JPWO2009063532A1 - Aluminum etched plate for electrolytic capacitors - Google Patents

Aluminum etched plate for electrolytic capacitors Download PDF

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JPWO2009063532A1
JPWO2009063532A1 JP2009540975A JP2009540975A JPWO2009063532A1 JP WO2009063532 A1 JPWO2009063532 A1 JP WO2009063532A1 JP 2009540975 A JP2009540975 A JP 2009540975A JP 2009540975 A JP2009540975 A JP 2009540975A JP WO2009063532 A1 JPWO2009063532 A1 JP WO2009063532A1
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etching
aluminum
plate
electrolytic
etched
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JP4998559B2 (en
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雅彦 片野
雅彦 片野
昌司 磯部
昌司 磯部
達由樹 小林
達由樹 小林
祐也 吉田
祐也 吉田
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Nippon Light Metal Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/04Etching of light metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/042Electrodes or formation of dielectric layers thereon characterised by the material
    • H01G9/045Electrodes or formation of dielectric layers thereon characterised by the material based on aluminium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/048Electrodes or formation of dielectric layers thereon characterised by their structure
    • H01G9/055Etched foil electrodes

Abstract

エッチング倍率が高く、かつ、固体電解質を含浸した場合でも高い静電容量を得ることができる電解コンデンサ用アルミニウムエッチド板を製造するにあたって、アルミニウム純度が99.98質量%以上のアルミニウム板に対して、交流による電気化学的エッチングを行い、エッチング部位(3)の嵩比重が0.6〜1.2である電解コンデンサ用アルミニウムエッチド板(1)を得る。エッチング部位(3)は、表面から20μmより深い位置の平面断面を画像解析装置で測定したとき、各測定面において、円形に換算したときのピット径で0.01〜1μmφのピット数が当該測定面内における全ピット数の70%以上存在しており、エッチング倍率が高く、かつ、固体電解質を含浸した場合でも高い静電容量を得ることができる。When manufacturing an aluminum etched plate for electrolytic capacitors that has a high etching magnification and can obtain a high capacitance even when impregnated with a solid electrolyte, an alternating current is applied to an aluminum plate with an aluminum purity of 99.98% by mass or more. The aluminum etching board (1) for electrolytic capacitors whose bulk specific gravity of an etching site | part (3) is 0.6-1.2 is obtained by performing electrochemical etching by. The etching site (3) has a pit number of 0.01 to 1 μmφ in the measurement plane when converted into a circle on each measurement surface when a planar cross section at a position deeper than 20 μm from the surface is measured with an image analyzer. 70% or more of the total number of pits is high, the etching magnification is high, and a high capacitance can be obtained even when impregnated with a solid electrolyte.

Description

本発明は、アルミニウム板をエッチングしてなる電解コンデンサ用アルミニウムエッチド板に関するものである。   The present invention relates to an aluminum etched plate for electrolytic capacitors obtained by etching an aluminum plate.

近年、パーソナルコンピュータや情報機器などの電子機器のデジタル化、高周波化が進むにつれて、電解コンデンサには、低背化、低インピーダンス化、低ESRに加えて、低ESL化、高容量化が求められている。それらに対応すべく電解コンデンサの開発が進められているが、電解コンデンサの低インピーダンス化や低ESR化は、機能性高分子などの固体電解質や、エッチング部位に固体電解質を充填(含浸)する技術に負うところが大きい。このため、従来は、例えば、厚さが70〜120μmのアルミニウム箔に対して約30〜35μm程度の深さにエッチングしたものが用いられており、かかる深さであれば、従来の固体電解質や含浸技術でも、含浸性については大きな問題が発生していない。   In recent years, as electronic devices such as personal computers and information devices have become more digitized and higher in frequency, electrolytic capacitors are required to have lower ESL and higher capacity in addition to lower height, lower impedance, and lower ESR. ing. Electrolytic capacitors are being developed to meet these requirements, but lowering the impedance and lowering the ESR of electrolytic capacitors is a technology that fills (impregnates) a solid electrolyte such as a functional polymer or a solid electrolyte at the etching site. The burden on is large. For this reason, conventionally, for example, an aluminum foil having a thickness of 70 to 120 μm is etched to a depth of about 30 to 35 μm. If this depth is used, a conventional solid electrolyte or Even in the impregnation technique, no major problem has occurred regarding the impregnation property.

しかしながら、厚さが70〜120μmのアルミニウム箔に対して約30〜35μm程度の深さにエッチングした電極箔では、十分な静電容量が得られない。このため、電解コンデンサを製作する際、電極箔を複数枚、積層して用いており、その結果、製造コストが増大するとともに、電解コンデンサの厚さ寸法が増大し、低背化を図ることができない。   However, an electrode foil etched to a depth of about 30 to 35 μm with respect to an aluminum foil having a thickness of 70 to 120 μm cannot provide a sufficient capacitance. For this reason, when manufacturing an electrolytic capacitor, a plurality of electrode foils are laminated and used, resulting in an increase in manufacturing cost and an increase in the thickness of the electrolytic capacitor, thereby reducing the height. Can not.

そこで、アルミニウム箔を厚くするとともに深くまでエッチングを行なうことにより、静電容量を高め、電極箔の積層枚数を低減することが提案されている(特許文献1参照)。
特開2005−150705号公報
Therefore, it has been proposed to increase the electrostatic capacity and reduce the number of laminated electrode foils by thickening the aluminum foil and etching deeply (see Patent Document 1).
JP 2005-150705 A

しかしながら、特許文献1に記載の方法でアルミニウム箔を厚くするとともにエッチング部位を深くすると、エッチング部位に固体電解質が十分に含浸されず、エッチング倍率が高くても十分な静電容量を得ることができないという問題点がある。また、エッチング部位に固体電解質が十分に充填されないと、ESRが増大するなどの問題点もある。   However, when the aluminum foil is thickened by the method described in Patent Document 1 and the etching site is deepened, the etching site is not sufficiently impregnated with the solid electrolyte, and sufficient electrostatic capacity cannot be obtained even when the etching magnification is high. There is a problem. In addition, if the etching site is not sufficiently filled with the solid electrolyte, there is a problem that ESR increases.

以上の問題点に鑑みて、本発明の目的は、エッチング倍率が高く、かつ、固体電解質を含浸した場合でも高い静電容量を得ることができる電解コンデンサ用アルミニウムエッチド板を提供することにある。   In view of the above problems, an object of the present invention is to provide an aluminum etched plate for electrolytic capacitors that has a high etching magnification and can obtain a high capacitance even when impregnated with a solid electrolyte. .

本願発明者らは、エッチング倍率が十分高く、かつ、含浸率が十分高いという条件を的確に規定できるパラメータとしてエッチング部位の体積重量に着目し、かかる値を所定の範囲に設定することにより、固体電解質を含浸した場合でも高い静電容量を得ることができる電解コンデンサ用アルミニウムエッチド板を提供する。本明細書において、「アルミニウムエッチド板」は150μm以上の厚さのものをいう。   The inventors of the present application pay attention to the volume weight of the etching site as a parameter that can accurately define the conditions that the etching magnification is sufficiently high and the impregnation rate is sufficiently high, and by setting such a value within a predetermined range, Provided is an aluminum etched plate for electrolytic capacitors, which can obtain a high capacitance even when impregnated with an electrolyte. In this specification, “aluminum etched plate” refers to a sheet having a thickness of 150 μm or more.

すなわち、本発明では、アルミニウム板を交流による電気化学的エッチングして拡面化してなる電解コンデンサ用アルミニウムエッチド板において、エッチング部位の嵩比重が0.6〜1.2であることを特徴とする。   That is, the present invention is characterized in that the bulk specific gravity of the etched portion is 0.6 to 1.2 in an aluminum etched plate for electrolytic capacitors obtained by expanding an aluminum plate by electrochemical etching with alternating current.

本発明では、アルミニウム板を交流により電気化学的エッチングすることにより、エッチングにより、1平方ミリメートルあたり、数千〜数十万の海綿状のピットを穿孔した際、エッチング部位の嵩比重を0.6〜1.2としたため、十分な表面積を有し、かつ、固体電解質の含浸性がよいので、固体電解質を含浸した場合でも高い静電容量を得ることができる。   In the present invention, when the aluminum plate is electrochemically etched by alternating current, several thousand to several hundreds of thousands of spongy pits are drilled per square millimeter by etching, and the bulk specific gravity of the etched portion is 0.6 to 1.2. Therefore, since it has a sufficient surface area and the impregnation property of the solid electrolyte is good, a high capacitance can be obtained even when impregnated with the solid electrolyte.

固体電解質を含浸した場合の静電容量は、以下の理由から、エッチング倍率だけでは十分に規定できない。エッチング倍率は、電解コンデンサ用アルミニウムエッチド板を陽極酸化した後、アジピン酸アンモニウム水溶液中で静電容量を測定することにより求めることができる。但し、電解コンデンサ用アルミニウムエッチド板を陽極酸化した後、固体電解質を含浸した後の静電容量(電解コンデンサに用いた状態での静電容量)は、エッチング倍率と固体電解質の含浸性とによって支配され、概ね、以下の値
エッチング倍率×固体電解質の含浸性(含浸率)
に比例する。含浸率は、容量出現率とも称せられ、アジピン酸アンモニウム水溶液中で測定した静電容量が、固体電解質を含浸した状態でどのレベルまで出現するかを示す。
The electrostatic capacity when impregnated with the solid electrolyte cannot be sufficiently defined only by the etching magnification for the following reasons. The etching magnification can be obtained by anodizing the aluminum etched plate for electrolytic capacitors and then measuring the capacitance in an aqueous solution of ammonium adipate. However, the capacitance after the anodization of the aluminum etched plate for electrolytic capacitors and the impregnation with the solid electrolyte (capacitance when used in the electrolytic capacitor) depends on the etching magnification and the impregnation property of the solid electrolyte. Dominated, roughly the following values Etching magnification x Solid electrolyte impregnation (impregnation rate)
Is proportional to The impregnation rate is also referred to as a capacity appearance rate, and indicates to what level the electrostatic capacity measured in the ammonium adipate aqueous solution appears in the state impregnated with the solid electrolyte.

一般に、エッチング電気量が少ない場合、エッチングが浅い分、固体電解質が充填されやすいが、エッチング倍率が低い。これに対して、エッチング電気量が多い場合には、エッチングが深くなる分、エッチング倍率が高くなる一方、固体電解質が奥まで充填されにくくなるので、含浸率が低下する傾向にある。従って、固体電解質を含浸した後の静電容量は、含浸性が高くてもエッチング倍率が低い場合には、固体電解質を含浸した後、高い静電容量を得ることができず、エッチング倍率が高くても含浸率が低い場合にも、高い静電容量を得ることができないことになる。   In general, when the amount of etching electricity is small, the etching is shallow, but the solid electrolyte is easily filled, but the etching magnification is low. On the other hand, when the amount of etching electricity is large, the etching magnification increases as the etching becomes deeper, while the solid electrolyte becomes difficult to be fully filled, so that the impregnation rate tends to decrease. Therefore, when the capacitance after impregnation with the solid electrolyte is high even if the impregnation property is high, the high capacitance cannot be obtained after impregnation with the solid electrolyte, and the etching magnification is high. However, even when the impregnation rate is low, a high capacitance cannot be obtained.

また、エッチングの電気量や、アルミニウム板の状態からのエッチング減量で規定した場合には、エッチング部位の三次元的な形状を十分規定できず、固体電解質を含浸した後の静電容量を十分制御できない。例えば、細かいピットが多数形成された場合には、エッチング倍率が高くなるが、固体電解質が奥まで充填されにくくなるので、含浸率が低下する結果、固体電解質を含浸した後、高い静電容量を得ることができない。これに対して、大きなピットが多く形成された場合には、固体電解質が充填されやすいが、エッチング倍率が低いので、固体電解質を含浸した後、高い静電容量を得ることができない。   In addition, when the amount of electricity for etching or the amount of etching reduced from the state of the aluminum plate is specified, the three-dimensional shape of the etched part cannot be sufficiently specified, and the electrostatic capacity after impregnation with the solid electrolyte is sufficiently controlled. Can not. For example, when a large number of fine pits are formed, the etching magnification is increased, but the solid electrolyte is difficult to be fully filled, so that the impregnation rate is lowered. Can't get. On the other hand, when a large number of large pits are formed, the solid electrolyte is easily filled, but since the etching magnification is low, a high capacitance cannot be obtained after impregnating the solid electrolyte.

しかるに本発明では、エッチング部位の嵩比重によって規定したため、エッチング部位の三次元的な形状を確実に規定でき、固体電解質を含浸した後の静電容量を確実に制御できる。   However, in the present invention, since it is defined by the bulk specific gravity of the etching site, the three-dimensional shape of the etching site can be defined reliably, and the capacitance after impregnation with the solid electrolyte can be controlled reliably.

ここで、エッチング部位の嵩比重と、エッチング倍率、含浸率および固体電解質を含浸した場合の静電容量の関係を各々、図1に点線L1、一点鎖線L2および実線L3で示す。この図から分るように、エッチング部位の嵩比重が増大するほど、エッチング倍率が上昇するが(点線L1参照)、含浸率が低下するため(一点鎖線L2参照)、固体電解質を含浸した場合の静電容量は、実線L3で示すように変化する。すなわち、エッチング部位の嵩比重が0.6未満では、固体電解質が充填されやすいが、エッチング倍率が低く、エッチング部位の嵩比重が1.2を超えると、エッチング倍率が高いが、固体電解質が奥まで充填されにくくなる。それ故、エッチング部位の嵩比重が0.6〜1.2であることが重要である。   Here, the relationship between the bulk specific gravity of the etching site, the etching magnification, the impregnation rate, and the electrostatic capacity when impregnated with the solid electrolyte is shown by a dotted line L1, a one-dot chain line L2, and a solid line L3 in FIG. As can be seen from this figure, as the bulk specific gravity of the etched portion increases, the etching magnification increases (see the dotted line L1), but the impregnation rate decreases (see the alternate long and short dash line L2), so that the solid electrolyte is impregnated. The capacitance changes as indicated by the solid line L3. That is, when the bulk specific gravity of the etching site is less than 0.6, the solid electrolyte is easily filled, but when the etching magnification is low, and when the bulk specific gravity of the etching site exceeds 1.2, the etching magnification is high, but the solid electrolyte is difficult to fill deeply. Become. Therefore, it is important that the bulk specific gravity of the etching site is 0.6 to 1.2.

本発明において、前記エッチング部位の厚さ(深さ)が100μm以上、好ましくは120μm以上であることが好ましい。かかる構成によれば、エッチング倍率が高く、かつ、固体電解質が奥まで充填されやすいエッチング部位が深くまで存在するので、固体電解質を含浸した後の静電容量が高い。   In the present invention, the thickness (depth) of the etching site is 100 μm or more, preferably 120 μm or more. According to such a configuration, the etching magnification is high, and there are deeply etched portions where the solid electrolyte is easily filled to the back, so that the capacitance after impregnation with the solid electrolyte is high.

本発明を適用した電解コンデンサ用アルミニウムエッチド板は、電解質として機能性高分子が用いられるアルミニウム電解コンデンサの陽極として用いられる。すなわち、本発明を適用した電解コンデンサ用アルミニウムエッチド板は、表面に誘電体膜が形成され、当該誘電体膜上に機能性高分子層が形成されて、電解コンデンサに用いられる。   The aluminum etched plate for electrolytic capacitors to which the present invention is applied is used as an anode of an aluminum electrolytic capacitor in which a functional polymer is used as an electrolyte. That is, the aluminum etched plate for electrolytic capacitors to which the present invention is applied is used for an electrolytic capacitor in which a dielectric film is formed on the surface and a functional polymer layer is formed on the dielectric film.

本発明を適用した電解コンデンサ電極用アルミニウムエッチド板におけるエッチング部位の体積重量と、エッチング倍率、含浸率および固体電解質を含浸した場合の静電容量の関係を示す説明図である。It is explanatory drawing which shows the relationship of the electrostatic capacitance at the time of impregnating the volume weight of the etching site | part in the aluminum etched plate for electrolytic capacitor electrodes to which this invention is applied, an etching magnification, an impregnation rate, and a solid electrolyte. 本発明を適用した電解コンデンサ電極用アルミニウムエッチド板の断面写真を表す図である。It is a figure showing the cross-sectional photograph of the aluminum etched board for electrolytic capacitor electrodes to which this invention is applied. 本発明を適用した電解コンデンサ電極用アルミニウムエッチド板を用いて電解コンデンサを製作するときの説明図である。It is explanatory drawing when manufacturing an electrolytic capacitor using the aluminum etched plate for electrolytic capacitor electrodes to which the present invention is applied.

符号の説明Explanation of symbols

1 電解コンデンサ用アルミニウムエッチド板
2 芯部
3 エッチング部位
1 Aluminum Etched Plate for Electrolytic Capacitor 2 Core 3 Etching Site

以下、本発明の実施の形態として、本発明を適用した電解コンデンサ用アルミニウムエッチド板の構成および製造方法を説明する。   Hereinafter, as an embodiment of the present invention, a configuration and a manufacturing method of an aluminum etched plate for electrolytic capacitors to which the present invention is applied will be described.

本発明では、アルミニウム板を交流による電気化学的エッチングして拡面化してなる電解コンデンサ用アルミニウムエッチド板において、エッチング部位の嵩比重が0.6〜1.2であることを特徴とする。また、エッチング部位の厚さが100μm以上、より好ましくは120μm以上であることが好ましい。   In the present invention, an aluminum etched plate for electrolytic capacitors obtained by expanding an aluminum plate by electrochemical etching with alternating current has a bulk specific gravity of 0.6 to 1.2 at an etching site. The thickness of the etching site is preferably 100 μm or more, more preferably 120 μm or more.

本形態に係る電解コンデンサ用アルミニウムエッチド板は、アルミニウム純度が99.98質量%以上からなるアルミニウム板をエッチングしてなる。このような純度のアルミニウム板を用いることによって、靭性が高く、電解コンデンサを製造する際の取り扱いが容易となる。アルミニウム純度が下限値未満であると、硬度が増して靭性が低下し、取り扱い中に割れ等の損傷が生じる虞があり、好ましくない。   The aluminum etched plate for electrolytic capacitors according to this embodiment is formed by etching an aluminum plate having an aluminum purity of 99.98% by mass or more. By using an aluminum plate having such a purity, the toughness is high, and handling when manufacturing an electrolytic capacitor is facilitated. If the aluminum purity is less than the lower limit, the hardness increases, the toughness decreases, and damage such as cracking may occur during handling, which is not preferable.

エッチング処理に供されるアルミニウム板の厚さは目的によって種々の厚さとすればよいが、例えば、150μm乃至1mm、通常は300〜400μmのものが用いられる。そして、アルミニウム板に一次電解処理として低濃度塩酸水溶液で交流エッチングを施す。前処理としてアルミニウム板を脱脂洗浄や軽度のエッチングにより、表面酸化膜の除去を施すと好ましい。   The thickness of the aluminum plate used for the etching treatment may be various depending on the purpose. For example, a thickness of 150 μm to 1 mm, usually 300 to 400 μm is used. Then, AC etching is performed on the aluminum plate with a low concentration hydrochloric acid aqueous solution as a primary electrolytic treatment. As a pretreatment, it is preferable to remove the surface oxide film from the aluminum plate by degreasing and light etching.

一次電解処理で電解液として用いる低濃度塩酸水溶液は、例えば、割合として1.5〜2.5モル/リッタの塩酸と0.05〜0.5モル/リッタの硫酸とを含有する水溶液であり、下記条件、即ち、液温度は40〜55℃、周波数は10〜25Hz、交流波形は正弦波形、矩形波形、交直重畳波形等、電流密度は40〜50A/dm2、処理時間30〜60秒の条件でエッチング処理し、アルミニウム板表面に多数のピットを穿孔する。The low concentration hydrochloric acid aqueous solution used as the electrolytic solution in the primary electrolytic treatment is, for example, an aqueous solution containing 1.5 to 2.5 mol / liter hydrochloric acid and 0.05 to 0.5 mol / liter sulfuric acid as a ratio. 40 to 55 ° C, frequency is 10 to 25Hz, AC waveform is sine waveform, rectangular waveform, AC / DC superimposed waveform, etc., current density is 40 to 50A / dm 2 , processing time is 30 to 60 seconds, etching treatment, aluminum A large number of pits are drilled on the plate surface.

一次電解処理を施した後に主電解処理を施して海綿状に穿孔しエッチングを進行させる。この主電解処理で用いる電解液は、例えば、割合として4〜6モル/リッタの塩酸と0.05〜0.5モル/リッタ硫酸を含有する水溶液中で、下記条件、即ち、液温度は一次処理より低い20〜35℃、周波数は30〜60Hz、交流波形は正弦波形、矩形波形、交直重畳波形等、電流密度は一次電解処理より低い20〜30A/dm2、処理時間は所定のエッチング部位厚さまで処理できる時間に設定し、一次電解処理で穿孔したピットを更に穿孔する。このような方法を採用すれば、アルミニウム板表面のピット形成に寄与しない溶解を少なくして、特定サイズの径のピットを多数穿孔した海綿状のエッチング部位を深くまで形成することができる。After performing the primary electrolytic treatment, the main electrolytic treatment is performed to make holes in a spongy manner, and the etching proceeds. The electrolytic solution used in this main electrolytic treatment is, for example, in an aqueous solution containing 4 to 6 mol / liter hydrochloric acid and 0.05 to 0.5 mol / liter sulfuric acid as a ratio, under the following conditions, that is, the liquid temperature is lower than that of the primary treatment. to 35 ° C., a frequency is 30 Hz to 60 Hz, the AC waveform is a sine waveform, square waveform, such as AC-DC superimposed waveform, the current density may be treated to the primary electrolytic lower than the processing 20~30A / dm 2, treatment time predetermined etching region thickness The time is set, and the pits drilled by the primary electrolytic treatment are further drilled. By adopting such a method, it is possible to reduce the dissolution that does not contribute to the formation of pits on the surface of the aluminum plate, and to form a spongy etching site in which a large number of pits having a specific size are drilled.

一次電解処理を行った後、主電解処理を行う前に主電解処理が確実に進行するように交直重畳波形を用い、一次電解処理で穿孔したピット表面を活性化させてから主電解処理に移行させてもよい。かかる処理では、デューティー比が約0.7〜0.9で、電流密度が12〜17A/dm2の条件で60秒程度、エッチング処理する。このような電解エッチング方法を用いれば厚さ70μm以上、好ましくは100μm以上の海綿状のエッチング部位を形成することができる。After performing the primary electrolytic treatment, use the AC / DC superimposed waveform to ensure that the main electrolytic treatment proceeds before the main electrolytic treatment, and activate the pit surface drilled by the primary electrolytic treatment before moving to the main electrolytic treatment You may let them. In this process, the etching process is performed for about 60 seconds under the condition that the duty ratio is about 0.7 to 0.9 and the current density is 12 to 17 A / dm 2 . By using such an electrolytic etching method, a spongy etching site having a thickness of 70 μm or more, preferably 100 μm or more can be formed.

ここで、エッチング部位の嵩比重を0.6〜1.2とすると、以下のピットの径や数を有するエッチング部位が形成される。ピットの径や数は画像解析装置で測定できる。即ち、エッチングされた表面を深さ方向に所定の間隔毎に研磨した後、各研磨面の孔径と数を画像解析装置で測定し、0.01〜1μmφのピット数の占める割合を算出することによって、各層における特定サイズ径のピットの占める割合を測定でき、本発明では、エッチング部位に対して一様に、特定サイズ径のピットが数多く穿孔されていることが判定できる。即ち、少なくとも片面が表面から深さ方向で70μm以上、100m以上、さらには120μm以上のエッチング部位を有し、平面断面において画像解析装置で測定して0.01〜1μmφのピット数が各面における全ピット数の70%以上、好ましくは75%以上存在する電解コンデンサ用アルミニウムエッチド板を始めて得ることができ、このような電解コンデンサ用アルミニウムエッチド板を用いれば、ESRの低い電解コンデンサを実現することができる。0.001μmφ未満のピットは静電容量の向上に寄与しないから、画像解析装置で測定する径は0.001μmφ以上とする。   Here, if the bulk specific gravity of the etching site is 0.6 to 1.2, an etching site having the following pit diameter and number is formed. The diameter and number of pits can be measured with an image analyzer. That is, after polishing the etched surface at predetermined intervals in the depth direction, by measuring the hole diameter and number of each polished surface with an image analyzer, by calculating the ratio of the number of pits of 0.01-1 μmφ, The proportion of pits having a specific size diameter in each layer can be measured, and in the present invention, it can be determined that a large number of pits having a specific size diameter are perforated uniformly with respect to the etching site. That is, at least one side has an etching part of 70 μm or more, 100 m or more, and further 120 μm or more in the depth direction from the surface, and the number of pits of 0.01 to 1 μmφ measured on the plane section with an image analyzer is all pits on each surface It is possible to obtain for the first time an aluminum etched plate for electrolytic capacitors that is 70% or more of the number, preferably 75% or more. By using such an aluminum etched plate for electrolytic capacitors, an electrolytic capacitor having a low ESR can be realized. Can do. Since the pits of less than 0.001 μmφ do not contribute to the improvement of the capacitance, the diameter measured by the image analyzer is set to 0.001 μmφ or more.

エッチング部位の厚さに関しては、少なくとも片面で、好ましくは両面の各々の面で、表面から深さ方向に70μm以上、好ましくは100μm以上、さらに好ましくは120μm以上のエッチング部位が形成されていることが好ましく、エッチング部位の厚さが上記の値未満である場合、静電容量を考慮すると、積層数を増やす必要があり電解コンデンサの小型化が期待できない。   With respect to the thickness of the etching site, at least one side, preferably each side of both sides, an etching site of 70 μm or more, preferably 100 μm or more, more preferably 120 μm or more is formed in the depth direction from the surface. Preferably, when the thickness of the etching site is less than the above value, it is necessary to increase the number of stacked layers in consideration of the capacitance, and the electrolytic capacitor cannot be reduced in size.

ピット径が1μmφを超えたピットが多数存在すると静電容量を低下させる。好ましくは0.1μmφ以下である。このようなサイズのピットの存在量は各面における全ピット数の70%以上、好ましくは75%以上存在することによって、ESRの低い電解コンデンサを製作できる。更に好ましくは80%以上である。   If there are many pits with a pit diameter exceeding 1 μmφ, the capacitance is lowered. Preferably it is 0.1 μmφ or less. The presence of such sized pits is 70% or more, preferably 75% or more of the total number of pits on each surface, so that an electrolytic capacitor with low ESR can be manufactured. More preferably, it is 80% or more.

特定サイズのピットの測定位置は、表面近くは電解エッチング時に表面積拡大に寄与しない溶解があり、ピットとピットを連結させピット径を徒に大きくするので、表面から20μmより深い位置とする。また、エッチング部位と芯部との境界面は凹凸があって一定しないので、エッチング深さを定めた位置(エッチング部位と芯部との境界)から表面に10μm浅い位置とする。   The measurement position of the pit of a specific size is a position deeper than 20 μm from the surface because there is dissolution that does not contribute to the surface area expansion at the time of electrolytic etching near the surface, and the pit diameter is increased by connecting the pits. Further, since the boundary surface between the etching part and the core part is uneven and is not constant, the etching depth is set to a position 10 μm shallower from the position (between the etching part and the core part) on the surface.

固体電解質としては特に限定するものでなく公知の固体電解質でよく、例えば、ポリピロール、ポリチオフェン、ポリアニリン等が使用できる。   The solid electrolyte is not particularly limited and may be a known solid electrolyte. For example, polypyrrole, polythiophene, polyaniline and the like can be used.

また、本発明を適用した電解コンデンサ用アルミニウムエッチド板のアルミニウム純度が99.98質量%以上からなり、粒径が球相当で0.01〜1.0μmφのFe含有金属間化合物の数が1×107〜1010/cm3を含有するものであるときは、前記特定サイズ径のピットの占める割合を高くできるだけでなく、ESRがより低いコンデンサを製作できる。これは金属間化合物が多い割には粒径が小さいので、化成皮膜がピット表面に均等な厚さで形成され、固体電解質が含浸され易くなるためと考えられる。Further, the aluminum purity of the aluminum etched plate for electrolytic capacitors to which the present invention is applied is 99.98% by mass or more, and the number of Fe-containing intermetallic compounds having a particle diameter equivalent to a sphere of 0.01 to 1.0 μmφ is 1 × 10 7 to 10 When it contains 10 3 / cm 3 , not only can the ratio of the pits of the specific size diameter be increased, but a capacitor with a lower ESR can be manufactured. This is presumably because the chemical conversion film is formed with a uniform thickness on the pit surface and is easily impregnated with the solid electrolyte because the particle size is small for a large amount of intermetallic compounds.

アルミニウム純度が99.98質量%以上からなるアルミニウム板は、Al以外の元素として、その含有量を限定するものではないが、好ましい組成としては、例えば、Fe50ppm以下、好ましくは40ppm以下、Cu40ppm以下、Si60ppm以下、好ましくは40ppm以下とするのがよい。これはFe、Siが上限値を超えると、Fe、Siを含有する粗大な金属間化合物の晶出物および析出物が生じ、漏れ電流が大きくなるからである。Siの場合は単体Siも生じるので、同様の理由で好ましくない。Cuが上限値を超えるとマトリックスの腐食電位を大きく貴に変移させるので、好ましいエッチングができなくなる虞がある。   The aluminum plate having an aluminum purity of 99.98% by mass or more is not limited in its content as an element other than Al, but as a preferred composition, for example, Fe50ppm or less, preferably 40ppm or less, Cu40ppm or less, Si60ppm or less Preferably, it is 40 ppm or less. This is because when Fe and Si exceed the upper limit values, crystallized substances and precipitates of coarse intermetallic compounds containing Fe and Si are generated, and the leakage current increases. In the case of Si, simple Si is also generated, which is not preferable for the same reason. If Cu exceeds the upper limit value, the corrosion potential of the matrix is greatly changed and no good etching may be performed.

これに対して、Feの5〜50pppmの含有はAlmFe、Al6Fe、Al3Fe、Al-Fe-Si、Al-(Fe、M)-Si(Mはその他の金属)等の金属間化合物を生じさせ、交流エッチングのピット起点になりやすいので好ましい。Cuの5〜40ppmの含有は、Feの存在のもとでマトリックスの腐食電位を安定化でき、特定サイズのピットを穿孔し易くなって好ましい。その他の元素としては、Ni、Ti、Zrは夫々10ppm以下、好ましくは3ppm以下とするのがよい。更に、その他の不純物は3ppm以下が好ましい。これにより前記の交流エッチング方法でピットの起点となるためか海綿状に特定サイズの径のピットを穿孔し易くなる。In contrast, 5-50pppm of Fe is contained in metals such as Al m Fe, Al 6 Fe, Al 3 Fe, Al-Fe-Si, Al- (Fe, M) -Si (M is other metals) It is preferable because an intermetallic compound is generated and tends to be a pit starting point for AC etching. The Cu content of 5 to 40 ppm is preferable because the corrosion potential of the matrix can be stabilized in the presence of Fe, and pits of a specific size can be easily formed. As other elements, Ni, Ti and Zr are each 10 ppm or less, preferably 3 ppm or less. Further, other impurities are preferably 3 ppm or less. As a result, it becomes easy to drill pits having a specific size in a spongy shape because they are the starting point of pits in the AC etching method.

それ故、アルミニウム板は、アルミニウム純度が99.98質量%以上でFe5〜50ppm、Cu5〜40ppmを含有するとともに、残部が不可避的不純物からなり、球形に換算したときの粒径が0.01〜1.0μmφのFe含有金属間化合物を1×107〜1010/cm3の数、含有することが好ましい。Therefore, the aluminum plate has an aluminum purity of 99.98% by mass or more and contains Fe 5 to 50 ppm and Cu 5 to 40 ppm, the balance is inevitable impurities, and the particle size when converted to a sphere is 0.01 to 1.0 μmφ Fe. The contained intermetallic compound is preferably contained in a number of 1 × 10 7 to 10 10 / cm 3 .

このような高純度のアルミニウムは電解一次地金を精製して製造される。このとき用いる精製方法としては三層式電解法や結晶分別法が広く採用され、これらの精製法により、アルミニウム以外の元素の大半が除去される。しかしながら、FeおよびCuに関しては、不純物としてではなく微量合金元素として利用できるため、精製後の各元素の含有量を測定し、FeおよびCuの含有量が所定量未満の場合は、スラブ鋳造時、溶湯中にAl-Fe、Al- Cu母合金等を添加することによってFeあるいはCuの含有量を調節することができる。   Such high-purity aluminum is produced by refining electrolytic primary metal. As a purification method used at this time, a three-layer electrolytic method or a crystal fractionation method is widely employed, and most of elements other than aluminum are removed by these purification methods. However, for Fe and Cu, since it can be used as a trace alloy element rather than as an impurity, the content of each element after purification is measured, and when the content of Fe and Cu is less than a predetermined amount, during slab casting, The content of Fe or Cu can be adjusted by adding Al—Fe, Al—Cu master alloy or the like to the molten metal.

前記の粒径が球相当で0.01〜1.0μmφのFe含有金属間化合物の数が1×107〜1010/cm3を含有するアルミニウム板を得るには、例えば、アルミニウム純度が99.98質量%以上で、Fe含有量を調整したアルミニウム溶湯を半連続鋳造してスラブを得た後、530℃以上の温度で均質化処理し、板温度領域がFe含有金属間化合物の析出し易い範囲(300〜400℃)に相当するパス回数を3回以上、あるいは30分以上60分以下保持した熱間圧延板を冷間圧延のみで所定の厚さとしてエッチングに供する方法が挙げられる。特に前記組成のアルミニウム溶湯を前記のように鋳造、圧延すると好ましい大きさで、かつ所定数のFeを含む金属間化合物が容易に得られる。Feを含む金属間化合物の大きさと数は、画像解析装置で測定できる。In order to obtain an aluminum plate containing 1 × 10 7 to 10 10 / cm 3 of Fe-containing intermetallic compound having a particle size equivalent to a sphere and having a diameter of 0.01 to 1.0 μmφ, for example, the aluminum purity is 99.98% by mass or more Then, after obtaining a slab by semi-continuously casting a molten aluminum with an adjusted Fe content, homogenization at a temperature of 530 ° C. or higher, the range of the plate temperature range where Fe-containing intermetallic compounds are likely to precipitate (300 to And a hot rolled sheet having a number of passes corresponding to (400 ° C.) of 3 times or more, or 30 minutes or more and 60 minutes or less, which is subjected to etching to a predetermined thickness only by cold rolling. In particular, when an aluminum melt having the above composition is cast and rolled as described above, an intermetallic compound having a preferred size and containing a predetermined number of Fe can be easily obtained. The size and number of intermetallic compounds containing Fe can be measured with an image analyzer.

Feを含む金属間化合物の粒径が球相当で0.01μmφ未満では公知の方法でエッチングピットの核になり難い傾向がある。また、1.0μmφを超えるとコンデンサを組み立てたときに、漏電流に影響し易くなる。また、粒径が球相当で0.01〜1.0μmφのFeを含む金属間化合物の数が1×107/cm3未満では、特定サイズのピットの占める割合が少なく、1×1010/cm3を超えると過剰な溶解が多くなる。If the particle size of the intermetallic compound containing Fe is equivalent to a sphere and is less than 0.01 μmφ, it tends not to be the core of etching pits by a known method. On the other hand, if it exceeds 1.0 μmφ, the leakage current is likely to be affected when the capacitor is assembled. In addition, if the number of intermetallic compounds containing Fe of 0.01 to 1.0 μmφ in particle size is less than 1 × 10 7 / cm 3 , the proportion of pits of a specific size is small, 1 × 10 10 / cm 3 If it exceeds, excessive dissolution increases.

(実施例)
図2は、本発明を適用した電解コンデンサ電極用アルミニウムエッチド板の断面写真を表す図である。図3は、本発明を適用した電解コンデンサ電極用アルミニウムエッチド板を用いて電解コンデンサを製作するときの説明図である。
(Example)
FIG. 2 is a view showing a cross-sectional photograph of an aluminum etched plate for electrolytic capacitor electrodes to which the present invention is applied. FIG. 3 is an explanatory diagram when an electrolytic capacitor is manufactured using an aluminum etched plate for electrolytic capacitor electrodes to which the present invention is applied.

アルミニウム溶湯を半連続鋳造して厚さ560mmのスラブを得、550℃で10時間加熱して均一処理し、熱延工程中350℃に保持時間を変えて保持し、次いで熱延および圧延して厚さ0.4mmのアルミニウム板とした。組成を表1に示す。   Semi-continuously cast molten aluminum to obtain a slab with a thickness of 560 mm, heated to 550 ° C for 10 hours, uniformly processed, held at 350 ° C for a different holding time, then hot rolled and rolled An aluminum plate having a thickness of 0.4 mm was used. The composition is shown in Table 1.

Figure 2009063532
Figure 2009063532

前記厚さ0.4mmのAl純度99.98質量%以上のアルミニウム板を用い、下記条件で両面エッチング処理し、図2に示す電解コンデンサ用アルミニウムエッチド板を得た。かかる電解コンデンサ用アルミニウムエッチド板1は、芯部2の両側にエッチング部位3を備えている。   Using an aluminum plate having an Al purity of 99.98% by mass or more having a thickness of 0.4 mm, double-side etching was performed under the following conditions to obtain an aluminum etched plate for electrolytic capacitors shown in FIG. The aluminum etched plate 1 for electrolytic capacitors is provided with etching sites 3 on both sides of the core 2.

(エッチング条件)
10%苛性ソーダ水溶液で軽度のエッチング処理を施して脱脂、表面酸化物を除去後、一次エッチング処理として、電解液として2モル/リッタの塩酸と0.02モル/リッタの硫酸を含有する水溶液中で、液温度50℃、周波数20Hz、交流正弦波交流、電流密度は45A/dm2、処理時間45秒で処理し、アルミニウム板表面に多数のピットを穿孔した。次いで主電解処理として電解水溶液として6モル/リッタの塩酸と0.05モル/リッタの硫酸を含有する水溶液中で、液温30℃、周波数は種々任意に設定できるが、例えば、50Hz、正弦波交流、電流密度は25A/dm2、処理時間は種々変えて一次処理で穿孔したピットを更に穿孔し、各種厚さの海綿状のエッチング部位を得、該エッチング部位の厚さを測定した。結果を表2〜7に示す。
(Etching conditions)
After mild degreasing with 10% aqueous caustic soda solution, degreasing and removal of surface oxides, as the primary etching treatment, in an aqueous solution containing 2 mol / liter hydrochloric acid and 0.02 mol / liter sulfuric acid as the electrolyte, It was processed at a temperature of 50 ° C., a frequency of 20 Hz, an AC sine wave AC, a current density of 45 A / dm 2 , and a processing time of 45 seconds, and many pits were drilled on the aluminum plate surface. Next, in the aqueous solution containing 6 mol / liter hydrochloric acid and 0.05 mol / liter sulfuric acid as the electrolytic solution as the main electrolytic treatment, the liquid temperature is 30 ° C., and the frequency can be arbitrarily set, for example, 50 Hz, sinusoidal alternating current, The current density was 25 A / dm 2 , the pits drilled in the primary treatment with various treatment times were further drilled to obtain spongy etched sites of various thicknesses, and the thickness of the etched sites was measured. The results are shown in Tables 2-7.

(嵩比重の測定方法)
種々厚みにエッチングされたエッチド板(中央の芯部を含む)に対して、縦、横、エッチング厚さ、芯部厚さ、および全質量を測定し、芯部の比重を2.7としてエッチング部位の嵩比重を計算した。その結果を表2〜7に示す。
(Method for measuring bulk specific gravity)
Measure the length, width, etching thickness, core thickness, and total mass of an etched plate (including the central core) etched to various thicknesses. The bulk specific gravity was calculated. The results are shown in Tables 2-7.

(ピット径の測定)
次に、ピット径とその割合を画像解析装置で測定した。測定は試料のエッチング深さ方向で表面から20μmの面と、エッチング深さを定めた位置(エッチング部位と芯部との境界)から表面側に10μm浅い位置との面間距離を4等分(但し、片面のエッチング層の厚さが35μmの場合は2面)したときの5面に相当する位置を表面から順次研磨して各表面を画像解析装置で測定した。ピット径とその割合については、各測定面での10点の平均をその測定面の値とした。2面または5面に対する測定結果のうち、円形に換算したときのピット径で0.01〜1μmφのピット数が当該測定面内における全ピット数に対して占める割合が一番少ない値を表2〜7に示す。
(Measurement of pit diameter)
Next, the pit diameter and its ratio were measured with an image analyzer. The measurement is performed by dividing the surface distance between the surface 20 μm from the surface in the etching depth direction of the sample and the position 10 μm shallower from the position where the etching depth is defined (between the etching site and the core) to the surface side by four ( However, the surface corresponding to the five surfaces when the thickness of the etching layer on one side was 35 μm was polished sequentially from the surface, and each surface was measured with an image analyzer. For the pit diameter and its ratio, the average of 10 points on each measurement surface was taken as the value of that measurement surface. Among the measurement results for 2 surfaces or 5 surfaces, Tables 2 to 7 show the values in which the number of pits having a pit diameter of 0.01 to 1 μmφ when converted to a circle accounts for the smallest number of the total number of pits in the measurement surface. Shown in

次に、電解コンデンサ用アルミニウムエッチド板をアジピン酸アンモニウム水溶液中で5V化成処理し、次いで、下記に示すように、ポリピロールを常法に従って含浸させて機能性高分子層を形成し、2.5V/330μFの電解コンデンサを作製し、ESR(100KHz)、静電容量、漏れ電流を測定した。その結果を表2〜7に示す。   Next, the aluminum etched plate for electrolytic capacitors was subjected to 5V chemical conversion treatment in an aqueous solution of ammonium adipate, and then impregnated with polypyrrole according to a conventional method to form a functional polymer layer as shown below. A 330 μF electrolytic capacitor was fabricated, and ESR (100 KHz), capacitance, and leakage current were measured. The results are shown in Tables 2-7.

(ポリピロールの含浸)
ポリピロールを含浸するにあたっては、ピット内にピロールモノマーのエタノール溶液を滴下し、さらに過硫酸アンモニウムおよび2-ナフタレンスルホン酸ナトリウム水溶液を滴下して化学重合させ、ポリピロールからなるプレコート層を形成する。次いで、この電極板をピロールモノマーおよび2-ナフタレンスルホン酸ナトリウムを含有するアセトニトリル電解液中に浸漬し、先に形成させた化学重合ポリピロール層の一部にステンレスワイヤを接触させて陽極とする一方、ステンレス板を陰極として電解重合を行い、機能性高分子層となる電解重合ポリピロールを形成させる。なお、ポリピロールに代えて、ポリチオフェンやポリアニリンを用いても同等の特性を得ることができる。
(Polypyrrole impregnation)
When impregnating with polypyrrole, an ethanol solution of a pyrrole monomer is dropped into the pit, and ammonium persulfate and an aqueous solution of sodium 2-naphthalenesulfonate are dropped and chemically polymerized to form a precoat layer made of polypyrrole. Next, this electrode plate was immersed in an acetonitrile electrolyte containing a pyrrole monomer and sodium 2-naphthalenesulfonate, and a stainless steel wire was brought into contact with a part of the previously formed chemically polymerized polypyrrole layer to serve as an anode, Electrolytic polymerization is performed using a stainless steel plate as a cathode to form an electropolymerized polypyrrole that becomes a functional polymer layer. In addition, it can replace with polypyrrole and can obtain an equivalent characteristic even if it uses polythiophene or polyaniline.

(電解コンデンサの作製方法)
エッチングされた前記電解コンデンサ用アルミニウムエッチド板を用いて電解コンデンサを作製するには、図3に示すように、両面をエッチングした電解コンデンサ用アルミニウムエッチド板1に陽極酸化を行なった後、電解コンデンサ用アルミニウムエッチド板1の側端面を露出させ、その芯部2の側端面4に対して、リード線などの陽極リード6を接合する。接合方法としてはスポット径を芯部の厚さ未満に絞ったレーザ溶接5を用いた。スポット径は20〜100φであった。
(Method for producing electrolytic capacitor)
In order to produce an electrolytic capacitor using the etched aluminum capacitor-etched plate for electrolytic capacitor, as shown in FIG. 3, the aluminum etched plate for electrolytic capacitor 1 having both surfaces etched is subjected to anodic oxidation, followed by electrolysis. The side end face of the capacitor aluminum etched plate 1 is exposed, and an anode lead 6 such as a lead wire is joined to the side end face 4 of the core portion 2. As a joining method, laser welding 5 with a spot diameter reduced to less than the thickness of the core was used. The spot diameter was 20-100φ.

次に、前記陽極酸化を行なった電解コンデンサ用アルミニウムエッチド板1の表面に前記機能性高分子層を形成した後、該機能性高分子層を形成したエッチド板の表面にカーボンペーストや銀ペーストなどを用いて陰極を形成し、電極体を構成し、前記の如くESR(100KHz)、静電容量、漏れ電流を測定した。その結果を表2〜7に示す。   Next, after forming the functional polymer layer on the surface of the anodized aluminum etched plate 1 for electrolytic capacitors, carbon paste or silver paste is formed on the surface of the etched plate on which the functional polymer layer is formed. The cathode was formed using the above, and the electrode body was constructed, and the ESR (100 KHz), capacitance, and leakage current were measured as described above. The results are shown in Tables 2-7.

Figure 2009063532
Figure 2009063532

Figure 2009063532
Figure 2009063532

Figure 2009063532
Figure 2009063532

Figure 2009063532
Figure 2009063532

Figure 2009063532
Figure 2009063532

Figure 2009063532
Figure 2009063532

表2〜7に示すように、エッチング部位の嵩比重が0.6〜1.2である電解コンデンサ用アルミニウムエッチド板であれば、ESRが低く、静電容量が高く、漏洩電流の低い電解コンデンサを得ることができる。しかも、エッチング部位の厚さが厚くても同様に、ESRが低く、静電容量が高く、漏洩電流の低い電解コンデンサが得られるから、積層枚数を低減でき低背コンデンサを提供できることが判る。   As shown in Tables 2-7, an aluminum capacitor for an electrolytic capacitor having an etched portion with a bulk specific gravity of 0.6 to 1.2, an electrolytic capacitor having a low ESR, a high capacitance, and a low leakage current is obtained. Can do. In addition, even when the thickness of the etching site is large, an electrolytic capacitor having a low ESR, a high capacitance, and a low leakage current can be obtained.

一方、嵩比重の大きい試料番号2-1、3-1、4-1、5-1、6-1、7-1は、ESRが高く、静電容量が低く、漏れ電流の高いことが判る。また、嵩比重の小さい試料番号2-6、3-6、4-6、5-6、6-6、7-6は、静電容量が低いことが判る。   On the other hand, sample numbers 2-1, 3-1, 4-1, 5-1, 6-1 and 7-1 with large bulk specific gravity have high ESR, low capacitance, and high leakage current. . It can also be seen that Sample Nos. 2-6, 3-6, 4-6, 5-6, 6-6, and 7-6 having a small bulk specific gravity have a low capacitance.

本発明では、アルミニウム板を交流により電気化学的エッチングすることにより、エッチングにより、1平方ミリメートルあたり、数千〜数十万の海綿状のピットを穿孔した際、エッチング部位の嵩比重を0.6〜1.2としたため、十分な表面積を有し、かつ、固体電解質の含浸性がよいので、固体電解質を含浸した場合でも高い静電容量を得ることができる。   In the present invention, when the aluminum plate is electrochemically etched by alternating current, several thousand to several hundreds of thousands of spongy pits are drilled per square millimeter by etching, and the bulk specific gravity of the etched portion is 0.6 to 1.2. Therefore, since it has a sufficient surface area and the impregnation property of the solid electrolyte is good, a high capacitance can be obtained even when impregnated with the solid electrolyte.

Claims (5)

アルミニウム板に対して交流による電気化学的エッチングを施して拡面化してなる電解コンデンサ用アルミニウムエッチド板において、
エッチング部位の嵩比重が0.6〜1.2であることを特徴とする電解コンデンサ用アルミニウムエッチド板。
In the aluminum etched plate for electrolytic capacitors, which is obtained by subjecting the aluminum plate to electrochemical expansion by alternating current and expanding the surface.
An aluminum etched plate for electrolytic capacitors, wherein the bulk specific gravity of the etched portion is 0.6 to 1.2.
前記エッチング部位の厚さが100μm以上であることを特徴とする請求項1に記載の電解コンデンサ用アルミニウムエッチド板。   The aluminum etched plate for electrolytic capacitors according to claim 1, wherein a thickness of the etched portion is 100 μm or more. 前記エッチング部位の厚さが120m以上であることを特徴とする請求項1に記載の電解コンデンサ用アルミニウムエッチド板。   2. The aluminum etched plate for electrolytic capacitors according to claim 1, wherein the thickness of the etched portion is 120 m or more. 電解質として機能性高分子が用いられるアルミニウム電解コンデンサの陽極として用いられることを特徴とする請求項1乃至3の何れか1項に記載の電解コンデンサ用アルミニウムエッチド板。   The aluminum etched plate for electrolytic capacitors according to any one of claims 1 to 3, wherein the aluminum etched plate is used as an anode of an aluminum electrolytic capacitor in which a functional polymer is used as an electrolyte. 前記電気化学的エッチングが施された面に誘電体膜が形成され、当該誘電体膜上に機能性高分子層が形成されていることを特徴とする請求項1乃至3の何れか1項に記載の電解コンデンサ用アルミニウムエッチド板。   The dielectric film is formed on the surface subjected to the electrochemical etching, and a functional polymer layer is formed on the dielectric film. Aluminum etched plate for electrolytic capacitor as described.
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