JPWO2006030608A1 - テラヘルツ電磁波放射素子及びその製造方法 - Google Patents
テラヘルツ電磁波放射素子及びその製造方法 Download PDFInfo
- Publication number
- JPWO2006030608A1 JPWO2006030608A1 JP2006535106A JP2006535106A JPWO2006030608A1 JP WO2006030608 A1 JPWO2006030608 A1 JP WO2006030608A1 JP 2006535106 A JP2006535106 A JP 2006535106A JP 2006535106 A JP2006535106 A JP 2006535106A JP WO2006030608 A1 JPWO2006030608 A1 JP WO2006030608A1
- Authority
- JP
- Japan
- Prior art keywords
- layer
- dimensional electron
- gate electrode
- electromagnetic wave
- terahertz electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 238000005513 bias potential Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000001427 coherent effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000003989 dielectric material Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 16
- 230000005684 electric field Effects 0.000 description 21
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 18
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 18
- 230000000737 periodic effect Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 238000004458 analytical method Methods 0.000 description 10
- 238000009826 distribution Methods 0.000 description 10
- 230000003595 spectral effect Effects 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 7
- 230000004044 response Effects 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- 230000005670 electromagnetic radiation Effects 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000013598 vector Substances 0.000 description 3
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910018885 Pt—Au Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 210000001520 comb Anatomy 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001803 electron scattering Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S1/00—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range
- H01S1/02—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range solid
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/13—Function characteristic involving THZ radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2302/00—Amplification / lasing wavelength
- H01S2302/02—THz - lasers, i.e. lasers with emission in the wavelength range of typically 0.1 mm to 1 mm
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
(1)光波から2次元電子プラズモン共鳴への変換効率
(2)2次元電子プラズモン共鳴から放射電磁波への変換効率
このうち本発明が対象とする(2)2次元電子プラズモン共鳴から放射電磁波への変換効率について従来技術の推移を述べる。
M.Dyakonov and M.Shur,Phys.Rev.Lett.,71(15),2465(1993) T.Otsuji,Y.Kanamaru,et.al.,Dig.the 59th Annual Dev.Res.Conf.,Notre Dame,IN,97(2001) V.Ryzhii,I.Khmyrova,and M.Shur,J.Appl.Phys.,Vol.91,No.4,1875(2002) S.A.Mikhailov,Phys.Rev.B,Vol.58,pp.1517−1532,1998 R.J.Wilkinson,et.Al.,Journal of Applied Physics,Vol.71,No.12,pp.6049−6061,1992. X.G.Peralta,et.Al.,Applied Physics Letters,Vol.81,No.9,pp.1627−1629,2002.
Claims (11)
- 2つのコヒーレントな光波を入力し、混合してその差周波数に対応したテラヘルツ電磁波を放射出力するテラヘルツ電磁波放射素子において、
半絶縁性の半導体バルク層と、
該半導体バルク層の直上に半導体ヘテロ接合構造によって形成される2次元電子層と、
該2次元電子層の1辺に電気的に接続されたソース電極と、
該ソース電極に対向する該2次元電子層の他の1辺に接続されたドレイン電極と、
該2次元電子層の上面近傍に該2次元電子層と平行に、2つの異なる直流バイアス電位を交互に設定できる2重ゲート電極格子と、
該半導体バルク層の下面に接して膜状に形成されたテラヘルツ帯では反射鏡として機能し、かつ光波帯では透明な、透明金属ミラーと、
によって構成され、
2つの光波を該透明金属ミラーの下面より入射させ、かつ、2重ゲート電極格子に2つの異なる直流バイアス電位を交互に与え、該2重ゲート電極格子の配位に対応して2次元電子層の電子濃度を周期的に変調せしめたこと、
を特徴とするテラヘルツ電磁波放射素子。 - 前記2重ゲート電極格子は、入れ子型に2重の回折格子状に形成された請求項1に記載のテラヘルツ電磁波放射素子。
- 前記半導体バルク層の側面が該半導体バルク層よりは低い比誘電率を有する低誘電材料で被覆されたことを特徴とする請求項1又は2に記載のテラヘルツ電磁波放射素子。
- 前記ソース電極と前記ドレイン電極の間に一定の直流バイアス電位を与え、該2次元電子層内の2次元電子を一様に直流ドリフト走行せしめたことを特徴とする請求項1〜3のいずれかに記載のテラヘルツ電磁波放射素子。
- 前記2重ゲート電極格子の第1の回折格子ゲート電極の格子幅がサブミクロンオーダに設定され、かつ、該第1の回折格子ゲート電極と近隣の第2の回折格子ゲート電極との間隔がサブミクロン以下に設定され、かつ、該第2の回折格子ゲート電極の格子幅がミクロンないしサブミクロンオーダに設定され、
前記2重ゲート電極格子の第1の回折格子ゲート電極のバイアス電位を制御することによって、該第1の回折格子ゲート電極直下の2次元電子層の電子濃度を10の11乗毎平方センチメートル乃至10の13乗毎平方センチメートルに設定し、2重ゲート電極格子の第2の回折格子ゲート電極のバイアス電位を制御することによって、該第2の回折格子ゲート電極直下の2次元電子層の電子濃度を準金属的に極めて高く設定するか、或いは半絶縁的に極めて低く設定したこと、
を特徴とする請求項1〜4のいずれかに記載のテラヘルツ電磁波放射素子。 - 前記2重ゲート電極格子が、該第1の回折格子ゲート電極直下の2次元電子層内と同程度の導電率を有する材料によって形成されたことを特徴とする請求項5に記載のテラヘルツ電磁波放射素子。
- 前記2重ゲート電極格子の厚みが、該2重ゲート電極格子と該2次元電子層との間隔よりも薄いことを特徴とする請求項6に記載のテラヘルツ電磁波放射素子。
- 前記2重ゲート電極格子が、半導体ヘテロ接合構造内に該2次元電子層の上部に積層してなる第2の2次元電子層をエッチング加工することによって形成され、かつ該第2の2次元電子層の導電率がゲートバイアス電位によって制御できることを特徴とする請求項7に記載のテラヘルツ電磁波放射素子。
- 2次元電子層と透明金属ミラーの距離を、放射させる(テラヘルツ帯)電磁波の波長の(2n+1)/4倍(但しnは整数)に設定したことを特徴とする請求項6〜8のいずれかに記載のテラヘルツ電磁波放射素子。
- 2つのコヒーレントな光波を入力し、混合してその差周波数に対応したテラヘルツ電磁波を放射出力するテラヘルツ電磁波放射素子の製造方法において、
半導体バルク層となる基板の直上に半導体ヘテロ接合構造によって形成される2次元電子層と、該2次元電子層の1辺に電気的に接続されたソース電極と、該ソース電極に対向する該2次元電子層の他の1辺に接続されたドレイン電極と、を形成し、
該2次元電子層の上面近傍に該2次元電子層と平行に、2つの異なる直流バイアス電位を交互に設定できる2重ゲート電極格子を形成し、
該半導体バルク層の下面に接して膜状に形成されたテラヘルツ帯では反射鏡として機能し、かつ光波帯では透明な、透明金属ミラーを形成すること、
を特徴とするテラヘルツ電磁波放射素子の製造方法。 - 前記半導体バルク層の側面を、該半導体バルク層よりは低い比誘電率を有する低誘電材料で被覆したことを特徴とする請求項10に記載のテラヘルツ電磁波放射素子の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004265011 | 2004-09-13 | ||
JP2004265011 | 2004-09-13 | ||
PCT/JP2005/015277 WO2006030608A1 (ja) | 2004-09-13 | 2005-08-23 | テラヘルツ電磁波放射素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006030608A1 true JPWO2006030608A1 (ja) | 2008-05-08 |
JP4423429B2 JP4423429B2 (ja) | 2010-03-03 |
Family
ID=36059866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006535106A Active JP4423429B2 (ja) | 2004-09-13 | 2005-08-23 | テラヘルツ電磁波放射素子及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7915641B2 (ja) |
EP (1) | EP1804347B1 (ja) |
JP (1) | JP4423429B2 (ja) |
WO (1) | WO2006030608A1 (ja) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4708277B2 (ja) * | 2006-07-13 | 2011-06-22 | 浜松ホトニクス株式会社 | 導波構造及び光学素子 |
JP5268090B2 (ja) * | 2008-03-14 | 2013-08-21 | 国立大学法人東北大学 | 電磁波放射素子 |
JP5419411B2 (ja) * | 2008-10-08 | 2014-02-19 | キヤノン株式会社 | テラヘルツ波発生素子 |
US8324661B2 (en) * | 2009-12-23 | 2012-12-04 | Intel Corporation | Quantum well transistors with remote counter doping |
US8304812B2 (en) | 2010-02-24 | 2012-11-06 | Panasonic Corporation | Terahertz wave radiating element |
JP5967867B2 (ja) | 2010-06-03 | 2016-08-10 | キヤノン株式会社 | テラヘルツ波発生素子、テラヘルツ波検出素子、及びテラヘルツ時間領域分光装置 |
US9018683B2 (en) * | 2010-12-03 | 2015-04-28 | Tohoku University | Terahertz electromagnetic wave conversion device |
CN102176463B (zh) * | 2010-12-21 | 2012-12-12 | 上海电机学院 | 太赫兹光子片上控制系统及其控制方法 |
CN102279476B (zh) * | 2011-07-15 | 2013-06-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | 高速电调控太赫兹调制器 |
EP2807675B1 (en) * | 2012-01-23 | 2018-09-05 | The Regents of The University of Michigan | Photoconductive device with plasmonic electrodes |
DE102013202220A1 (de) * | 2013-02-12 | 2014-08-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungsquelle und Verfahren zu deren Betrieb |
US9105791B1 (en) * | 2013-09-16 | 2015-08-11 | Sandia Corporation | Tunable plasmonic crystal |
DE112014004277T5 (de) * | 2013-09-18 | 2016-06-16 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Sciences | Terahertz-Lichtquellenchip, Lichtquellenvorrichtung, Lichtquellenanordnung und ihr Herstellungsverfahren |
CN105204190A (zh) * | 2014-06-10 | 2015-12-30 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种基于低维电子等离子体波的太赫兹调制器及其制造方法 |
JP6955337B2 (ja) * | 2014-06-13 | 2021-10-27 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニアThe Regents Of The University Of California | 低デューティサイクル連続波光伝導性テラヘルツ撮像および分光システム |
US11448824B2 (en) * | 2015-03-20 | 2022-09-20 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Devices with semiconductor hyperbolic metamaterials |
JP6860210B2 (ja) | 2015-05-27 | 2021-04-14 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニアThe Regents Of The University Of California | レーザ駆動式テラヘルツ源および検出器を通したテラヘルツ内視鏡検査 |
CN105549227A (zh) * | 2015-12-18 | 2016-05-04 | 成都浩博依科技有限公司 | 一种基于GaN半导体材料异质结场效应晶体管结构的太赫兹波空间外部调制器 |
US10684320B2 (en) | 2015-12-31 | 2020-06-16 | Unist (Ulsan National Institute Of Science And Technology) | Performance evaluation method of suspended channel plasma wave transistor |
JP6829517B2 (ja) * | 2016-07-23 | 2021-02-10 | 国立大学法人千葉大学 | 赤外光素子 |
DE102016116900B3 (de) * | 2016-09-09 | 2017-11-16 | Helmholtz-Zentrum Dresden - Rossendorf E.V. | THz-Antenne und Vorrichtung zum Senden und/oder Empfangen von THz-Strahlung |
US11249017B2 (en) | 2017-04-20 | 2022-02-15 | The Regents Of The University Of California | Systems and methods for high frequency nanoscopy |
CN110346997B (zh) * | 2019-07-08 | 2023-04-07 | 深圳大学 | 一种谐振腔型太赫兹器件及其制备方法 |
CN110515254B (zh) * | 2019-09-02 | 2020-09-29 | 南开大学 | 一种非互易磁光太赫兹波束扫描器 |
WO2021067635A1 (en) | 2019-10-01 | 2021-04-08 | The Regents Of The University Of California | Method for identifying chemical and structural variations through terahertz time-domain spectroscopy |
EP4052458A4 (en) | 2019-10-31 | 2023-11-29 | The Regents of the University of California | METHODS AND SYSTEMS FOR DETECTING WATER STATE IN PLANTS USING TERAHERTZ RADIATION |
CN113161763A (zh) * | 2021-04-20 | 2021-07-23 | 桂林电子科技大学 | 基于石墨烯的全介质太赫兹可调谐吸波器 |
WO2023163032A1 (ja) * | 2022-02-24 | 2023-08-31 | 国立大学法人大阪大学 | テラヘルツ波出力装置およびテラヘルツ波出力方法 |
CN115810680B (zh) * | 2022-09-21 | 2023-09-26 | 广东工业大学 | 一种局域场增强的光电导型高速光电探测器 |
JP7440988B1 (ja) | 2023-05-31 | 2024-02-29 | 国立大学法人東北大学 | 周波数下方変換装置、及び通信装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7619263B2 (en) * | 2003-04-08 | 2009-11-17 | Sensor Electronic Technology, Inc. | Method of radiation generation and manipulation |
WO2005017494A2 (en) * | 2003-08-18 | 2005-02-24 | Trustees Of Stevens Institute Of Technology | A frequency selective terahertz radiation detector |
US7376403B1 (en) * | 2005-04-25 | 2008-05-20 | Sandia Corporation | Terahertz radiation mixer |
-
2005
- 2005-08-23 US US11/575,102 patent/US7915641B2/en not_active Expired - Fee Related
- 2005-08-23 EP EP05774908.7A patent/EP1804347B1/en not_active Not-in-force
- 2005-08-23 JP JP2006535106A patent/JP4423429B2/ja active Active
- 2005-08-23 WO PCT/JP2005/015277 patent/WO2006030608A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1804347A1 (en) | 2007-07-04 |
EP1804347B1 (en) | 2014-01-01 |
WO2006030608A1 (ja) | 2006-03-23 |
US20080315216A1 (en) | 2008-12-25 |
EP1804347A4 (en) | 2010-07-28 |
US7915641B2 (en) | 2011-03-29 |
JP4423429B2 (ja) | 2010-03-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4423429B2 (ja) | テラヘルツ電磁波放射素子及びその製造方法 | |
US11231318B2 (en) | Photoconductive detector device with plasmonic electrodes | |
US20160233379A1 (en) | Terahertz source chip, source device and source assembly, and manufacturing methods thereof | |
Vijayraghavan et al. | Terahertz sources based on Čerenkov difference-frequency generation in quantum cascade lasers | |
Fujita et al. | Terahertz generation in mid-infrared quantum cascade lasers with a dual-upper-state active region | |
JP4857027B2 (ja) | レーザ素子 | |
US9711948B2 (en) | Terahertz quantum cascade laser implementing a {hacek over (C)}erenkov difference-frequency generation scheme | |
US20160094183A1 (en) | Electromagnetic wave generation device and detection device | |
US9819145B2 (en) | Laser and integrated graphene modulator | |
JP2011524024A (ja) | テラヘルツ波放出レーザデバイス | |
Meng et al. | Terahertz intersubband electroluminescence from nonpolar m-plane ZnO quantum cascade structures | |
JP5268090B2 (ja) | 電磁波放射素子 | |
US20240004263A1 (en) | Systems and Methods for Wavelength Conversion through Plasmon-Coupled Surface States | |
Razeghi | Terahertz emitters at Center for Quantum Devices: recent advances and future trends | |
Liu et al. | Realization of GaAs/AlGaAs quantum-cascade lasers with high average optical power | |
Kim | Terahertz Difference Frequency Generation Quantum Cascade Lasers with Improved Terahertz Out-coupling Efficiency | |
Scalari | Magneto-spectroscopy and development of terahertz quantum cascade lasers | |
Teng | Semiconductor based THz components | |
Meng | Tunable mid-infrared quantum cascade lasers | |
Otsuji | Plasma-Wave Devices for Terahertz Applications | |
Belkin et al. | THz quantum cascade lasers for operation above cryogenic temperatures | |
Miles et al. | Terahertz Sources | |
Alam | Simulation of a MOS or MIS structured Spatial Light Modulator for Terahertz (THz) Imaging | |
Jiang | Broadly tunable terahertz difference frequency generation in mid-infrared quantum cascade lasers | |
Vijayraghavan et al. | Terahertz quantum cascade laser sources based on Čerenkov difference-frequency generation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090602 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090619 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090825 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091008 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091110 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313532 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |