron microscope (TEM). As a result, at the bottom of the concave reference mark, a shrink region in which at least a part of the plurality of films contained in the multilayer reflective film was shrunk was formed. Further, in the groove portion at the bottom of the reference mark and its vicinity, above the shrink region, a mixing region in which at least a part of the plurality of films contained in the multilayer reflective film is integrated with each other was formed. .. In the shrink region, the thickness of the one-cycle Mo / Si film contained in the multilayer reflective film was reduced from 7.0 nm to 6.0 nm. In addition, the ratio of the thickness of the mixing region in the film thickness direction of the groove portion was larger than the ratio of the thickness of the mixing region at the bottom of the reference mark other than the groove portion.
The surface layer of the reference mark was analyzed by EDX (Energy Dispersive X-ray Analysis). As a result, the surface layer of the reference mark contained Mo and Si, which are the same elements as those contained in the multilayer reflective film. Further, since oxygen (O) was also detected, it is considered that SiO or MoSiO is contained in the surface layer of the reference mark.

After forming a reference mark on the surface of the multilayer reflective film, a protective film containing a Ru compound was formed on the multilayer reflective film. Specifically, a protective film made of a RuNb film is formed on a multilayer reflective film by DC magnetron sputtering in an Ar gas atmosphere using a RuNb target (Ru: 80 atomic%, Nb: 20 atomic%). did. The thickness of the protective film was 2.5 nm.

A defect inspection device (ABI, manufactured by Lasertec Co., Ltd.) was used to inspect the substrate with a multilayer reflective film for defects. In the defect inspection, the position of the defect was identified with reference to the reference mark formed in a concave shape on the multilayer reflective film. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

An absorber film was formed on the protective film of the substrate with a multilayer reflective film to manufacture a reflective mask blank. Specifically, an absorber film composed of a laminated film of TaBN (thickness 56 nm) and TaBO (thickness 14 nm) was formed by DC magnetron sputtering. The TaBN film was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and N ₂ gas using a TaB target. The TaBO membrane was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and O ₂ gas using a TaB target.

The concave reference mark transferred to the absorber film was detected by an electron beam drawing apparatus. As a result, it was possible to detect the reference mark, and it was confirmed that the reference mark transferred to the absorber film had sufficient contrast to be detectable by the electron beam drawing apparatus.

Defect inspection on the absorber membrane was performed using a defect inspection device (M8350, manufactured by Lasertec Co., Ltd.). In the defect inspection, the position of the defect was identified with reference to the reference mark transferred concavely on the absorber membrane. As a result, the number of defects was reduced as compared with the case where the reference mark was formed by the conventional FIB method.

A resist film was formed on the absorber film of the reflective mask blank produced above. A pattern was drawn on the resist film based on the defect information obtained by the defect inspection using an electron beam drawing apparatus. After drawing the pattern, a predetermined development process was performed to form a resist pattern on the absorber film.

A pattern was formed on the absorber membrane using the resist pattern as a mask. Specifically, the upper TaBO film was dry-etched with a fluorine-based gas (CF ₄ gas), and then the lower TaBN film was dry-etched with a chlorine-based gas (Cl ₂ gas).

By removing the resist pattern remaining on the absorber film pattern with hot sulfuric acid, the reflective mask according to Example 3 was obtained. When the reflective mask thus obtained is set in an exposure apparatus and pattern transfer is performed on a semiconductor substrate on which a resist film is formed, good pattern transfer can be performed without any defect of the transfer pattern caused by the reflective mask. it can.

(Comparative Example 1)
A SiO _2- TiO ₂ system glass substrate (6 inch square, thickness 6.35 mm) was prepared. The end face of this glass substrate was chamfered and ground, and further rough-polished with a polishing liquid containing cerium oxide abrasive grains. The glass substrate after these treatments was set in the carrier of the double-sided polishing apparatus, and precision polishing was performed under predetermined polishing conditions using an alkaline aqueous solution containing colloidal silica abrasive grains as the polishing liquid. After the precision polishing was completed, the glass substrate was cleaned. The surface roughness of the main surface of the obtained glass substrate was 0.10 nm or less in terms of root mean square roughness (RMS). The flatness of the main surface of the obtained glass substrate was 30 nm or less in the measurement region 132 mm × 132 mm.

A back surface conductive film made of CrN was formed on the back surface of the above glass substrate by a magnetron sputtering method under the following conditions.
(Conditions): Cr target, Ar + N ₂ gas atmosphere (Ar: N ₂ = 90%: 10%), film composition (Cr: 90 atomic%, N: 10 atomic%), film thickness 20 nm

A multilayer reflective film was formed by periodically laminating a Mo film / Si film on the main surface opposite to the side on which the back surface conductive film of the glass substrate was formed.

Specifically, the Mo target and the Si target were used, and the Mo film and the Si film were alternately laminated on the substrate by ion beam sputtering (using Ar). The thickness of the Mo film is 2.8 nm. The thickness of the Si film is 4.2 nm. The thickness of the Mo / Si film in one cycle is 7.0 nm. Such Mo / Si films were laminated for 40 cycles, and finally a Si film was formed with a film thickness of 4.0 nm to form a multilayer reflective film.

A protective film containing a Ru compound was formed on the multilayer reflective film. Specifically, a protective film made of a RuNb film is formed on a multilayer reflective film by DC magnetron sputtering in an Ar gas atmosphere using a RuNb target (Ru: 80 atomic%, Nb: 20 atomic%). did. The thickness of the protective film was 2.5 nm.

A reference mark was formed on the protective film by the FIB method.
The conditions of the FIB were as follows.
Acceleration voltage: 50kV
Beam current value: 20pA

The shape and dimensions of the reference mark were as follows.
Shape: Approximately cross-shaped Depth D1: 40nm
Width W1: 2 μm
Length L: 1mm
Tilt angle θ: 86 degrees

No grooves or protrusions were formed on the bottom of the reference mark.

The surface layer of the reference mark was analyzed by EDX (Energy Dispersive X-ray Analysis). As a result, the surface layer of the reference mark did not contain Ru and Nb, which are the same elements as the elements contained in the protective film, and Mo and Si were detected. Since no protective film remained on the surface layer of the reference mark, it is probable that the material of the multilayer reflective film was exposed.

A defect inspection device (ABI, manufactured by Lasertec Co., Ltd.) was used to inspect the substrate with a multilayer reflective film for defects. In the defect inspection, the position of the defect was identified with reference to the reference mark formed in a concave shape on the protective film. As a result, the number of defects was significantly increased as compared with Examples 1 to 3. It is presumed that the cause was that the surface of the multilayer reflective film was contaminated by the dust generated when the reference mark was processed by FIB.

An absorber film was formed on the protective film of the substrate with a multilayer reflective film to manufacture a reflective mask blank. Specifically, an absorber film composed of a laminated film of TaBN (thickness 56 nm) and TaBO (thickness 14 nm) was formed by DC magnetron sputtering. The TaBN film was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and N ₂ gas using a TaB target. The TaBO membrane was formed by reactive sputtering in a mixed gas atmosphere of Ar gas and O ₂ gas using a TaB target.

Defect inspection on the absorber membrane was performed using a defect inspection device (M8350, manufactured by Lasertec Co., Ltd.). In the defect inspection, the position of the defect was identified with reference to the reference mark transferred concavely on the absorber membrane. As a result, the number of defects was significantly increased as compared with Examples 1 to 3.

A resist film was formed on the absorber film of the reflective mask blank produced above. A pattern was drawn on the resist film based on the defect information obtained by the defect inspection using an electron beam drawing apparatus. After drawing the pattern, a predetermined development process was performed to form a resist pattern on the absorber film.

A pattern was formed on the absorber membrane using the resist pattern as a mask. Specifically, the upper TaBO film was dry-etched with a fluorine-based gas (CF ₄ gas), and then the lower TaBN film was dry-etched with a chlorine-based gas (Cl ₂ gas).

By removing the resist pattern remaining on the absorber film pattern with hot sulfuric acid, the reflective mask according to Comparative Example 1 was obtained. When the reflective mask thus obtained is set in an exposure apparatus and pattern transfer is performed on a semiconductor substrate on which a resist film is formed, the number of defects in the transfer pattern due to the reflective mask increases as compared with Examples 1 to 3. , It is difficult to perform good pattern transfer.

10 Substrate with multi-layer reflective film 12 Substrate 14 Multi-layer reflective film 18 Protective film 20 Reference mark 21 Groove 23 Projection 24 Shrink area 26 Mixing area 28 Absorber film 28a Absorber film pattern 30 Reflective mask blank 32 Resist film 40 Reflective mask 50 Pattern transfer device

Claims (10)

A substrate with a multilayer reflective film including a substrate and a multilayer reflective film formed on the substrate that reflects EUV light.
A reference mark formed in a concave shape on the surface of the substrate with a multilayer reflective film is provided.
The reference mark has a groove or a protrusion at a substantially center, and has a groove or a protrusion.
A substrate with a multilayer reflective film, characterized in that the shape of the groove or protrusion in a plan view is similar to or substantially similar to the shape of the reference mark. The bottom of the reference mark is a shrink region in which at least a part of the plurality of films included in the multilayer reflective film is shrunk, and at least a part of the films included in the multilayer reflective film are formed on each other. Including an integrated mixing area
The substrate with a multilayer reflective film according to claim 1, wherein the groove or protrusion contains a relatively large amount of the mixing region as compared with the bottom of the reference mark excluding the groove or protrusion. The substrate with a multilayer reflective film according to claim 1 or 2, wherein the depth of the groove or the height of the protrusion is 20 nm or more. The substrate with a multilayer reflective film according to any one of claims 1 to 3, wherein the width of the groove or the protrusion is 200 nm or more and 10 μm or less. The substrate with a multilayer reflective film according to any one of claims 1 to 4, wherein the depth of the reference mark is 30 nm or more and 50 nm or less. Including a protective film formed on the multilayer reflective film,
The substrate with a multilayer reflective film according to any one of claims 1 to 5, wherein the reference mark is formed on the surface of the protective film. The substrate with a multilayer reflective film according to any one of claims 1 to 6, wherein the surface layer of the multilayer reflective film on the opposite side to the substrate is a layer containing Si. A reflective mask having a substrate with a multilayer reflective film according to any one of claims 1 to 7 and an absorber film that absorbs EUV light and is formed on the substrate with a multilayer reflective film. It ’s blank,
A reflective mask blank in which the shape of the reference mark is transferred to the absorber film. A reflective type having a substrate with a multilayer reflective film according to any one of claims 1 to 7 and an absorber film pattern that absorbs EUV light formed on the substrate with a multilayer reflective film. It ’s a mask,
A reflective mask in which the shape of the reference mark is transferred to the absorber film pattern. A method for manufacturing a semiconductor device, comprising a step of forming a transfer pattern on a semiconductor substrate by using the reflective mask according to claim 9.