JPWO2009072341A1 - Probe device - Google Patents

Abstract

An inspection contact structure is attached to the lower surface side of the circuit board of the probe card provided in the probe device. The contact structure for inspection has a three-layer structure including an intermediate body, an upper surface elastic sheet attached to the upper surface of the intermediate body, and a lower surface elastic sheet attached to the lower surface of the intermediate body. A pitch conversion board is provided between the circuit board and the inspection contact structure. An actuator that maintains the contact pressure between the conductive portion of the lower elastic sheet and the object to be inspected at a constant pressure is provided on the upper surface of the pitch conversion substrate.

Description

  The present invention relates to a probe apparatus for inspecting electrical characteristics of an object to be inspected.

  For example, the inspection of the electrical characteristics of an electronic circuit such as an IC or LSI formed on a semiconductor wafer is performed using, for example, a probe device. The probe device includes, for example, a probe card having a circuit board and a plurality of probe pins, and a mounting table that is arranged to face the probe pins and holds a wafer. Then, the electrical characteristics of the electronic circuit are inspected by bringing these plural probe pins into electrical contact with the electrode pads of the electronic circuit on the wafer held on the mounting table. For this reason, it is necessary to arrange | position a probe pin according to the position of each electrode pad on a wafer.

  However, in recent years, since the miniaturization of electronic circuit patterns has progressed, the electrode pads have become finer, and the distance between the electrode pads has become even narrower. Is required. Thus, for example, it has been proposed to use an inspection contact structure instead of the probe pin (Patent Document 1). This inspection contact structure is composed of, for example, an intermediate sheet-like connector and elastic sheets attached to the upper and lower surfaces thereof. In these elastic sheets, a plurality of conductive portions having a plurality of elasticity protrude from one surface of the sheet serving as an insulating portion, and the conductive portions can be formed in a very fine and narrow pitch. In addition, for example, an elastic rubber sheet is used as the elastic sheet in order to secure unevenness absorbability, impact absorbability, and the like with respect to the contacted body.

The elastic sheet comes into contact with the electrode pad of the wafer, and the electrical characteristics of the electronic circuit are inspected. In this inspection, the desired contact between the elastic sheet and the electrode pad is usually realized by controlling the height of the mounting table.
Japanese Unexamined Patent Publication No. 2006-194620

  However, when the inspection of the electrical characteristics of the electronic circuit is repeatedly performed using the inspection contact structure, the elastic sheet is deteriorated. Then, when the contact between the elastic sheet and the electrode pad is controlled by the height of the mounting table as in the prior art, the contact pressure between the elastic sheet and the electrode pad may be different before and after the deterioration of the elastic sheet. As a result, a contact failure may occur between the elastic sheet and the electrode pad.

  Further, by detecting the contact pressure between the contact structure for inspection and the electrode pad and controlling the contact pressure, it is difficult to detect the contact pressure in real time even if the contact between the elastic sheet and the electrode pad is controlled. In some cases, the same contact failure occurred.

  Furthermore, a probe having a cantilever structure and having a contact made of a metal at the tip may be used as the inspection contact structure. In this case, the same problem as described above may occur. For example, when the inspection is repeated, the tip of the contact is worn. Then, the contact pressure between the contact and the electrode pad may be different before and after the contact is worn. As a result, a contact failure may occur between the contact and the electrode pad.

  This invention is made | formed in view of this point, and it aims at making the contact structure for a test | inspection and a to-be-inspected object contact stably in the test | inspection of the electrical property of a to-be-inspected object.

  In order to achieve the above object, the present invention provides a probe device for inspecting the electrical characteristics of an object to be inspected, which is provided on a circuit board and the object to be inspected side of the circuit board. A test contact structure for establishing electrical continuity with the circuit board; and a support member provided between the circuit board and the test contact structure and supporting the test contact structure. And an actuator for maintaining a contact pressure between the inspection contact structure and the object to be inspected at a constant pressure is provided on the upper surface of the support member.

  The actuator used in the present invention generates a constant pressure in a certain direction by air, electric power or the like, and can generate the pressure constantly regardless of the position of the pressure application point. According to the present invention, since the actuator is provided on the upper surface of the supporting member of the inspection contact structure, when the inspection contact structure and the inspection object come into contact with each other during inspection of the inspection object, the actuator A constant contact pressure can be obtained with the inspection object stopped at an arbitrary position. In this case, the contact pressure does not change depending on the stop position of the inspection object (the position of the inspection contact structure). In this way, the pressure applied to the inspection contact structure can be made constant at all times. For example, when an elastic sheet is provided on the lower surface of the inspection contact structure and the elastic sheet is in contact with the inspection object, the inspection object Even if the inspection is repeated and the elastic sheet deteriorates, the contact structure for inspection and the object to be inspected can be stably contacted. Also, for example, when using a cantilever-type probe as a contact structure for inspection, when the contact of the probe and the object to be inspected are contacted, even if the contact is worn by repeated inspection of the object to be inspected, the contact structure for inspection The body and the object to be inspected can be brought into stable contact.

  A control unit configured to control a constant pressure when the inspection contact structure and the object to be inspected contact each other, and the control unit is configured so that a resistance value of the inspection contact structure becomes a predetermined value; The pressure in the actuator may be controlled.

  It further has a resistance measuring device for measuring the resistance value of the inspection contact structure, and the control unit is measured based on the resistance value of the inspection contact structure measured by the resistance measuring device. The pressure in the actuator may be controlled so that the resistance value becomes the predetermined value.

  An elastic sheet that contacts the object to be inspected may be provided on at least the lower surface of the inspection contact structure. The inspection contact structure may have a three-layer structure including a flat intermediate body and elastic sheets attached to both upper and lower surfaces of the intermediate body. Further, the circuit board may be provided with a plurality of connection terminals of an electronic circuit, and the support member may be a pitch conversion board that changes an interval between the connection terminals of the circuit board.

  The inspection contact structure includes a beam portion that is cantilevered by the support member, a contact that extends from the free end portion of the beam portion to the inspection object side, and contacts the inspection object during inspection, You may have.

  A fixing member for fixing the circuit board may be provided above the circuit board, and the actuator may pass through the circuit board and be fixed to the fixing member.

  Another aspect of the present invention is a probe apparatus for inspecting the electrical characteristics of an object to be processed, which is provided on a circuit board, the object side of the circuit board, and the object to be inspected and the circuit board at the time of inspection A contact structure for inspection that achieves electrical continuity between and a holding member that holds the object to be inspected so as to face the contact structure for inspection, and the lower surface of the holding member includes It is characterized by having an inspection contact structure and an actuator for maintaining the contact pressure of the inspection object at a constant pressure.

  An elastic sheet that contacts the object to be inspected may be provided on at least the lower surface of the inspection contact structure. The inspection contact structure may have a three-layer structure including a flat intermediate body and elastic sheets attached to both upper and lower surfaces of the intermediate body.

  The inspection contact structure includes a beam portion that is cantilevered by the support member, a contact that extends from the free end portion of the beam portion to the inspection object side, and contacts the inspection object during inspection, You may have.

  A plurality of the actuators may be provided.

  You may have a control part which controls so that the to-be-inspected object may become horizontal based on the position of the up-and-down direction of each of these actuators.

  The control unit may control a certain pressure when the inspection contact structure and the inspection object come into contact with each other.

  ADVANTAGE OF THE INVENTION According to this invention, in the test | inspection of the electrical property of a to-be-inspected object, a test contact structure and a to-be-inspected object can be made to contact stably.

It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning this Embodiment. It is the graph which showed the relationship between contact pressure and the frequency | count of an inspection. It is explanatory drawing of the longitudinal cross-section which shows the structure of the contact structure for a test | inspection. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is the graph which showed the relationship between resistance value and the frequency | count of an inspection. It is the graph which showed the relationship between resistance value and contact pressure. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is a side view which shows the outline of a structure of a probe. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form. It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of the probe apparatus concerning another form.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Probe apparatus 2 Probe card 3 Mounting base 3a Chuck 3b Base 10 Circuit board 11 Inspection contact structure 12 Pitch conversion board 14 Actuator 15 Holder 15a Outer holder 15b Stiffener 20 Intermediate board 21 Upper surface elastic sheet 22 Lower surface elastic sheet 30 Conductive part DESCRIPTION OF SYMBOLS 40 Conductive part 80 Actuator 100 Control part 200 Resistance measuring device 300 Probe 301 Support member 311 Beam part 312 Contactor 320 Resistance measuring instrument 330 Actuator U Electrode pad W Wafer

  Hereinafter, preferred embodiments of the present invention will be described. FIG. 1 is a longitudinal sectional view showing an outline of a configuration of a probe apparatus 1 according to the present embodiment.

  The probe device 1 is provided with, for example, a probe card 2 and a mounting table 3 on which a wafer W as an object to be inspected is mounted. The probe card 2 is disposed above the mounting table 3.

  The probe card 2 is mounted on the lower surface side of the circuit board 10 for sending an electrical signal for inspection to the wafer W mounted on the mounting table 3, for example, and contacts the electrode pad U of the wafer W. The inspection contact structure 11 is provided to achieve electrical conduction between the circuit board 10 and the wafer W. Between the circuit board 10 and the inspection contact structure 11, a pitch conversion board 12 is provided as a support member that supports the inspection contact structure 11. An actuator 14 is provided on the upper surface of the pitch conversion substrate 12 to maintain the contact pressure between the inspection contact structure 11 and the electrode pad U of the wafer W at a constant pressure via a pressing member 13.

  The circuit board 10 is fixed by a holder 15 as a fixing member that holds the outer periphery of the circuit board 10. The holder 15 is located above the circuit board 10 and the outer periphery holder 15 a that holds the outer periphery of the circuit board 10. It has a fixed stiffener 15b. The circuit board 10 is electrically connected to a tester (not shown), and an electrical signal for inspection from the tester can be transmitted to and received from the lower inspection connection structure 11. The circuit board 10 is formed in a substantially disk shape, for example. An electronic circuit is formed inside the circuit board 10, and a plurality of connection terminals 10 a of the electronic circuit are formed on the lower surface of the circuit board 10.

  The pitch conversion board 12 is supported by a support member 16 provided between its upper surface and the lower surface of the circuit board 10. A plurality of upper terminals 12 a are provided on the upper surface of the pitch conversion substrate 12. The upper terminal 12a is formed so as to correspond to the arrangement of the connection terminals 10a on the lower surface of the circuit board 10. A pogo pin 17 is provided between the upper terminal 12a of the pitch conversion board 12 and the connection terminal 10a of the circuit board 10 corresponding to the upper terminal 12a for electrical connection between the upper terminals 12a and 10a. Yes. Lower terminals 12b are provided on the lower surface of the pitch conversion board 12 at a pitch narrower than the upper terminals 12a on the upper surface. The lower terminals 12b on the lower surface are provided in the same number as the upper terminals 12a on the upper surface, and the lower terminals 12b on the lower surface corresponding to the upper terminals 12a on the upper surface are connected to each other. As described above, the pitch conversion board 12 can support the inspection contact structure 11 and can change the interval between the connection terminals 10 a of the circuit board 10. Note that the pitch conversion substrate 12 is formed, for example, in a rectangular shape, and is formed of, for example, a ceramic substrate.

  An actuator 14 is provided in the center of the upper surface of the pitch conversion board 12 via a pressing member 13. The actuator 14 penetrates the circuit board 10 and is fixed to a stiffener 15 b provided above the circuit board 10. The actuator 14 is connected to a pressure control unit (not shown). A piston rod (not shown) of the actuator 14 can move in the vertical direction, and the inside of the actuator 14 is always maintained at a constant pressure regardless of the stop position of the piston rod by the flow rate and electric energy of air supplied from the pressure control unit. ing. For example, also when the contact structure 11 for inspection contacts the electrode pad U of the wafer W at the time of inspection, the contact pressure can be kept constant. The constant contact pressure is controlled by the actuator 14 based on the material and thickness of the upper elastic sheet 21 and the lower elastic sheet 22 of the inspection contact structure 11 to be described later, the diameter and the number of the conductive portions 30, and the like. Controlled by the unit 100. The control unit 100 repeats the inspection of the electrode pad U of the wafer W, so that the upper elastic sheet 21 and the lower elastic sheet 22 deteriorate, and for example, even when the contact pressure decreases as shown in FIG. 2 (FIG. 2). (Dotted line in the middle), control is performed so that the contact pressure becomes constant by adjusting the flow rate and electric power of air from the pressure control unit (solid line in FIG. 2).

  As shown in FIG. 3, the inspection contact structure 11 is attached to, for example, a flat intermediate substrate 20 as an intermediate, an upper elastic sheet 21 attached to the upper surface of the intermediate substrate 20, and a lower surface of the intermediate substrate 20. The bottom elastic sheet 22 is provided and has a three-layer structure.

  The lower elastic sheet 22 is formed, for example, in a square shape, and is formed of, for example, a rubber sheet, which is an insulating material having elasticity as a whole. A plurality of conductive portions 30 having conductivity are formed on the bottom elastic sheet 22. The conductive portion 30 is formed by densely filling conductive particles in a part of a rubber sheet. The conductive portion 30 is formed so as to correspond to the arrangement of the electrode pads U of the wafer W that is an object to be inspected, for example. Each conductive part 30 penetrates the elastic sheet 22 in the vertical direction, for example, protrudes from both the upper and lower surfaces of the elastic sheet 22 in a convex shape, and has a quadrangular prism shape. A portion other than the conductive portion 30 of the bottom elastic sheet 22, that is, a portion connecting the conductive portions 30 is an insulating portion 31 made of only a rubber sheet.

  The upper surface elastic sheet 21 is formed of, for example, a square, and is formed of the same rubber sheet as the lower surface elastic sheet 22, which is an insulating material having elasticity as a whole. The upper surface elastic sheet 21 is formed with a plurality of conductive portions 40 having conductivity. The conductive part 40 is formed by densely filling conductive particles in a part of a rubber sheet. The plurality of conductive portions 40 are arranged uniformly so that the distribution is not biased within the sheet surface. The conductive portion 40 is formed to correspond to the arrangement of the lower terminals 12b on the lower surface of the pitch conversion substrate 12, for example. Each conductive part 40 penetrates the upper surface elastic sheet 21 in the vertical direction, for example, and protrudes in a convex shape from both upper and lower surfaces of the upper surface elastic sheet 21. A portion other than the conductive portion 40 of the top elastic sheet 21 is an insulating portion 41. In the present embodiment, the size of the conductive portion 40 of the upper elastic sheet 21 and the thickness of the insulating portion 41 are set to be the same as, for example, the conductive portion 30 and the insulating portion 31 of the lower elastic sheet 22 described above.

  The intermediate substrate 20 is formed in a rectangular flat plate shape that is thicker than the upper elastic sheet 21 and the lower elastic sheet 22, for example. The intermediate substrate 20 is made of, for example, a silicon substrate or a glass substrate, and has a thermal expansion coefficient similar to that of the wafer W. The intermediate substrate 20 has higher rigidity than the upper elastic sheet 21 and the lower elastic sheet 22. As shown in FIG. 3, the intermediate substrate 20 is formed with a plurality of energization paths 50 extending from the lower surface to the upper surface. The energization path 50 is formed in a straight line, for example, in a direction perpendicular to the thickness direction of the intermediate substrate 20. An upper terminal 50 a is formed at the upper end of the energization path 50, and a lower terminal 50 b is formed at the lower end of the energization path 50. The current path 50 of the intermediate substrate 20 is formed at a position corresponding to the conductive portion 30 of the lower elastic sheet 22 and the conductive portion 40 of the upper elastic sheet 21 on a one-to-one basis, for example. Thereby, the lower terminal 50b of the energization path 50 and the conductive portion 30 of the lower elastic sheet 22 correspond to each other. Further, the upper terminal 50a of the energization path 50 corresponds to the conductive portion 40 of the upper elastic sheet 21.

  The bottom elastic sheet 22 is fixed to a metal frame 60 that surrounds the outer periphery thereof. The metal frame 60 is formed of, for example, an iron-nickel alloy (Fe—Ni alloy) having the same thermal expansion coefficient as that of the wafer W, for example. The metal frame 60 has a square frame shape along the outer peripheral portion of the bottom elastic sheet 22.

  The metal frame 60 is bonded to the lower surface of the outer peripheral portion of the intermediate substrate 20 with, for example, an elastic silicone adhesive 61. Thereby, each conductive part 30 of the bottom elastic sheet 22 is in contact with the lower terminal 50 b of the energization path 50 of the intermediate substrate 20.

  The upper elastic sheet 21 is fixed to a metal frame 70 that surrounds the outer periphery thereof. The metal frame 70 is formed of, for example, an iron-nickel alloy (Fe—Ni alloy) having the same thermal expansion coefficient as that of the wafer W, for example.

  The metal frame 70 is bonded to the upper surface of the outer peripheral portion of the intermediate substrate 20 with, for example, an elastic silicone adhesive 71. Accordingly, each conductive portion 40 of the upper elastic sheet 21 is in contact with the upper terminal 50 a of the current path 50 of the intermediate substrate 20.

  The mounting table 3 is configured to be movable in the horizontal direction and the vertical direction, for example, and can move the mounted wafer W three-dimensionally.

  The probe apparatus 1 according to the present embodiment is configured as described above, and a method for inspecting the electrical characteristics of the electronic pad U of the wafer W performed by the probe apparatus 1 will be described.

  First, when the wafer W is mounted on the mounting table 3, the mounting table 3 is raised, and the wafer W is pressed against the lower surface of the inspection contact structure 11 from below. At this time, each electrode pad U of the wafer W comes into contact with and presses each conductive portion 30 of the bottom elastic sheet 22. As a result, the conductive portion 30 of the bottom elastic sheet 22 is compressed in the vertical direction by a force acting from below to above. Further, the force acting on the lower elastic sheet 22 is transmitted to the conductive portion 40 of the upper elastic sheet 21 through the intermediate substrate 20, and the conductive portion 40 of the upper elastic sheet 21 is also compressed in the vertical direction. As a result, the circuit board 10 and the electrode pad U of the wafer W are electrically connected with a sufficiently low resistance.

  At this time, the force acting on the lower elastic sheet 22 transmitted to the conductive portion 40 of the upper elastic sheet 21 is transmitted to the actuator 14 via the pitch conversion substrate 12 and the pressing member 13. Then, regardless of the position of the piston rod in the actuator 14, the pitch conversion substrate 12 is pushed to the inspection contact structure 11 side by the pressure generated in the actuator 14, whereby the conductive portion 30 and the wafer of the bottom elastic sheet 22 are pressed. The contact pressure of the W electrode pad U can be kept constant. At this time, the movement of the piston rod in the actuator 14 in the vertical direction is absorbed by, for example, the bending of the pitch conversion board 12 and the vertical expansion / contraction of the pogo pin 17.

  Then, in a state where the wafer W is pressed against the inspection contact structure 11, an electrical signal for inspection is transmitted from the circuit board 10 to the pogo pins 17, the upper terminals 12 a and the lower terminals 12 b of the pitch conversion board 12, and the inspection contact structure. 11, the conductive portion 40 of the upper surface elastic sheet 21, the conduction path 50 of the intermediate substrate 20, and the conductive portion 30 of the lower surface elastic sheet 22 are sequentially sent to the electrode pads U on the wafer W, and the circuit on the wafer W Electrical characteristics are inspected.

  According to the above embodiment, since the actuator 14 is provided on the upper surface of the pitch conversion substrate 12 that supports the inspection contact structure 11, the lower elastic sheet 22 and the electrode pad of the inspection contact structure 11 at the time of inspection. When U contacts, the contact pressure can be maintained at a constant pressure. Accordingly, since the pressure applied to the upper elastic sheet 21 and the lower elastic sheet 22 of the contact structure 11 for inspection can always be kept constant, the inspection of the electrode pad U of the wafer W is repeatedly performed to check the upper elastic sheet 21 and the lower elastic. Even if the sheet 22 deteriorates, the conductive portion 30 of the bottom elastic sheet 22 and the electrode pad U of the wafer W can be stably brought into contact with each other. As a result, the life of the inspection contact structure 11 can be extended, and the maintenance frequency of the inspection contact structure 11 can also be reduced.

  In the above embodiment, the actuator 14 is provided on the pitch conversion substrate 12 of the probe card 2, but may be provided on the mounting table 3 of the wafer W as shown in FIG. In such a case, an actuator 80 having the same configuration as that of the actuator 14 is provided between the chuck 3a and the base 3b as a holding member that sucks the wafer W of the mounting table 3, for example. A plurality of, for example, four actuators 80 are provided on the lower surface of the chuck 3a. First, the height of the actuator 80 is adjusted to ensure the level of the wafer W. Thereafter, when the electrode pad U comes into contact with the conductive portion 30 of the lower elastic sheet 22 during inspection, the force acting on the electrode pad U is transmitted to the actuator 80 via the wafer W and the chuck 3a. Then, a piston rod (not shown) of the actuator 80 moves in the vertical direction, and the contact pressure between the conductive portion 30 of the bottom elastic sheet 22 and the electrode pad U of the wafer W is set to a constant pressure by the flow rate of the air generated in the actuator 80. Can be kept in.

  At this time, since a plurality of actuators 80 are provided, an unbalanced load is generated in the surface direction (horizontal direction) of the wafer W due to the contact between the conductive portion 30 of the bottom elastic sheet 22 and the electrode pad U of the wafer W. Even in this case, the control unit 100 connected to the actuator 80 can adjust the air pressure inside each actuator 80 to keep the wafer W parallel to the lower elastic sheet 22, for example, horizontal. Specifically, the position of the piston rod of the actuator 80 in the vertical direction is monitored, and the air pressure in each actuator 80 is adjusted according to the difference in the vertical position of each actuator 80 to keep the wafer W horizontal. The contact pressure between the electrode pad U of the wafer W and the conductive portion 30 of the lower elastic sheet 22 can be uniformly dispersed in the horizontal direction.

  Further, when the actuator 80 is provided on the mounting table 3 for the wafer W, the pitch conversion substrate 12 included in the probe card 2 may be omitted, and the inspection contact structure 11 may be directly fixed to the circuit substrate 10. .

  In the above embodiment, either the actuator 14 or the actuator 80 is provided on the probe card 2 or the mounting table 3, respectively. However, as shown in FIG. 5, the actuators 14 and 80 are connected to the probe card 2 and the mounting table. 3 may be provided in both. In such a case, the contact pressure between the electrode pad U of the wafer W and the conductive portion 30 of the lower elastic sheet 22 can be maintained more accurately and constant.

  By the way, when the inventors investigated, as described in the above embodiment, the inspection of the electrode pad U can be performed even when the contact pressure when the contact structure 11 for inspection and the electrode pad U are in contact with each other is constant. It was found that the conductive portion 30 of the bottom elastic sheet 22 deteriorates by repeating the process, and the resistance value of the conductive portion 30 is increased as shown in FIG. 6, for example (dotted line in FIG. 6). Thus, since the electrical continuity between the circuit board 10 and the wafer W decreases when the resistance value of the conductive portion 30 increases, it is preferable to maintain the resistance value of the conductive portion 30 at a predetermined value.

  On the other hand, as shown in FIG. 7, when the contact pressure when the contact structure 11 for inspection and the electrode pad U contact was made high, it turned out that the resistance value of the electroconductive part 30 becomes low.

  Therefore, the contact pressure between the inspection contact structure 11 and the electrode pad U may be controlled so that the resistance value of the conductive portion 30 is maintained at a predetermined value (solid line in FIG. 6).

  In such a case, as shown in FIG. 8, a resistance measuring device 200 that measures the resistance value of the conductive portion 30 is provided for the probe device 1 in the above embodiment. When measuring the resistance value of the conductive portion 30 using the resistance measuring device 200, an inspection plate T made of, for example, copper (Cu) is used. The resistance measuring device 200 is connected to the conductive portion 30 and the inspection plate T. Then, the resistance value of the conductive portion 30 is measured by the resistance measuring device 200 in a state where the inspection plate T is placed on the mounting table 3 and the conductive portion 30 and the inspection plate T are in contact with each other. In this way, the resistance value of the conductive unit 30 measured by the resistance measuring device 200 is output to the control unit 100.

  In the control unit 100, first, based on the measurement result of the resistance value of the conductive unit 30 output from the resistance measuring device 200, the inspection contact structure 11 and the electrode are set so that the resistance value of the conductive unit 30 becomes a predetermined value. A correction value for the contact pressure with the pad U is calculated. Then, a correction value of the pressure in the actuator 14 is calculated from the calculated correction value, and the flow rate and electric energy of air supplied from the pressure control unit to the actuator 14 are controlled based on the correction value. By controlling the pressure in the actuator 14 in this way, the resistance value of the conductive portion 30 can be maintained at a predetermined value as shown in FIG. 6 (solid line in FIG. 6).

  According to the above embodiment, the pressure in the actuator 14 can be controlled to maintain the contact pressure at which the test contact structure 11 and the electrode pad U are in contact with each other, and the resistance value of the conductive portion 30 can be maintained. Can be maintained at a predetermined value. Then, when the inspection of the electrode pad U of the wafer W is performed thereafter, the electrical continuity between the circuit board 10 and the wafer W can be appropriately maintained. Even if it deteriorates, the inspection can be appropriately performed. Thereby, the life of the contact structure for inspection 11 can also be extended.

  In the above embodiment, the inspection plate T made of copper (Cu) is used. However, an inspection plate made of gold (Au) may be used. In such a case, first, the resistance value of the conductive portion 30 is measured by the resistance measuring instrument 200 in a state where the conductive portion 30 is in contact with the inspection plate made of Au, and the conductive portion 30 is inspected for dirt. When it is determined that the conductive portion 30 is dirty, the conductive portion 30 is cleaned. Thereafter, the resistance value of the conductive part 30 is measured using the inspection plate T, and the pressure in the actuator 14 is controlled by the control unit 100 so that the resistance value of the conductive part 30 becomes a predetermined value. As a result, the resistance value of the conductive portion 30 can be measured more accurately, and the resistance value of the conductive portion 30 can be more accurately maintained at a predetermined value.

  In the above embodiment, the resistance value of the conductive portion 30 is controlled to a predetermined value using the inspection plate T. However, as shown in FIG. 9, for example, the lower elastic sheet 22 has the same configuration as the conductive portion 30. The inspection conductive portion 210 may be provided, and a plate P made of copper (Cu) may be provided on the wafer W. The inspection conductive portion 210 is formed at a position where it comes into contact with the plate P during inspection. When the electrode pad U of the wafer W is inspected, the conductive portion 30 and the electrode pad U are brought into contact with each other, and the inspection conductive portion 210 is brought into contact with the plate P. In this state, the resistance value of the inspection conductive portion 210 is measured by the resistance measuring device 200 in a state where the inspection conductive portion 210 and the plate P are in contact with each other. Then, the control unit 100 controls the pressure of the actuator 14 based on the resistance value of the inspection conductive unit 210 so that the resistance value becomes a predetermined value. Here, since the measured resistance value of the conductive portion for inspection 210 can be equated with the resistance value of the conductive portion 30, the resistance value of the conductive portion 30 is maintained at a predetermined value by controlling the pressure of the actuator 14 described above. can do. Accordingly, the pressure in the actuator 14 can be appropriately controlled at the same time when the electrode pad U is inspected.

  In the above embodiment, the resistance value of the conductive portion 30 of the lower elastic sheet 22 is controlled to be maintained at a predetermined value, but the resistance value of the conductive portion 40 of the upper elastic sheet 21 is also controlled. Also good. In such a case, the resistance measuring device 200 is connected to the conductive portion 40 and the inspection plate T. That is, the conductive part 40, the conductive part 30, and the inspection plate T are connected to the resistance measuring device 200 as one circuit. Then, the resistance value of the conductive portion 30 and the conductive portion 40 is measured by the resistance measuring device 200 in a state where the conductive portion 30 and the inspection plate T are in contact with each other, and the control portion 100 so that the resistance value becomes a predetermined value. To control the pressure in the actuator 14. As described above, the resistance value of the conductive portion 40 together with the conductive portion 30 can be maintained at a predetermined value. Therefore, even if the conductive portion 30 and the conductive portion 40 deteriorate due to repeated inspection of the electrode pads U of the wafer W, Inspection can be performed more appropriately.

  In the above embodiment, the pressure in the actuator 14 is controlled based on the measurement result of the resistance value of the conductive portion 30 by the resistance measuring device 200, but based on the number of inspections without using the resistance measuring device 200. The pressure in the actuator 14 may be controlled. For example, as shown in FIG. 6, when the characteristic of the resistance value of the conductive portion 30 with respect to the number of inspections is known in advance, the actuator 14 is configured to maintain the resistance value of the conductive portion 30 at a predetermined value based on the number of inspections. The pressure inside can be controlled.

  In the above embodiment, the inspection contact structure 11 has the three-layer structure of the intermediate substrate 20, the upper surface elastic sheet 21, and the lower surface elastic sheet 22, but as the inspection contact structure, as shown in FIG. Alternatively, a probe 300 having a cantilever structure may be used. In such a case, a support member 301 that supports the probe 300 is provided on the lower surface side of the circuit board 10. The support member 301 is formed in a substantially square shape, for example, and is disposed so as to face the mounting table 3. A plurality of leaf springs 302 are fixed to the lower surface of the outer periphery holder 15 a, and the outer peripheral portion of the support member 301 is supported by the leaf springs 302.

  On the upper surface of the support member 301, a plurality of connection terminals 303 are provided at positions corresponding to the connection terminals 10 a of the circuit board 10. The connection terminal 303 is electrically connected to the connection terminal 10 a of the circuit board 10 by contact pins 304. The contact pin 304 is made of, for example, nickel which is elastic and flexible and has conductivity. The contact pin 304 can freely move up and down and left and right while maintaining contact with the circuit board 10.

  A plurality of probes 300 are supported on the lower surface of the support member 301 at positions corresponding to the electrode pads U on the wafer W. The probe 300 is electrically connected to a connection terminal 303 provided on the upper surface of the support member 301.

  The probe 300 is made of a metal conductive material such as nickel cobalt. As shown in FIG. 11, the probe 300 is supported by a support member 301 and has a support portion 310 that protrudes from the lower surface of the support member 301. A beam portion 311 is provided at the lower end of the support portion 310, and the beam portion 311 is cantilevered at a predetermined interval by the support portion 310 with respect to the support member 301. A contact 312 extending downward in the direction perpendicular to the beam 311 is provided at the free end of the beam 311.

  When the electrical characteristics of the electrode pad U of the wafer W are inspected using the probe device 1, first, the electrode pad U is pressed against the contact 312 of the probe 300 and brought into contact therewith. At this time, as in the above embodiment, the pressure of the actuator 14 is controlled by the control unit 100, and the contact pressure between the contact 312 and the electrode pad U can be kept constant. Then, in this state where the contact pressure is kept constant, an inspection signal from the circuit board 10 is sent to the electrode pad U through the contact pin 304, the connection terminal 303 of the support member 301 and the probe 300 in this order. Thus, the electrical characteristics of the electrode pad U are inspected.

  Here, for example, even when the tip of the contact 312 is worn due to repeated inspections and the contact pressure between the contact 312 and the electrode pad U decreases (for example, the dotted line shown in FIG. 2), the probe with the cantilever structure 300 can control the contact pressure to some extent by bending the beam portion 311 and moving the contact 312 up and down. However, since the moving range of the contact 312 is limited, the contact pressure may not be kept constant. According to the present embodiment, even in such a case, the contact pressure can be made constant by the actuator 14 (for example, the solid line shown in FIG. 2).

  In addition, as a result of investigations by the inventors, even when the contact pressure when the probe 300 having the cantilever structure and the electrode pad U are in contact with each other as described above, the contactor can be obtained by repeatedly inspecting the electrode pad U. It was found that the resistance value of 312 was high (for example, the dotted line shown in FIG. 6). For example, when the inspection is repeated, the tip of the contact 312 wears or the aluminum oxide film on the electrode pad U adheres to the tip of the contact 312, thereby increasing the resistance value of the contact 312.

  Therefore, a resistance measuring device 320 for measuring the resistance value of the contact 312 may be provided for the probe device 1 as shown in FIG. Since the configuration of the resistance measuring device 320 and the method of measuring the resistance value using the inspection plate T are the same as those of the resistance measuring device 200 in the above embodiment, the description thereof is omitted. Even in such a case, the resistance value of the contact 312 can be maintained at a predetermined value by controlling the pressure in the actuator 14 based on the resistance value of the contact 312 measured by the resistance measuring device 320 (for example, Solid line shown in FIG. 6).

  In addition, when the cantilever-type probe 300 is used as the inspection contact structure as described above, the actuator 330 may be provided on the mounting table 3 of the wafer W. Since the configuration and operation of the actuator 330 are the same as those of the actuator 80 in the above embodiment, the description thereof is omitted. The actuator 330 may be provided instead of the actuator 14 as shown in FIG. In such a case, by controlling the pressure in the actuator 330, the contact pressure between the contact 312 of the probe 300 and the electrode pad U of the wafer W can be kept constant, and the wafer W can be kept horizontal. The contact pressure between the contact 312 and the electrode pad U can be uniformly dispersed in the horizontal direction. The actuator 330 may be provided together with the actuator 14 as shown in FIG. In such a case, the contact pressure between the contact 312 and the electrode pad U can be maintained more accurately and constant.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be made within the scope of the ideas described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs. The present invention is not limited to this example and can take various forms. The present invention can also be applied to a case where the substrate is another substrate such as an FPD (flat panel display) other than a wafer or a mask reticle for a photomask.

  The present invention is useful when inspecting the electrical characteristics of an object to be inspected, such as a semiconductor wafer.

Claims (15)

A probe device for inspecting the electrical characteristics of an object to be inspected,
A circuit board;
An inspection contact structure that is provided on the inspected object side of the circuit board and that provides electrical continuity between the inspected object and the circuit board during inspection;
A support member provided between the circuit board and the contact structure for inspection and supporting the contact structure for inspection;
An actuator is provided on the upper surface of the support member to maintain the contact pressure between the inspection contact structure and the object to be inspected at a constant pressure. The probe device according to claim 1,
A control unit for controlling a constant pressure when the contact structure for inspection and the inspection object are in contact with each other;
The controller controls the pressure in the actuator so that the resistance value of the inspection contact structure becomes a predetermined value. The probe apparatus according to claim 2, wherein
A resistance measuring instrument for measuring the resistance value of the contact structure for inspection;
The control unit controls the pressure in the actuator based on the resistance value of the inspection contact structure measured by the resistance measuring device so that the measured resistance value becomes the predetermined value. The probe device according to claim 1,
An elastic sheet that contacts the object to be inspected at the time of inspection is provided on at least the lower surface of the inspection contact structure. The probe apparatus according to claim 4, wherein
The inspection contact structure has a three-layer structure including a flat intermediate body and elastic sheets attached to both upper and lower surfaces of the intermediate body. The probe apparatus according to claim 4, wherein
The circuit board is provided with a plurality of connection terminals of an electronic circuit,
The support member is a pitch conversion board that changes an interval between a plurality of connection terminals of the circuit board. The probe device according to claim 1,
The inspection contact structure includes a beam portion that is cantilevered by the support member, a contact that extends from the free end of the beam portion toward the inspection object, and contacts the inspection object during inspection, Have The probe device according to claim 1,
A fixing member for fixing the circuit board is provided above the circuit board,
The actuator penetrates the circuit board and is fixed to the fixing member. A probe device for inspecting the electrical characteristics of a workpiece,
A circuit board;
An inspection contact structure that is provided on the inspected object side of the circuit board and that provides electrical continuity between the inspected object and the circuit board during inspection;
A holding member that holds the object to be inspected so as to face the contact structure for inspection,
On the lower surface of the holding member, there is an actuator that maintains the contact pressure between the inspection contact structure and the inspection object at a constant pressure. The probe device according to claim 9, wherein
An elastic sheet that contacts the object to be inspected at the time of inspection is provided on at least the lower surface of the inspection contact structure. The probe device according to claim 9, wherein
The inspection contact structure has a three-layer structure including a flat intermediate body and elastic sheets attached to both upper and lower surfaces of the intermediate body. The probe device according to claim 9, wherein
The inspection contact structure includes a beam portion that is cantilevered by the support member, a contact that extends from the free end of the beam portion toward the inspection object, and contacts the inspection object during inspection, Have The probe device according to claim 9, wherein
A plurality of the actuators are provided. The probe apparatus according to claim 13,
A control unit configured to control the inspected object to be horizontal based on a vertical position of each of the plurality of actuators; The probe apparatus according to claim 14, wherein
The said control part controls the fixed pressure at the time of the said contact structure for a test | inspection and the said to-be-inspected object contacting.

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