JPWO2019065069A1 - Parts for measuring equipment - Google Patents

Abstract

The measuring device component 100 of the present disclosure includes a base 1 made of ceramics and having a flow path 11 through which gas flows, and a porous ceramics provided inside the flow path 11 so as to divide the flow path 11 into a plurality of parts. A filter unit 2 composed of the same, and a pair of electrodes 3 for forming a capacitance provided on the base portion 1 so as to sandwich the filter unit 2 are provided, and a surface of the filter unit 2 on the flow path 11 is provided. The surface of the ceramic has a groove 6 extending in a direction intersecting the traveling direction of the flow path 11.

Description

The present disclosure relates to parts for measuring devices.

As a measuring device component used for measuring the amount of particulate matter in the exhaust gas emitted from a diesel engine, for example, those described in Japanese Patent Application Laid-Open No. 2014-159783 (hereinafter referred to as Patent Document 1). It has been known. The measuring device component described in Patent Document 1 is provided so as to sandwich a filter divided into a plurality of cells by a porous partition wall and at least one cell as a measuring cell. It has a pair of electrodes.

The measuring device component of an example of the present disclosure is a filter made of ceramics and having a base through which a gas flows, and a porous ceramics provided inside the flow path so as to divide the flow path into a plurality of parts. A portion and a pair of electrodes for forming a capacitance provided on the base portion so as to sandwich the filter portion are provided, and the progress of the flow path on the surface of the filter portion facing the flow path. It has a groove extending in a direction intersecting the direction.

Further, the measuring device component of the present disclosure is composed of a base made of ceramics and having a flow path for gas flowing inside, and a porous ceramics provided inside the flow path so as to divide the flow path into a plurality of parts. The base is provided with a filter portion and a pair of electrodes for forming a capacitance provided on the base portion so as to sandwich the filter portion, and the base portion is an outer surface located along the traveling direction of the flow path. The outer surface has a plurality of grooves extending in a direction intersecting the traveling direction of the flow path.

It is a perspective view which shows an example of the component for a measuring apparatus. It is sectional drawing which shows the vertical cross section of the component for measuring apparatus shown in FIG. It is sectional drawing which shows the cross section of the component for measuring apparatus shown in FIG. It is a schematic diagram which shows the wiring pattern of the electrode in the component for measuring apparatus shown in FIG. It is a schematic diagram which shows the wiring pattern of the electrode in the modification of the component for a measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the cross section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is a schematic diagram which shows the wiring pattern of the electrode in the modification of the component for a measuring apparatus. It is a schematic diagram which shows the wiring pattern of the electrode in the modification of the component for a measuring apparatus. It is a schematic diagram which shows the manufacturing method of the part for a measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. (A) is a perspective view of a modified example of a component for a measuring device, (b) is a cross-sectional view showing a CC line cross section (longitudinal cross section) of (a), and (c) is a D of (a). It is sectional drawing which shows the −D line cross section (vertical cross section). It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the vertical cross-section of the modification of the component for measuring apparatus. It is sectional drawing which shows the cross section of the modification of the component for measuring apparatus. It is sectional drawing which shows the cross section of the component for measuring apparatus of this disclosure. It is sectional drawing which shows the vertical cross section in XX line of the component for measuring apparatus shown in FIG. It is sectional drawing which shows another example of the component for a measuring apparatus. It is sectional drawing which shows another example of the component for a measuring apparatus. It is a perspective view which shows an example of the component for a measuring apparatus of this disclosure. It is a perspective view which shows the other example of a component for a measuring apparatus. It is a perspective view which shows the other example of a component for a measuring apparatus. It is sectional drawing which shows another example of the component for a measuring apparatus. It is sectional drawing which shows another example of the component for a measuring apparatus.

Hereinafter, the measuring device component 100 according to the embodiment of the present disclosure will be described with reference to the drawings.

FIG. 1 is a perspective view showing the configuration of the measuring device component 100. As shown in FIG. 1, the measuring device component 100 includes a base portion 1 having a flow path 11 inside, and a filter section 2 provided inside the flow path 11. The measuring device component 100 further includes a pair of electrodes 3 for forming a capacitance on the base 1. The measuring device component 100 is used, for example, for measuring the amount of particulate matter in the exhaust gas emitted from a diesel engine.

The base 1 is a member for forming a flow path 11 through which gas flows. The base 1 is made of an insulating ceramic such as alumina. The base 1 has, for example, one or more flow paths 11 inside. In the measuring device component 100 shown in FIG. 1, the base 1 has a rectangular parallelepiped outer shape and has two flow paths 11 inside. The flow path 11 extends along the longitudinal direction of the main surface of the base 1. Each of the flow paths 11 is divided into a plurality of sections by the filter unit 2, and each of the divided spaces is also referred to as a flow path 11. The flow path 11 is open to one side surface of the base 1 and a side surface at a position facing the side surface. The two flow paths 11 are arranged in the thickness direction of the base 1. The length of the base 1 in the longitudinal direction of the main surface can be set to 40 mm, the length (width) in the lateral direction can be set to 10 mm, and the thickness of the base 1 can be set to 5 mm. Further, the width of the flow path 11 (the flow path 11 between the filter units 2) formed by being separated by the filter unit 2 can be set to 1.2 mm, and the distance between the bottom surface and the ceiling surface can be set to 1.2 mm. The length of the flow path 11 is equal to the length of the base 1 and can be set to 40 mm.

The filter unit 2 is a member for collecting particulate matter in the gas. As shown in FIG. 2, the filter unit 2 is provided inside the flow path 11. As shown in FIG. 3, in the measuring device component 100 of the present embodiment, the filter portion 2 has a plate shape and is provided along the longitudinal direction of the base portion 1 (along the length direction of the flow path 11). Has been done. A plurality of filter portions 2 are provided so as to divide the flow path 11 of the base portion 1 into a plurality of regions. The measuring device component 100 of the present embodiment is provided with four filter units 2 for each flow path 11. Each of the four filter units 2 is arranged in parallel. The filter unit 2 is made of porous ceramics. Examples of the porous ceramics include porous alumina. Since the filter unit 2 is made of porous alumina, the gas flowing through the flow path 11 can pass through the filter unit 2. At this time, the filter unit 2 can collect (deposit) a part of the particulate matter contained in the gas.

In the measuring device component 100, the wall surface of the flow path 11 of the base portion 1 may be denser than the surface of the filter portion 2. This makes it difficult for the particulate matter to be deposited on the wall surface of the flow path 11 of the base portion 1, and makes it easier for the particulate matter to be deposited on the surface of the filter portion 2. As a result, the accumulation of the particulate matter can be easily concentrated on the filter unit 2, so that the linearity between the accumulated amount of the particulate matter and the measured value can be improved. As a result, the measurement accuracy of the measuring device component 100 can be improved.

It can be confirmed, for example, by the following method that the wall surface of the flow path 11 of the base portion 1 is denser than the surface of the filter portion 2. Specifically, the wall surface of the flow path 11 of the base portion 1 and the surface of the filter portion 2 are observed using a scanning electron microscope (SEM). Then, the obtained SEM image is subjected to image processing to determine the porosity of the surface. As a result, the one with the smaller porosity can be regarded as more dense. The porosity of the wall surface of the flow path 11 of the base 1 can be set to, for example, 3% or less. The porosity on the surface of the filter unit 2 can be set to, for example, 40 to 70%. The wall surface of the flow path 11 referred to here means the entire inner surface of the base portion 1 of the flow path 11 facing the gas. That is, the ceiling surface and the bottom surface are also included in the wall surface referred to here.

By setting the porosity of the wall surface of the flow path 11 of the base 1 to 3% or less, it is possible to prevent particulate matter from entering the inside of the base 1. As a result, the possibility that the particulate matter adheres to the electrode 3 can be reduced, so that there is a risk that the capacitance between the electrodes 3 cannot be measured correctly due to the particulate matter adhering to the electrode 3. Can be reduced. As a result, the measurement accuracy of the measuring device component 100 can be further improved.

The base portion 1 and the filter portion 2 are integrally formed. Since the base portion 1 and the filter portion 2 are integrally formed, the long-term reliability of the measuring device component 100 can be improved. Specifically, when the base portion 1 and the filter portion 2 are separately formed and then joined, for example, peeling may occur from the interface between the base portion 1 and the filter portion 2. In particular, when a bonding material or the like is used for bonding, deterioration of the bonding material may make it impossible to correctly fix the filter portion 2 to the base portion 1. On the other hand, by integrally forming (firing) the base portion 1 and the filter portion 2, it is possible to reduce the possibility of deterioration occurring from the interface between the base portion 1 and the filter portion 2.

In particular, since the base 1 and the filter 2 are made of the same ceramics, the coefficients of thermal expansion of the base 1 and the filter 2 can be brought close to each other. As a result, the long-term reliability of the measuring device component 100 under the heat cycle can be improved. The term "consisting of the same ceramics" as used herein means that the main components (components occupying 80% by mass or more) of the ceramics constituting the base portion 1 and the filter portion 2 are the same.

In the measuring device component 100, the base portion 1 and the filter portion 2 are made of alumina. Alumina is preferable in that it can be produced at low cost and the porosity of the surface can be easily adjusted as shown below.

The base portion 1 having a surface having a porosity of 3% or less and the filter portion 2 having a surface having a porosity of about 40 to 70% can be integrally formed by, for example, the following method. Specifically, for the portion to be the base 1, a ceramic paste containing 93% by mass of alumina powder and 7% by mass of a resin binder is used. Further, for the portion to be the filter portion 2, a ceramic paste containing 55% by mass of alumina powder, 38% by mass of a pore-forming material and 7% by mass of a resin binder is used. These ceramic pastes are processed into a green sheet having a predetermined shape by using the doctor blade method. At this time, the electrode 3 for forming the capacitance can be formed by printing the conductive paste on the green sheet. Then, these green sheets are pressure-laminated using a uniaxial press. The filter portion 2 and the base portion 1 having the above-mentioned porosity can be formed by firing at 1500 ° C. after processing the surface as necessary.

The dimensions of the filter portion 2 are, for example, 1 such that the length along the width direction of the base 1 is 0.3 mm and the length along the thickness direction of the base 1 is equal to the distance between the bottom surface and the ceiling surface of the flow path 11. The length of the base 1 along the length direction can be set to .2 mm and 40 mm.

The electrode 3 is a member for forming a capacitance. As shown in FIG. 2, the electrodes 3 are provided in pairs so as to sandwich the filter portion 2 in the base portion 1. More specifically, when a plurality of flow paths 11 are provided, the electrodes 3 are provided so as to sandwich the filter unit 2 located in each flow path 11. The electrode 3 may be provided so as to cover the plurality of filter portions 2 so as to cover the plurality of filter portions 2, or may be provided so as to correspond to each of the filter portions 2. Then, as shown in FIG. 2, when two flow paths 11 are provided in the vertical direction as in the measuring device component 100 of the present embodiment, the electrode 3 is located above the upper flow path 11. It may be located between the upper flow path 11 and the lower flow path 11 and below the lower flow path 11. The electrode 3 located between the upper flow path 11 and the lower flow path 11 can form a capacitance between the upper electrode 3 and the upper flow path 11 and also can form a capacitance. Capacitance can also be formed with the lower electrode 3 of the lower flow path 11.

A capacitance is formed between the pair of electrodes 3 that sandwich the filter portion 2. When the particulate matter is collected in the filter unit 2, the capacitance between the pair of electrodes 3 changes. By detecting this change in capacitance with an external detection device, the amount of particulate matter collected in the filter unit 2 can be measured.

In the measuring device component 100, the electrode 3 is embedded in the base 1. As a result, the possibility that the electrode 3 is affected by corrosion due to gas can be reduced. Further, since the possibility that particulate matter or the like adheres to the surface of the electrode 3 can be reduced, the measurement accuracy of the measuring device component 100 can be improved. In the measuring device component 100 of the present embodiment, the electrode 3 is provided (embedded) inside the base 1, but the present invention is not limited to this. Specifically, the position where the electrode 3 is provided may be, for example, the outer surface of the base 1 (a surface other than the wall surface of the flow path 11).

As shown in FIG. 4, in the measuring device component 100, the electrode 3 has, for example, a linear wiring pattern and is provided along the filter portion 2. By providing the electrode 3 along the filter unit 2 in this way, the linearity between the amount of particulate matter collected in the filter unit 2 and the change in the capacitance between the electrodes 3 is improved. be able to. This is because since the electrode 3 is provided along the filter portion 2, it is possible to reduce the change in capacitance due to the particulate matter adhering to other than the filter portion 2 (for example, the wall surface of the flow path 11). Is. The shape of the electrode 3 when viewed in a plan view is not limited to a linear shape, and may be, for example, a circular shape or a rectangular shape.

Further, by forming the electrode 3 in a linear wiring pattern, the resistance value can be increased as compared with the case where the electrode 3 has a circular shape or a rectangular shape. Therefore, it can be made to function as a heater by applying a high voltage to the electrode 3. As a result, the particulate matter collected in the filter unit 2 can be removed by heating.

Further, when the electrode 3 is heated, a direct current may be passed or an alternating current may be passed. In particular, by passing an alternating current, the migration that occurs in the electrode 3 can be reduced, so that the long-term reliability of the measuring device component can be improved.

In particular, as in the example shown in FIG. 5, the electrode 3 has a linear wiring pattern and is provided in a region of the base portion 1 that sandwiches the filter portion 2 and a region that does not sandwich the filter portion 2, and is viewed in a plan view. Occasionally, the portion of the electrode 3 located in the region not sandwiching the filter portion 2 may be narrower than the portion located in the region sandwiching the filter portion 2. As a result, the width of the portion of the electrode 3 located in the region sandwiching the filter portion 2 is secured to form a good capacitance between the electrodes 3, and the portion of the electrode 3 located in the region not sandwiching the filter portion. The resistance value can be increased by narrowing the width of. As a result, it is possible to effectively function as a heater while effectively functioning as an electrode 3 for forming a capacitance.

In the examples shown in FIGS. 4 and 5, each of the pair of electrodes 3 sandwiching the filter portion 2 has a meandering shape in which the ends of the portions provided along the respective filter portions 2 are connected to each other. It is a single linear wiring pattern. The end of one of the electrodes is drawn out to the outer surface of the base 1, and each of the pair of electrodes 3 is a system of wiring. On the other hand, in the examples shown in FIGS. 11 and 12, each of the pair of electrodes 3 is composed of two meander-shaped linear wiring patterns, and has two wiring systems. In the example shown in FIG. 11, the two wiring patterns are arranged side by side in the width direction of the flow path 11, and in the example shown in FIG. 12, the two wiring patterns are arranged side by side in the length direction of the flow path 11. ing.

In this way, if each of the pair of electrodes 3 arranged so as to sandwich the filter portion 2 has two wiring systems, the electrodes 3 of one system detect particulate matter and the other system. Particulate matter collected by the electrode 3 can be removed. Therefore, it is possible to continuously detect the particulate matter without stopping the detection of the particulate matter in order to remove the particulate matter. In the examples shown in FIGS. 11 and 12, each of the pair of electrodes 3 arranged so as to sandwich the filter portion 2 has two wiring systems, but since it may be a plurality of systems, three or more systems are required. It may be wiring.

As the electrode 3, for example, a metal material such as platinum or tungsten can be used. When the electrode 3 has a linear wiring pattern, for example, the width can be set to 2 mm, the length can be set to 38 mm, and the thickness can be set to 30 μm.

In the measuring device component 100 of the above-described embodiment, the base portion 1 has a shape having a flow path 11 inside, but the present invention is not limited to this. Specifically, for example, as shown in FIG. 6, a space is divided between a pair of bases 1 which are plate-shaped members made of ceramics and are juxtaposed so that their main surfaces face each other, and a pair of bases 1. A filter portion 2 made of porous ceramics provided so as to form a flow path, and a pair of electrodes for forming a capacitance provided on each of the pair of base portions 1 and provided so as to sandwich the filter portion 2. 3 may be provided, and the opposing main surfaces of the pair of base portions 1 may be denser than the surface of the filter portion 2. In the measuring device component 100 of another embodiment, the flow path 11 is formed by dividing the space between the base portion 1 and the base portion 1 by the filter portion 2. By flowing a gas through the flow path 11, the particulate matter is collected by the filter unit 2, and the amount of the particulate matter can be measured by detecting the change in the capacitance between the electrodes 3. Even in such a measuring device component 100, the measurement accuracy can be improved in the same manner as in the above-mentioned measuring device component 100.

More specifically, in the measuring device component 100 shown in FIG. 6, three bases 1 are provided side by side with two spaces in between, and six filter units 2 are provided in each of the two spaces. It is provided. The number of bases 1 may be two or three or more, and the number of filter parts 2 can be changed as appropriate.

In the measuring device component 100 shown in FIG. 6, the filter portion 2 also serves as a side wall, but a base portion 1 in contact with the filter portion 2 may be provided as a side wall outside the outer filter portion 2. This is the same as that in the measuring device component 100 shown in FIG. 2, in which the outer filter portion 2 is arranged so as to be in contact with the side wall of the base portion 1. By doing so, the rigidity of the measuring device component 100 is improved, and the exposed area of the filter portion 2 having a relatively low strength can be reduced, so that deformation due to thermal stress and damage due to external force can be suppressed. It becomes highly reliable. Further, all the wall surfaces facing the flow path 11 are the filter portions 2, and the collection efficiency is higher and the sensitivity is higher.

Further, in the measuring device component 100 shown in FIG. 1, the end of the flow path 11 is open, but the present invention is not limited to this. For example, as shown in FIG. 7, the end portion of the flow path 11 may be partially sealed by the sealing portion 4. In particular, one end of the flow path 11 is partially open, and a portion of the other end facing the open portion of one end is sealed. It is preferable that one end is partially sealed and the portion of the other end facing the sealed portion of one end is open.

As a result, the gas flowing inside the flow path 11 can easily pass through the filter unit 2, so that the filter unit 2 can easily collect particulate matter. As a result, the measurement accuracy of the measuring device component 100 can be improved. In FIG. 7, the gas flow is indicated by an arrow.

Further, as the sealing portion 4, for example, a resin material such as a fluororesin can be used. Further, the other sealing portion 4 is preferably made of the same ceramics as the filter portion 2 or the base portion 1. As a result, the difference in thermal expansion between the filter portion 2 or the base portion 1 and the sealing portion 4 can be reduced, so that long-term reliability under a heat cycle can be improved.

Further, it is preferable that the filter portion 2 is made of ceramics and is integrally formed (fired) together with the base portion 1 and the sealing portion 4. As a result, it is possible to reduce the possibility of deterioration occurring from the interface between the sealing portion 4 and the base portion 1 or the sealing portion 4 and the filter portion 2.

The measuring device component 100 shown in FIGS. 8 to 10 has a plurality of filters 2 having different degrees of porousness. Higher value-added items such as measuring device parts 100 that can know the particle size distribution of particulate matter and measuring device parts 100 that can continuously collect particulate matter for a long time and have a long life. can do.

Specifically, in the example shown in FIG. 8, the filter unit 2 made of porous ceramics has three types of filter units 2a, 2b, and 2c having different pore sizes and pore diameters. In the example shown in FIG. 8, it has a first filter portion 2a having a relatively large pore diameter, a third filter portion 2c having a small pore diameter, and a second filter portion 2b having a pore diameter intermediate between them. ing.

Since the particles have a plurality of filter portions 2a, 2b, 2c having different pore diameters, the particulate matter collected by the respective filter portions 2a, 2b, 2c has different average particle sizes. .. Therefore, the particle size distribution of the particulate matter collected from the capacitance detected by the electrodes 3 sandwiching the plurality of filter portions 2a, 2b, and 2c having different pore diameters can be known. For example, the exhaust gas containing the particulate matter. It is possible to estimate the combustion state of the engine that discharges gas and the state of the PM filter located upstream of the measuring device component 100. The measuring device component 100 can measure water or a gas such as butane gas in addition to the particulate matter.

Further, in the example shown in FIG. 8, the plurality of filter portions 2a, 2b, and 2c having different pore diameters are arranged in the order of the size of the pore diameter. Specifically, in the example shown in FIG. 8, the filter unit 2 has three stages of spaces (flow paths 11) arranged in the vertical direction of the drawing, and the first filter unit 2a is arranged in the upper stage, and the middle stage. A second filter unit 2b is arranged in, and a third filter unit 2c is arranged in the lower stage. That is, the filter portions 2 having the same pore diameter are arranged in a row in each stage. When arranged in this way, the electrodes 3 sandwiching the filter portions 2 having the same pore diameter can be arranged side by side, and these can be combined into one as in the example shown in FIG.

The type of pore diameter of the filter unit 2 is not limited to three, and may be two or four or more. Further, in the example shown in FIG. 8, the filter portions 2 having the same pore diameter are arranged in a row in the horizontal direction, but may be arranged in a row in the vertical direction. It may be arranged randomly, but it is preferable to arrange them in a row as described above.

The pore diameter referred to here is the average pore diameter. For the pore diameter, an SEM image of the surface or cross section of the filter unit 2 may be taken, and the average pore diameter may be calculated for the pores within the range of the SEM image by image analysis. The SEM magnification is 100 times, and the SEM image with a field of view of 1.0 mm × 1.3 mm may be used.

The pore diameter of the filter unit 2 is, for example, 1 μm to 60 μm. When the filter unit 2 has three types of filter units 2a, 2b, and 2c having different pore diameters as in the above example, for example, the pore diameter of the first filter unit 2a is 10 μm to 60 μm, and the second filter unit 2a. The pore diameter of the filter portion 2b may be 5 μm to 30 μm, and the pore diameter of the third filter portion 2c may be 1 μm to 15 μm.

Further, in the examples shown in FIGS. 9 and 10, the filter unit 2 made of porous ceramics has two types of filter units 2d and 2e having different porosities. In the examples shown in FIGS. 9 and 10, a fourth filter unit 2d having a relatively large porosity and a fifth filter unit 2e having a small porosity are provided. Then, in a cross-sectional view perpendicular to the length direction of the flow path 11, the porosity of the filter unit 2 located on the outside is larger than the porosity of the filter unit 2 located on the inside. In a cross-sectional view perpendicular to the length direction of the flow path 11, the fourth filter unit 2d is arranged on the outside and the fifth filter unit 2e is arranged on the inside. In the example shown in FIG. 9, the fourth filter unit 2d is arranged on the outside in the vertical direction, and the fifth filter unit 2e is arranged on the inside. Three stages of space (flow path 11) are arranged in the vertical direction of the drawing, a fourth filter unit 2d is arranged in the upper and lower spaces (flow path 11), and the fourth filter portion 2d is arranged in the middle space (flow path 11). A fifth filter unit 2e is arranged. In the example shown in FIG. 10, the fourth filter unit 2d is arranged on the outside in the left-right direction of the drawing, and the fifth filter unit 2e is arranged on the inside. Three stages of spaces (flow paths 11) are arranged in the vertical direction, and six filter units 2 are arranged in the horizontal direction in each space. Of these six filter units 2, two on the left and right are the fourth filter unit 2d, and two located between them are the fifth filter unit 2e.

When the gas containing the particulate matter flows through the space (flow path 11) in the measuring device component 100, it flows through the central part of the space (the inner region in the cross-sectional view perpendicular to the length direction of the flow path 11). The flow rate of the gas tends to be larger than the flow rate of the gas flowing through the outer peripheral portion of the space (the outer region in the cross-sectional view perpendicular to the length direction of the flow path 11). Therefore, the inner filter portion 2 collects more particulate matter than the outer filter portion 2, and the particulate matter is clogged faster. If the particulate matter is clogged quickly, the frequency of regeneration for removing the particulate matter by heating with a heater increases, so that the measuring device component 100 also deteriorates quickly.

On the other hand, as described above, in the cross-sectional view perpendicular to the length direction of the flow path, the porosity of the filter unit 2 (fourth filter unit 2d) located on the outside is the filter unit 2 located on the inside. If it is larger than the porosity of the (fifth filter unit 2e), the gas easily flows toward the filter unit 2 (fourth filter unit 2d) having a large porosity, and the cross section perpendicular to the length direction of the flow path. , The gas flow rate difference depending on the position becomes small. Therefore, since only the inner filter portion 2 is not quickly clogged with the particulate matter, the particulate matter can be continuously collected for a long time, and the measuring device component 100 has a long life.

In FIGS. 9 and 10, the pore ratios of the filter unit 2 (fourth filter unit 2d) located on the outer side in the vertical direction and the outer side in the horizontal direction are different from those of the filter unit 2 (fifth filter unit) located on the inner side, respectively. Although it is larger than the pore ratio of 2e), the pore ratio of the filter unit 2 located on the outer side in the vertical and horizontal directions and the outer peripheral portion in the cross section, which is a combination of these, is on the inner side in the vertical and horizontal directions and the central portion in the cross section. It may be larger than the pore ratio of the located filter unit 2. When the base portion 1 and the filter portion 2 are alternately arranged in the vertical direction, the fourth filter portion 2d is arranged on the outer side in the vertical direction and the fifth filter portion 2d is arranged on the inner side as in the example shown in FIG. The structure in which the filter portion 2e of the above is arranged can be easily manufactured by a manufacturing method as described later.

Examples of the method for measuring the porosity for comparing the porosity of the filter unit 2 include a mercury intrusion method (JIS standard R1655: 2003), image analysis of an SEM image, and the like. Image analysis of the SEM image can be performed by taking an SEM image of the cross section of the filter unit 2 and calculating the area ratio of the pores within the range of the SEM image by image analysis. For example, the magnification of SEM is 100 times, and the SEM image with a field of view of 1.0 mm × 1.3 mm may be used.

When the porosity of the filter unit 2 is 40 to 70%, the porosities of the filter unit 2d having a relatively large porosity and the filter unit 2e having a small porosity are 50 to 70% and 40 to 60, respectively. %And it is sufficient.

The method for manufacturing the parts for the measuring device includes a step of preparing a plurality of first ceramic green sheets 12, a step of preparing a plurality of second ceramic green sheets 22, and an electrode layer 32 on the first ceramic green sheet 12. The step of forming the through hole 112 in the second ceramic green sheet 22, the first ceramic green sheet 12 in which the electrode layer 32 was formed, and the second ceramic green in which the through hole 112 was formed. It is characterized by including a step of laminating the sheets 22 to form the laminated body 102 and a step of firing the laminated body 102.

According to such a manufacturing method, it is possible to manufacture the above-mentioned measuring device component 100 in which a dense base portion 1 made of ceramics and a filter portion 2 made of porous ceramics are integrally formed. ..

FIG. 13 is a schematic view showing a method of manufacturing parts for a measuring device for each process. First, as in the example shown in FIG. 13A, a plurality of first ceramic green sheets 12 and a plurality of second ceramic green sheets 22 are prepared. The first ceramic green sheet 12 is a portion that is sintered to become the base portion 1 in the subsequent firing step, and the second ceramic green sheet 22 is a portion that also becomes the filter portion 2. The filter portion 2 is made of porous ceramics, whereas the base portion 1 is made of dense ceramics. Therefore, the second ceramic green sheet 22 has more pores (increased porosity) than the first ceramic green sheet 12 when sintered in a later firing step. Specifically, the second ceramic green sheet 22 contains a large amount of components that become pores when sintered in the firing step, as compared with the first ceramic green sheet 12. Specifically, those containing a large amount of organic binder components, those containing a pore-forming material, and the like. Alternatively, the amount of the sintering aid component is small in order to reduce the sinterability and increase the pores.

It is preferable to use a pore-forming material because it is easy to adjust the pore diameter and porosity. The pore-forming material is in the form of particles that are burnt down in the subsequent firing step. Examples of the pore-forming material include acrylic resin beads (methacrylic acid ester-based copolymer), carbon powder, and crystalline cellulose. The particle size of the pore-forming material may be 1 to 1.2 times the pore diameter of the filter unit 2. In the case of producing the filter portion 2 having a pore diameter of 1 μm to 60 μm as described above, a pore-forming material having an average particle diameter of 1 μm to 72 μm may be used. The porosity can be adjusted by adjusting the particle size and amount of the pore-forming material.

When the base 1 of the first ceramic green sheet 12 is made of alumina-based ceramics, first, an alumina powder, a sintering aid (powder of SiO ₂ , MgO, CaO, etc.) and an organic binder such as an acrylic resin are used. , Organic solvents such as toluene and acetone and solvents such as water are mixed to prepare a slurry. This slurry may be used to form a sheet by a film forming method such as a doctor blade method. The second ceramic green sheet 22 may be prepared by adding a pore-forming material to the slurry for the first ceramic green sheet 12. The second ceramic green sheet 22 contains a pore-forming material with respect to the first ceramic green sheet 12.

When the filter unit 2 has different pore diameters, for example, as the pore-forming material to be added to the slurry for the second ceramic green sheet 22, materials having different average particle diameters are used, and the pore-forming material contained therein is used. A plurality of types of second ceramic green sheets 22 having different average particle sizes may be produced. When the filter portions 2 have different porosities, for example, the amounts of the pore-forming materials added to the slurry for the second ceramic green sheet 22 are different from each other, and the average particle diameters of the pore-forming materials contained are different. A plurality of types of second ceramic green sheets 22 may be produced.

Next, as shown in the example shown in FIG. 13B, the electrode layer 32 is formed on the first ceramic green sheet 12. The electrode layer 32 is sintered into the electrode 3 in a later firing step. The electrode layer 32 may be formed by applying a metal paste containing a metal material such as platinum or tungsten, which is the main component of the electrode 3, as a main component on the first ceramic green sheet 12. The metal paste can be prepared by adding a resin binder and a solvent to a powder of a metal material and kneading the paste. The metal paste may be applied to the wiring pattern shape of the electrode 3 by a screen printing method or the like.

Further, as shown in the example shown in FIG. 13C, a through hole 112 is formed in the second ceramic green sheet 22. The through hole 112 is a portion that serves as a flow path 11. The through hole 112 may be formed in the second ceramic green sheet 22 by punching or laser processing using a die.

Next, as shown in the example shown in FIG. 13D, the first ceramic green sheet 12 on which the electrode layer 32 is formed and the second ceramic green sheet 22 on which the through hole 112 is formed are laminated to form a laminated body. Form 102. In the example shown in FIG. 13 (d), the portion to be the three bases 1 is formed by laminating two layers of the first ceramic green sheet 12, and the portion to be the filter portion 2 is formed by stacking two layers of the second ceramic. The green sheets 22 are laminated and formed. In either case, one layer or three or more layers of ceramic green sheets may be used.

Since the example shown in FIG. 13D is a laminated body 102 in the case of manufacturing the measuring device component 100 in which the electrode 3 is embedded in the base 1 as in the example shown in FIG. 6, the electrode layer 32 is two layers. It is located between the layers of the first ceramic green sheet 12. The first ceramic green sheet 12 on which the electrode layer 32 is not formed is laminated on the first ceramic green sheet 12 on which the electrode layer 32 is formed.

When the measuring device component 100 as shown in FIG. 2 is manufactured, the first ceramic green sheet in which the electrode layer 32 is not formed is formed on the first ceramic green sheet 12 in which the electrode layer 32 is formed. On top of the 12 layers, only the portion of the second ceramic green sheet 22 that becomes the filter portion 2 may be overlapped, and the frame-shaped first ceramic green sheet 12 may be further overlapped so as to surround the portion.

In the case of the above-mentioned structure in which the base portion 1 in contact with the filter portion 2 is provided as a side wall outside the filter portion 2 on the outer side of the measuring device component 100 as in the example shown in FIG. 6, as shown in FIG. 13 (d). The first ceramic green sheet 12 may be further attached to the side surface of the laminated body 102. Alternatively, the inner side surface of the frame-shaped first ceramic green sheet 12 may be in contact with the portion of the second ceramic green sheet 22 that becomes the filter portion 2 located on the outside.

In order to form the laminated body 102, the first ceramic green sheet 12 on which the electrode layer 32 is formed and the second ceramic green sheet 22 on which the through hole 112 is formed are overlapped and pressed by a uniaxial pressure press or the like. It may be integrated by pressing and crimping.

If the through hole 112 is filled with a resin or the like that is burnt down in the subsequent firing step, deformation of the portions above and below the through hole in the first ceramic green sheet 12 can be suppressed.

Then, by firing the laminated body 102, the measuring device component 100 in which the dense base portion 1 made of ceramics and the filter portion 2 made of porous ceramics are integrally formed as described above. The firing temperature may be 1500 ° C. to 1600 ° C. when the base portion 1 and the filter portion 2 are made of alumina ceramics.

Further, as shown in FIG. 14, the distance between adjacent filter portions 2 located on the central side (central portion) of the flow path 11 is adjacent to each other located on the end side (outer peripheral portion) of the space (flow path 11). It may be larger (wider) than the distance between the matching filter units 2. In general, the flow rate of the gas flowing through the central portion of the flow path 11 tends to be larger than the flow rate of the gas flowing through the outer peripheral portion. Therefore, by increasing the distance between the filter portions 2 at the central portion, the gas is released. It can flow smoothly.

Further, as shown in FIG. 15, the thickness of the filter portion 2 located on the central side (central portion) of the space (flow path 11) is the thickness of the filter portion 2 located on the end side (outer peripheral portion) of the flow path 11. It may be smaller than the thickness. In FIG. 15, the electrode 3 is provided up to the end of the base 1 (for example, the electrode 31 is provided at the upper right end of the base 1). However, forming the electrode 3 (31, etc.) at the end of the base 1 depends on the magnitude of the voltage applied to the electrode 3, and the width of the base 1 is widened in order to secure an insulation distance from the outside. There may be a need for improvement such as increasing the size.

Therefore, as shown in FIG. 15, the thickness of the filter unit 2 located on the center side of the flow path 11 may be smaller than the thickness of the filter unit 2 located on the end side of the flow path 11. Specifically, since the above configuration makes it easier for the gas to collect on the central side of the flow path 11, the electrode 3 provided on the central side of the flow path 11 is preferable even if the electrode 3 is not provided at the end of the base 1. It is possible to detect particulate matter. As a result, it is possible to improve the detection system for particulate matter while preventing the size of the measuring device component 100 from becoming large.

On the contrary, as shown in FIG. 16, the thickness of the filter portion 2 located on the central side (central portion) of the space (flow path 11) is the filter located on the end side (outer peripheral portion) of the flow path 11. It may be larger than the thickness of the portion 2. In this case, contrary to the case of FIG. 15, the gas tends to flow toward the end side. As described above, the gas originally tends to flow toward the center side, but by adopting the configuration shown in FIG. 16, the gas can easily flow to the end side, so that the flow rate of the gas in each flow path 11 Can be brought closer evenly. The fact that the flow rate of the gas approaches uniform means that the amount of particulate matter collected in each of the filter units 2 also approaches uniform. As a result, the time required to remove the particulate matter by heating can be shortened. As a result, the long-term reliability of the measuring device component 100 can be improved.

As shown in FIG. 2, when the flow path 11 is surrounded by the base portion 1, the thickness of the filter portion 2 may be reduced as it approaches the end portion side. However, as shown in FIG. 6, when the flow path 11 is formed by being surrounded by the base portion 1 and the filter portion 2, the configuration shown in FIG. 17 may be used. In the measuring device component 100 shown in FIG. 17, the thickness of the filter portion 2 decreases as the distance from the center side increases, but the thickness of the filter portion 2 located on the outermost circumference is not limited to this. Specifically, the "filter unit 2 located on the outermost circumference" is thicker than the "filter unit 2 located on the end side of the filter units 2 other than the filter unit 2 located on the outermost circumference". .. As a result, the flow rate of the gas in each of the flow paths 11 is made uniform, and the gas is prevented from easily escaping to the outside from the outermost filter portion 2. Therefore, the flow rate of the gas in each of the flow paths 11 can be made uniform while ensuring the amount of gas passing through the measuring device component 100.

Further, as shown in FIG. 18, the wall surface of the filter unit 2 facing the flow path 11 may be recessed. Specifically, the wall surface of the filter unit 2 facing the flow path 11 may have a shape in which the center is recessed in an arc shape. As a result, the surface area of the filter unit 2 can be increased, so that the amount of particulate matter that can be collected by the filter unit 2 can be increased.

Further, as shown in FIG. 18, the outer wall surface of the filter unit 2 located at the outermost periphery of the plurality of filter units 2 (the wall surface that does not face the flow path 11 and is exposed to the outside) is recessed. It may be. More specifically, it may have a shape in which the center is recessed in an arc shape. As a result, the possibility that the filter unit 2 comes into contact with the outside can be reduced, so that the possibility that the filter unit 2 is damaged can be reduced. As a result, the long-term reliability of the measuring device component 100 can be improved.

Further, the base portion 1 may have a glass component, and as shown in FIG. 19, this glass component may spread to a part of the filter portion 2. In other words, the filter unit 2 has a glass diffusion region 20 in the vicinity of the base unit 1. As a result, the adhesion between the base portion 1 and the filter portion 2 can be improved, so that the long-term reliability of the measuring device component 100 can be improved.

Further, as shown in FIG. 20, when the filter unit 2 is divided into three layers (upper layer 22, middle layer 23, lower layer 24) in the vertical direction, the porosity of the upper layer 22 and the lower layer 24 adjacent to the base 1 is the middle layer 23. It may be larger than the porosity in. As a result, the thermal stress generated in the filter portion 2 and the base portion 1 under the heat cycle can be absorbed by the upper layer 22 and the lower layer 24. As a result, it is possible to reduce the possibility of thermal stress occurring in the middle layer 23 through which the gas flows most. As a result, the possibility that the middle layer 23 is damaged can be reduced, so that the long-term reliability of the measuring device component 100 can be improved.

Further, as shown in FIG. 21, a portion of the base portion 1 facing the flow path 11 may be raised in an arc shape. As a result, the upper end and the lower end of the filter portion 2 are sandwiched between the arcuately raised portions of the base portion 1, so that the strength against bending stress can be improved. As a result, the long-term reliability of the measuring device component 100 can be improved.

On the contrary, as shown in FIG. 22, the portion of the base portion 1 facing the flow path 11 may be recessed in an arc shape. As a result, the movement of the gas flowing through the flow path 11 can be made smoother. Specifically, it is possible to reduce the stagnation of gas in the vicinity of the corner portion formed by the surface of the base portion 1 and the wall surface of the filter portion 2. As a result, the sensitivity of the measuring device component 100 can be improved.

Further, as shown in FIG. 23, it is preferable that the corners of the flow path 11 are smooth. More specifically, the portion of the base portion 1 facing the flow path 11 is recessed in an arc shape, and the wall surface of the filter portion 2 facing the flow path 11 is recessed in an arc shape, and these are smoothly continuous. Is preferable. As a result, the gas flow can be made smoother, so that the sensitivity of the measuring device component 100 can be further improved.

Further, in a cross-sectional view perpendicular to the length direction of the flow path 11, the corner portion formed by the portion of the base portion 1 facing the flow path 11 and the wall surface of the filter portion 2 facing the flow path 11 is arcuate. May be good. This makes it possible to further smooth the gas flow at the corners.

Further, the corner portion of the base portion 1 facing the flow path 11 and the wall surface of the filter portion 2 facing the flow path 11 is arcuate, and the region where the shape of the corner portion is arcuate is the flow path. It may be continuous in the length direction of 11. This makes it possible to further smooth the gas flow at the corners.

Further, as shown in FIG. 24, a recess may be provided in the wall surface of the filter portion 2 facing the flow path 11 in a cross-sectional view perpendicular to the length direction of the flow path 11. As a result, the surface area of the wall surface of the filter unit 2 can be increased, so that the amount of particulate matter that can be collected by the filter unit 2 can be increased.

The above-mentioned measuring device component 100 has been described by an example in which the flow path 11 extends from one side surface of the base portion 1 to a side surface at a position facing the base portion 1, but the present invention is not limited to this. For example, as in the example shown in FIG. 25, even if one end of the flow path 11 is open to one side surface of the base 1 and the other end is open to the surface (lower surface) located at one end of the base 1. Good. Alternatively, it may be open to two opposing side surfaces of the base portion 1 and a surface (lower surface) located at one end of the base portion 1. Specifically, gas inlets and outlets may be provided on adjacent surfaces. By arranging one surface provided with the outflow port along the direction in which the exhaust gas flows, the exhaust gas can easily flow in from the inflow port provided on the other surface even if the inflow port is small.

Further, as shown in FIG. 26, the filter unit 2 may be composed of two portions having different widths when the vertical cross section is viewed. In other words, the filter portion 2 may be composed of a wide portion (large portion) and a narrow width portion (small portion). Since the filter unit 2 has a wide portion, it is possible to reduce the possibility that the filter unit 2 will be broken when an external force is applied to the measuring device component 100 in the vertical direction. Further, since the filter unit 2 has a narrow portion, it is possible to facilitate the flow of gas through the filter unit 2.

Further, as shown in FIG. 27, the width of the flow path 11 increases in the vertical direction toward the outside (upper side in the flow path 11 located on the upper side, lower side in the flow path 11 located on the lower side). It may have a widening shape. More specifically, the flow path 11 may have a trapezoidal shape with the long side located on the outside. Generally, when viewed in a vertical cross section, gas tends to flow more difficultly on the outside than on the inside (center side) of the flow path 11, but by making the flow path 11 have the above shape, the flow tends to flow. The retention of gas on the outside of the road 11 can be reduced. In FIG. 27, the flow path 11 is trapezoidal due to the linear wall surface, but the present invention is not limited to this. For example, the wall surface may have one step or a plurality of steps.

Further, as shown in FIG. 28, the base portion 1 may protrude to the outside from the filter portion 2 located on the outermost side. As a result, it is possible to reduce the risk of damage to the filter unit 2 due to foreign matter hitting the outermost filter unit 2.

Further, as shown in FIG. 29, the base portion 1 may protrude outward from the filter portion 2 located on the outermost side, and the surface of the filter portion 2 located on the outermost side may be covered with the protective layer 5. .. As a result, the risk of damage to the filter unit 2 can be further reduced. Further, it is possible to reduce the flow of gas from the flow path 11 to the outside through the filter unit 2 located on the outermost side. As the protective layer, for example, a resin material in which ceramic powder is dispersed can be used.

Further, as shown in FIG. 30, when the cross section is viewed, the end portion of the flow path 11 is partially sealed by the sealing portion 4, and the surface of the sealing portion 4 on the flow path 11 The shape of the portion to be formed may be an arc shape which is concave on the flow path side. As a result, it is possible to reduce the accumulation of gas in the vicinity of the sealing portion 4 in the flow path 11.

As shown in FIG. 31, the measuring device component 100 of the present disclosure has a groove portion 6 extending in a direction intersecting the traveling direction of the flow path 11 on the surface of the filter portion 2 facing the flow path 11. As a result, the gas flowing through the flow path 11 can be easily turbulent. Therefore, by facilitating the flow of the particulate matter in the gas to the filter unit 2, it is possible to facilitate the collection of the particulate matter in the gas in the filter unit 2. Therefore, the amount of particulate matter flowing to the outlet-side end of the flow path 11 can be reduced. Therefore, it is possible to reduce the possibility that particulate matter accumulates at the end of the flow path 11 on the outlet side. As a result, the measurement accuracy of the measuring device component 100 can be improved.

The shape of the groove portion 6 is, for example, a rectangular shape or an elliptical shape in which the shape of the opening portion facing the flow path 11 has a longitudinal direction and a lateral direction. The groove portion 6 may extend in a direction perpendicular to the traveling direction of the flow path 11, for example. At this time, the groove 6 is provided with 0.15 to 0.9 mm in the traveling direction of the flow path 11 and 0.15 to 0.8 mm in the direction perpendicular to the traveling direction of the flow path 11. Further, the groove portion 6 may have a shape that becomes narrower toward the bottom of the groove. The depth of the groove 6 is, for example, 0.08 to 0.5 mm.

Further, as shown in FIG. 31, a plurality of groove portions 6 may be located along the traveling direction of the flow path 11. As a result, the gas flowing through the flow path 11 can be easily turbulent. Further, the gas that did not turbulent in one of the plurality of groove portions 6 provided on the upstream side of the flow path 11 can also be turbulently flowed in the other groove portion 6 provided on the downstream side. Therefore, by facilitating the flow of the particulate matter in the gas to the filter unit 2, it is possible to facilitate the collection of the particulate matter in the gas in the filter unit 2. Therefore, the amount of particulate matter flowing to the outlet-side end of the flow path 11 can be reduced. Therefore, it is possible to reduce the possibility that particulate matter accumulates at the end of the flow path 11 on the outlet side. As a result, the measurement accuracy of the measuring device component 100 can be improved.

It is preferable that, for example, 8 to 70 grooves 6 are located along the traveling direction of the flow path 11. In the measuring device component 100 shown in FIG. 31, groove portions 6 are provided in the two filter portions 2 on the center side of the four filter portions 2, and the groove portions 6 are provided along the traveling direction of the flow path 11. , 8 are located.

Further, as shown in FIG. 31, the groove portions 6 may be located at equal intervals. As a result, when an external force such as vibration is applied to the measuring device component 100, it is possible to reduce the possibility that stress is concentrated on a part of the groove portion 6. Therefore, it is possible to reduce the possibility that the measuring device component 100 is damaged in the groove 6. As a result, the durability of the measuring device component 100 can be improved. At this time, the groove portions 6 are provided at intervals of, for example, 0.4 to 1.7 mm.

Further, as shown in FIG. 32, the groove portion 6 may extend over the entire surface of the filter portion 2 facing the flow path 11 in a direction perpendicular to the traveling direction of the flow path 11. As a result, the gas flowing through the flow path 11 can be turbulently flowed from the upper end to the lower end of the surface of the filter unit 2. Therefore, the particulate matter in the gas can be easily flowed to the filter unit 2. As a result, particulate matter can be collected on the entire surface of the filter unit 2 from the upper end to the lower end. Therefore, it is possible to reduce the possibility that particulate matter accumulates in a part of the flow path 11 in the vertical direction. Further, it is possible to reduce the possibility that particulate matter accumulates at the end of the flow path 11 on the outlet side. As a result, the measurement accuracy of the measuring device component 100 can be improved. Note that FIG. 32 shows a cross section of the measuring device component 100 shown in FIG. 31 on an X-ray line.

Further, as shown in FIG. 33, the filter portion 2 has a first main surface 21 facing the flow path 11 and a second main surface 22 facing the first main surface 21, and the groove portion 6 has a first main surface 21. And may be located on both the second main surface 22. As a result, the filter portion 2 can be thinned in the portion where the groove portion 6 is located on both the first main surface 21 and the second main surface 22. Therefore, for example, even if the filter portion 2 is deformed so as to be recessed inward due to the pressure difference between the inside and outside of the measuring device component 100, the filter portion 2 is bent in the portion where the filter portion 2 is thinned. By doing so, the stress can be reduced. As a result, the durability of the measuring device component 100 can be improved.

Further, as shown in FIG. 33, a plurality of groove portions 6 are provided on both the first main surface 21 and the second main surface 22, and the groove portions 6 are alternately positioned along the traveling direction of the flow path 11. You may be doing it. As a result, the surface area of the filter unit 2 can be increased while reducing the thickness of the filter unit 2 as a whole. Since the thickness of the filter unit 2 is small as a whole, the filter unit 2 can be easily deformed when an external force is applied to the measuring device component 100, for example. Therefore, the stress generated in the filter unit 2 can be reduced. As a result, the durability of the measuring device component 100 can be improved.

Further, a plurality of groove portions 6 are provided on both the first main surface 21 and the second main surface 22, and the groove portions 6 are alternately located along the traveling direction of the flow path 11, so that the filter is formed. The surface area of part 2 can be increased. Therefore, the amount of particulate matter in the gas that can be collected in the groove 6 can be increased. This makes it possible to reduce the amount of particulate matter flowing to the end of the flow path 11. Therefore, it is possible to reduce the possibility that particulate matter accumulates at the end of the flow path 11 on the outlet side. As a result, the measurement accuracy of the measuring device component 100 can be improved.

Further, as shown in FIG. 34, the base 1 may also be provided with a groove extending in a direction intersecting the traveling direction of the flow path 11. Thereby, the base 1 can be made thin. Therefore, for example, even if the base portion 1 is deformed so as to be recessed toward the flow path 11 due to the pressure difference between the inside and outside of the measuring device component 100, the base portion 1 is bent in the portion where the base portion 1 is thinned. By doing so, the stress can be reduced. As a result, the durability of the measuring device component 100 can be improved.

Further, as shown in FIG. 35, the base portion has an outer surface located along the traveling direction of the flow path, and the outer surface has a plurality of grooves extending in a direction intersecting the traveling direction of the flow path. You may have. As a result, when the base portion thermally expands, the outer surface of the base portion expands toward the inside of the groove, so that deformation of the base portion in the traveling direction of the flow path due to thermal expansion can be suppressed. Therefore, it is possible to reduce the possibility of peeling between the base and the electrode. As a result, the durability of the measuring device component can be improved. For example, 2 to 100 grooves on the outer side surface are provided. The groove on the outer side surface can have a width of 0.1 to 2.0 mm, a length of 0.2 to 2.0 mm, and a depth of 0.1 to 1.0 mm, for example.

Further, as shown in FIG. 36, the grooves may be provided at equal intervals from one end on the inlet side of the flow path to the other end on the outlet side of the outer surface. As a result, the difference in the amount of thermal expansion can be reduced from one end on the inlet side of the flow path to the other end on the outlet side of the outer surface. Therefore, the distortion of the base can be suppressed and the fluctuation of the distance between the electrodes can be suppressed. As a result, the detection accuracy can be improved.

Further, as shown in FIG. 37, the groove portion may extend on the outer surface over the entire direction perpendicular to the traveling direction of the flow path. As a result, the difference in the amount of thermal expansion can be reduced over the entire direction perpendicular to the traveling direction of the flow path. Therefore, the distortion of the base can be suppressed and the fluctuation of the distance between the electrodes can be suppressed. As a result, the detection accuracy can be improved.

Further, as shown in FIG. 38, the groove portions are provided on both outer surfaces of the base portion, and may be provided at symmetrical positions across the flow path. As a result, the amount of thermal expansion of one outer surface and the other outer surface can be made uniform. Therefore, it is possible to suppress the distortion of both side surfaces sandwiching the flow path of the base portion and suppress the fluctuation of the distance between the electrodes. As a result, the detection accuracy can be improved.

Further, as shown in FIG. 39, the base portion has an end face surrounding the opening of the flow path, and the end face has a plurality of grooves extending along the side surface when viewed from a direction perpendicular to the end face. You may. As a result, the possibility that the end face portion is deformed due to thermal expansion can be reduced. Therefore, the distortion of the base can be suppressed and the fluctuation of the distance between the electrodes can be suppressed. As a result, the detection accuracy can be improved. For example, 1 to 20 grooves are provided on the end face. The groove on the outer side surface can have a width of 0.1 to 2.0 mm, a length of 0.2 to 2.0 mm, and a depth of 0.1 to 1.0 mm, for example.

1: Base part 11: Flow path 2: Filter part 21: First main surface 22: Second main surface 3: Electrode 4: Sealing part 5: Protective layer 6: Groove part 100: Parts for measuring device

Claims (11)

The filter portion is sandwiched between a base portion made of ceramics and having a flow path through which gas flows, a filter portion made of porous ceramics provided inside the flow path so as to divide the flow path into a plurality of passages, and the base portion. It is equipped with a pair of electrodes for forming capacitance, which are provided as described above.
A component for a measuring device having a groove portion extending in a direction intersecting the traveling direction of the flow path on the surface of the filter portion facing the flow path. The component for a measuring device according to claim 1, wherein a plurality of the grooves are located along the traveling direction of the flow path. The measuring device component according to claim 2, wherein the grooves are located at equal intervals. The measurement according to any one of claims 1 to 3, wherein the groove portion extends over the entire surface of the filter portion facing the flow path in a direction perpendicular to the traveling direction of the flow path. Equipment parts. The filter portion has a first main surface facing the flow path and a second main surface facing the first main surface, and the groove portion is located on both the first main surface and the second main surface. The measuring device component according to any one of claims 1 to 4. The measurement according to claim 5, wherein a plurality of the grooves are provided on both the first main surface and the second main surface, and the grooves are alternately located along the traveling direction of the flow path. Equipment parts. The filter portion is sandwiched between a base portion made of ceramics and having a flow path through which gas flows, a filter portion made of porous ceramics provided inside the flow path so as to divide the flow path into a plurality of passages, and the base portion. It is equipped with a pair of electrodes for forming capacitance, which are provided as described above.
The base has an outer surface located along the traveling direction of the flow path.
The outer surface is a component for a measuring device having a plurality of grooves extending in a direction intersecting the traveling direction of the flow path. The measuring device component according to claim 7, wherein the groove portions are provided at equal intervals from one end on the inlet side of the flow path to the other end on the outlet side of the outer surface. The measuring device component according to claim 7 or 8, wherein the groove portion extends over the entire direction perpendicular to the traveling direction of the flow path on the outer surface. The measuring device component according to any one of claims 7 to 9, wherein the groove portions are provided on both outer surfaces of the base portion and are provided at symmetrical positions across the flow path. The base has an end face that surrounds the opening of the flow path.
The measuring device component according to any one of claims 7 to 10, wherein the end face has a plurality of grooves extending along the side surface when viewed from a direction perpendicular to the end face.

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