JP2005071034A - Servo controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform high speed and highly accurate control with little response delay by reducing mechanical vibration due to non-linear disturbance. <P>SOLUTION: A first feed-forward compensation part 8 attenuates vibration factor components included in a position command to generate a first position command, and differentiates the first position command to generate a first speed feed-forward command and a first torque feed-forward command. A second feed-forward compensation part 9 is provided with a timing compensation part 16 with delay quantity which is almost equivalent to the delay quantity of the filtering of a vibration reducing filter 11 to input the position command, and to adjust the timing of the non-linear correction of the toque command non-linear correction part 18, a differentiator 17 to differentiate the output of the timing correction part 16 and a torque command non-linear correction part 18 to apply non-linear functions to the output of the differentiator 17 to generate a second toque feed-forward command. A feedback compensation part 10 performs feedback-control of the position of a control target 2 based on those commands and the measurement result of an encoder 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a servo control device.

  The conventional servo control device is based on a feedback compensation unit that controls the control target so that the state of the control target matches the command, and prediction of the response of the control target to the command so that the response delay to the command is reduced. Some have a feed-forward compensation unit that controls the controlled object. For example, the feedforward compensator of the servo control device disclosed in Patent Literature 1 applies a sign function sgn to the differential result of the position command to give a command that cancels out the effect of Coulomb friction predicted to be applied to the machine in advance. Generate. Therefore, even if there is a disturbance such as Coulomb friction, high-speed and high-precision control with little response delay can be performed.

JP 2002-172341 A (7th page, FIG. 6)

  However, in such a servo control device, when driving a controlled object at high speed and high acceleration, mechanical vibration occurs when the mechanical rigidity of the controlled object is weak as a result of a large acceleration applied to the controlled object. In some cases, there is a problem that accuracy is deteriorated. In order to suppress the occurrence of mechanical vibration, it is possible to remove the natural frequency component of the machine included in the position command with a vibration reduction filter such as a notch filter. In this case, however, the natural frequency of the vibration reduction filter The vibration reduction filter output vibrates slightly. When this minute vibration reciprocates in a nonlinear region of a nonlinear function such as the sign function (sgn) that compensates for Coulomb friction, the vibration frequency component of the minute vibration is enlarged and output, so that the vibration is generated in the machine. A correct torque command is input, the machine vibrates again, and high-precision control cannot be performed.

  The present invention has been made to solve the above-described problem, and can reduce or prevent mechanical vibration of a controlled object even when there is a nonlinear disturbance such as Coulomb friction, and has a small response delay. An object of the present invention is to provide a servo control device capable of high-speed and high-precision control.

  The servo control device according to the present invention is configured to reduce the vibration factor component of the control target based on the position command generated by the command generation unit that generates a position command to the control target and the control generation unit. A first feedforward compensation unit that generates a first drive command for moving the target, and a second for correcting the nonlinear motion of the control target based on the position command generated by the command generation unit A second feed-forward compensation unit that generates a drive command for the control unit, a state measurement unit that measures the state of the control target, the first drive command, the second drive command, and the measurement of the state measurement unit And a feedback control unit configured to control the motion of the control target based on the result, wherein the first feedforward compensation unit is a control target included in the position command output from the command generation unit. A vibration reduction filter that attenuates a dynamic factor component and generates a first position command as the first drive command is provided, and the second feedforward compensation unit nonlinearly affects the position command or the processing result of the position command. A drive command nonlinear correction unit that generates the second drive command by applying a function and a delay amount substantially equivalent to a filtering delay amount of the vibration reduction filter of the first feedforward compensation unit; And a timing correction unit that adjusts the timing of nonlinear correction of the command nonlinear correction unit.

  According to the present invention, the first feedforward compensation unit generates the first position command as the first drive command by attenuating the vibration factor component of the control target included in the position command output from the command generation unit. Therefore, the vibration factor component included in the first drive command is attenuated, the mechanical vibration to be controlled is reduced or prevented, and high-speed and high-precision control is possible. The second feedforward compensation unit includes a drive command nonlinear correction unit that generates a second drive command by applying a nonlinear function to the position command or the processing result of the position command, and vibrations of the first feedforward compensation unit. The delay filter has a delay amount substantially equivalent to the filtering delay amount of the reduction filter and includes a timing correction unit that adjusts the timing of the nonlinear correction of the drive command nonlinear correction unit, so that there is a nonlinear disturbance such as Coulomb friction, for example. However, it is possible to correct the non-linear motion of the controlled object by the second drive command, and the second drive command corrects the non-linear motion at an appropriate timing substantially synchronized with the first drive command. Since the second drive command is generated by the second feedforward compensation unit that is separate from the vibration reduction filter, the mechanical vibration to be controlled is reduced without being affected by the natural frequency of the vibration reduction filter itself. Alternatively, it is possible to correct the non-linear operation with high accuracy while preventing it. The feedback compensation unit measures the first drive command generated by the first feedforward compensation unit, the second drive command generated by the second feedforward compensation unit, and the state of the control target. Since the position and speed of the controlled object are feedback-controlled based on the measurement result of the state measuring unit to perform, it has both the effect of the first drive command and the effect of the second drive command generated separately from this, In addition, position control and speed control can be performed so as to follow the state of the control target. That is, even if there is a disturbance such as Coulomb friction, mechanical vibrations to be controlled can be reduced or prevented, and high-speed and high-precision control with little response delay can be performed.

Hereinafter, various embodiments according to the present invention will be described with reference to the accompanying drawings.
Embodiment 1 FIG.
FIG. 1 is a diagram showing a servo control apparatus according to Embodiment 1 of the present invention. A servo control device 1 shown in FIG. 1 is a digital processing device such as a computer, for example, and performs a calculation operation for calculating a torque command from a position command that changes at a constant sampling period.

  The control target 2 includes an X-axis table 3 that is a positioning table, a servo motor 4 that drives the X-axis table 3, and an encoder (state measurement unit) 5 that measures the position of the movable part of the X-axis table 3 from the rotation angle of the motor 4. , And a motor driver 6 that controls the supply current to the motor 4 so that the motor 4 exhibits the torque specified in the input torque command Tcx.

  The servo control device 1 includes a command generation unit 7, a first feedforward compensation unit 8, a second feedforward compensation unit 9, and a feedback compensation unit 10. These actually represent the functions of the digital processing apparatus according to the processing program, and constitute the digital processing apparatus as a unit. The command generation unit 7 generates a position command for the control target 2 based on an operation program that describes the operation of the control target 2, and outputs the position command to the first feedforward compensation unit 8 and the second feed for each sampling period. This is supplied to the forward compensation unit 9.

  Based on the position command, the first feedforward compensation unit 8 attenuates the vibration factor component of the control target 2 and moves the control target 2 (in this embodiment, the first position) Command, first speed feedforward command and first torque feedforward command). It has a vibration reducing filter 11, differentiators (differential operation units) 12 and 13, and amplifiers 14 and 15. The vibration reduction filter 11 is, for example, a band rejection filter or a notch filter, and generates a first position command by attenuating a vibration factor component of the controlled object 2 included in the position command, particularly a natural frequency component of the controlled object 2. To do. The differentiator 12 differentiates the first position command output from the vibration reduction filter 11 and converts it into a speed command. Further, the differentiator 13 differentiates the speed command output from the differentiator 12 and converts it into an acceleration command.

  The amplifier 14 of the first feedforward compensation unit 8 multiplies the speed command output from the differentiator 12 by a constant gain Kvx1, and outputs the multiplication result as a first speed feedforward command. The gain Kvx1 is normally set to 1, but may be adjusted as necessary. The amplifier 15 multiplies the acceleration command output from the differentiator 13 by a constant gain Ktx1, and outputs the multiplication result as a first torque feed forward command. The gain Ktx1 is a constant for obtaining a torque necessary for realizing the acceleration specified by the acceleration command. Normally, a value corresponding to the total inertia of the control target 2 is set as the gain Ktx1.

  Based on the position command, the second feedforward compensation unit 9 reduces the non-linear motion of the controlled object 2 (that is, corrects the non-linear motion). The second drive command (second torque in this embodiment) Feedforward command). In other words, the second feedforward compensation unit 9 generates a command for minimizing the influence of nonlinear disturbance such as predicted Coulomb friction. The second feedforward compensation unit 9 includes a timing correction unit 16, a differentiator 17, a torque command nonlinear correction unit (drive command nonlinear correction unit) 18, and an amplifier 19. The timing correction unit 16 receives the position command output from the command generation unit 7 and outputs a timing correction position command obtained by delaying the position command by a delay amount substantially equivalent to the delay amount associated with the filtering of the vibration reduction filter 11. Is done. The differentiator 17 differentiates the timing correction position command and converts it into a speed command. The torque command nonlinear correction unit 18 applies a nonlinear function (for example, a sign function) to the speed command output from the differentiator 17 to generate a sign of the torque command. The amplifier 19 multiplies the sign of the torque command output from the torque command nonlinear correction unit 18 by the gain Ktx2, and outputs the multiplication result as a second torque feedforward command. As the gain Ktx2, a value corresponding to the Coulomb friction coefficient of the control target 2 is set. As is clear from the above, the timing correction unit 16 synchronizes with the second torque feedforward so as to synchronize with a delay amount substantially equivalent to the delay amount associated with the filtering of the vibration reduction filter 11 of the first feedforward compensation unit 8. Output a command.

  The feedback compensation unit 10 includes a first torque feedforward command output from the first feedforward compensation unit 8, a second torque feedforward command output from the second feedforward compensation unit 9, and measurement by the encoder 5. Based on the result, the movement of the controlled object 2 is controlled. The feedback compensation unit 10 includes a subtracter (position error calculation unit) 20, a position control unit 21, a differentiator 22, an adder / subtractor (speed error calculation unit) 23, a speed control unit 24, and an adder (torque command calculation unit) 25. Have. The subtracter 20 calculates a position error that is a difference between the first position command output from the first feedforward compensation unit 8 and the position measurement value output from the encoder 5. Based on this position error, the position control unit 21 performs a position control calculation (including a proportional calculation, an integral calculation and a differential calculation), and calculates a desired speed value for setting the position error to zero.

  The differentiator 22 of the feedback compensation unit 10 differentiates the position measurement value output from the encoder 5 and converts it into a speed measurement value. The adder / subtracter 23 adds the desired speed value output from the position control unit 21 and the first speed feedforward command from the first feedforward compensation unit 8, and further subtracts the speed measurement value from the differentiator 22. Calculate the speed error. Based on this speed error, the speed control unit 24 performs a speed control calculation (including a proportional calculation, an integral calculation, and a differential calculation), and calculates a desired torque value so that the speed error becomes zero.

  The adder 25 of the feedback compensation unit 10 includes a first torque feedforward command from the first feedforward compensation unit 8, a second torque feedforward command from the second feedforward compensation unit 9, and a speed control. The desired torque value output by the unit 24 is added, and the addition result is output to the motor driver 6 as a torque command Tcx. In this way, the motor 4 is driven. By appropriately sequentially controlling the torque command Tcx, the position, speed, and acceleration of the motor 4 are appropriately controlled.

Next, the vibration reduction filter 11 of the first feedforward compensation unit 8 will be described in more detail. As described above, the vibration reduction filter 11 is, for example, a band rejection filter or a notch filter, and attenuates the vibration factor component of the controlled object 2 included in the position command, in particular, the natural frequency component of the controlled object 2 to attenuate the first position. Generate directives. The band rejection filter or the notch filter has a smaller phase delay in the low frequency region than the low pass filter, and sharply attenuates the amplitude characteristic near the band rejection frequency, so that mechanical vibration can be effectively reduced. A transfer function G ₁ (s) of a second-order band rejection filter is known as shown in Expression (1).

Here, ζ ₁ is a damping coefficient, ω ₁ is a frequency, and s is a Laplace operator. a ₀ , a ₁ and a ₂ are coefficients. If a ₀ = 1, a ₁ = 0, and a ₂ = 1 are substituted in equation (1), the transfer function of the notch filter can be realized. That is, a notch filter can be realized by the transfer function G ₁ of the equation (2).
G ₁ (s) = (s ² + ω ₁ ² ) / (s ² + 2ζ ₁ ω ₁ s + ω ₁ ² ) (2)

When the notch filter whose transfer function G ₁ (s) is expressed in Expression (2) is used for the vibration reduction filter 11, ω _{1 in} Expression (2) is the notch frequency with the largest attenuation by the notch filter. FIG. 2 shows the frequency characteristics of this notch filter. In FIG. 2, omega ₁ is the notch frequency, omega _b attenuation bandwidth of the notch filter, the A _b is the attenuation amplitude ratio, it is set according to the oscillation characteristics of the controlled object 2. The notch frequency ω ₁ is set to a frequency at which the vibration of the control target 2 should be most suppressed. Preferably, the notch frequency ω ₁ is set so as to coincide with the natural frequency ω _p of the controlled object 2. Further, the attenuation bandwidth ω _b and the attenuation amplitude ratio A _b of the notch filter can be changed by changing ζ ₁ in Expression (2) from 0 to ₁ . The adjustment of the notch frequency of the vibration reduction filter 11 is performed by measuring the vibration frequency included in the output of the encoder 5, but the linear scale that can directly measure the position of the movable part of the controlled object 2 or the accuracy of the machine tool. If a vibration frequency is measured using a position measuring device such as a DBB (double ball bar) or grid encoder used for measurement, a better control result can be obtained.

  According to such a configuration, the vibration reduction filter 11 includes the first position command, the first speed feedforward command, and the first torque feedforward command output from the first feedforward compensation unit 8. The vibration factor component of the controlled object 2 can be attenuated. The first speed feedforward command and the first torque feedforward command work to generate a large torque so that the control target 2 follows the first position command. Since the vibration factor component is attenuated, the mechanical vibration of the controlled object 2 is reduced or prevented, and the control can be performed with high speed and high accuracy.

  Although the notch filter as described above is suitable as the vibration reducing filter 11, a high frequency band rejection filter that includes the natural frequency of the controlled object 2 and that has a damping characteristic in a high frequency region may be used. In addition, when the control target 2 has a plurality of natural frequencies, it is more effective to use a band rejection filter having a plurality of attenuation frequencies corresponding to the plurality of natural frequencies.

  Next, the operation of the second feedforward compensation unit 9 will be described in more detail. When the control object 2 is affected by a nonlinear disturbance such as Coulomb friction, a motor position error called stick motion occurs when the motor speed is reversed from positive to negative and from negative to positive. This is a phenomenon in which since the motor cannot rotate under the condition where the motor generated torque is equal to or less than the Coulomb friction force, the controlled object 2 is stopped without following the position command until the motor torque becomes larger than the Coulomb friction force. . In order to correct the influence of such a nonlinear operation or disturbance, the torque command nonlinear correction unit 18 and the amplifier 19 of the second feedforward compensation unit 9 are used.

  The torque command nonlinear correction unit 18 generates a sign of the torque command by applying a nonlinear function for correcting the nonlinear operation to the speed command output from the differentiator 17. For the purpose of canceling the influence of the Coulomb friction force, the torque command nonlinear correction unit 18 outputs the speed command input to the torque command nonlinear correction unit 18 when the speed command is reversed from positive to negative or from negative to positive. A function in which the sign of the torque command changes rapidly and discontinuously may be used. For example, it is preferable to use a step function or a sign function. The sign function outputs a sign of a torque command having a value of 1 if the input speed command is positive, and outputs a sign of a torque command having a value of 0 if the input speed command is 0. If the command is negative, the sign of the torque command having a value of -1 is output. According to this, when the positive / negative sign of the speed command output from the differentiator 17 is reversed, the motor 4 can exert torque that overcomes the frictional force.

  The nonlinear function used by the torque command nonlinear correction unit 18 may be another function in which the output changes discontinuously suddenly when the sign of the input speed command is inverted. In addition, considering the hysteresis characteristics of the motor 4 (input / output characteristics with different output values when the input increases and decreases even when the input value is the same), the input speed command is reversed from negative to positive. Different functions may be used for the case of reversing from positive to negative. For example, as shown in FIG. 3, when the input speed command reverses from negative to positive, the speed command increases from negative to reach 0 and becomes slightly larger than 0. When a step function that switches the sign from -1 to 1 is used and the input speed command reverses from positive to negative, the speed command decreases from positive and reaches 0, slightly larger than 0. In this case, a step function for switching the sign of the torque command from 1 to -1 may be used.

The timing correction unit 16 is preferably a low-pass filter that does not overshoot even when the input rises steeply (hereinafter referred to as an overshoot 0 filter). In addition, it is preferable that the overshoot 0 filter has a delay characteristic substantially equal to the delay amount associated with the filtering of the vibration reduction filter 11 in the low frequency region, and thus has a low-pass characteristic substantially equivalent to that of the vibration reduction filter 11. The low frequency region is generally a frequency region of 1/10 or less of the notch frequency ω ₁ (the lowest notch frequency when there are a plurality of notch frequencies) of the vibration reducing filter 11. As the overshoot 0 filter, a primary filter or a secondary filter having an attenuation coefficient ζ of 1 is preferably used. An example of the transfer function G ₂ (s) of the second-order overshoot 0 filter is shown in Equation (3).

Here, ω ₂ is the frequency, and ζ ₂ is the damping coefficient. Typically, ζ ₂ = 1 is set to realize an overshoot 0 filter. b ₀ , b ₁ , and b ₂ are coefficients. If b ₀ = 0, b ₁ = 0, and b ₂ = 1, low-pass characteristics can be realized. That is, a low-pass filter can be realized by the transfer function G ₂ of the equation (4).
G ₂ (s) = ω ₂ ² / (s ² + 2ζ ₂ ω ₁ s + ω ₂ ² ) (4)

The frequency characteristic of the overshoot 0 filter can be adjusted by changing the frequency ω ₂ . When using a low-pass filter whose transfer function G ₂ (s) is expressed by Equation (4), for example, ζ ₂ = 1 is set, and the frequency characteristic is adjusted by changing the frequency ω ₂ . Usually, the frequency ω ₂ is set in the vicinity of the frequency ω ₁ of the vibration reduction filter 11 or so that ω ₂ > ω ₁ . By adjusting in this way, the timing at which the sign of the speed command output from the differentiator 12 of the first feedforward compensation unit 8 reverses from positive to negative, and from negative to positive, and the second feedforward compensation unit 9 The timing at which the sign of the speed command output from the differentiator 17 is reversed from positive to negative and from negative to positive can be substantially matched. Therefore, the timing at which the sign of the torque command that is the output of the sign function of the torque command nonlinear correction unit 18 is reversed is appropriate. The sign of the torque command is multiplied by a coefficient Ktx2 corresponding to the Coulomb friction coefficient by the amplifier 19 and supplied to the feedback compensation unit 10 as a second torque feedforward command. Since the second torque feedforward command works to correct the influence of the Coulomb friction force applied to the control target 2, the control target 2 can be controlled with high accuracy. The vibration reduction filter 11 and the overshoot 0 filter have been described with respect to the second-order filter as shown in the equations (1) to (4), but may be a primary filter or a higher-order filter of the third or higher order. .

As described above, when the overshoot 0 filter used as the timing correction unit 16 is a secondary filter, it is preferable to set the attenuation coefficient ζ ₂ to 1, but the differential value of the position command of the command generation unit 7, that is, the speed When the command component does not change suddenly, even when the attenuation coefficient ζ ₂ in equation (4) is smaller than 1, the output of the filter often does not cause overshoot. Therefore, in such a case, the attenuation coefficient ζ ₂ may be set in the range of 0.7 to 1.

As a method of adjusting the frequency ω ₂ , a position signal measured by a device that can directly measure the speed measurement value of the differentiator 22 of the feedback compensation unit 10 or the position of the movable part of the table 3, for example, a device such as a linear scale. Alternatively, adjustment may be made using a speed signal. When adjusting with the speed measurement value or the speed signal, adjustment is made so that the sign of the sign changes at almost the same timing as the speed command output from the differentiator 17 of the second feedforward compensation unit 9. According to this, a better control result can be obtained. Even if a position measuring device such as a DBB (double ball bar) or grid encoder used for measuring the accuracy of a machine tool is used to adjust the position error due to friction to be small, a good control result can be obtained. .

  The reason why the overshoot 0 filter is used for the timing correction unit 16 will be described below. If a band rejection filter or notch filter having the same transfer function as the vibration reduction filter 11 is used for the timing correction unit 16, the speed command output from the differentiator 12 and the speed command from the differentiator 17 are substantially synchronized, and the speed The inversion timing of the positive and negative signs of the command is almost the same. Normally, when a signal that changes sharply, such as a step-like signal, is input to the band rejection filter or notch filter, it is output at the natural frequency of the filter itself. Vibrates slightly. For this reason, the speed command output from the differentiator 17 connected to such a filter also vibrates slightly at the natural frequency of the filter.

  When the speed command output from the differentiator 17 is minutely oscillated and reciprocates in the non-linear region of the non-linear function used in the torque command non-linear correction unit 18 (for example, in the sign function, the non-linear region is 0), the torque command nonlinear correction section 18 outputs a rectangular wave torque signal having the frequency of the minute vibration. Then, the second torque feedforward command of the feedforward compensation unit 9 also has a rectangular wave shape, and a torque that changes to a rectangular wave shape is applied to the controlled object 2. Thereby, the mechanical vibration of the controlled object 2 is excited and good control cannot be performed. If the overshoot 0 filter is used, even if the position command exhibits a steep change (even if position control is performed at high speed), the position command output from the timing correction unit 16 does not vibrate slightly. Can reduce or prevent mechanical vibration.

As described above, according to the first embodiment, the first feedforward compensation unit 8 attenuates the vibration factor component of the control target 2 included in the position command output from the command generation unit 7 to reduce the first feedforward compensation unit 8. Since the vibration factor component included in the first position command is attenuated, the mechanical vibration of the controlled object 2 is reduced or prevented, and high-speed and high-precision control is possible. It becomes. The vibration factor component is also attenuated for the first speed feedforward command and the first torque feedforward command derived from the first position command, and the mechanical vibration of the controlled object 2 is reduced or prevented, and the control is performed with high speed and high accuracy. It becomes possible.
The second feedforward compensation unit 9 receives the position command output from the command generation unit 7 and receives the timing correction by delaying the position command by a delay amount substantially equivalent to the delay amount associated with filtering by the vibration reduction filter 11. A timing correction unit 16 that outputs a position command, a differentiator 17 that differentiates the timing correction position command, and a second torque feedforward command by applying a nonlinear function to the differentiation result of the timing correction position command output by the differentiator 17 Therefore, even if there is a non-linear disturbance such as Coulomb friction, the non-linear operation of the controlled object 2 can be corrected by the second torque feedforward command. Further, since the second torque feedforward command is generated by the second feedforward compensator 9 which is a separate system from the vibration reduction filter 11, the control is performed without being affected by the natural frequency of the vibration reduction filter itself. It is possible to correct the nonlinear operation of the object 2.
The feedback compensation unit 10 includes the first position command, the first speed feedforward command, the first torque feedforward command, and the second feedforward compensation generated by the first feedforward compensation unit 8. Since the position control or speed control of the control target 2 is performed based on the second torque feedforward command generated by the unit 9 and the measurement result of the encoder 5 which is a state measurement unit that measures the state of the control target 2, the control target Therefore, even if there is a nonlinear disturbance such as Coulomb friction, high-speed and high-precision control with little response delay can be achieved.

  Further, according to the first embodiment, since the timing correction unit 16 of the second feedforward compensation unit 9 is a filter that does not overshoot, this servo control device can be used for the timing correction unit 16 itself even during high-speed position control. The generation of minute vibrations at the natural frequency can be prevented, and the non-linear operation can be corrected with higher accuracy while further effectively reducing or preventing the mechanical vibration of the controlled object 2. Therefore, the servo controller as a whole can perform high-speed and high-precision control more stably.

Embodiment 2. FIG.
4 is a block diagram showing a servo control apparatus according to Embodiment 2 of the present invention. In FIG. 4, the same reference numerals as those in FIG. 1 are used to indicate the same elements as those in FIG. 1, and detailed description of these elements is omitted. 1 is different from the embodiment of FIG. 1 in that the servo control device of the second embodiment includes an amplifier 30, an adder 31, a position command nonlinear correction unit (drive command nonlinear correction unit) 33, an amplifier 34, and an adder / subtracter (position error). Calculation unit) 35.

  The first feedforward compensation unit 8 includes an amplifier 30 and an adder 31. The amplifier 30 multiplies the speed command, which is the first-order differentiation result by the first position command differentiator 12, by the gain Ktx3, and outputs the multiplication result as a viscous friction torque correction value. The gain Ktx3 is a viscous friction coefficient in consideration of the viscous friction coefficient between the relative motion elements of the controlled object 2, specifically, the viscous friction in the motor 4 and the viscous friction existing between the movable part and the fixed part of the X-axis table 3. Corresponds to the coefficient. The adder 31 adds the viscous friction torque correction value to the first torque feedforward command, and outputs a total first torque feedforward command.

  When the controlled object 2 is affected by viscous friction, the controlled object 2 does not follow the motor command completely, and a position error occurs. In order to correct the influence of such nonlinear operation or disturbance, the amplifier 30 and the adder 31 of the first feedforward compensation unit 8 are used.

  The second feedforward compensation unit 9 includes a position command nonlinear correction unit 33 and an amplifier 34. The position command nonlinear correction unit 33 generates a sign of the position command by applying a nonlinear function to the speed command, which is the differentiation result of the timing corrected position command by the differentiator 17. The amplifier 34 multiplies the sign of the position command output from the position command nonlinear correction unit 33 by the gain Kpx2, and outputs the multiplication result as a second position command for correcting the backlash position to the controlled object 2. The gain Kpx2 is set to a value corresponding to the backlash of the motion transmission mechanism between the motor 4 to be controlled 2 and the X-axis table 3.

  The feedback compensation unit 10 has an adder / subtractor 35. The adder / subtracter 35 is a position measurement value which is a measurement result of the encoder 5 which is a state measurement unit, a first position command generated by the vibration reduction filter 11 of the first feedforward compensation unit 8, and a second feedforward. Based on the second position command generated by the compensation unit 9, the position error of the control object 2 is calculated. That is, the adder / subtracter 35 adds the first position command and the second position command, and calculates the position error by subtracting the position measurement value of the encoder 5 from the addition result. Based on this position error, the position control unit 21 performs position control calculation (including proportional calculation, integration calculation, and differentiation calculation) in the same manner as in the first embodiment, and calculates a desired speed value for setting the position error to zero. To do.

  Next, the operations of the position command nonlinear correction unit 33 and the amplifier 34 will be described in more detail. In the controlled object 2, if there is a backlash in the motion transmission mechanism between the motor 4 and the X-axis table 3, the movement of the movable part of the X-axis table 3 is delayed even if the motor 4 starts rotating. To do. That is, when the motor speed is reversed from positive to negative and from negative to positive, the operation of the X-axis table 3 may not immediately follow the motor rotation due to backlash. In order to correct the influence of such a nonlinear operation or disturbance, the position command nonlinear correction unit 33 of the second feedforward compensation unit 9 is used.

  The position command non-linear correction unit 33 applies a non-linear function for correcting non-linear motion to the speed command output from the differentiator 17 to generate a position command code. For the purpose of canceling the influence of backlash, the position command output from the position command nonlinear correction unit 33 when the speed command input to the position command nonlinear correction unit 33 is reversed from positive to negative or from negative to positive. A function in which the sign of the command changes discontinuously suddenly may be used. For example, a step function or a sign function can be used. The sign function outputs the sign of the position command with a value of 1 if the input speed command is positive, and outputs the sign of the position command with a value of 0 if the input speed command is 0. If the command is negative, the sign of the position command whose value is -1 is output. If the product multiplied by the gain Kpx2 is used, when the sign of the speed command output from the differentiator 17 is reversed, the motor 4 provides a position command for rapidly rotating an angle corresponding to backlash. it can.

  The non-linear function used by the position command non-linear correction unit 33 may be another function whose output changes discontinuously suddenly when the sign of the input speed command is reversed. Also, considering the backlash hysteresis characteristics of the motion transmission mechanism during forward and reverse rotation, it is preferable to use different functions depending on whether the input speed command reverses from negative to positive or reverse from positive to negative. . For example, similarly to the operation of the variation of the torque command nonlinear correction unit 18 described with reference to FIG. 3, when the input speed command reverses from negative to positive, the speed command increases from negative to zero. If the speed command is slightly larger than 0, a step function that switches the sign of the torque command from -1 to 1 is used. If the input speed command is reversed from positive to negative, the speed command is changed from positive to negative. If it decreases to 0 and becomes slightly smaller than 0, it is preferable to use a step function that switches the sign of the torque command from 1 to -1.

  According to the second embodiment, in addition to the effects of the first embodiment, the following effects are achieved. The first feedforward compensator 8 multiplies the first-order differential result by the first position command differentiator 12 by the gain corresponding to the viscous friction coefficient between the relative motion elements of the controlled object 2 and the viscous friction as the multiplication result. Since the amplifier 30 for outputting the torque correction value and the adder 31 for adding the viscous friction torque correction value to the first drive command are further provided, it is possible to correct even if there is a torque disturbance due to viscous friction in the controlled object 2. . Further, the second feedforward compensation unit 9 generates a second position command for correcting the backlash position to the controlled object 2 by applying a nonlinear function to the differentiation result of the timing correction position command by the differentiator 17. The feedback compensation unit 10 further includes a position command nonlinear correction unit 33, and the feedback compensation unit 10 includes a measurement result of the encoder 5, a first position command generated by the vibration reduction filter 11 of the first feedforward compensation unit 8, and a first position command. 2 further includes an adder / subtractor 35 that calculates a position error of the control target 2 based on the second position command generated by the feedforward compensation unit 9 and a position control unit 21 that reduces the position error. Even if there is backlash in 2, it becomes possible to control with high accuracy.

Embodiment 3 FIG.
FIG. 5 is a block diagram showing a servo control apparatus according to Embodiment 3 of the present invention. The control target 42 of the servo control device 1 according to the third embodiment includes a plurality of motors 4 and 44 that move objects in different directions (X-axis direction and Y-axis direction). More specifically, the control target 42 includes the Y-axis table 43, the motor 44, and the encoder related to the movement in the Y-axis in addition to the X-axis table 3, the motor 4, the encoder 5, and the motor driver 6 related to the movement in the X-axis direction. (State measurement unit) 45 and a motor driver 46 are included. The Y-axis table 43 is a positioning table and is mounted on a movable part of the X-axis table 3, and the X-axis table 3 and the Y-axis table 43 constitute an XY table. The moving direction (Y-axis direction) of the movable part of the Y-axis table 43 in FIG. 5 is a direction perpendicular to the paper surface. By driving the X-axis table 3 and the Y-axis table 43, two-dimensional positioning control can be performed. The motor 44 drives the Y-axis table 43, the encoder 45 measures the position of the movable part of the Y-axis table 43 from the rotation angle of the motor 44, and the motor driver 46 uses the torque specified in the input torque command Tcy to the motor. The supply current to the motor 44 is controlled so that the output 44 is exerted.

  In order to control the plurality of motors 4 and 44, the servo control device 1 includes a plurality of control systems that control the motors 4 and 44 with respect to the corresponding directions, and each control system has a first feed. Forward compensation units 8, 48, second feed forward compensation units 9, 49, and feedback control units 10, 50 are provided. 5, the same reference numerals as those in FIG. 1 are used to indicate the elements for controlling in the X-axis direction that are common to those in FIG. 1, and detailed descriptions thereof are omitted.

  The first feedforward compensation unit 48, the second feedforward compensation unit 49, and the feedback compensation unit 50 of the Y-axis control system are respectively the first feedforward compensation unit 8 and the second feedforward compensation of the X-axis control system. This is equivalent to the unit 9 and the feedback compensation unit 10. The vibration reduction filter 51, the differentiator 52, the differentiator 53, the amplifier 54, and the amplifier 55 of the first feedforward compensation unit 48 are respectively the vibration reduction filter 11, the differentiator 12, and the differentiator of the first feedforward compensation unit 8. 13, the amplifier 14 and the amplifier 15 operate in the same manner. The timing correction unit 56, the differentiator 57, the torque command nonlinear correction unit (drive command nonlinear correction unit) 58 and the amplifier 59 of the second feedforward compensation unit 49 are the same as the timing correction unit of the second feedforward compensation unit 9. 16, the differentiator 17, the torque command nonlinear correction unit 18, and the amplifier 19 are operated. Further, the subtractor 60, the position controller 61, the differentiator 62, the adder / subtractor 63, the speed controller 64, and the adder 65 of the feedback compensation unit 50 are the subtracter 20, the position controller 21, and the differentiator of the feedback compensation unit 10, respectively. 22, the adder / subtractor 23, the speed controller 24, and the adder 25 operate in the same manner. Note that the gain used in the X-axis control system and the gain used in the Y-axis control system are distinguished by subscripts x and y (for example, gains Kvx1 and Kvy1 of amplifiers 15 and 55 in the figure).

  Instead of the command generation unit 7 in FIG. 1, the servo control device includes a command generation unit 40 that outputs position commands in the X-axis direction and the Y-axis direction. The command generator 40 outputs an X-axis direction position command and a Y-axis direction position command for each sampling period. The X-axis direction position command is input to the first feed-forward compensation unit 8 and the second feed-forward compensation unit 9 of the X-axis control system, and the Y-axis direction position command is the first feed-forward compensation unit of the Y-axis control system. 48 and the second feedforward compensation unit 49. Based on the Y-axis direction position command, the first feedforward compensation unit 48 attenuates the vibration factor component of the control target 42 and moves the control target 42 in the first drive command in the Y-axis direction (this implementation) In this embodiment, a first position command, a first speed feedforward command, and a first torque feedforward command) are generated. The second feedforward compensation unit 9 reduces the nonlinear motion of the control target 42 based on the position command in the Y axis direction (that is, corrects the nonlinear motion). In the embodiment, a second torque feed forward command) is generated. The feedback compensation unit 50 outputs the first position command, the first speed feedforward command and the first torque feedforward command output from the first feedforward compensation unit 48, and the second feedforward compensation unit 49 outputs Based on the second torque feedforward command and the measurement result of the encoder 45, a torque command Tcy is generated to the motor driver 46 for controlling the movement of the controlled object 42 in the Y-axis direction.

  Thus, the X-axis control system and the Y-axis control system operate to drive the X-width motor 4 and thus the X-axis table 3, and the Y-axis motor 44 and thus the Y-axis table 43. If the response characteristics (time response characteristics and frequency response characteristics) of 4 and the Y-axis table 44 are not matched equally, a two-dimensional operation on the XY table will result in a large trajectory error. For example, if the X-axis and Y-axis responses are different, the resulting trajectory will be an elliptical trajectory, even if the XY table is caused to move along a circular trajectory, for example, the true circle of the manufactured object on the table The degree gets worse. For this reason, it is preferable to match the response characteristics of the X-axis table 4 and the Y-axis table 44 equally.

In the servo control device 1 of FIG. 5, since the vibration reduction filters 11 and 51 have a great influence on the response characteristics of the table, the filter characteristics (time response characteristics and frequency response characteristics) of the vibration reduction filters 11 and 51 are equalized. It is preferable to keep them together.
As a method of matching the filter characteristics of the vibration reduction filters 11 and 51 equally, it is preferable to adjust the phase delay amount in the low frequency region equally. The low frequency region is, for example, a frequency region of 1/10 or less of the lowest frequency among the vibration factor components to be controlled. Alternatively, when there are a plurality of vibration factor components, it may be considered that the frequency region is 1/10 or less of the lowest notch frequency among the notch frequencies ω ₁ set by the vibration reduction filters 11 and 51. The low frequency region is a frequency region that is very often used in a servo control device. In this low frequency region, the filter characteristics of the vibration reduction filters 11 and 51 are adjusted so that the difference between the phase delay amounts of the vibration reduction filters 11 and 51 is ± 12.6 degrees or less. For adjusting the filter characteristics, for example, the coefficients of the vibration reduction filters 11 and 51 corresponding to the coefficients a ₀ , a ₁ , a ₂ and ζ 1 of the transfer function of the band rejection filter are adjusted. By adjusting the filter characteristics in this way, for example, when the XY table is moved along a circular trajectory, a trajectory having a roundness of 80% or more can be achieved.

Furthermore, it is preferable to use the same filter transfer function for the vibration reduction filters 11 and 51 as a simple method for equalizing the filter characteristics of the vibration reduction filters 11 and 51. For example, when the natural frequency ω _px of the X-axis table 3 and the natural frequency ω _py of the Y-axis table 43 are different, the filters of the vibration reduction filters 11 and 51 are either of the frequencies generated individually for each axis. A filter having a filter characteristic as shown in FIG. It is assumed that each of the vibration reduction filters 11 and 51 has two notch frequencies (a first notch frequency and a second notch frequency). In FIG. 6, ω _1x is the first notch frequency of the vibration reduction filters 11 and 51, ω _1y is the second notch frequency of the vibration reduction filters 11 and 51, and A _bx is the first attenuation of the vibration reduction filters 11 and 51. The amplitude ratio, A _by, is the second attenuation amplitude ratio of the vibration reduction filters 11, 51. The first notch frequency ω _1x is set so as to coincide with the natural frequency ω _px of the control target 2 in the X-axis direction, and the second notch frequency ω _1y is the natural frequency ω _{py of the} control target 2 in the Y-axis direction. Set to match. A _bx is adjusted according to the magnitude of the vibration amplitude of the X-axis table 3, and A _by is adjusted according to the magnitude of the vibration amplitude of the Y-axis table.
Although the vibration reduction filters 11 and 51 are preferably the same as described above, there may be a difference in filter characteristics as long as the trajectory error does not increase when the control target 2 is driven in two dimensions. .

When the overshoot 0 filter is used for the timing correction units 16 and 56, the variables ζ ₂ and ω _{2 of} Equation (4) used by the timing correction units 16 and 56 are set so that these filter characteristics are equal to each other. Are preferably matched as much as possible.

As described above, according to the third embodiment, in order to control the control object 42 including the plurality of motors 4 and 44 that move the objects in different directions, the respective motors 4 and 44 are in the corresponding directions. A plurality of control systems that control the first feedforward compensation unit 8 or 48, the second feedforward compensation unit 9 or 49, the encoder 5 or 45, and the feedback control unit. 10 or 50, the mechanical vibration in each drive direction of the control target 42 is reduced even if there is a nonlinear disturbance such as Coulomb friction in each drive direction of the control target 42 having a plurality of drive directions such as an XY table. Alternatively, high-speed and high-precision control with little response delay can be performed in each driving direction.
Further, the amount of phase delay in the low frequency region of the vibration reduction filter 11 of the first feedforward compensation unit 8 of one control system and the vibration reduction filter 51 of the first feedforward compensation unit 48 of the other control system. The difference from the phase delay amount in the low frequency region is within ± 12.6 °, and the overshoot 0 filter of the timing correction unit 16 of the second feedforward compensation unit 9 of one control system and the other control system Since the filter characteristics of the overshoot 0 filter of the timing correction unit 56 of the second feedforward compensation unit 49 are made equal to each other, high-precision control with little two-dimensional shape error can be realized.

The servo control device 1 used for the control object 42 that performs the two-dimensional operation in which the driving directions are the X-axis direction and the Y-axis direction has been described above, but has three or more driving directions by increasing the control system. It is also possible to use the servo control device according to the present invention as a control target.
It is possible to combine the second embodiment (FIG. 4) with the third embodiment. That is, the amplifier 30, the adder 31, the position command nonlinear correction unit 33, the amplifier 34, and the adder / subtractor 35 of the second embodiment may be provided in each control system of this embodiment.

Embodiment 4 FIG.
FIG. 7 is a block diagram showing a servo control apparatus according to Embodiment 4 of the present invention. In FIG. 7, the same reference numerals as those in FIG. 1 are used to indicate the same elements as those in FIG. 1, and detailed descriptions thereof are omitted. The difference from the embodiment of FIG. 1 is the configuration of the second feedforward compensation unit 70.

  The second feedforward compensation unit 70 includes a minute vibration removal nonlinear correction unit 71, a torque command nonlinear correction unit 18, and an amplifier 19. A speed command output from the differentiator 12 of the first feedforward compensation unit 8 is input to the minute vibration elimination nonlinear correction unit 71. The minute vibration removal nonlinear correction unit 71 is in the vicinity of the nonlinear region of the torque command nonlinear correction unit 18 with respect to the output of the differentiator 12, that is, the speed command that is the differentiation result of the first position command generated by the vibration reduction filter 11. The process which removes minute vibration of is performed. The torque command nonlinear correction unit 18 applies a nonlinear function (for example, a sign function or a hysteresis function) to the processing result of the minute vibration removal nonlinear correction unit 71 to generate a sign of the torque command. The amplifier 19 multiplies the sign of the torque command output from the torque command nonlinear correction unit 18 by the gain Ktx2, and outputs the multiplication result as a second torque feedforward command. As the gain Ktx2, a value corresponding to the Coulomb friction coefficient of the control target 2 is set.

  With this configuration, the second feedforward compensation unit 70 generates a second drive command (a second torque feedforward command in this embodiment) for correcting the nonlinear motion of the controlled object 2. In other words, the second feedforward compensation unit 70 generates a command for minimizing the influence of nonlinear disturbance such as predicted Coulomb friction.

  Next, the operation of the second feedforward compensation unit 70 will be described in more detail. FIG. 8 is a graph showing the input / output characteristics of the minute vibration elimination nonlinear correction unit 71, that is, the function to be executed. This function is a step function, and outputs 0 when the input speed command is in a certain range near 0 (hereinafter referred to as dead zone). When there is an input above the dead band, the minute vibration removal nonlinear correction unit 71 outputs 1, and when there is an input below the dead band, the minute vibration removal nonlinear correction unit 71 outputs -1. As in the illustrated example, the range of the dead zone for positive input and the range of the dead zone for negative input are preferably equal, but the present invention is not limited to this, and both ranges may be slightly different.

  As described in connection with the first embodiment, normally, when a band-changing filter or notch filter receives a signal that changes sharply, for example, a stepped signal, the output is small at the natural frequency of the filter itself. Vibrate. For this reason, the speed command output from the differentiator 12 at the subsequent stage of the vibration reduction filter 11 also vibrates slightly at the natural frequency of the vibration reduction filter 11. When the speed command output from the differentiator 12 slightly fluctuates in the vicinity of the nonlinear region of the torque nonlinear correction unit 18, if the output of the differentiator 12 is input to the torque command nonlinear correction unit 18, the torque command nonlinear correction unit 18 is minute. Outputs a sign of a square wave torque signal having a vibration frequency.

The minute vibration removal non-linear correction unit 71 has a dead zone, and outputs 0 even when such a small amplitude vibration is input, and thus acts to remove such a small amplitude vibration. Accordingly, the dead zone of the minute vibration elimination nonlinear correction unit 71 is set to have a range larger than the amplitude of the minute vibration of the speed command given from the differentiator 12. The torque command nonlinear correction unit 18 and the amplifier 19 perform processing equivalent to that in the first embodiment on the processing result output from the minute vibration removal nonlinear correction unit 71, thereby generating a second torque ford forward command. Is output.
When the processing of the minute vibration removal nonlinear correction unit 71 includes the processing of the torque command nonlinear correction unit 18 (for example, when the torque command nonlinear correction unit 18 is a sign function), the torque command nonlinear correction unit 18 is changed. Alternatively, the output of the minute vibration removal nonlinear correction unit 71 may be input to the amplifier 19.

As described above, according to the fourth embodiment, as in the first embodiment, the first feedforward compensation unit 8 is configured to vibrate the control target 2 included in the position command output from the command generation unit 7. Since the vibration reduction filter 11 that generates the first position command by attenuating the factor component is provided, the vibration factor component included in the first position command is attenuated, and the mechanical vibration of the controlled object 2 is reduced or prevented. It becomes possible to control with high accuracy. The vibration factor component is also attenuated for the first speed feedforward command and the first torque feedforward command derived from the first position command, and the mechanical vibration of the controlled object 2 is reduced or prevented, and the control is performed with high speed and high accuracy. It becomes possible.
Further, the second feedforward compensation unit 70 performs a nonlinear region of the torque command nonlinear correction unit 18 on the differential result of the first position command generated by the vibration reduction filter 11 of the first feedforward compensation unit 8. Since the second vibration feed forward command is generated by the minute vibration removal nonlinear correction unit 71 that performs the removal process of the minute vibrations in the vicinity and the torque command nonlinear correction unit 18 having a nonlinear function, for example, such as Coulomb friction Even if there is a non-linear disturbance, the non-linear operation of the control target 2 can be corrected by the second torque feedforward command. Since the second torque feedforward command is generated by the second feedforward compensation unit 9 that is a separate system from the vibration reduction filter 11, the second torque feedforward command is not affected by the natural frequency of the vibration reduction filter 11 itself. It is possible to correct the nonlinear motion with high accuracy while reducing or preventing the mechanical vibration 2.
The feedback compensation unit 10 includes the first position command, the first speed feedforward command, the first torque feedforward command, and the second feedforward compensation generated by the first feedforward compensation unit 8. Since the position control or speed control of the control target 2 is performed based on the second torque feedforward command generated by the unit 9 and the measurement result of the encoder 5 which is a state measurement unit that measures the state of the control target 2, the control target Therefore, even if there is a nonlinear disturbance such as Coulomb friction, high-speed and high-precision control with little response delay can be achieved.

Embodiment 5 FIG.
FIG. 9 is a block diagram showing a servo control apparatus according to Embodiment 5 of the present invention. The servo control device shown in FIG. 9 is a modification of the two-dimensional servo control device of the third embodiment (FIG. 5). Specifically, the minute vibration elimination nonlinear correction unit of the fourth embodiment is replaced with that of the third embodiment. The timing correction units 16 and 56 and the differentiators 17 and 57 are used in place of the microvibration elimination nonlinear correction unit, and the inputs are made from the differentiators 12 and 52.

  In FIG. 9, the same reference numerals as those in FIG. 5 are used to indicate the same elements as those in FIG. 5, and detailed descriptions of these elements are omitted. The difference from the embodiment of FIG. 5 is the configuration of the second feedforward compensation units 70 and 80. Therefore, in the servo control device 1, each control system in the X-axis direction or the Y-axis direction includes the first feedforward compensation units 8 and 48, the second feedforward compensation units 70 and 80, and the feedback control unit 10. , 50. The second feedforward compensation unit 70 in FIG. 9 performs control in the X-axis direction, has the same configuration as the second feedforward compensation unit 70 in FIG. 7, and performs the same operation.

  The second feedforward compensation unit 80 of the Y-axis control system is equivalent to the second feedforward compensation unit 70 of the X-axis control system. The minute vibration removal nonlinear correction unit 81, the torque command nonlinear correction unit 58, and the amplifier 59 of the second feedforward compensation unit 80 are the same as the minute vibration removal nonlinear correction unit 71, the torque command nonlinear correction unit of the second feedforward compensation unit 70, respectively. 18 and the amplifier 19 operate in the same manner. Therefore, the second feedforward compensation unit 80 reduces the nonlinear motion of the control target 42 based on the speed command in the Y-axis direction output from the differentiator 52 of the first feedforward compensation unit 48 (that is, the nonlinear motion). In the Y-axis direction (in this embodiment, a second torque feedforward command) is generated.

  Similarly to the third embodiment, in the servo control device 1 of FIG. 9, since the vibration reduction filters 11 and 51 have a great influence on the response characteristics of the table, the filter characteristics of the vibration reduction filters 11 and 51 (time response characteristics). And frequency response characteristics) are preferably matched equally. The filter characteristics of the vibration reduction filters 11 and 51 are adjusted so that the difference between the phase delay amounts of the vibration reduction filters 11 and 51 is ± 12.6 degrees or less at least in the low frequency region.

  As described above, according to the fifth embodiment, in order to control the control object 42 including the plurality of motors 4 and 44 that move the objects in different directions, the respective motors 4 and 44 are in the corresponding directions. A plurality of control systems that control the first feedforward compensation unit 8 or 48, the second feedforward compensation unit 70 or 80, the encoder 5 or 45, and the feedback control unit. 10 or 50, the mechanical vibration in each drive direction of the control target 42 is reduced even if there is a nonlinear disturbance such as Coulomb friction in each drive direction of the control target 42 having a plurality of drive directions such as an XY table. Alternatively, high-speed and high-precision control with little response delay can be performed in each driving direction.

  In addition, the phase delay amount in the low frequency region of the vibration reduction filter 11 of the first feedforward compensation unit 8 of one control system is low in the vibration reduction filter 51 of the first feedforward compensation unit 48 of the other control system. Since the difference with respect to the phase delay amount in the frequency domain is ± 12.6 degrees or less, high-precision control with little two-dimensional shape error can be realized.

  The servo control device 1 used for the control object 42 that performs the two-dimensional operation in which the driving directions are the X-axis direction and the Y-axis direction has been described above, but has three or more driving directions by increasing the control system. It is also possible to use the servo control device according to the present invention as a control target.

  In the first to fifth embodiments, a torque command is input to the motor drivers 6 and 46, and each compensator generates a torque feedforward command in response to this. However, not only the torque command but also a current command indicating the current supplied to the motors 4 and 44 may be input to the motor drivers 6 and 46 as a drive command. In such a case, the first feedforward compensation unit generates a first current feedforward command as the first drive command instead of the first torque feedforward command, and the second feedforward compensation unit As the second drive command, a second current feedforward command may be generated instead of the second torque feedforward command. Needless to say, even if the torque command is named acceleration command, a mode using the acceleration command is included in the scope of the present invention.

In the first to fifth embodiments, the first position command, the first speed feedforward command, and the first torque feedforward command are input to the feedback compensation units 10 and 50 as the first drive command, Although provided for feedback compensation, it is not intended to limit the present invention to the embodiments. For example, the following forms are also included in the scope of the present invention.
A mode in which only the first position command is input from the first feedforward compensation units 8 and 48 to the feedback compensation units 10 and 50 as the first drive command and used for feedback compensation. In this embodiment, the differentiators 12, 13, 52, 53 and the amplifiers 14, 15, 54, 55 are unnecessary.
Only the first position command and the first speed feedforward command are input from the first feedforward compensation units 8 and 48 to the feedback compensation units 10 and 50 as the first drive command and used for feedback compensation. . In this embodiment, the differentiators 12 and 53 and the amplifiers 15 and 55 are unnecessary.

In the first to third embodiments, the differentiator 17 differentiates the timing correction position command generated by the timing correction unit 16 based on the position command to generate the timing correction position command. May be processed by a timing correction unit to generate a timing correction position command.
Further, in the first to third embodiments, the torque command nonlinear correction units 18, 58 apply a nonlinear function to the speed command generated by the first-order differentiation of the outputs of the timing correction units 16, 56 by the differentiators 17, 57. Thus, the second torque feedforward command is generated, but the second drive command generated by the second feedforward compensation unit 9 is not intended to be limited to such a second torque feedforward command. For example, the following forms are also included in the scope of the present invention.
A speed command is generated by applying a nonlinear function similar to the above to the output result (timing correction position command) of the timing correction unit 16, and a second speed feedforward command is generated by multiplying the speed command by a gain. The second speed feedforward command is supplied to the adder / subtractor 23, 63. In this embodiment, the adders / subtractors 23 and 63 add the first speed feedforward command and the second feedforward command generated in this way to the difference between the desired speed and the speed measurement value.
By applying a nonlinear function similar to the above to the second derivative result (acceleration command) of the timing correction units 16 and 56, a sign of the torque command is generated, and the sign of the torque command is multiplied by a gain to generate the second torque. A form in which a feedforward command is generated and this second torque feedforward command is supplied to adders 25 and 65. In this embodiment, the adders 25 and 65 add the desired torque, the first torque feedforward command, and the second torque feedforward command thus generated.
As a modification of the second embodiment of FIG. 4, the torque command nonlinear correction unit 18 and the amplifier 19 are not provided, the second torque feedforward command is not generated, and the back generated by the position command nonlinear correction unit 33 and the amplifier 34. A mode in which only the second position command for rush position correction is supplied to the feedback compensators 10 and 50 as the second drive command.

Moreover, although Embodiment 1-5 finally controls a motor, the form which controls not only a motor but a linear actuator is also included in the scope of the present invention.
Further, forms obtained by equivalently converting the first to fifth embodiments are also included in the scope of the present invention.

It is a figure which shows the servo control apparatus by Embodiment 1 of this invention. It is a graph which shows the frequency characteristic of the vibration reduction filter used with the servo control apparatus of FIG. It is a graph which shows the example of the nonlinear function used with the variation of the drive command nonlinear correction | amendment part of FIG. It is a block diagram which shows the servo control apparatus by Embodiment 2 of this invention. It is a block diagram which shows the servo control apparatus by Embodiment 3 of this invention. It is a graph which shows the frequency characteristic which may be set about the vibration reduction filter used with the servo control apparatus of FIG. It is a block diagram which shows the servo control apparatus by Embodiment 4 of this invention. It is a graph which shows the input output characteristic of the minute vibration removal nonlinear correction | amendment part used with the servo control apparatus of FIG. 7, ie, the function to perform. It is a block diagram which shows the servo control apparatus by Embodiment 5 of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Servo control apparatus, 2,42 Control object, 3 X-axis table, 4,44 Motor (driver), 5,45 Encoder (state measurement part), 6,46 Motor driver, 7,40 Command generation part, 8, 48 First feed-forward compensation unit, 9, 49, 70, 80 Second feed-forward compensation unit, 10, 50 Feedback compensation unit, 11, 51 Vibration reduction filter, 12, 13, 52, 53 Differentiator (differentiation operation) Part), 14, 15, 19, 30, 34, 54, 55, 59 Amplifier, 20, 60 Subtractor, 16, 56 Timing correction part, 17, 22, 57, 62 Differentiator, 18, 58 Torque command nonlinear correction Part (drive command non-linear correction part), 21, 61 position control part, 23, 63 adder / subtractor (speed error calculation part), 24, 64 speed control part, 25, 31, 65 Adder, 33 a position command non-linear correction unit (drive command non-linear correction unit) 35 subtractor (position error calculation unit), 43 Y-axis table, 71 and 81 minute vibration removing non-linear correction unit.

Claims (4)

A command generator for generating a position command to the control target;
A first feedforward compensation unit that generates a first drive command for damping the vibration factor component of the control target to move the control target based on the position command generated by the command generation unit;
A second feedforward compensation unit that generates a second drive command for correcting the nonlinear motion of the controlled object based on the position command generated by the command generation unit;
A state measuring unit for measuring the state of the controlled object;
A feedback control unit configured to control the movement of the control target based on the first drive command, the second drive command, and the measurement result of the state measurement unit;
The first feedforward compensation unit attenuates a vibration factor component to be controlled included in the position command output from the command generation unit and generates a first position command as the first drive command. With a filter,
The second feedforward compensation unit includes a drive command nonlinear correction unit that generates the second drive command by applying a nonlinear function to the position command output from the command generation unit or a processing result of the position command. ,
A servo control having a delay amount substantially equivalent to a filtering delay amount of the vibration reduction filter of the first feedforward compensation unit and adjusting a timing of nonlinear correction of the drive command nonlinear correction unit; apparatus.   The servo control device according to claim 1, wherein the timing correction unit of the second feedforward compensation unit is a filter that does not overshoot. A command generator for generating a position command to the control target;
A first feedforward compensation unit that generates a first drive command for damping the vibration factor component of the control target to move the control target based on the position command generated by the command generation unit;
A second feedforward compensator for generating a second drive command for correcting the nonlinear motion of the controlled object;
A state measuring unit for measuring the state of the controlled object;
A feedback control unit configured to control the movement of the control target based on the first drive command, the second drive command, and the measurement result of the state measurement unit;
The first feedforward compensation unit attenuates a vibration factor component to be controlled included in the position command output from the command generation unit and generates a first position command as the first drive command. With a filter,
The second feedforward compensator applies the second drive by applying a non-linear function for performing a process of removing a minute vibration component to the processing result of the output of the vibration reduction filter or the output of the vibration reduction filter. A servo control device including a minute vibration removal nonlinear correction unit that generates a command. In order to control a control target including a plurality of drivers that move the object in different directions, each control system includes a plurality of control systems that control the respective drivers with respect to the corresponding directions. A feedforward compensation unit, a second feedforward compensation unit, a state measurement unit, and a feedback control unit,
Phase delay amount in the low frequency region of the vibration reduction filter of the first feedforward compensation unit of one control system, and phase delay amount in the low frequency region of the vibration reduction filter of the first feedforward compensation unit of the other control system The servo control device according to any one of claims 1 to 3, wherein a difference between the servo control device and the difference is within ± 12.6 °.

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