JPWO2018142523A1 - Control apparatus and control method - Google Patents

Abstract

The transient characteristic of the average (for example, average temperature) of the output at each point is controlled to a desired characteristic together with the difference in output at each point (for example, temperature difference between multiple points). The control device (10) is a control device that controls a control object having a plurality of measurement points and a plurality of inputs corresponding to the measurement points, and the response to the input among the measurement points is a response at another measurement point. A first controller (11) for controlling a physical quantity at the measurement point with respect to a first partial control object (1A) having an output corresponding to a measurement point that is slower than the output and an input corresponding to the measurement point as an input; , Out of the measurement points, a measurement point other than the measurement point of the first partial control target (1A) is output, and the second partial control target (1B) having an input corresponding to the measurement point as an input is A second controller (16) for controlling the physical quantity at the measurement point is provided, and the target value (SV2) for the measurement point of the second partial control target (1B) is output from the first partial control target (1A) (PV1). ) And is given to the second controller (16).

Description

  The present invention relates to a control device and a control method, and more particularly to a control device and a control method in a multi-input / output control system.

  There is known a temperature adjustment system in a system having interference that requires multipoint control by a plurality of sensors and a heat source (actuator). Such a temperature control system is used in, for example, an air conditioning system and an injection molding machine. In such a system, there is a need for each point to control the temperature difference between multiple points to zero in the transient state until the target value is reached as well as quickly following each corresponding target value. When the target value is different at each point, there is a need to control the ratio between the target value and the output value to be the same among multiple points. Furthermore, from the viewpoint of energy saving, there is a need to improve the follow-up characteristics in a transient state and particularly to suppress the overshoot amount.

  Conventionally, a multipoint PID control method using PID control is often used as multipoint temperature control. On the other hand, a method shown in the following Patent Document 1 for controlling a temperature difference and an average temperature at multiple points, a method shown in the following Patent Document 2 using non-interference and pole-zero cancellation, and the like have been proposed. For example, Patent Document 1 discloses that a mode conversion matrix Gm from each temperature to an average temperature (overall average temperature) and a temperature difference between multiple points, and a pre-compensation matrix Gc that appropriately distributes an operation amount to the heater, A structure is disclosed in which the temperature difference can be controlled while controlling the temperature (see, for example, FIG. 25 of the same document).

  Further, Patent Document 2 assumes an ideal first-order lag model by canceling the target dynamic characteristic by the reverse characteristic of the control target (the reverse characteristic of the temperature difference model) while canceling the interference term by the compensation term β ′ for the interference term. However, a structure for performing PID control is disclosed.

JP 2001-296902 A JP 2009-282878 A

  Any of the methods disclosed in Patent Documents 1 and 2 aims to follow the target temperature while minimizing the temperature difference at multiple points. However, these methods have the following problems.

  First, since the characteristics of the controlled object include a dead time, the PID controller must be designed in consideration of the dead time. For example, the design is based on the Ziegler-Nichols (ZN) method. Accordingly, the method shown in Patent Document 1 can be improved as compared with the conventional method (multi-point PID control method), but a significant improvement in characteristics cannot be expected at the average temperature. Moreover, in the method shown in Patent Document 1, when multiple target values are different, only the temperature difference (absolute value) can be controlled. For example, when the arrival times are controlled to be the same, the inclination cannot be controlled.

  The above-described multipoint temperature control methods are all control methods that focus on the temperature difference between the multipoints, and do not necessarily focus on improving the performance with respect to the transient characteristics in consideration of the dead time. As a result, it is not possible to improve the temperature difference and the transient characteristics with respect to the average temperature at the same time. Such a problem is similar to a control object including a dead time element other than temperature control.

  In view of the above points, the present invention provides a control device that controls the transient characteristics of the average (for example, average temperature) of the output at each point as well as the difference in the output at each point (for example, the temperature difference between multiple points) and a desired characteristic An object is to provide a control method.

  According to the first solving means of the present invention, there is provided a control device for controlling a control object having a plurality of measurement points and a plurality of inputs corresponding to the respective measurement points, and (a) a response to an input among the measurement points is provided. First control for controlling a physical quantity at a measurement point with respect to a first partial control target having a measurement point that is slower than the response at another measurement point as an output and an input corresponding to the measurement point as an input And (b) a second measurement target other than the measurement point of the first partial control object among the measurement points as an output and an input corresponding to the measurement point as an input, A second controller for controlling a physical quantity at the measurement point; (c) determining a target value for the measurement point of the second partial control target based on an output of the first partial control target; A control device is provided for the second controller.

  According to the second solving means of the present invention, there is provided a control method for controlling a control object having a plurality of measurement points and a plurality of inputs corresponding to the respective measurement points, and (A) a response to an input among the measurement points is provided. Controlling a physical quantity at the measurement point with respect to a first partial control object having a measurement point that is slower than the response at another measurement point as an output and an input corresponding to the measurement point as an input; B) Among the measurement points, a measurement point other than the measurement point of the first partial control object is output, and a second partial control object that has an input corresponding to the measurement point as an input is There is provided a control method including controlling a physical quantity and (C) determining a target value for a measurement point of the second partial control target based on an output of the first partial control target.

  According to the present invention, there is provided a control device and a control method for controlling a transient characteristic of an average (eg, average temperature) of outputs at each point as well as a difference in output at each point (eg, temperature difference between multiple points) to a desired characteristic. can do.

It is a block diagram of a control system in the present embodiment. It is a graph which shows the simulation result of the temperature difference between the average temperature by a conventional control method, and many points. It is a graph (1) which shows the simulation result in aspect 2 (configuration 1 + 2) in the present embodiment. It is a graph (2) which shows the simulation result in the aspect 2 in this Embodiment. It is a graph (1) which shows the simulation result in the aspect 3 (configuration 1 + 2 + 3) in the present embodiment. It is a graph (2) which shows the simulation result in the aspect 3 in this Embodiment. It is a graph (1) which shows the simulation result in the aspect 4 (configuration 1 + 2 + 3 + 4) in the present embodiment. It is a graph (2) which shows the simulation result in the aspect 4 in this Embodiment. It is graph (1) which shows the simulation result in a different target value by the aspect 5 (configuration 1 + 2 + 3 + 4 + 5) in this Embodiment. It is a graph (2) which shows the simulation result in a different target value by the aspect 5 in this Embodiment. It is a graph (1) which shows the simulation result in the same target value by the aspect 5 in this Embodiment. It is a graph (2) which shows the simulation result in the same target value by the aspect 5 in this Embodiment. It is a graph (1) which shows the simulation result in the aspect 6 (configuration 1 + 3) in this Embodiment. It is a graph (2) which shows the simulation result in the aspect 6 in this Embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1. First, the basic configuration of the present embodiment will be described. In the present embodiment, in a multi-input / output control system (multi-input / output control system) such as multi-point temperature control, the rise of a measured value (for example, temperature) relative to the input is relatively slow (the control system for this point) (Hereinafter also referred to as a slow mode), and the output is caused to follow a measurement point other than the above measurement point (a control system for this point is also referred to as a fast mode hereinafter). Such a configuration is a basic configuration, and the transient characteristic of the average temperature is controlled to a desired characteristic together with the temperature difference between multiple points. In addition, a control device and a design method that can be designed without considering dead time when designing a PID controller are proposed. Further, even when the target values at multiple points are different, the rising temperature ratio (ratio of the measured temperature with respect to the target value) is made equal, and each point reaches the target value at substantially the same timing.

  Although this embodiment is described using an example of controlling temperature, physical quantities other than temperature may be controlled. The temperature to be controlled will be described using an example of measurement (detection) at a measurement point. However, the temperature to be controlled was measured at a temperature other than the measurement point obtained based on the temperature measured at the measurement point, or measured at the measurement point. You may control the temperature calculated | required based on a physical quantity. In other words, the physical quantity to be controlled need not be measured directly at the measurement point.

2. Configuration Example of Control Device FIG. 1 is a block diagram of a multi-input / output control system in the present embodiment. The control device 10 in this embodiment controls each physical quantity at a plurality of measurement points of the control target 1. The control device 10 includes, for example, a first PID controller (first controller) 11, a first dead time difference compensator 12, a first dead time compensator 13, and a second dead time difference compensator. 14, a feedforward compensator (FF compensator) 15, a second PID controller (second controller) 16, a second dead time compensator 17, and a target value adjuster 18. Prepare. As will be described later, the first dead time difference compensator 12, the first dead time compensator 13, the second dead time difference compensator 14, the FF compensator 15, the second dead time compensator 17, and The target value adjuster 18 can be omitted as appropriate.

  The control target 1 has a plurality of measurement points and a plurality of inputs corresponding to the measurement points. The control target 1 is illustrated as being divided into a first partial control target 1A and a second partial control target 1B. The first partial control object 1A outputs a measurement point (first measurement point) whose response to the input is slower than the response at other measurement points among the plurality of measurement points, and an input corresponding to the first measurement point. As an input. The second partial control target 1B outputs a measurement point (second measurement point) other than the measurement point of the first partial control target 1A among a plurality of measurement points, and inputs corresponding to the measurement points as inputs. . In other words, the output of the second partial control target 1B is a measurement point that has a relatively fast response to the input. Note that the first partial control target 1A and the second partial control target 1B may each be subject to disturbance. Further, the first partial control target 1A may receive interference from the input or the like of the second partial control target 1B, and vice versa.

  The first PID controller 11 performs PID control on the first partial control target 1A. The second PID controller 16 performs PID control on the second partial control target 1B. A conventional technique can be used as a design technique for the first PID controller 11 and the second PID controller 16. A control method other than PID control may be used.

  Hereafter, each structural example in this Embodiment is demonstrated with reference to FIG.

(Configuration 1)
As described in the above basic configuration, the present embodiment has a configuration in which the output in the fast mode follows the output in the slow mode. For example, the target value SV2 of the second partial control target 1B is determined based on the output PV1 of the first partial control target 1A and given to the second PID controller 16. The output PV1 of the first partial control target 1A may be used as the target value SV2 of the second partial control target 1B as it is, but as will be described later, the first dead time compensator 13 and the second dead time difference compensation. The target value SV2 of the second partial control target 1B can be obtained based on the output PV1 of the first partial control target 1A by the device 14 and / or the target value adjuster 18. As shown in FIG. 1, the slow mode is arranged on the left side of the block diagram (upstream of the signal, sometimes called a master), and the fast mode is arranged on the right side (downstream of the signal, sometimes called a slave). Deploy.

  With such a configuration, it is possible to perform control so that the temperature difference between the two points in the slow mode and the fast mode approaches zero.

(Configuration 2)
The present embodiment has a configuration (first dead time compensator 13) that obtains the target value SV2 in the fast mode by compensating for the time delay of the first partial control target 1A with respect to the output PV1 in the slow mode.

  When the output in the slow mode (the output PV1 of the first partial control target 1A) is used as the target value SV2 in the fast mode as it is, the response in the fast mode is the time delay in the fast mode (in addition to the time delay in the slow mode ( Output is delayed by the dead time). The first dead time compensator 13 of the present embodiment removes the dead time component of the first partial control target 1A from the output PV1 of the first partial control target 1A. In other words, the output from the first dead time compensator 13 is an output without delay in the slow mode. When an interference term exists in the multi-input / output control system, the target value SV2 has a steady deviation, and as a result, a steady deviation also occurs in the fast mode output PV2. Therefore, the first dead time compensator 13 outputs a signal including an interference term and a disturbance signal.

  Specifically, the first dead time compensator 13 can be realized by applying a control structure of the Smith method. For example, the first dead time compensator 13 includes a model (first model) of the first partial control target 1A including the dead time component of the first partial control target 1A, and the first partial control target 1A. It has a model (second model) of the first partial control target 1A excluding the time delay component. For example, the operation amount MV1 for the first partial control target 1A is input to the first model, and the output of the first model is obtained. Further, for example, the output from the first PID controller 11 is input to the second model, and the output of the second model is obtained. For example, the first dead time compensator 13 subtracts the output of the first model from the output PV1 of the first partial control target 1A to obtain an interference term and a component corresponding to the disturbance. Further, the first dead time compensator 13 adds the output of the second model to the subtraction result and outputs the result. Needless to say, the order of addition and subtraction described above may be reversed. Similarly to the first dead time compensator 13, the second dead time compensator 17 has the first model and the second model for the second partial control target 1B, and performs the same processing. Can be configured.

  The output from the first dead time compensator 13 may be feedback in a feedback loop for the first partial control target 1A. Further, the output of the second partial control target 1B is also compensated for the time delay of the second partial control target 1B by the second dead time compensator 17 to provide a feedback loop for the second partial control target 1B. It is good also as feedback in.

With such a configuration, it is possible to avoid that the output in the fast mode includes both the time delay in the slow mode and the time delay in the fast mode. Further, the steady-state deviation at the output of the fast mode can be reduced or zero without identifying or estimating the disturbance or the interference term.
(Configuration 3)

  In this embodiment, the target value response in the fast mode is configured to include the second PID controller 16 and the FF compensator 15.

  The FF compensator 15 has an inverse characteristic of the second partial control target 1B. The target value SV2 of the second partial control target 1B is supplied to the FF compensator 15 and the second PID controller 16, and the output of the FF compensator 15 and the output of the second PID controller 16 are added to obtain the second value This is given to the partial control object 1B.

  With such a configuration, the followability of the fast mode itself can be improved. In other words, the delay of the dynamic characteristics of the fast mode itself can be improved, and the output of the slow mode can be followed almost without delay. Thereby, the temperature difference between the slow mode and the fast mode can be further reduced.

(Configuration 4)
The present embodiment has a configuration (a first dead time difference compensator 12 and a second dead time difference compensator 14) for compensating for a dead time difference between the slow mode and the fast mode.

  The first partial control target 1A in the slow mode and the second partial control target 1B in the fast mode have different dead times. Therefore, when the output without delay from the first dead time compensator 13 is set to the target value SV2 in the fast mode, the output PV1 of the first partial control target 1A is equal to the dead time (L1 of the first partial control target 1A). The output PV2 of the second partial control target 1B is output with a delay corresponding to the dead time (L2) of the second partial control target 1B. As a result, there is a time difference between the outputs of both modes by a dead time difference. This causes a temperature difference when viewed at the same time.

  The first dead time difference compensator 12 of the present embodiment, when the dead time of the second partial control target 1B is longer than the dead time of the first partial control target 1A (L2> L1), The operation amount of the target 1A is delayed. The first dead time difference compensator 12 delays, for example, the time of a difference (L2−L1) obtained by subtracting the dead time of the first partial control target 1A from the dead time of the second partial control target 1B. When the dead time of the first partial control target 1A is longer than the dead time of the second partial control target 1B (L1> L2), the second dead time difference compensator 14 sets the target value of the second partial control target 1B. Or delay the operation amount. The second dead time difference compensator 14 delays, for example, a difference (L1−L2) obtained by subtracting the dead time of the second partial control target 1B from the dead time of the first partial control target 1A.

  When the dead time of the second partial control object 1B is longer than the dead time of the first partial control object 1A, the first dead time difference compensator 12 is enabled and the dead time of the first partial control object 1A is activated. When the dead time is longer than that of the second partial control target 1B, a switching unit (not shown) that enables the second dead time difference compensator 14 may be further included.

  With such a configuration, even if the shape of the output waveform in the fast mode matches the shape of the output waveform in the slow mode, there is a time lag between both outputs, resulting in a difference in output (for example, temperature difference). Can be improved. In other words, it is possible to minimize the temperature difference between the two by matching the shape of the response waveform with the waveform of the slow mode and matching the mode with a long dead time on the time axis.

(Configuration 5)
The present embodiment has a configuration (target value adjuster 18) that appropriately sets the target value in the fast mode using the ratio of the target values in each mode even when the target values in the slow mode and the fast mode are different.

  The target value adjuster 18 multiplies the input signal by the ratio (r2 / r1) between the target value r1 in the slow mode and the target value r2 in the fast mode and outputs the result. Here, the target value r2 in the fast mode is not the target value SV2 that is dynamically set according to the output in the slow mode, but the original target value that the fast mode output PV is to finally reach (this specification) (Referred to as the final target value). The target value r1 in the slow mode here is the same as the above-described target value SV1, but is referred to as r1 for convenience.

  With such a configuration, in addition to the temperature difference control, the temperature ratio between multiple points can be directly controlled. More specifically, even when multipoint target values are different, it is possible to follow different target values while controlling the ratio of the fast mode response to the slow mode response at a constant rate. In addition, it is possible to match the arrival times to the target values at multiple points and to directly control the slope (rate) of the response.

  The above-described configuration 1 is a basic configuration, and configurations 2 to 5 can be combined as appropriate. For example, although the control apparatus 10 of this Embodiment can be comprised like each following aspect, it is not limited only to this combination.

(Aspect 1)
The control device 10 may be configured with the configuration 1 described above. In other words, the control device 10 includes a first PID controller 11 and a second PID controller 16. The output of the first partial control target 1A is used as the target value of the second partial control target 1B.

(Aspect 2)
The control device 10 may be configured by the above-described configuration 1 and configuration 2. In other words, the control device 10 includes a first PID controller 11, a second PID controller 16, and a first dead time compensator 13. The control device 10 may further include a second dead time compensator 17. The output of the first dead time compensator 13 is used as the target value of the second partial control target 1B.

(Aspect 3)
The control device 10 may be configured by the above-described configurations 1 to 3. In other words, the control device 10 includes the first PID controller 11, the second PID controller 16, the first dead time compensator 13, and the FF compensator 15. The control device 10 may further include a second dead time compensator 17. The output of the first dead time compensator 13 is used as the target value of the second partial control target 1B.

(Aspect 4)
The control device 10 may be configured by the above-described configurations 1 to 4. In other words, the control device 10 includes the first PID controller 11, the second PID controller 16, the first dead time compensator 13, the FF compensator 15, and the first dead time difference compensator 12. And a second dead time difference compensator 14. The control device 10 may further include a second dead time compensator 17. As the target value of the second partial control target 1B, the output of the second dead time difference compensator 14 is used.

(Aspect 5)
The control device 10 may be configured by the above-described configurations 1 to 5. In other words, the control device 10 includes the first PID controller 11, the second PID controller 16, the first dead time compensator 13, the FF compensator 15, and the first dead time difference compensator 12. And a second dead time difference compensator 14 and a target value adjuster 18. The control device 10 may further include a second dead time compensator 17. The output of the target value adjuster 18 is used as the target value of the second partial control target 1B.

(Aspect 6)
The control device 10 may be configured by the above-described configuration 1 and configuration 3. In other words, the control device 10 includes the first PID controller 11, the second PID controller 16, and the FF compensator 15. The output of the first partial control target 1A is used as the target value of the second partial control target 1B.

(Aspect 7)
The control device 10 may be configured by the above-described configuration 1 and configuration 5. In other words, the control device 10 includes a first PID controller 11, a second PID controller 16, and a target value adjuster 18. The output of the target value adjuster 18 is used as the target value of the second partial control target 1B.

(Aspect 8)
The configuration 4 may be further added to the above-described modes 1, 2, and 6. In this case, the output of the second dead time difference compensator 14 is used as the target value of the second partial control target 1B.

(Aspect 9)
The configuration 5 may be further added to the above-described embodiment 1, embodiment 2, embodiment 6, and embodiment 8. The output of the target value adjuster 18 is used as the target value of the second partial control target 1B.

3. Simulation Result Next, a simulation result in the two-input / output temperature control is shown. FIG. 2 shows a simulation result of an average temperature and a temperature difference between multiple points by a conventional control method. In the figure, for the multipoint control, the method shown in Patent Document 1 and the method shown in Patent Document 2, the results of the average temperature 21 at two points to be controlled and the temperature difference 22 between each point are shown. In the figure, the result in multipoint control is indicated by a solid line, and a is added to the reference symbol. Moreover, the result in the method shown in patent document 1 is shown with a broken line, and b is attached | subjected to the code | symbol. The result in the method shown in Patent Document 2 is indicated by a one-dot chain line, and c is attached to the reference numeral. From the figure, the maximum temperature differences in the multipoint control, the method shown in Patent Document 1, and the method shown in Patent Document 2 are about 68 ° C., about 18 ° C., and about 25 ° C., respectively.

  3A and 3B show simulation results in the above-described aspect 2 (configuration 1 + 2). In other words, a simulation result is shown in which the slow mode no delay output (the output of the first dead time compensator 13) including the interference term and the disturbance component is the target value SV2 in the fast mode. The upper part of FIG. 3A shows target values SV1 and SV2 and outputs PV1 and PV2 in each mode. The lower part of the figure shows the control inputs MV1 and MV2 in each mode. The upper part of FIG. 3B shows the target value 31 of the average temperature of each point, the average temperature 32, the target value 41 of the temperature difference between the points, and the temperature difference 42 between the points. The lower part of the figure represents the control input. From the upper part of FIG. 3B, it can be seen that the maximum temperature difference (maximum temperature difference between each point) is about 25 ° C., which is equivalent to the conventional method. It can also be confirmed that the dynamic characteristics such as the overshoot from the target value and the settling time are improved. Furthermore, the steady-state deviation is zero despite interference.

  4A and 4B show simulation results in the above-described aspect 3 (configuration 1 + 2 + 3). In other words, the simulation result when the FF compensator 15 is introduced in the fast mode is shown. From the upper part of FIG. 4A, it can be seen that the FF compensator 15 reduces the responsiveness of the fast mode, particularly the overshoot amount, and as a result, the maximum temperature difference is improved to about 15 ° C.

  5A and 5B show simulation results in the above-described aspect 4 (configuration 1 + 2 + 3 + 4). In other words, a simulation result in which a difference in dead time between the slow mode and fast mode control objects is compensated is shown. In this example, the difference in dead time between the two modes is 0.5 seconds, and the dead time is longer in the slow mode than in the fast mode. As shown in the upper part of FIG. 5A, the rising of the output PV2 in the fast mode is delayed by 0.5 seconds with respect to the mode 3 shown in the upper part of FIG. 4A. Thus, it can be seen that the rising of the output PV2 in the fast mode and the rising of the output PV1 in the slow mode coincide, and in particular, the temperature difference between the two modes at the rising portion becomes even smaller. Looking at the upper part of FIG. 5B, it can be confirmed that the temperature difference is small. In this example, the maximum temperature difference is also improved to 12 ° C.

  6A and 6B show simulation results at different target values in the above-described aspect 5 (configuration 1 + 2 + 3 + 4 + 5). In other words, it is a simulation result at different target values in the control device 10 including all of the configurations 1 to 5 described above. In this example, the target value r1 in the slow mode is set to 100 ° C. and the target value r2 in the fast mode is set to 200 ° C. as the target values. In the aspect 5, the ratio of the temperature to each target value is controlled, and it can be confirmed from the upper stage of FIG. 6A that the arrival time to the target value is substantially the same according to the control of the temperature ratio. Moreover, it can be confirmed that the temperature difference in the upper part of FIG. 6B is also controlled to 100 ° C. (target value difference) in a steady state.

  7A and 7B show simulation results for the same target value in the above-described aspect 5. FIG. In other words, a simulation result at the same target value in the control device 10 including all of the configurations 1 to 5 described above is shown. From FIG. 7B, it can be confirmed that the transient characteristics (overshoot amount and settling time) are improved in the average temperature characteristics, and the maximum temperature difference is 12 ° C., which is superior to the conventional method.

8A and 8B show simulation results in the above-described aspect 6 (configuration 1 + 3). In other words, the simulation result when the FF compensator 15 is introduced in the fast mode and the two-degree-of-freedom control is applied is shown. It can be confirmed that the response is improved with respect to the conventional multipoint PID controller. However, since a delay corresponding to the dead time occurs, the response is delayed.
4. Control over 3 points

  In the above-described embodiment, description has been made mainly using an example in which two measurement points (two points) are controlled. However, this embodiment can also be applied to a case where three or more points are controlled. In the case of control of three or more points, for example, the control system for the point with the slowest response to the input may be set to the slow mode, and the control systems for other points may be set to the fast mode in parallel on the downstream side of the signal. . In this case, the slow mode output with the slowest response may be set as the target value in all the control systems in the fast mode. In addition to setting the control system for the point with the slowest response to the slow mode, the control system for one of the points where the response to the input is relatively slow with respect to other measurement points may be set to the slow mode. Further, a mode in which a deviation between the target value and the output is large may be regarded as a master and arranged upstream, and the output may be set as a target value for other modes.

  The present invention is applicable to, for example, a multiple input / output control system.

DESCRIPTION OF SYMBOLS 10 Control apparatus 11 1st PID controller 12 1st dead time difference compensator 13 1st dead time compensator 14 2nd dead time difference compensator 14 Feed forward compensator (FF compensator)
16 Second PID controller 17 Second dead time compensator 18 Target value adjuster

Claims (14)

A control device for controlling a control object having a plurality of measurement points and a plurality of inputs corresponding to each measurement point,
Among the measurement points, a measurement point whose response to an input is slower than responses at other measurement points is an output, and the measurement point is measured with respect to a first partial control object that has an input corresponding to the measurement point as an input. A first controller for controlling a physical quantity in
Among the measurement points, a measurement point other than the measurement point of the first partial control target is output, and a physical quantity at the measurement point is set for a second partial control target having an input corresponding to the measurement point as an input. A second controller for controlling,
A control device that determines a target value for a measurement point of the second partial control target based on an output of the first partial control target and supplies the target value to the second controller. A first dead time compensator for removing a dead time component of the first partial control target from an output of the first partial control target;
2. The control device according to claim 1, wherein a target value for a measurement point of the second partial control target is determined based on an output of the first dead time compensator and is given to the second controller.   The control device according to claim 2, wherein the output of the first dead time compensator includes a disturbance component with respect to the first partial control target and / or an interference component from the second partial control target. A feedforward controller having an inverse characteristic of the second partial control object;
A target value for the measurement point of the second partial control object is given to the feedforward controller and the second controller;
The control device according to any one of claims 1 to 3, wherein an output of the feedforward controller and an output of the second controller are given to the second partial control target. A first dead time difference compensator for delaying the amount of operation of the first partial control object by a difference time obtained by subtracting the dead time of the first partial control object from the dead time of the second partial control object; The control device according to claim 1. A second time delay for delaying a target value or an operation amount with respect to a measurement point of the second partial control target, a difference time obtained by subtracting the dead time of the second partial control target from the dead time of the first partial control target. The control device according to claim 1, further comprising a time difference compensator. A first dead time difference compensator for delaying an operation amount of the first partial control target;
A second dead time difference compensator for delaying a target value or an operation amount for the measurement point of the second partial control target;
When the dead time of the first partial control object is longer than the dead time of the second partial control object, the second dead time difference compensator is enabled and the dead time of the second partial control object is the first time. 5. The control device according to claim 1, further comprising a switching unit that enables the first dead time difference compensator when the dead time is longer than one partial control target.   The ratio of the target value for the measurement point of the first partial control object and the final target value for finally setting the measurement point of the second partial control object with respect to the target value input to the second controller The control device according to any one of claims 1 to 7, wherein the control device is multiplied by and input to the second controller. The plurality of measurement points have three or more measurement points,
Of the measurement points, a partial control target that outputs one of the measurement points whose response to input is relatively slower than the response at other measurement points is set as the first partial control target, and the first controller Controls the physical quantity at the measurement point with respect to the first partial control object,
Among the measurement points, a partial control target that outputs a plurality of measurement points other than the measurement points of the first partial control target is set as the second partial control target, and the second controller includes the second part. The control device according to claim 1, wherein a physical quantity at each measurement point is controlled with respect to a control target.   The control device according to claim 9, wherein a partial control target whose output is a measurement point with the slowest response to an input among the measurement points is the first partial control target.   The control device according to claim 1, wherein the physical quantity controlled by the first controller and the second controller is a temperature. The controlled object includes a dead time element,
The control device according to claim 1, wherein each of the first controller and the second controller is a PID controller.   The control device according to claim 1, wherein the first partial control target and the second partial control target interfere with each other. A control method for controlling a control object having a plurality of measurement points and a plurality of inputs corresponding to each measurement point,
Among the measurement points, a measurement point whose response to an input is slower than responses at other measurement points is an output, and the measurement point is measured with respect to a first partial control object that has an input corresponding to the measurement point as an input. Controlling physical quantities in
Among the measurement points, a measurement point other than the measurement point of the first partial control target is output, and a physical quantity at the measurement point is set for a second partial control target having an input corresponding to the measurement point as an input. Control and
A control method including determining a target value for a measurement point of the second partial control target based on an output of the first partial control target.

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