JPWO2014104014A1 - Light source device - Google Patents

Abstract

A light source device includes a discharge lamp, an elliptical mirror that reflects light emitted from the discharge lamp, a discharge lamp and an elliptical mirror, and a box-shaped housing provided with an emission port that emits light to the front panel. A light amount adjustment unit comprising: a diaphragm mechanism for controlling the amount of light; a shutter mechanism for controlling emission and blocking of light passing through the diaphragm mechanism; and a substantially box-shaped case member for supporting the shutter mechanism and the diaphragm mechanism A side panel of the housing has a mounting opening into which the light amount adjustment unit can be inserted, and the case member is a lid that can cover the mounting opening at the rear end of the light amount adjustment unit in the insertion direction. The light quantity adjustment unit is inserted into the casing through the mounting opening, and is attached to one side panel of the casing so that the lid covers the mounting opening.

Description

  The present invention relates to a light source device including a discharge lamp, and more particularly to a light source device including a diaphragm and a shutter on an optical path of light emitted from the discharge lamp.

  Conventionally, a light source device including a discharge lamp as a light source has been used to perform bonding of optical components, curing of paints and adhesives, wafer peripheral exposure in semiconductor manufacturing, and the like. This type of discharge lamp is, for example, a discharge lamp that emits Xe gas for a xenon lamp, mercury for an ultra-high pressure mercury lamp, and mercury and a metal halide for a metal halide lamp, and has a short arc, that is, a short arc compared to the diameter of the arc tube. It discharges at a distance between electrodes and generates light with very high luminance.

  The light emitted from the discharge lamp is reflected and collected by the reflecting mirror, guided to the exit of the light source device, and emitted to the outside by a light guide means such as an optical fiber bundle connected to the exit. The amount of light emitted from the discharge lamp is adjusted by a diaphragm mechanism provided between the discharge lamp and the exit. On / off of light emitted from the discharge lamp (that is, emission / blocking of light) is controlled by a shutter mechanism provided between the discharge lamp and the emission port (for example, Patent Document 1).

JP 2000-057816 A

  In general, the diaphragm mechanism and shutter mechanism are driven by an actuator such as a rotary solenoid, but such an actuator is affected by heat generation and vibration caused by long-term use, and deterioration of grease caused by long-term non-use. Due to deterioration over time, it must be replaced periodically.

  The light source device described in Patent Document 1 is provided with an inner box between a discharge lamp and an emission port, and a cover (inner box cover) of the inner box is composed of a shutter plate, a shutter drive unit (rotary solenoid), and the like. The shutter mechanism is integrally fixed. When the shutter mechanism is replaced, the entire inner box cover is replaced, so that complicated operations such as positioning of the shutter at the time of replacement are eliminated.

  However, in the light source device described in Patent Document 1, when replacing the shutter mechanism, (1) remove the upper cover of the housing, (2) remove the inner box cover from the inner box, (3) electrical wiring (connector (4) Replace with a new inner box cover, (5) Connect electrical wiring, (6) Install the inner box cover on the inner box, (7) Install the top cover on the housing There is a problem that downtime (non-operating time) that occurs when the shutter mechanism is replaced is not yet shortened.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a light source device that can easily replace a shutter mechanism and a diaphragm mechanism and can reduce downtime. To do.

  In order to achieve the above object, a light source device of the present invention accommodates a discharge lamp, an elliptical mirror that reflects light emitted from the discharge lamp, a discharge lamp and an elliptical mirror, and emits light to the front panel. A box-shaped housing provided with an exit port, an aperture mechanism that controls the amount of light, a shutter mechanism that controls emission and blocking of light passing through the aperture mechanism, and an abbreviation that supports the shutter mechanism and the aperture mechanism. A light amount adjustment unit having a box-shaped case member. One side panel of the housing has a mounting opening into which the light quantity adjustment unit can be inserted, and the case member has a lid that can cover the mounting opening at the rear end in the insertion direction of the light quantity adjustment unit. The adjustment unit is inserted into the casing from the mounting opening, and is attached to one side panel of the casing so that the lid covers the mounting opening.

  According to such a configuration, it is possible to replace the light amount adjustment unit without removing the panel of the housing, so that it is possible to drastically reduce downtime.

  When the case member is attached to one side panel of the housing, the case member is disposed on the elliptical mirror side, and has a first plate member having a first opening that allows light to pass through, and a side panel of the housing. A second plate-like member that is disposed between the first plate-like member and the front panel so as to face the first plate-like member when attached, and has a second opening that allows light to pass through; A light transmission region that allows light to pass through the first opening and the second opening through a space between the first plate member and the second plate member; and a light shielding region that blocks light. And a partition plate for partitioning. In this case, it is desirable that the partition plate surround the first opening and the second opening in a bowl shape, and the light transmission region is formed in a space surrounded by the partition plate. In this case, it is desirable that the space surrounded by the partition plate is opened in a direction orthogonal to the optical path of light. According to such a configuration, the light transmission region and the light shielding region can be easily formed in the space between the first plate member and the second plate member, and deteriorated by ultraviolet rays contained in the light. Electric parts and the like can be arranged in the light shielding region.

  The diaphragm mechanism includes a dimming element that is disposed on the optical path of the light and changes a light transmission amount, and a first actuator that drives the dimming element, and the first actuator is disposed in the light shielding region. The light control element can be configured to be disposed outside the second plate-like member. According to such a configuration, it is possible to prevent the first actuator from being deteriorated by ultraviolet rays contained in the light.

  In addition, the dimming element includes a disk-shaped rotating plate disposed so as to cross the optical path of light, and a net-like opening formed so that the opening area continuously changes along the circumferential direction of the rotating plate, Can be provided.

  The dimming element includes a disk-shaped rotating plate disposed so as to cross the optical path of the light, and an optical filter unit formed so that the light transmittance continuously changes along the circumferential direction of the rotating plate. And can be provided.

  The first actuator is preferably a motor that rotates the rotating plate.

  The shutter mechanism includes a shutter plate that is disposed on the optical path of the light and shields the light, and a second actuator that drives the shutter plate to advance and retract on the optical path of the light, and the second actuator is a light shielding region. The shutter plate can be arranged outside the second plate-like member. According to such a configuration, it is possible to prevent the second actuator from being deteriorated by ultraviolet rays contained in the light.

  Further, it is desirable that the light control element is disposed between the second plate member and the shutter plate. According to such a configuration, since the distance from the discharge lamp to the shutter plate is longer than the distance to the light control element, the light emitted from the light amount adjustment unit can be shielded by a relatively small shutter plate. It becomes.

  In addition, the light source device has an intake port that sucks air from the outside of the housing and an exhaust port that exhausts air sucked from the intake port to the outside of the housing, and the light shielding region is the air sucked from the intake port Can be formed so as to form a flow path that flows toward the exhaust port. In this case, the light amount adjustment unit includes a connecting member that connects the lid and the case member so as to form a hollow portion between the lid and the case member, and the hollow portion communicates with the light shielding region, When the adjustment unit is attached to one side panel of the housing, it is desirable that the hollow portion and the light-shielding region form a flow path for flowing the air sucked from the intake port toward the exhaust port. According to such a configuration, it is possible to efficiently cool the components arranged in the light shielding region.

  Further, the case member has a first connection mechanism electrically connected to the shutter mechanism and the diaphragm mechanism on the surface facing the lid, and the casing is provided inside the casing with the first connection mechanism. A second connection mechanism that fits into the connection mechanism is provided, and at least one of the first connection mechanism and the second connection mechanism is fixed to the case member or the housing with a predetermined play. It is desirable. In this case, it is desirable that at least one of the first connection mechanism and the second connection mechanism includes a guide mechanism that guides the other and assists mutual fitting. According to such a configuration, since the processing error, assembly error, mounting position error, etc. of the light amount adjustment unit are absorbed by play, the light amount adjustment unit is accurately positioned in the housing. Further, the fitting between the first connection mechanism and the second connection mechanism is smoothly and reliably performed.

  In addition, the housing can be configured to have a guide rail that guides insertion of the case member when the light amount adjustment unit is inserted into the housing. According to such a configuration, the light quantity adjustment unit can be easily inserted.

  As described above, according to the light source device of the present invention, the shutter mechanism and the diaphragm mechanism can be easily replaced, and the downtime of the light source device can be drastically shortened.

FIG. 1 is a schematic configuration diagram of a light source device according to an embodiment of the present invention. FIG. 2 is a perspective view illustrating a schematic configuration of a light source device according to an embodiment of the present invention. FIG. 3 is a perspective view illustrating a schematic configuration of an actuator unit accommodated in the light source device according to the embodiment of the present invention. FIG. 4 is an exploded perspective view of the actuator unit shown in FIG. FIG. 5 is a diagram for explaining the flow of air inside the light source device according to the embodiment of the present invention. 6 is a cross-sectional view taken along the line AA in FIG. FIG. 7 is a perspective view showing a modification of the actuator unit shown in FIG. FIG. 8 is an exploded perspective view of a modification of the actuator unit shown in FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or an equivalent part in a figure, and the description is not repeated.

  FIG. 1 is a diagram illustrating a schematic configuration of a light source device 1 according to an embodiment of the present invention. FIG. 1 is a top view when the top cover 10f (not shown in FIG. 1) of the housing 10 is removed. For convenience of explanation, a part of the configuration (for example, the elliptical mirror 40) is a cross-sectional view. It is shown in the figure. The light source device 1 is a device that supplies ultraviolet light in UV curing or the like in which a photosensitive resin is cured from a monomer to a polymer by photocuring. As shown in FIG. 1, the light source device 1 includes a box-shaped housing 10 that houses each component, a discharge lamp 30, and a lamp unit 14 that houses an elliptical mirror 40 that reflects light emitted from the discharge lamp 30. , An optical connector part 12 in which an exit 12 a for emitting light reflected by the elliptical mirror 40 (hereinafter referred to as “illumination light”) is formed, and an actuator unit disposed between the elliptical mirror 40 and the optical connector part 12. 100, and a control circuit 50 for driving and controlling the discharge lamp 30 and the actuator unit 100.

  The housing 10 includes a front panel 10a, a back panel 10b, a right side panel 10c, a left side panel 10d, a bottom plate 10e, and a top cover 10f (not shown in FIG. 1). An optical connector portion 12 is attached to the front panel 10 a so that the emission port 12 a opens toward the outside of the light source device 1. The optical connector portion 12 is a cylindrical member to which an optical fiber bundle (not shown) is connected. Illumination light emitted from the discharge lamp 30 passes through the optical connector portion 12 and is guided by the optical fiber bundle to the outside. Is emitted. The rear panel 10b is configured so that a fan unit 200 (not shown in FIG. 1) that sucks air outside the housing 10 into the interior and exhausts air inside the housing 10 to the outside can be attached. A partition plate that forms a flow path of air taken into the housing 10 and shields light emitted from the discharge lamp 30 from leaking to the outside. 15a-15f and 16 are arrange | positioned. In the present specification, the direction in which illumination light is emitted from the light source device 1 (that is, the front-rear direction of the housing 10) is taken as the X axis, and the longitudinal direction of the front panel 10a and the back panel 10b (that is, the housing 10). The right and left direction) is defined as the Y axis, and the direction orthogonal to the X axis and the Y axis (that is, the height direction of the housing 10) is described as the Z axis.

  The actuator unit 100 (light amount adjustment unit) includes a diaphragm mechanism 110 that controls the amount of light emitted from the elliptical mirror 40, and ON / OFF of illumination light emitted from the elliptical mirror 40 (that is, emission / blocking of illumination light). ) Is a unit (part) that is integrally provided with a shutter mechanism 130 that controls the shutter. The actuator unit 100 of the present embodiment is configured as a kind of replacement part, and can be inserted into and removed from the housing 10 through the opening 10da formed in the left side panel 10d of the housing 10 (that is, the left side panel 10d). On the other hand, it is detachable in the Y-axis direction). When the actuator unit 100 is mounted on the housing 10, the actuator unit 100 is connected to the connector 18 in the housing 40 and is disposed between the elliptical mirror 40 and the emission port 12 a. The connector 18 (second connection mechanism) is a connector connected to the connector 103 (first connection mechanism) provided in the actuator unit 100.

  FIG. 2 is a perspective view illustrating a schematic configuration of the light source device 1 of the present embodiment. In FIG. 2, the upper surface cover 10f of the housing 10 is broken to show a schematic configuration inside the apparatus. Further, in FIG. 2, in order to clarify the drawing, some components such as internal electric wiring are omitted.

  As shown in FIGS. 1 and 2, in the light source device 1, a lamp unit 14 is disposed on the left side (that is, the left side panel 10d side) across the partition plate 16, and the right side (that is, the right side panel 10c side). The drive circuit 50 is disposed in the circuit. The drive circuit 50 is operated by a commercial power source supplied from an AC inlet 51 attached to the back panel 10b, and is electrically connected to each component such as the discharge lamp 30, the actuator unit 100, and the like. And a control signal is transmitted and received. In the present embodiment, the drive circuit 50 and the actuator unit 100 are connected via the connector 18, and the motor 114 and the rotary solenoid 134 of the actuator 100 described later (FIG. 4). In addition, power is supplied through the connector 18 and control signals are transmitted and received.

  The lamp unit 14 is a case that houses the discharge lamp 30 and the elliptical mirror 40, and includes a front panel 14a, a back panel 14b, a right side panel 14c, and a left side panel 14d (FIG. 1). The front panel 14a of the lamp unit 14 and the front panel 10a of the housing 10 are connected via the optical connector portion 12, and the illumination light from the lamp unit 14 is emitted from the emission port 12a of the optical connector portion 12. It is like that. The discharge lamp 30 is a commercially available lamp provided with an arc tube formed using quartz glass or the like excellent in ultraviolet light transmittance and heat resistance. The discharge lamp 30 has an anode-side base 31 attached to the distal end side (X-axis direction positive side) and a cathode-side base 32 (fixing base) attached to the base end side (X-axis direction negative side). . A clamp member (not shown) for clamping the base 32 is exposed on the rear panel 14b, and the discharge lamp 30 is positioned and fixed in the lamp unit 14 by clamping the base 32 to the clamp member. When the discharge lamp 30 is mounted on the lamp unit 14, the position of the arc bright spot of the discharge lamp 30 coincides with the position of the first focal point of the elliptical mirror 40. When the power source of the light source device 1 is turned on, a high voltage is applied between the base 31 and the base 32 (that is, between the anode and the cathode) by the drive circuit 50. As a result, dielectric breakdown occurs between the anode and the cathode, and arc discharge starts. When the arc discharge starts, the drive circuit 50 supplies a current so as to maintain the arc discharge. For this reason, the discharge lamp 30 is lit stably.

  The elliptical mirror 40 is a reflecting member that reflects the light emitted from the discharge lamp 30 toward the exit port 12a. The illumination light reflected by the elliptical mirror 40 is gradually condensed so as to have a predetermined spot diameter at the emission port 12a, and is emitted from the emission port 12a through the actuator unit 100 (FIG. 1).

  As shown in FIG. 2, the actuator unit 100 is configured to be inserted into and removed from the housing 10 through an opening 10 da formed in the left side panel 10 d of the housing 10. The casing 10 extends parallel to the insertion direction of the actuator unit 100 (that is, the Y-axis direction). When the actuator unit 100 is inserted into the casing 10, the upper end and the lower end of the actuator unit 100 are A pair of guide rails 17 (in FIG. 2, the lower guide rail 17 is not shown) for guiding the outer diameter are formed. Therefore, when the actuator unit 100 is mounted, the actuator unit 100 is easily mounted by inserting the distal end side (Y axis direction positive side) of the actuator unit 100 into the opening 10da and pushing it into the housing 10.

  FIG. 3 is a perspective view illustrating a schematic configuration of the actuator unit 100 of the present embodiment. FIG. 4 is an exploded perspective view of the actuator unit 100 shown in FIG. In FIG. 4, in order to clarify the drawing, some components such as internal electric wiring are omitted.

<Configuration of actuator unit 100>
As shown in FIGS. 3 and 4, the actuator unit 100 of the present embodiment includes a diaphragm mechanism 110 that controls the amount of illumination light emitted from the elliptical mirror 40, and on / off of illumination light (that is, illumination light Shutter mechanism 130 for controlling emission / blocking), case 101 to which the diaphragm mechanism 110 and the shutter mechanism 130 are integrally fixed, and one side surface (first side plate) in the insertion direction (Y-axis direction) of the case 101 on the rear end side. 101c) is electrically connected to the lid 102, the diaphragm mechanism 110, and the shutter mechanism 130, and attached to the other side surface (second side plate 101d) of the distal end side of the case 10 in the insertion direction (Y-axis direction). And a connector 103.

  The case 101 is a substantially box-shaped metallic case. When the actuator unit 100 is mounted on the housing 10, the case 101 faces the first light shielding plate 101a located on the elliptical mirror 40 side and the first light shielding plate 101a. The second light shielding plate 101b located on the exit 12a side, the first side plate 101c and the second side plate 101d for connecting the first light shielding plate 101a and the second light shielding plate 101b, and the first light shielding plate 101a. A partition plate 101e that partitions the space between the second light shielding plate 101b into a light transmitting region through which illumination light emitted from the elliptical mirror 40 passes and a light shielding region through which illumination light emitted from the elliptical mirror 40 is shielded. And.

  The first light shielding plate 101a (first plate-like member) is a rectangular plate-like member having a circular opening 101ao (first opening) formed at a substantially central portion, and the actuator unit 100 is mounted on the housing 10. Then, the opening 101ao is arranged so as to cross the optical path of the illumination light. Accordingly, only the light that has passed through the opening 101ao out of the illumination light emitted from the elliptical mirror 40 enters the case 101.

  The first side plate 101c is a plate-like member for connecting the first light shielding plate 101a and the second light shielding plate 101b provided on the rear end side in the insertion direction of the case 101 (the Y axis direction negative side). The first side plate 101c of the present embodiment is formed of a common plate material with the first light shielding plate 101a, and is formed by bending the end portion on the Y axis direction negative side of the first light shielding plate 101a to the X axis direction positive side. Has been. The first side plate 101c has an inverted U-shape when viewed from the Y axis direction negative side. When the actuator unit 100 is mounted on the housing 10, air is contained in the housing 10. A rectangular notch 101ca constituting the flow path (that is, for passing air) is formed (details will be described later). Further, the second light shielding plate 101b side of the first side plate 101c is further bent so as to face the second light shielding plate 101b, and an upper mounting surface 101cb and a lower mounting surface 101cc for mounting the second light shielding plate 101b are provided. Is formed.

  The second side plate 101d is a plate-like member for connecting the first light-shielding plate 101a and the second light-shielding plate 101b provided on the distal end side (Y-axis direction positive side) of the case 101 in the insertion direction. The second side plate 101d of the present embodiment is formed of a common plate material with the first light shielding plate 101a, and is formed by bending the end on the Y axis direction positive side of the first light shielding plate 101a to the X axis direction positive side. Has been. On the upper side of the second side plate 101d, when the actuator unit 100 is mounted on the housing 10, a rectangular notch that forms an air flow path in the housing 10 (that is, for allowing air to pass through). 101da is formed (details will be described later). A rectangular opening 101db for attaching the connector 103 is formed below the second side plate 101d. The connector 103 is inserted into the opening 101db and positioned, and is fixed to the second side plate 101d with a screw (not shown). Each terminal of the connector 103 is electrically connected to the motor 114 of the diaphragm mechanism 110 and the rotary solenoid 134 of the shutter mechanism 130 by a cable (not shown). Further, the second light shielding plate 101b side of the second side plate 101d is further bent so as to face the second light shielding plate 101b, and an upper mounting surface 101dc, a central mounting surface 101dd and a lower mounting surface for mounting the second light shielding plate 101b. A side mounting surface 101de is formed.

  The second light shielding plate 101b (second plate-like member) is a rectangular plate-like member having a circular opening 101bo (second opening) formed at a substantially central portion, and the actuator unit 100 is attached to the housing 10. When this is done, the opening 101bo is arranged so as to cross the optical path of the illumination light. Therefore, only the light that has passed through the opening 101bo out of the light that has entered the case 101 through the opening 101ao is emitted from the case 101. Further, the diaphragm mechanism 110 and the shutter mechanism 130 are assembled to the second light shielding plate 101b (described later). Then, the second light shielding plate 101b assembled with the diaphragm mechanism 110 and the shutter mechanism 130 is screwed to the first side plate 101c and the second side plate 101d, so that the diaphragm mechanism 110 and the shutter mechanism 130 are fixed to the case 101. Is done.

  The lid 102 is a plate-like member that covers the opening 10da formed in the left side panel 10d of the housing 10 (that is, for covering the opening 10da), and is on the back side of the lid 102 (positive in the Y-axis direction). The spacer 102a is fixed to the side. The spacer 102a is a plate-like member having a U-shaped cross section in the X-axis direction, and the lid 102 is screwed to the first side plate 101c with the spacer 102a interposed therebetween. The hollow portion between the lid 102 and the spacer 102 a forms an air flow path in the housing 10 when the actuator unit 100 is mounted on the housing 10. The spacer 102a has an opening (not shown) at a position facing the notch 101ca, and a hollow portion between the lid 102 and the spacer 102a and the inside of the case 101 (light shielding region). Are configured to communicate with each other.

  The lid body 102 covers the opening 10da when the actuator unit 100 is mounted on the housing 10, contacts the left side panel 10d, and is inserted into the three through holes 102b formed in the lid body 102. It is fixed to the left side panel 10d by screws (not shown). That is, the lid body 102 of the present embodiment constitutes a part of the left side panel 10d when the actuator unit 100 is mounted on the housing 10. Therefore, when exchanging the actuator unit 100, it is only necessary to remove the screw fixing the lid 102 and replace the actuator unit 100, and troublesome work such as removing each panel of the housing 10 does not occur.

  The partition plate 101e is a member formed by bending an elongated metal plate material into a substantially U shape, and includes a U-shaped curved portion 101ea that is open on the upper side. The partition plate 101e is disposed so as to be sandwiched between the first light shielding plate 101a and the second light shielding plate 101b, and the curved portion 101ea surrounds the opening 101ao and the opening 101bo. The upper end of the curved portion 101ea is bent toward the first side plate 101c and the second side plate 101d along the upper end edge of the first light shielding plate 101a, and is a space inside the curved portion 101ea (that is, inside the U-shape). Is open upward, and the space outside the curved portion 101ea (that is, outside the U-shape) is open downward. As described above, the partition plate 101e of the present embodiment partitions the space between the first light shielding plate 101a and the second light shielding plate 101b into a U shape so that the space between the curved portion 101ea and the elliptical mirror 40 can be separated. A light transmission region through which the emitted illumination light passes is formed, and a light shielding region in which the illumination light emitted from the elliptical mirror 40 is shielded is formed in a space outside the curved portion 101ea. The actuator unit 100 according to the present embodiment arranges the motor 114 of the diaphragm mechanism 110, the rotary solenoid 134 of the shutter mechanism 130, and the wiring cables thereof in this light shielding region, so that these electrical components can be used as illumination light. It is configured not to be deteriorated by exposure to the contained ultraviolet rays. Of the illumination light emitted from the elliptical mirror 40, light that is not incident on the opening 101ao (that is, light incident on the first light shielding plate 101a) is reflected to the elliptical mirror 40 side by the first light shielding plate 101a. And is confined in the space between the elliptical mirror 40 and the first light shielding plate 101a. In addition, light that is not incident on the opening 101bo (that is, light incident on the second light shielding plate 101b) is reflected by the second light shielding plate 101b toward the first light shielding plate 101a, and the second light shielding plate 101b and the first light shielding plate. It is confined in the space between the plate 101a. Therefore, a part of the illumination light emitted from the elliptical mirror 40 does not leak outside the lamp unit 14 from a part other than the opening 101bo.

<Configuration of diaphragm mechanism 110>
Next, a specific configuration of the diaphragm mechanism 110 attached to the second light shielding plate 101b of the actuator unit 100 of the present embodiment will be described. The diaphragm mechanism 110 includes a disk-shaped diaphragm plate 111, a motor 114 that rotates the diaphragm plate 111, a cylindrical spacer 112 that fixes the diaphragm plate 111 to the rotation shaft 114a of the motor 114, and a rotation angle of the diaphragm plate 111. And a photo interrupter 113 to be detected.

  The second light shielding plate 101b is formed with a through-hole 101ba through which the rotating shaft 114a of the motor 114 is inserted. The motor 114 is connected to the second light shielding plate from the inside of the second light shielding plate 101b (that is, the light shielding region side). It is attached to 101b and fixed with a screw (not shown). When the motor 114 is attached to the second light shielding plate 101b, the rotating shaft 114a of the motor 114 protrudes outside the second light shielding plate 101b. Then, the rotating shaft 114a of the motor 114 is inserted into the fitting hole 112a of the spacer 112, and the spacer 112 is attached. Next, the diaphragm plate 111 is attached to the tip of the spacer 112 with a screw (not shown). A recess 101bb for positioning the photo interrupter 113 is formed on the outer side (X axis direction positive side) of the second light shielding plate 101b. The photo interrupter 113 is attached to the recess 101bb and fixed by a screw (not shown). The

  The aperture plate 111 is a metal member having a net-like opening 111a that changes the amount of illumination light that has passed through the opening 101bo and a circular opening 111b that transmits 100% of the illumination light that has passed through the opening 101bo. The disk surface is disposed outside the second light shielding plate 101b (that is, outside the opening 101bo) so that the disk surface vertically crosses the optical path of the illumination light. The opening 111a is formed so that the diameter of the mesh gradually changes (continuously) along the circumferential direction of the diaphragm plate 111, and corresponds to the stop position of the diaphragm plate 111 (that is, the stop position of the opening 111a). Thus, the amount of transmitted illumination light (that is, the amount of emitted light) can be adjusted. Further, a notch 111 c indicating a reference position (reference angle) of the diaphragm plate 111 is formed on the outer peripheral edge of the diaphragm plate 111.

  The motor 114 is a stepping motor (first actuator) for rotating the diaphragm plate 111, and is attached to the second light shielding plate 101b so that the rotation shaft 114a is parallel to the optical path of the illumination light as described above. . The motor 114 is electrically connected to the connector 103, and rotates the rotating shaft 114a at a predetermined step angle in accordance with the power supply and drive pulse supplied from the drive circuit 50 via the connector 103. A diaphragm plate 111 is attached to the tip of the rotating shaft 114 a of the motor 114 via a spacer 112. Accordingly, when the rotation shaft 114a rotates at a predetermined step angle, the diaphragm plate 111 rotates accordingly.

  The photo interrupter 113 is a transmission type photo interrupter that is disposed in the vicinity of the outer peripheral edge of the aperture plate 111 and detects a notch 111 c formed in the aperture plate 111. The photo interrupter 113 is electrically connected to the connector 103 and is operated by a power supply supplied from the drive circuit 50 via the connector 103. When the notch 111 c of the aperture plate 111 is positioned at the position of the photo interrupter 113 (that is, when the notch 111 c is detected), a detection signal is output to the drive circuit 50 via the connector 103. In the present embodiment, when the notch 111c of the aperture plate 111 is positioned at the position of the photo interrupter 113, the center of the opening 101bo and the center of the opening 111b substantially coincide with each other, and the illumination light that has passed through the opening 101bo is 100%. It is configured to transmit light, and this position of the diaphragm plate 111 is set as a reference position. When the user of the light source device 1 performs an input for reducing the amount of emitted light by operating an operation panel or an operation button (not shown), the drive circuit 50 responds to the input from the user. A predetermined drive pulse is output to the motor 114 so as to obtain an emitted light amount, and the diaphragm plate 111 is rotated by a predetermined angle. As described above, the diaphragm mechanism 110 according to the present embodiment rotates the diaphragm plate 111 according to the input from the user, so that the amount of illumination light desired by the user is emitted from the emission port 12a. I do.

<Configuration of shutter mechanism 130>
Next, a specific configuration of the shutter mechanism 130 of the present embodiment will be described. The shutter mechanism 130 includes an elongated plate-shaped shutter plate 131, a rotary solenoid 134 that rotates the shutter plate 131, three spacers 132 that fix the shutter plate 131 to the rotary solenoid 134, and a support plate 135 that supports the rotary solenoid 134. And a photo interrupter 133 that detects the rotation angle of the shutter plate 131.

  The shutter mechanism 130 is attached to the support plate 135 and fixed to the second light shielding plate 101b. Specifically, first, the rotary solenoid 134 is attached to the support plate 135 and fixed by screws (not shown). Next, the photo interrupter 133 is attached to the support plate 135 and fixed by screws (not shown). Then, the spacer 132 is sandwiched between the rotary plate 134a of the rotary solenoid 134 and the shutter plate 131, and the shutter plate 131 is fixed to the rotary plate 134a with screws (not shown). Then, the shutter mechanism 130 fixed to the support plate 135 is inserted into the notch opening 101bc formed in the second light shielding plate 101b from the inside (that is, the light shielding region side) of the second light shielding plate 101b, and is not shown. Secure with screws. When the shutter mechanism 130 of the present embodiment is fixed to the second light shielding plate 101b, the rotary solenoid 134 is attached so as to slightly protrude from the surface of the second light shielding plate 101b (FIG. 3). Since the light shielding plate 101bd is formed between the opening 134bo and the opening 101bo, the leakage light from the opening 101bo does not enter the rotary solenoid 134 directly.

  The shutter plate 131 is a metal plate-like member that is disposed outside the diaphragm plate 111, and has a tip portion 131 a configured to be able to advance and retreat in the optical path of illumination light that has passed through the diaphragm plate 111. When the actuator unit 100 is mounted on the housing 10, if the tip 131 a of the shutter plate 131 is arranged in the optical path of the illumination light that has passed through the diaphragm plate 111, the illumination light is blocked by the shutter plate 131. Illumination light emitted from the emission port 12a is blocked. On the contrary, when the front end 131a of the shutter plate 131 is disposed at a position deviated from the optical path of the illumination light that has passed through the diaphragm plate 111 (when retracted), the illumination light is not blocked by the shutter plate 131, and thus the emission port 12a. Illumination light is emitted from. As described above, the shutter plate 131 of the present embodiment is between the position in the optical path of the illumination light (hereinafter referred to as “blocking position”) and the position outside the optical path of the illumination light (hereinafter referred to as “retraction position”). In this way, the illumination light is turned on / off. A tongue 131c is formed on the base end portion 131b side of the shutter plate 131 so that the photo interrupter 133 can detect the position (blocking position or retracted position) of the shutter plate 131.

  The rotary solenoid 134 is an actuator for rotating (advancing and retracting) the shutter plate 131 attached to the rotating plate 134a. The rotary solenoid 134 is electrically connected to the connector 103, and rotates the rotating plate 134a by a predetermined angle (for example, 30 °) in accordance with the power supply and control signal supplied from the drive circuit 50 via the connector 103. The base end portion 131b of the shutter plate 131 is attached to the rotary plate 134a of the rotary solenoid 134 with the cylindrical spacer 132 interposed therebetween. When the rotary plate 134a rotates by a predetermined angle, the shutter plate 131 of the shutter plate 131 is moved accordingly. The tip 131a moves. That is, the rotary solenoid 134 of the present embodiment switches the position of the shutter plate 131 between the blocking position and the retracted position by rotating the diaphragm plate 111 by a predetermined angle.

  The photo interrupter 133 is a transmissive photo interrupter arranged so as to sandwich the tongue 131 c of the shutter plate 131. The photo interrupter 133 is electrically connected to the connector 103 and is operated by a power supply supplied from the drive circuit 50 via the connector 103. When the tongue 131c of the shutter plate 131 is positioned at the position of the photo interrupter 133 (that is, when the tongue 131c is detected), a detection signal is output to the drive circuit 50 via the connector 103. In the present embodiment, when the tongue 131c of the shutter plate 131 is positioned at the position of the photo interrupter 133, the tip 131a of the shutter plate 131 is disposed in the optical path of the illumination light that has passed through the diaphragm plate 111 (that is, The shutter plate 131 is set as a reference position. When the user of the light source device 1 performs an input for turning on the illumination light by operating an operation panel (not shown) or an operation button, the drive circuit 50 sends a predetermined signal to the rotary solenoid 134. , And the shutter plate 131 is rotated by a predetermined angle to be retracted from the optical path of the illumination light (that is, moved to the retracted position). As described above, the shutter mechanism 130 of the present embodiment performs on / off control of illumination light by rotating (moving) the shutter plate 131 in accordance with an input from the user. In the present embodiment, the illumination light reflected by the elliptical mirror 40 is gradually condensed so as to have a predetermined spot diameter at the exit port 12a. For this reason, since the distance from the discharge lamp 30 to the shutter plate 131 becomes longer than the distance to the diaphragm plate 111 by disposing the shutter plate 131 outside the diaphragm plate 111, the light emitted from the case 101. Can be shielded by a relatively small shutter plate 131.

  As described above, the actuator unit 100 according to the present embodiment includes the diaphragm mechanism 110 that controls the amount of illumination light and the shutter mechanism 130 that controls on / off of the illumination light (that is, emission / blocking of the illumination light). And is configured to be detachable from the housing 10 through an opening 10da formed in the left side panel 10d of the housing 10 (that is, detachable in the Y-axis direction with respect to the left side panel 10d). Yes. When the actuator unit 100 is mounted on the housing 10, the connector 103 is engaged with the connector 18 in the housing 40 and both are electrically connected. Therefore, according to the configuration of the present embodiment, it is not necessary to attach and detach electric wiring when exchanging the actuator unit 100. Note that the connector 18 of the present embodiment is loosely fixed in the housing 10 with a predetermined play in order to absorb processing errors, assembly errors, mounting position errors, and the like of the actuator unit 100. In another embodiment, the connector 18 may be securely fixed within the housing 10 and the connector 103 may be loosely fixed. In addition, a guide mechanism for assisting mutual fitting by guiding at least one of the connector 103 and the connector 18 so that the connector 103 and the connector 18 can be smoothly and reliably engaged. May be provided.

  As described above, in the actuator unit 100 according to the present embodiment, the motor 114, the rotary solenoid 134, and the wiring cables thereof are arranged in the light shielding region, so that these electrical components are exposed to ultraviolet rays included in the illumination light. It is configured not to deteriorate. However, if the motor 114 and the rotary solenoid 134 are arranged in a narrow light-shielding area and are always energized, there is a concern about the problem of heat generation. Therefore, in the present embodiment, when the actuator unit 100 is mounted on the housing 10, the light shielding area of the actuator unit 100 is configured as an air flow path so that the motor 114 and the rotary solenoid 134 are cooled. It has become.

  FIG. 5 is a diagram illustrating a schematic configuration when the fan unit 200 is attached to the back panel 10b of the light source device 1 of the present embodiment. FIG. 6 is a cross-sectional view taken along the line AA in FIG. In addition, in FIG. 5, each arrow has shown the flow of air.

  As shown in FIG. 5, the interior of the light source device 1 of the present embodiment includes a space in which the control circuit 50 is disposed (hereinafter referred to as “space A”) and a space in which the lamp unit 14 is disposed by the partition plate 16. (Hereinafter referred to as “space B”) is completely separated. In the space A, the rear panel 10b is formed with an intake port IN1 and an exhaust port EX1, and when the fan in the fan unit 200 rotates, air is sucked into the space A of the housing 10 from the intake port IN1, An air flow is formed in the space A. Then, after the air in the space A circulates in the space A, the air is exhausted to the outside from the exhaust port EX1 through the fan unit 200. Thus, the control circuit 50 is cooled by the circulation of the air in the space A.

  In the space B, an intake port IN2 is formed in the left side panel 10d, and an exhaust port EX2 is formed in the back panel 10b. When the fan in the fan unit 200 rotates, air is sucked into the space B of the housing 10 from the intake port IN2. The air sucked into the space B flows in a plurality of paths in the space B. Specifically, the air sucked into the space B first separates in two directions along the left side panel 14d of the lamp unit 14. The air that has flowed in one direction (X-axis direction positive side) passes through the opening (not shown) of the partition plate 15d, partly flows into the inside of the lamp unit 14, and partly the opening (not shown) of the partition plate 15e. ) And flows into the actuator unit 100. Further, the air that flows on the negative side in the X-axis direction along the left side panel 14d passes through openings (not shown) of the partition plates 15c and 15b, and a part of the air is behind the elliptical mirror 40 inside the lamp unit 14. Partly flows through the opening (not shown) of the partition plate 15a and flows into the space between the back panel 14b and the back panel 10b.

  The air flowing into the back side of the elliptical mirror 40 inside the lamp unit 14 enters the space between the back panel 14b and the back panel 10b from an opening (not shown) formed on the right side panel 14c side of the back panel 14b. Flows in. The air that has flowed into the space between the back panel 14b and the back panel 10b flows into the space between the partition plate 15f and the back panel 10b, and is exhausted from the exhaust port EX2. In this manner, the air in the space B circulates, whereby the elliptical mirror 40 and the base 32 of the discharge lamp 30 are cooled.

  The air that has flowed into the lamp unit 14 through the partition plate 15d passes through a space surrounded by the elliptical mirror 40 and the first light shielding plate 101a, and the opening 14ca formed in the right side panel 14c (FIG. 2). ) Through the hood 14g, through the opening (not shown) of the partition plate 15f, and exhausted from the exhaust port EX2. As described above, the air in the space B circulates, whereby the elliptical mirror 40 and the distal end side of the discharge lamp 30 are cooled.

  The air that has flowed into the actuator unit 100 through the partition plate 15e passes through the hollow portion between the lid 102 and the spacer 102a, and then flows into the light shielding region from the cutout portion 101ca of the first side plate 101c (FIG. 6). . The air that has flowed into the light shielding area travels in the light shielding area while cooling the rotary solenoid 134 and the motor 114, and enters the space between the lamp unit 14 and the partition plate 16 from the notch 101da of the second side plate 101d. Exhausted. The air that has flowed into the space between the lamp unit 14 and the partition plate 16 is further exhausted from the exhaust port EX2 through an opening (not shown) of the partition plate 15f. Thus, in the present embodiment, when the actuator unit 100 is mounted on the housing 10, the light shielding region of the actuator unit 100 is configured as an air flow path. For this reason, the motor 114 and the rotary solenoid 134 are efficiently cooled, and there is no problem that the motor 114 and the rotary solenoid 134 are damaged by heat generation or the life is shortened.

  The above is the description of one embodiment of the present invention. Embodiments of the present invention are not limited to those described above, and various modifications are possible within the scope of the technical idea of the present invention.

  For example, the opening 111a of the diaphragm plate 111 of the present embodiment is a mesh-shaped opening formed so that the diameter of the mesh gradually changes (continuously) along the circumferential direction of the diaphragm plate 111. For example, an optical filter whose transmittance changes gradually (continuously) along the circumferential direction of the diaphragm plate 111 may be used.

  Moreover, although the partition plate 101e of the present embodiment is configured to include the U-shaped curved portion 101ea that is open on the upper side, the curved portion 101ea does not necessarily have to be open on the upper side. It may be open to the side. In this case, the light shielding region is formed above the light transmission region. Further, the bending portion 101ea is not necessarily U-shaped, and may be formed in a bowl shape with one side opened, such as a V-shape or a U-shape. Further, the opening 101ao of the first light shielding plate 101a is not necessarily circular.

  FIG. 7 is a perspective view showing a modification of the actuator unit 100 of the present embodiment. FIG. 8 is an exploded perspective view of the actuator unit 100M shown in FIG. In FIG. 8, as in FIG. 4, in order to clarify the drawing, some components such as internal electric wiring are omitted.

  In the actuator unit 100M of this modification, the shapes of the first light shielding plate 101aM, the second light shielding plate 101bM, and the partition plate 101eM are the shapes of the first light shielding plate 101a, the second light shielding plate 101b, and the partition plate 101e of the present embodiment. Is different.

  Specifically, the first light shielding plate 101aM of the present modification is different from the first light shielding plate 101a of the present embodiment in that it has an opening 101aoM formed in a U shape along the partition plate 101eM. Further, the second light-shielding plate 101bM of the present modified example is provided with a tongue portion 101be that protrudes toward the first light-shielding plate 101aM and has an inverted L-shaped cross-section with its tip bent downward. Different from the second light shielding plate 101b. Further, the partition plate 101eM of the present modification is that the curved plate 101eaM (that is, the partition plate 101eM) is not bent so that the upper end of the curved portion 101eaM is along the upper end edge of the first light shielding plate 101aM. 101e is different.

  With such a configuration, the illumination light emitted from the elliptical mirror 40 enters the case 101 through the U-shaped opening 101aoM, and is further partially blocked by the tip of the tongue 101be, Only the illumination light that is not shielded by the tip of the tongue 101be (that is, illumination light that has passed through the periphery of the curved portion 101eaM) is directed toward the second light shielding plate 101bM. Of the illumination light traveling toward the second light shielding plate 101bM, only the light that has passed through the opening 101bo is emitted from the case 101M.

  Thus, since the illumination light emitted from the case 101M is finally regulated by the opening 101bo, the present invention can be used if a light transmission region through which the illumination light passes is formed in the space inside the curved portion 101eaM. The opening 101aoM formed in the first light shielding plate 101aM does not necessarily need to be circular as in the present embodiment.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

Claims (15)

A discharge lamp;
An elliptical mirror that reflects light emitted from the discharge lamp;
A box-shaped housing that houses the discharge lamp and the elliptical mirror, and is provided with an exit opening for emitting the light on a front panel;
A diaphragm mechanism that controls the amount of light, a shutter mechanism that controls the emission and blocking of the light passing through the diaphragm mechanism, a substantially box-shaped case member that supports the shutter mechanism and the diaphragm mechanism; A light amount adjustment unit having
With
One side panel of the housing has a mounting opening into which the light amount adjustment unit can be inserted,
The case member has a lid that can cover the mounting opening at the rear end of the light amount adjustment unit in the insertion direction;
The light amount adjustment unit is inserted into the casing from the mounting opening, and is attached to one side panel of the casing so that the lid covers the mounting opening. The case member is
A first plate-like member having a first opening that is disposed on the elliptical mirror side and allows the light to pass through when attached to one side panel of the housing;
A second opening that is disposed between the first plate-like member and the front panel so as to face the first plate-like member when being attached to a side panel of the housing, and allows the light to pass therethrough. A second plate member having a portion;
A light transmissive region that allows the light to pass through the first opening and the second opening through a space between the first plate-like member and the second plate-like member; and the light A partition plate that divides the light into a light-shielding region that shields light,
The light source device according to claim 1, comprising: The partition plate surrounds the first opening and the second opening in a bowl shape,
The light source device according to claim 2, wherein the light transmission region is formed in a space surrounded by the partition plate.   The light source device according to claim 3, wherein the space surrounded by the partition plate is opened in a direction orthogonal to the optical path of the light. The diaphragm mechanism includes a dimming element that is arranged on the optical path of the light and changes the transmission amount of the light, and a first actuator that drives the dimming element,
The said 1st actuator is arrange | positioned in the said light-shielding area | region, and the said light control element is arrange | positioned on the outer side of the said 2nd plate-shaped member, The Claim 1 characterized by the above-mentioned. Light source device.   The dimming element includes a disk-shaped rotating plate disposed so as to cross the optical path of the light, and a net-like opening formed so that an opening area continuously changes along a circumferential direction of the rotating plate. The light source device according to claim 5, further comprising:   The dimming element includes a disk-shaped rotating plate disposed so as to cross the optical path of the light, and an optical element formed such that the light transmittance continuously changes along a circumferential direction of the rotating plate. The light source device according to claim 5, further comprising a filter unit.   The light source device according to claim 6, wherein the first actuator is a motor that rotates the rotating plate. The shutter mechanism includes a shutter plate that is disposed on the light path of the light and shields the light, and a second actuator that drives the shutter plate to move back and forth on the light path of the light,
The said 2nd actuator is arrange | positioned at the said light-shielding area | region, and the said shutter board | plate is arrange | positioned on the outer side of the said 2nd plate-shaped member, The Claim 1 characterized by the above-mentioned. Light source device.   The said light control element is arrange | positioned between the said 2nd plate-shaped member and the said shutter board | plate, The quotation of any one of Claims 5-8 characterized by the above-mentioned. Light source device. The light source device has an intake port for sucking air from the outside of the housing, and an exhaust port for exhausting air sucked from the intake port to the outside of the housing,
11. The light source device according to claim 2, wherein the light shielding region forms a flow path for flowing air sucked from the air intake port toward the exhaust port. 11. The light amount adjustment unit includes a connecting member that connects the lid and the case member so as to form a hollow portion between the lid and the case member,
The hollow portion communicates with the light shielding region, and when the light amount adjustment unit is attached to one side panel of the housing, the hollow portion and the light shielding region allow air sucked from the air inlet to the exhaust port. The light source device according to claim 11, wherein a flow path that flows toward the surface is formed. The case member has a first connection mechanism electrically connected to the shutter mechanism and the diaphragm mechanism on a surface facing the lid.
The housing includes a second connection mechanism that fits into the first connection mechanism inside the housing,
The at least one of the first connection mechanism or the second connection mechanism is fixed to the case member or the housing with a predetermined play. Item 13. The light source device according to any one of Items 12.   The light source according to claim 13, wherein at least one of the first connection mechanism and the second connection mechanism includes a guide mechanism that guides the other and assists mutual fitting. apparatus. The said housing | casing has a guide rail which guides insertion of the said case member when the said light quantity adjustment unit is inserted in the said housing | casing, The Claim 1 characterized by the above-mentioned. The light source device described.

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