JPWO2013030870A1 - Metal foil electrolytic deposition equipment - Google Patents

Abstract

A metal foil electrolytic deposition that allows the electric cable connected to the power supply terminal to be detached from the outside of the tank by realizing a single tank while facing the surface of the anode plate where the power supply terminal is provided outside the tank. Providing equipment. The bottom plate portion of the electrolytic cell is formed with a window portion that leads to the outside of the cell, and the anode plate is attached to the bottom plate portion so as to close the window portion, thereby exposing the electrolytic surface facing the cathode drum and the outside of the cell. And a plurality of power supply terminals arranged in a predetermined arrangement pattern are provided on the exposed surface, and the tank is provided between the peripheral portion of the anode plate and the peripheral portion of the window portion from the window portion. An annular sealing means for preventing leakage of the electrolytic solution to the outside is provided, provided with a collecting means for collecting the electrolytic solution overflowing from the electrolytic cell, and a plurality of power supply terminals are detachable from the outside of the cell. It is set as the structure which faces outside a tank through a window part so that it may become.

Description

  The present invention relates to a metal foil electrolytic deposition apparatus for depositing a metal foil on the peripheral surface of a cathode drum by energizing a cathode drum and an anode plate through an electrolytic solution, and in particular, the thickness of the deposited metal foil. The present invention relates to a metal foil electrolytic deposition apparatus in which a plurality of power supply terminals are arranged on an anode plate to make it uniform.

  An electrolytic cell capable of storing a predetermined electrolytic solution, a cathode drum that is rotationally driven in the electrolytic cell, and at least two anode plates that are disposed opposite to the peripheral surface of the cathode drum in the electrolytic cell. By passing the electrolyte flowing in from the lower part of the tank between the cathode drum and the anode plate and energizing them, a metal foil is deposited on the peripheral surface of the cathode drum, and the deposited metal foil is deposited on the periphery of the cathode drum. 2. Description of the Related Art A metal foil electrolytic deposition apparatus that continuously manufactures a metal foil by winding while peeling from the surface is known.

The electrolytic tank of such a metal foil electrolytic deposition apparatus includes, for example, an inner tank formed between the cathode drum and the anode plate, and an electrolytic solution overflowed from the inner tank, as described in Patent Document 1. It has the two tank structure which has the outer tank formed so that storage is possible.
For this reason, the anode plate is exposed not only to the electrolytic surface facing the cathode drum, but also to the surface opposite to the electrolytic solution overflowing from the inner tank, and is eroded by the electrolytic solution. And made of valve metal such as titanium having corrosion resistance.

Further, the deposited metal foil is required to have a uniform thickness, and in order to satisfy such a requirement, it goes without saying that the distance between both electrodes of the cathode drum and the anode plate is kept uniform. It is necessary to form an electric field having a uniform current density on the anode plate.
In view of such a necessity, Patent Document 2 discloses a metal foil that is provided with an appropriate number of power supply terminals (connection terminals) at substantially uniform positions over the entire area of the anode plate, and is capable of supplying power to these power supply terminals. A power feeding structure for an electrolytic deposition apparatus has been proposed.

Japanese Patent Laid-Open No. 2002-294481 (see FIG. 4 on page 6) Japanese Patent Laid-Open No. 9-87883

  However, although a plurality of power supply terminals are arranged so as to be substantially uniform over the entire area of the anode plate, the metal foil deposited by itself alone is not necessarily uniform, and the amount of current supplied to each power supply terminal In addition to the adjustment control to increase or decrease, the connection band connected to the power supply terminal at a predetermined location is removed, the connection band connected to one power supply terminal, and the connection band connected to another power supply terminal It was necessary to make physical adjustments such as replacing.

  The obstacle in performing such physical adjustment is the two-cell structure of the electrolytic cell, and the anode plate is immersed in the electrolyte solution on both sides and cannot directly touch the power supply terminal by hand. For example, it was forced to carry out prior work such as collecting the electrolyte accumulated in the outer tank, which made adjustment work difficult.

Therefore, it is also conceivable that the electrolytic cell has a single cell structure in which the anode plate forms part of the wall surface of the electrolytic cell while facing one surface of the anode plate (side where the power supply terminal is provided) to the outside of the cell. However, the anode plate is a member that needs to be removed for repair because it causes wear of iridium oxide covering the surface due to concentration of current due to electrolytic deposition, etc., and a decrease in activity. It is comprised so that attachment or detachment with respect to a tank is possible.
Such a configuration that can be attached to and detached from the electrolytic cell causes leakage of the electrolytic solution from the attachment portion of the anode plate, which has been a factor that hinders the use of a single electrolytic cell.

  In order to solve the problems as described above, the inventors of the present application have made an electrolysis cell as a single cell while facing the surface side of the anode plate where the power supply terminal is provided, as a result of intensive studies. Thus, the inventors have arrived at the present invention in which the electric cable connected to the power supply terminal can be detached from the outside of the tank.

  That is, the present invention has been proposed to solve the problems of the current technology as described above, and a plurality of power supplies are supplied to one anode plate so as to form an electric field having a uniform current density on the anode plate. It aims at providing the metal foil electrolytic deposition apparatus which provided the terminal and enabled the attachment or detachment from the tank outside of the electric cable connected to each electric power feeding terminal.

  In order to achieve the above object, the metal foil electrolytic deposition apparatus of the present invention includes an electrolytic cell capable of storing a predetermined electrolytic solution, a cathode drum that is rotationally driven in the electrolytic cell, and the cathode in the electrolytic cell. And at least two anode plates disposed opposite to the peripheral surface of the drum, and energizing them while passing the electrolyte flowing in from the lower part of the electrolytic cell between the cathode drum and the anode plate. A metal foil electrolytic deposition apparatus for depositing a metal foil on the peripheral surface of the cathode drum, wherein the electrolytic cell is formed in an arc shape having a predetermined curvature and faces the peripheral surface of the cathode drum The electrolytic solution is stored in a tank surrounded by the bottom plate part arranged in the vertical direction and the side plate part arranged orthogonal to the axial direction of the cathode drum, and the outside of the tank is immersed in the electrolytic solution. Without exposure to the atmosphere The bottom plate portion has an opening area excluding the peripheral edge portion of the anode plate and a substantially rectangular window portion communicating with the outside of the tank, and the anode plate has a predetermined curvature. It is formed in a circular arc shape, and is disposed between the bottom plate portion and the cathode drum and attached to the bottom plate portion so as to close the window portion, thereby being exposed to the electrolytic solution and facing the cathode drum. A plurality of power supply terminals arranged in a predetermined arrangement pattern on the exposed surface, wherein the plurality of power supply terminals are provided on the exposed surface. An electric cable for supplying power to the anode plate is connected to each of the power supply terminals, and the electrolyte solution from the window portion to the outside of the tank is interposed between the peripheral portion of the anode plate and the peripheral portion of the window portion. An annular sealing means is installed to prevent leakage. Recovery means for recovering the electrolytic solution overflowing from the electrolytic cell without contacting the exposed surface, and the plurality of power supply terminals are configured so that each of the electric cables can be detached from the outside of the cell. It is configured to face the outside of the tank through the window.

  According to the metal foil electrolytic deposition apparatus of the present invention, it is possible to adjust the current supplied to the anode plate while operating the electric cable connected to the plurality of power supply terminals facing the outside of the electrolytic cell from the outside of the cell. The work labor for adjustment is reduced, and the thickness of the deposited metal foil can be made uniform.

It is a schematic perspective view which shows the metal foil electrolytic deposition apparatus which concerns on one Embodiment of this invention. It is the figure which showed typically the internal structure of the metal foil electrolytic deposition apparatus which concerns on one Embodiment of this invention, and is a schematic sectional drawing which shows the state which removed one anode plate of two anode plates. .

  Hereinafter, a preferred embodiment of a metal foil electrolytic deposition apparatus according to the present invention will be described with reference to FIGS. 1 and 2.

As shown in the drawings, the metal foil electrolytic deposition apparatus 1 according to this embodiment includes an electrolytic cell 10 that can store an electrolytic solution L, a cathode drum 20 that is rotationally driven in the electrolytic cell 10, and the electrolytic cell 10. And two anode plates 30 disposed opposite to the peripheral surface 20a of the cathode drum 20, and the electrolyte L flowing in from a supply pipe 60 installed in the lower part of the electrolytic cell 10 is supplied to the cathode drum 20 and the anode plate. The metal foil S is deposited on the peripheral surface 20a of the cathode drum 20 by energizing them while being passed between them, and the deposited metal foil S is peeled off from the peripheral surface 20a of the cathode drum 20 by the peeling roll 70. In addition to being configured so that the metal foil S can be continuously manufactured by winding, the anode plate 30 is provided with a plurality of power supply terminals 31 and the electric cables 40 connected to the power supply terminals 31 are placed in a tank. Outside It is removably configuration.
Hereinafter, the metal foil electrolytic deposition apparatus 1 of this embodiment is explained in full detail.

  The electrolytic cell 10 is formed in an arc shape having a predetermined curvature and is disposed perpendicular to the rotation axis direction of the cathode drum 20 and the bottom plate portion 11 disposed to face the peripheral surface 20a of the cathode drum 20. The side plate part 12 is provided, and the electrolytic solution L (for example, copper sulfate) can be stored in a tank surrounded by these.

The bottom plate portion 11 is a portion that becomes the bottom surface of the electrolytic cell 10, has a substantially semi-cylindrical shape having a curvature that is concentric with the cathode drum 20, and ensures a uniform gap between the peripheral surface 20 a of the cathode drum 20. Arranged to be.
The bottom plate portion 11 is formed with two substantially rectangular window portions 111 having an opening area (for example, 800 mm × 800 mm) excluding the peripheral portion of the anode plate 30 and communicating with the outside of the tank. One surface of the anode plate 30 is exposed to the outside of the tank.

The side plate portion 12 is a portion that becomes the side wall surface of the electrolytic cell 10, and supports the entire electrolytic cell 10 by supporting the bottom plate portion 11 joined by welding or the like, with its lower end contacting the installation surface. It has become.
The electrolytic cell 10 configured in this manner stores the electrolytic solution L in a space surrounded by the bottom plate unit 11 and the side plate unit 12 by closing the window 111 with the anode plate 30, and the outside of the electrolytic cell is the electrolytic solution L. It is installed so as to be exposed to the air atmosphere without being immersed in.

  The cathode drum 20 is a portion where the metal foil S (for example, copper foil) is deposited, has a cylindrical shape in which a titanium plate is wound around the peripheral surface 20a, and the lower half thereof is buried in the electrolytic cell 10. It is pivotally supported by the side plate part 12 so that rotation is possible. The cathode drum 20 is rotated in one direction by being driven by a predetermined motor.

The anode plate 30 is a member that is connected to a predetermined power source and is supplied with power. The anode plate 30 is formed in an arc shape having a curvature that is concentric with the cathode drum 20, and is disposed between the bottom plate portion 11 and the cathode drum 20. It is attached to the bottom plate part 11 so as to close the window part 111.
In the present embodiment, two anode plates 30 are attached to the bottom plate portion 11, each anode plate 30 has an outer shape larger than the window portion 111 (for example, 1000 mm × 1000 mm), and covers each window portion 111. It is like that.

In the present embodiment, the anode plate 30 is attached to the bottom plate portion 11 by sandwiching the periphery of the bottom plate portion 11 between the anode plate 30 and a washer 35 having a substantially L-shaped cross section, as shown in FIG. Is done.
Specifically, a plurality of male screws 33 joined to the anode plate 30 by welding or the like are implanted along the window portion 111, and a washer 35 is inserted into them, and the washer 35 is applied to the peripheral edge of the bottom plate portion 11. By screwing the female screw 34 to the male screw 33 while making contact, the peripheral edge of the bottom plate portion 11 is sandwiched between the anode plate 30 and a washer 35 having a substantially L-shaped cross section, and the anode plate 30 is attached to the bottom plate portion 11. It is supposed to be fixed.
By such attachment, the window portion 111 is closed by the anode plate 30, and the anode plate 30 is exposed to the electrolytic solution L and exposed to the electrolytic solution 30 a facing the cathode drum 20 and the electrolytic solution L. And the exposed surface 30b exposed to the outside of the tank.

An annular sealing means is provided between the peripheral edge of the anode plate 30 and the peripheral edge of the window 111.
The sealing means includes a ring 37 in which an elastic member such as rubber or silicon having a circular cross section is connected in an annular shape (rectangular shape), and a groove portion 36 into which the ring 37 is fitted is formed on the peripheral portion of the anode plate 30. A recess is formed over the entire circumference.
As a result, when the anode plate 30 is fixed to the bottom plate portion 11, the ring 37 is sandwiched between the peripheral portion of the anode plate 30 and the peripheral portion of the window portion 111, and between the anode plate 30 and the window portion 111. Since there is no gap, leakage of the electrolyte L from the window 111 to the outside of the tank is prevented.
In other words, since the anode plate 30 can be attached to and detached from the electrolytic cell 10 for repair or the like, the leakage of the electrolytic solution L from the electrolytic cell 10 can be prevented, so that the electrolytic cell 10 can be made into a single cell.

The exposed surface 30b of the anode plate 30 exposed to the outside of the tank has a plurality of power supply terminals 31 (for example, nine to two on one anode plate 30) serving as a contact point with the electric cable 40 connected to a predetermined power source. Ten).
Each power supply terminal 31 is formed of a male screw joined to the exposed surface 30b of the anode plate 30 by welding or the like, and a terminal portion 41 (for example, an O-type terminal, etc.) of the electric cable 40 is interposed between the power supply terminal 31 and the female screw 32. The electric cable 40 can be connected to the power supply terminal 31 by tightening the female screw 32 in a state where the Y-type terminal is sandwiched.
Accordingly, the electric cable 40 can be freely attached and detached simply by loosening or tightening the female screw 32, and the electric cable 40 connected to the power supply terminal 31 at a predetermined location can be removed or one power supply terminal can be removed. The adjustment work of replacing the electric cable 40 connected to 31 with the electric cable 40 connected to another power supply terminal 31 can be easily performed from outside the tank.

Furthermore, each power supply terminal 31 is formed to have a length that allows a plurality of (for example, a maximum of three) terminal portions 41 of the electric cable 40 to be sandwiched (multiple cable connecting means).
Thus, each electric power feeding terminal 31 has the length which can pinch | interpose the some electric cable 40, for example, one electric cable removed from the electric power feeding terminal 31 corresponding to the part where the thickness of the metal foil S deposited is thick 40 can be connected to the power supply terminal 31 corresponding to the portion where the thickness of the metal foil S to which another electric cable 40 is already connected is thin, and the thickness of the deposited metal foil S can be made uniform. Adjustments can be made.

  In addition, the power supply terminals 31 are arranged in an arrangement pattern that is substantially equally spaced over the entire exposed surface 30b. Thereby, the current density of the electric field formed on the electrolytic surface 30a can be made uniform.

The electrolyte L that passes between the cathode drum 20 and the anode plate 30 is configured to flow from the lower part of the electrolytic cell 10.
Specifically, two supply pipes 60 connected to a predetermined pump are disposed in the lower part of the electrolytic cell 10, and the electrolytic solution L is electrolyzed from the supply pipes 60 through the electrolytic solution supply unit 13. It flows into the tank 10.

  The electrolyte solution supply unit 13 is a portion that is provided in the lower part of the electrolytic cell 10 and supplies the electrolyte solution L from the lower side of the cathode drum 20 between the cathode drum 20 and the anode plate 30. 30 has a function of keeping the flow rate of the electrolytic solution L to be uniform between 30 and 30 in the axial direction of the cathode drum 20.

Specifically, the electrolyte supply unit 13 extends in the axial direction of the cathode drum 20, and has a liquid storage chamber 132 having a predetermined storage capacity capable of storing the electrolyte L flowing in from the inlet 131, And a plurality of jet outlets 133 that are arranged evenly in the upper part of the liquid storage chamber 132 and jet the electrolyte L stored in the liquid storage chamber 132 toward the lower part of the cathode drum 20.
The jet outlet 133 is a pipe having a predetermined length extending upward from the liquid storage chamber 132, and the liquid storage chamber 132 is an inlet for allowing the electrolyte L to flow into the liquid storage chamber 132 from outside the electrolytic cell 10. As shown, an inlet 131 communicating with the supply pipe 60 is provided.
The inflow port 131 is disposed at a position that does not directly face the ejection port 133. For example, in the present embodiment, the inflow port 131 is disposed at a position that is parallel to the side plate portion 12 and orthogonal to the ejection port 133. .

  With such a configuration, the electrolytic solution L supplied from the supply pipe 60 flows into the liquid storage chamber 132 through the inlet 131 and is temporarily stored, whereby the pressure applied to the electrolytic solution L is changed in the axial direction of the cathode drum 20. , And is ejected toward the lower part of the cathode drum 20 from the jet outlet 133 disposed evenly at the upper part of the liquid storage chamber 132, and thus flows between the cathode drum 20 and the anode plate 30. The flow rate of the electrolytic solution L is uniform over the axial direction of the cathode drum 20.

  Furthermore, the flow of the electrolyte L along the axial direction of the cathode drum 20 can be formed in the liquid storage chamber 132 by disposing the inflow port 131 at a position that does not directly face the ejection port 133. As a result, the pressure applied to the electrolytic solution L is dispersed along the axial direction of the cathode drum 20, so that the flow rate of the electrolytic solution L ejected from the ejection port 133 is more uniform over the axial direction of the cathode drum 20. It will be something.

The electrolyte L flowing into the electrolytic cell 10 rises along the peripheral surface 20a of the cathode drum 20 and overflows from the upper edge portion of the bottom plate portion 11. A recovery means 50 for recovering the liquid L without contacting the exposed surface 30b is provided.
The recovery means 50 according to the present embodiment includes a recovery tank 51 that receives the electrolytic solution L that overflows from the upper edge of the electrolytic cell 10 and a recovery pipe 52 that recovers the electrolytic solution L received by the recovery tank 51. Yes.

The recovery tank 51 is opened at the top along the axial direction of the cathode drum 20 so that the electrolyte L overflowed from the upper edge of the electrolytic cell 10 can be received. It has the inclined surface which makes it flow down toward.
As a result, the electrolytic solution L overflowing from the upper edge of the electrolytic cell 10 does not enter the outside of the electrolytic cell 10, so that the exposed surface 30 b does not contact the electrolytic solution L.

The recovery pipe 52 recovers the electrolytic solution L flowing in from the recovery tank 51 and guides the recovered electrolytic solution L to a tank for circulating the electrolytic solution.
Thus, since the electrolytic solution L overflowed from the electrolytic cell 10 can be recovered without contacting the exposed surface 30b, the electrolytic cell 10 is exposed to the atmosphere without immersing the outside of the electrolytic cell in the electrolytic solution L. Can be installed as follows.

  The recovery tank 51 is provided with a cover that covers the upper opening while allowing the electrolyte L to overflow and a duct that exhausts the air in the cover (both not shown). The work environment can be preserved by preventing suction.

  Thus, the metal foil electrolytic deposition apparatus 1 of the present embodiment prevents leakage of the electrolytic solution L from the electrolytic cell 10 while allowing the anode plate 30 to be attached to and detached from the electrolytic cell 10. The electrolytic solution L overflowing from the tank is collected without leaving the electrolytic cell 10 to be made into a single cell, and a space outside the cell that is not immersed in the electrolytic solution L is secured, and the entire surface of the anode plate 30 is spaced at substantially equal intervals. A plurality of power supply terminals 31 arranged in the tank are exposed to the outside of the tank.

The metal foil electrolytic deposition apparatus 1 configured as described above is configured to deposit the metal foil S by operating as follows.
First, the electrolytic solution L flowing in from the supply pipe 60 is supplied to the electrolytic cell 10 from the lower part of the cathode drum 20 and passes between the peripheral surface 20 a of the cathode drum 20 and the electrolytic surface 30 a of the anode plate 30. At this time, the electrolytic solution L becomes a uniform flow by the liquid storage chamber 132 and the jet outlet 133 provided in the electrolytic solution supply unit 13, and the peripheral surface 20 a of the cathode drum 20 and the electrolytic surface 30 a of the anode plate 30. Will pass between.

Since the anode plate 30 is formed in an arc shape having a curvature that is concentric with the cathode drum 20, there is an equidistant gap between the peripheral surface 20 a of the cathode drum 20 and the electrolytic surface 30 a of the anode plate 30. Since the plurality of power supply terminals 31 provided on the exposed surface 30b are arranged substantially evenly, the electric field having a uniform current density is formed between the two electrodes by energizing the cathode drum 20 and the anode plate 30. Will be formed.
As a result, the metal foil S having a uniform thickness is deposited on the peripheral surface 20 a of the cathode drum 20. Then, the deposited metal foil S is peeled off from the peripheral surface 20a of the cathode drum 20 by the peeling roll 70 and wound up on a predetermined winding roll.

The electrolyte L passing between the peripheral surface 20 a of the cathode drum 20 and the electrolytic surface 30 a of the anode plate 30 is an annular seal disposed between the peripheral edge of the anode plate 30 and the peripheral edge of the window portion 111. The means (ring 37) and the collecting means 50 are collected from the electrolytic cell 10 without contacting the exposed surface 30b.
Thereby, since the electrolytic cell 10 can be installed so that the outside of the cell is exposed to the air atmosphere without being immersed in the electrolytic solution L, when the thickness of the deposited metal foil S is uneven. By directly attaching and detaching the electric cable 40 connected to the power supply terminal 31 from the outside of the tank, fine adjustment can be performed so that the thickness of the metal foil S becomes uniform.

  For example, the electric cable 40 connected to the power supply terminal 31 at a predetermined location can be removed or the electric cable 40 connected to the single power supply terminal 31 simply by loosening or tightening the female screw 32 from the outside of the tank. Can be replaced with an electric cable 40 connected to another power supply terminal 31.

  In addition, since each power supply terminal 31 has a length that allows the plurality of electric cables 40 to be sandwiched, the one electric cable 40 removed from the power supply terminal 31 corresponding to the portion where the thickness of the deposited metal foil S is thick, The metal foil S to which the other electric cable 40 is already connected can be connected to the power supply terminal 31 corresponding to the thin portion, and the thickness of the deposited metal foil S can be finely adjusted.

As described above, the metal foil electrolytic deposition apparatus 1 of the present embodiment realizes the electrolytic cell 10 as a single cell while facing the surface side of the anode plate 30 provided with the power supply terminal 31 to the outside of the cell. Thus, the electric cable 40 connected to the power supply terminal 31 can be easily attached and detached from the outside of the tank.
Thereby, the fine adjustment of the thickness of the deposited copper foil can be performed from the outside of the tank while adjusting the attachment / detachment of the electric cable 40.
Further, since one surface of the anode plate 30 is exposed to the outside of the tank, and the electrolytic cell 10 has a single tank structure, maintenance work from outside the tank and attachment / detachment work of the anode plate 30 can be easily performed. Become.

  As mentioned above, although preferable embodiment of the metal foil electrolytic deposition apparatus 1 of this invention was described, the metal foil electrolytic deposition apparatus which concerns on this invention is not limited only to embodiment mentioned above, In the scope of this invention It goes without saying that various modifications can be made.

For example, the metal foil to be deposited is not limited to the copper foil, and other metal foils such as nickel can be manufactured according to the electrolytic solution.
In addition, the sealing means of the present embodiment uses an elastic member having a circular cross section, but an elastic member having a rectangular cross section can also be used.

Further, in the present embodiment, the anode plate 30 is a total of two on one side, but may be a total of two or more, for example, a total of four on one side.
In this case, a total of four window portions 111 corresponding to the respective anode plates 30 are formed in the bottom plate portion 11, and sealing means (rings 37) are provided between the periphery of each window portion 111 and the periphery of each anode plate 30. ) Must be provided.
FIG. 2 shows a state in which one of the two anode plates is removed for convenience, and the two anode plates serve as a reference for the electrolyte supply unit 13 during electrolytic deposition. Needless to say, they are mounted symmetrically.

  In the present embodiment, the power supply terminal 31 is formed to have a length that allows the terminal portions 41 of the plurality of electric cables 40 to be sandwiched therebetween, so that the plurality of cable connection means is used. For example, the terminal portion 41 of the electric cable 40 may be formed in a clip shape (for example, an alligator clip), and the power supply terminal 31 may be formed in a shape in which a plurality of clips can be sandwiched.

  Further, in the present embodiment, as an example in which the inlet 131 is disposed at a position that does not directly face the outlet 133 in the electrolyte supply unit 13, the inlet 131 is parallel to the side plate portion 12 and orthogonal to the outlet 133. However, the configuration in which the inlet 131 is arranged at a position that does not directly face the jet outlet 133 is not limited to this example, and the path through which the electrolyte L flows when the inlet 131 and the jet 133 are directly opposed to each other. As long as the flow of the electrolyte L along the axial direction of the cathode drum 20 is formed in the liquid storage chamber 132 without being in a straight line, any form may be used.

  For example, although the inflow port 131 is opposed to the jet port 133, a partition plate is provided in parallel between them, or the inflow port 131 is opposed to the jet port 133 while being shifted in position. Therefore, it is included in the technical scope of the present invention.

  INDUSTRIAL APPLICATION This invention can be utilized for the metal foil electrolytic deposition apparatus which deposits metal foil on the surrounding surface of a cathode drum by energizing a cathode drum and an anode plate through electrolyte solution.

DESCRIPTION OF SYMBOLS 1 Metal foil electrolytic deposition apparatus 10 Electrolysis tank 11 Bottom plate part 111 Window part 12 Side plate part 13 Electrolyte supply part 131 Inlet 132 Liquid storage chamber 133 Outlet 20 Cathode drum 20a Circumferential surface 30 Anode plate 30a Electrolytic surface 30b Exposed surface 31 Power supply terminal 37 Ring (sealing means)
40 Electric cable 50 Recovery means 51 Recovery trough 52 Recovery pipe 60 Supply pipe 70 Peeling roll

Claims (3)

An electrolytic cell capable of storing a predetermined electrolytic solution, a cathode drum that is rotationally driven in the electrolytic cell, and at least two anode plates that are disposed to face the circumferential surface of the cathode drum in the electrolytic cell. A metal foil battery that deposits metal foil on the peripheral surface of the cathode drum by energizing the electrolyte solution flowing from the lower part of the electrolytic cell while passing between the cathode drum and the anode plate. An analysis output device,
The electrolytic cell is
A tank that is formed in an arc shape having a predetermined curvature and is surrounded by a bottom plate portion that is disposed to face the peripheral surface of the cathode drum and a side plate portion that is disposed orthogonal to the axial direction of the cathode drum. In addition to storing the electrolyte solution inside, it is installed so that the outside of the tank is exposed to the atmosphere without being immersed in the electrolyte solution,
The bottom plate portion has an opening area excluding the peripheral portion of the anode plate and a substantially rectangular window portion communicating with the outside of the tank.
The anode plate is
The cathode is formed in an arc shape having a predetermined curvature, is disposed between the bottom plate portion and the cathode drum, and is attached to the bottom plate portion so as to close the window portion, thereby being exposed to the electrolytic solution and the cathode. An electrolytic surface facing the drum, and an exposed surface exposed to the outside of the tank without being exposed to the electrolytic solution,
The exposed surface is provided with a plurality of power supply terminals arranged in a predetermined arrangement pattern,
An electrical cable for supplying power to the anode plate is connected to each of the plurality of power supply terminals,
Between the peripheral part of the anode plate and the peripheral part of the window part, an annular sealing means for preventing leakage of the electrolyte from the window part to the outside of the tank is provided,
A recovery means for recovering the electrolytic solution overflowing from the electrolytic cell without contacting the exposed surface;
The metal feed electrolytic deposition apparatus, wherein the plurality of power supply terminals face the outside of the tank through the window portion so that the electric cables can be detached from the outside of the tank. 2. The apparatus according to claim 1, further comprising a plurality of cable connection means capable of connecting the one electric cable removed from the one power supply terminal to the other power supply terminal to which another electric cable is already connected. Metal foil electrolytic deposition equipment. In the lower part of the electrolytic cell, an electrolytic solution supply unit that supplies an electrolytic solution from the lower side of the cathode drum between the cathode drum and the anode plate is provided,
The electrolyte supply unit is
A liquid storage chamber extending in the axial direction of the cathode drum and having a predetermined storage capacity capable of storing an electrolyte, and an electrolyte stored in the liquid storage chamber is disposed above the liquid storage chamber. A plurality of jet nozzles jetting toward the lower part of the cathode drum,
The liquid storage chamber has an inlet for allowing an electrolytic solution to flow into the liquid storage chamber from outside the electrolytic cell,
3. The metal foil electrolytic deposition apparatus according to claim 1, wherein the inflow port is disposed at a position not directly opposed to the jet port.

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