JPWO2005078428A1 - Manufacturing method of reference gauge for scratch inspection - Google Patents

Manufacturing method of reference gauge for scratch inspection Download PDF

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JPWO2005078428A1
JPWO2005078428A1 JP2005518075A JP2005518075A JPWO2005078428A1 JP WO2005078428 A1 JPWO2005078428 A1 JP WO2005078428A1 JP 2005518075 A JP2005518075 A JP 2005518075A JP 2005518075 A JP2005518075 A JP 2005518075A JP WO2005078428 A1 JPWO2005078428 A1 JP WO2005078428A1
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reference gauge
scratch
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scratch inspection
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吉田 正雄
正雄 吉田
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/93Detection standards; Calibrating baseline adjustment, drift correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/30Arrangements for calibrating or comparing, e.g. with standard objects

Abstract

検査対象物の内部キズが維持基準を満足するものか否かを正確に検査し得るキズ検査用基準ゲージを高品質で製作し得るキズ検査用基準ゲージの製造方法を提供する。キズ検査用基準ゲージ1は第1のピースと第2のピース3とを拡散接合により一体化し、その内部に維持基準に対応する凹溝等を封止形成したものからなり、このキズ検査用基準ゲージは、第1のピース2又は第2のピース3の接合面2a,3aや端面に予めレーザ加工等により凹溝等4を加工し両者を合体しHIP装置により拡散接合して形成される。Provided is a method of manufacturing a scratch inspection reference gauge capable of manufacturing a scratch inspection reference gauge with high quality capable of accurately inspecting whether or not an internal scratch of an inspection object satisfies a maintenance standard. The scratch inspection reference gauge 1 is formed by integrating the first piece and the second piece 3 by diffusion bonding and sealingly forming a concave groove or the like corresponding to the maintenance reference therein. The gauge is formed by machining grooves 4 or the like in advance on the joining surfaces 2a, 3a and end surfaces of the first piece 2 or the second piece 3 by laser machining or the like, and combining them together to perform diffusion joining using an HIP device.

Description

本発明は、原子力,ロケット,航空機,船舶,車両,二輪車,機関車,マシーン,タンク,プラント,橋梁,橋,建造物,鍵,鋳物等のキズ検査対象物のキズ測定時において、その検査方法の正否を決めるために使用される基準ゲージの製造方法に係り、特に、キズの評価のために決められている維持基準に対してキズ検査対象物の合否を正しく判断し得るキズ検査用基準ゲージの製造方法に関する。  The present invention relates to a method for inspecting a flaw inspection object such as a nuclear power, a rocket, an aircraft, a ship, a vehicle, a motorcycle, a locomotive, a machine, a tank, a plant, a bridge, a bridge, a building, a key, and a casting. In particular, it is related to a method of manufacturing a reference gauge used to determine the right or wrong of a defect, and in particular, a reference gauge for scratch inspection that can correctly judge the pass / fail of a scratch inspection object against a maintenance standard determined for scratch evaluation. It relates to the manufacturing method.

表面キズの確認方法には、目視試験(VT)や超音波探傷試験(UT)及び渦電流探傷試験(ET)等がある。これらの試験方法を適用する場合、各々の試験方法の校正を行うための試験片(基準ゲージ)が必要になる。特に、超音波探傷試験や渦電流探傷試験の場合にはキズの深さを評価する必要があるため、人工キズとしては表面から深さを変えての模擬欠陥の加工が必要になる。従来これらのキズの加工方法としては放電加工(EDM)が一般に採用されている。しかしこの加工方法では、加工に電極を使用するため電極の厚さよりも幅の狭いキズの加工は不可能であり、キズ幅としては0.5mm(500μm)が限度であり、これ以下の幅の加工はできない。一方、目視の確認精度として、アメリカの規格で採用されているミルワイヤ(1/1000mm:0.025mmの線)の識別が求められているが、現実にミルワイヤの入手は困難であり、これに相当する目視基準ゲージが必要となり、これを手軽に社会に供給することが必要となるが、今の所、このような基準ゲージは存在していない。また、キズを評価するために維持基準が決められているが、キズ検査対象物がこの維持基準を満足しているか否かを正確に決められるものではない。  As a method for confirming surface scratches, there are a visual test (VT), an ultrasonic flaw detection test (UT), an eddy current flaw detection test (ET), and the like. When these test methods are applied, a test piece (reference gauge) for calibrating each test method is required. In particular, in the case of an ultrasonic flaw detection test or an eddy current flaw detection test, it is necessary to evaluate the depth of the flaw, so that artificial flaws require machining of simulated defects by changing the depth from the surface. Conventionally, electric discharge machining (EDM) has been generally adopted as a method for processing these scratches. However, in this processing method, since an electrode is used for processing, it is impossible to process a scratch having a width smaller than the thickness of the electrode, and the scratch width is limited to 0.5 mm (500 μm). It cannot be processed. On the other hand, as a visual confirmation accuracy, identification of mill wires (1/1000 mm: 0.025 mm lines) adopted in American standards is required, but it is actually difficult to obtain mill wires, which corresponds to this. However, there is no such standard gauge so far. Moreover, although the maintenance standard is determined in order to evaluate the scratch, it cannot be accurately determined whether or not the scratch inspection object satisfies the maintenance standard.

前記のように、これからのキズ検査の場合には、自然キズに近い幅の狭い人工キズを有するものが必要であり、維持基準が良否判定の基準となる。具体的には、例えば、少なくとも30μm程度で1/17の加工精度を有するものが必要である。前記特許文献1の特開2002−250694の「非接触式目視検査方法及び装置」の場合は基準となるキズは放電加工による500μm程度のものであり、前記の条件を満足するものではない。また、現存している放電加工機や電子ビーム加工機では500μmよりも狭幅のキズ加工はできない。
次に、原子力機器やロケット等の機器点検に適用される各種試験方法(RT,ET,VT)では、その評価精度を向上させるため、より幅の狭い自然キズに近いキズ加工が求められている。この自然キズに近いキズ加工が可能となれば、原子力機器は勿論、原子力機器以外の産業分野での各種試験方法の評価精度を向上させることが可能となり、製品の安全性が大幅に向上し、社会全般における信頼性を大きく向上させることができる。
本発明は、以上の事情に鑑みて発明されたものであり、維持基準に対するキズ検査対象物の良否が正確にわかり、かつ比較的容易に加工でき、更に鋼以外の各種の材質に対しても加工可能であり、各種材質のキズ検査対象物のキズ検査が正確にできる簡便構造のキズ検査用基準ゲージの製造方法を提供することを目的とする。
本発明は、以上の目的を達成するために、請求項1の発明は、金属,非金属,貴金属,合金,セラミックス,複合材等の同一材料又は異種材料からなる第1及び第2のピースの接合面や端面に検査対象物のキズに関する維持基準に対応する凹溝や細線,細条(以下、凹溝等という)を単列,並列,複層並列,重ね,複層重ねに形成してなるキズ検査用基準ゲージの製造方法であって、該製造方法は、前記第1のピース及び第2のピースの接合面を所定粗さに仕上げる第1のステップと、前記第1のピース及び第2のピースの一方又は双方の接合面や端面の一部に前記凹溝等を形成する第2のステップと、前記凹溝等を拡散接合しにくい処理を施す第3のステップと、前記第1のピースと第2のピースの接合面を接合せしめてこれ等をHIP装置内に入れて拡散接合又は高周波加熱接合を行う第4のステップとからなることを特徴とする。
また、請求項2の発明は、前記第3のステップにおける前記凹溝等の拡散接合しにくい処理が、前記凹溝等内を酸化処理するものからなることを特徴とする。
また、請求項3の発明は、前記酸化処理が、炭素,コウミョウタン,鉛,薬剤,火力,水,油等の処理を行うものからなることを特徴とする。
また、請求項4の発明は、前記凹溝等の形成が、レーザ,電子ビーム,放電加工,ウォータジェット,エッチング,アーク加工によることを特徴とする。
また、請求項5の発明は、前記第1のピース及び第2のピースは検査対象物の構成と同一の材料及びその組み合わせからなることを特徴とする。
また、請求項6の発明は、前記第1のピースと第2のピースとの結合が溶接結合により形成されたものであり、前記凹溝等が溶接接合面,その境界面,母材に形成されるものであることを特徴とする。
本発明の請求項1のキズ検査用基準ゲージの製造方法によれば、第1のピース及び/又は第2のピースに形成される凹溝等を維持基準に対応する形態にすることができ、かつキズ検査用基準ゲージは前記凹溝等を一体的に構造体の内部に正確に保持することができ、高品質の基準ゲージを製造することができる。
また、請求項2のキズ検査用基準ゲージの製造方法によれば、酸化処理を行うことにより拡散接合時に凹溝等が無くなることが防止され、所望の形態の基準溝を形成することができる。
また、請求項3のキズ検査用基準ゲージの製造方法によれば、酸化処理の手段が具体的に示され、凹溝等は拡散接合により消滅することがない。
また、請求項4のキズ検査用基準ゲージの製造方法によれば、凹溝等がレーザ加工等により形成されるため、極めて微細な形状に、かつ正確に凹溝等を形成することができる。また、レーザ加工等のため、任意の材質のピースに対しても加工可能である。
また、請求項5のキズ検査用基準ゲージの製造方法によれば、基準ゲージのピースは検査対象物と同一の材料及び材料組み合わせから形成されるため、正確なキズ判定を行うことができる。
また、請求項6のキズ検査用基準ゲージの製造方法によれば、溶接による接合面にも凹溝等を作ることができ、従来不可能とされたキズ検査用基準ゲージを作ることができる。
As described above, in the case of a flaw inspection from now on, it is necessary to have an artificial flaw having a narrow width close to a natural flaw, and the maintenance standard becomes a criterion for the quality determination. Specifically, for example, a material having a processing accuracy of 1/17 at least about 30 μm is required. In the case of “Non-contact visual inspection method and apparatus” disclosed in Japanese Patent Application Laid-Open No. 2002-250694 of Patent Document 1, the standard scratch is about 500 μm due to electric discharge machining, and does not satisfy the above condition. Further, the existing electric discharge machine or electron beam machine cannot perform scratch processing with a width narrower than 500 μm.
Next, in various test methods (RT, ET, VT) applied to equipment inspection of nuclear equipment, rockets, etc., scratch processing close to narrower natural scratches is required in order to improve the evaluation accuracy. . If scratch processing close to this natural scratch becomes possible, it will be possible to improve the evaluation accuracy of various test methods in industrial fields other than nuclear equipment as well as nuclear equipment, and the safety of the product will be greatly improved, It can greatly improve the reliability of society as a whole.
The present invention has been invented in view of the above circumstances, and the quality of scratch inspection objects with respect to the maintenance standard can be accurately and relatively easily processed, and also for various materials other than steel. An object of the present invention is to provide a method of manufacturing a reference gauge for scratch inspection of a simple structure that can be processed and can accurately perform scratch inspection of scratch inspection objects of various materials.
In order to achieve the above object, the present invention provides a first and second piece made of the same material or different materials such as metal, nonmetal, noble metal, alloy, ceramics, composite material, etc. Concave grooves, thin wires, and strips (hereinafter referred to as concave grooves) corresponding to the maintenance standard for scratches on the test object are formed in a single row, in parallel, in multiple layers in parallel, in layers, or in layers. A scratch inspection reference gauge manufacturing method comprising: a first step of finishing a joining surface of the first piece and the second piece to a predetermined roughness; and the first piece and the first piece. A second step of forming the concave groove or the like on a part of one or both of the two pieces, or a part of the end surface, a third step of applying a treatment that makes the concave groove or the like difficult to diffusely bond, and the first Join the joint surface of the piece and the second piece and attach them to the HIP Characterized in that comprising a fourth step of performing a diffusion bonding or high frequency heat-bonding put within.
Further, the invention according to claim 2 is characterized in that the process of preventing the diffusion bonding such as the concave groove in the third step includes oxidizing the inside of the concave groove or the like.
The invention according to claim 3 is characterized in that the oxidation treatment comprises treatment of carbon, bryotan, lead, chemicals, thermal power, water, oil and the like.
Further, the invention of claim 4 is characterized in that the formation of the groove or the like is performed by laser, electron beam, electric discharge machining, water jet, etching, or arc machining.
The invention according to claim 5 is characterized in that the first piece and the second piece are made of the same material and the combination thereof as the structure of the inspection object.
According to a sixth aspect of the present invention, the connection between the first piece and the second piece is formed by welding connection, and the concave groove or the like is formed on the weld joint surface, its boundary surface, or the base material. It is characterized by being.
According to the method for manufacturing a scratch inspection reference gauge according to claim 1 of the present invention, the groove formed in the first piece and / or the second piece can be in a form corresponding to the maintenance reference, In addition, the scratch inspection reference gauge can accurately hold the concave grooves and the like integrally in the structure, and can manufacture a high-quality reference gauge.
In addition, according to the method for manufacturing a reference gauge for scratch inspection according to claim 2, by performing the oxidation treatment, it is possible to prevent a ditch or the like from being lost at the time of diffusion bonding, and a reference groove having a desired form can be formed.
In addition, according to the method for manufacturing a scratch inspection reference gauge according to the third aspect, the means for the oxidation treatment is specifically shown, and the concave grooves and the like do not disappear due to diffusion bonding.
In addition, according to the method for manufacturing a scratch inspection reference gauge according to the fourth aspect, since the concave groove or the like is formed by laser processing or the like, the concave groove or the like can be accurately formed in a very fine shape. Moreover, it is possible to process a piece of any material for laser processing or the like.
Further, according to the method for manufacturing the reference gauge for scratch inspection according to claim 5, since the piece of the reference gauge is formed of the same material and material combination as the inspection object, accurate scratch determination can be performed.
In addition, according to the method for manufacturing a scratch inspection reference gauge according to the sixth aspect, it is possible to form a groove or the like on the welded joint surface, and it is possible to make a scratch inspection reference gauge that has been impossible in the past.

図1本発明に係るキズ検査用基準ゲージの全体概要構造を示す斜視図。
図2図1のA−A線断面図。
図3本発明のキズ検査用基準ゲージの製造方法の第1のステップを説明するための模式的斜視図。
図4本発明のキズ検査用基準ゲージの製造方法の第2のステップを説明するための模式的斜視図。
図5本発明のキズ検査用基準ゲージの製造方法の第3のステップを説明するための模式的断面図(a),(b)。
図6本発明のキズ検査用基準ゲージの製造方法の第4のステップを説明するための模式的構成図。
図7本発明のキズ検査用基準ゲージの製造方法を説明するためのフローチャート。
図8接合面が溶接結合の場合のキズ検査用基準ゲージを示す斜視図(a)及び断面図(b),(c),(d)。
1 is a perspective view showing the overall schematic structure of a scratch inspection reference gauge according to the present invention.
2 is a cross-sectional view taken along line AA in FIG.
3 is a schematic perspective view for explaining the first step of the method for manufacturing the scratch inspection reference gauge of the present invention.
4 is a schematic perspective view for explaining a second step of the method for manufacturing a scratch inspection reference gauge of the present invention.
5 is a schematic cross-sectional view (a), (b) for explaining the third step of the method for manufacturing a scratch inspection reference gauge of the present invention.
6 is a schematic configuration diagram for explaining a fourth step of the method for manufacturing a scratch inspection reference gauge of the present invention.
7 is a flowchart for explaining a method for manufacturing a scratch inspection reference gauge of the present invention.
8 is a perspective view (a) and cross-sectional views (b), (c), (d) showing a reference gauge for scratch inspection when the joint surface is welded.

以下、本発明のキズ検査用基準ゲージの製造方法の実施の形態を図面を参照して詳述する。図1(a),図1(b)及び図2はキズ検査用基準ゲージの概要構造を示すものである。キズ検査用基準ゲージ1は第1のピース2と第2のピース3とを合体したものからなり、その接合面2a及び3aの箇所には凹溝等4が形成されている。この凹溝等4の形状や形態が維持基準のキズの形状,形態に対応するものである。なお、第1のピース2や第2のピース3の材質は検査対象物の材料構成と同一のものが使用される。即ち、同一材料に限らず異種材料についても広く適用される。勿論この凹溝等4は内部に形成されているため通常の目視によっては確認できないが、内部を透視し得るテスト装置によって容易に確認することができる。なお、この凹溝等4は、例えば、レーザ加工により形成されるため、第1のピース2や第2のピース3の材質としては鋼のみならず、ステンレス,銅,アルミニウム,チタン,タンタル,タングステン,モリブデン,マグネシューム,セラミックス金,銀,複合材等が採用される。また、レーザ加工のため5μm程度、更にこれ以下の微細寸法の凹溝等4を正確に形成することができる。
次に、以上の構造のキズ検査用基準ゲージ1の製造方法を図3乃至図6及び図7のフローチャートを用いて説明する。この製造方法としては概略第1のステップ乃至第4のステップからなる。
まず、前記の第1のステップを説明する。第1のピース2及び第2のピース3を所定の形状のブロック体として形成した後、図3に示すように、第1のピース2及び第2のピース3の接合面2a及び3aを仕上げ加工する。後に説明する拡散接合によって第1のピース2と第2のピース3とを一体的に接合するには、この両者の接合面2a及び3aが高精度に仕上げられることが必要である。例えば、ILS以下に仕上げることが望ましい。この仕上げ加工方法としては各種のものが採用され、これ等には公知技術が適用可能である。
次に、第2のステップを説明する。図4に示すように、例えば、第1のピース2の接合面2aにレーザ加工等により凹溝等4を形成する。この凹溝等4は前記のように維持基準に対応するものである。図4では四角状の凹溝等4が形成されているが、これに限定するものではなく、各種形状のものや単列に限らず、並列,複層,重ね形状も採用される。また、本例では第1のピース2側にのみ凹溝等4が形成されているが第2のピース3側でもよく、また、第1のピース2及び第2のピース3の双方に形成されてもよい。また、前記のように凹溝等4は維持基準に対応する形態のものからなるが、後に説明する拡散接合によって凹溝等4の一部が変形することも考えられるため、この変形代を加味したものにすることが必要となる場合もある。この変形代や主に経験上求められる。
次に、第3のステップを説明する。一般に、拡散接合は接合面を隙間なく密に合体することが主目的であるため、凹溝等4も拡散接合時に変形又は皆無になる恐れがある。凹溝等4をレーザ加工した状態にほぼ保持するために第3のステップが行われる。このステップは拡散接合時において凹溝等4の部分が変形しないように、即ち、拡散接合の影響を受けないようにするためのものである。なお、図7のフローチャートに記載するように第2のステップと第3のステップとの間に酸化処理がすでにされたか否かのステップがある。これは、第2のステップにおける凹溝等4の加工時に酸化処理が自動的に行われる場合があるからである。具体的手段としては図5に示すようにこの凹溝等4内に微粒子のカーボン5を挿入するか(図5a)、又はこの凹溝等4の部位を酸化処理(図5(6))して酸化層6を形成する。これにより、凹溝等4の形態を保持することができる。
次に、図6により第4のステップを説明する。このステップは拡散接合の工程である。拡散接合はHIP(Hot Isostatie Pressing)装置により行われ、公知技術である。具体的には、第1のピース2と第2のピース3とを接合合体させ、これをカプセル7で真空封止し、これをHIP装置に入れてHIP処理を行う。具体的には真空加熱又は高周波加熱による押圧によって行われる。ピース形状に見合ったHIP処理を行うことにより第1のピース2と第2のピース3とは拡散接合して一体化する。ここで、カプセル7を除去し、仕上げ加工することにより所望のキズ検査用基準ゲージ1が製作される。
以上の工程によりキズ検査用基準ゲージ1が製作されるが、その製造工程については開示しないノウハウがあり、これにより、任意の形状高精度のキズ検査用基準ゲージ1を形成することができる。また、第1のピース2や第2のピース3の形状や凹溝等4の形状も図示のものに限定しないことは勿論である。
図8は、第1のピース2と第2のピース3とが溶接結合される場合におけるキズ検査用基準ゲージ1a((a))を示す。このキズ検査用基準ゲージ1aは検査対象物と同一の溶接結合された検査ピースを図示のように溶接部8(断面B−B(b))とその境界面(断面C−C(c))及び母材(断面D−D(d))で切断し、夫々の切断面に前記の図7に示すフローチャートによる工程を施して形成される。これにより、従来不可能とされていた溶接部におけるキズ検査が正確に行うことができる。
Embodiments of a method for manufacturing a scratch inspection reference gauge according to the present invention will be described below in detail with reference to the drawings. FIG. 1A, FIG. 1B, and FIG. 2 show a schematic structure of a reference gauge for scratch inspection. The scratch inspection reference gauge 1 is formed by combining the first piece 2 and the second piece 3, and a groove 4 or the like is formed at the joint surfaces 2 a and 3 a. The shape and form of the concave grooves 4 correspond to the shape and form of the maintenance reference scratch. The material of the first piece 2 or the second piece 3 is the same as that of the material to be inspected. That is, the present invention is widely applied not only to the same material but also to different materials. Of course, since the concave groove 4 is formed inside, it cannot be confirmed by normal visual observation, but can be easily confirmed by a test apparatus that can see through the inside. In addition, since this ditch | groove 4 etc. are formed by laser processing, for example, as a material of the 1st piece 2 and the 2nd piece 3, not only steel but stainless steel, copper, aluminum, titanium, tantalum, tungsten , Molybdenum, Magnesium, Ceramic gold, Silver, Composite materials, etc. are adopted. Further, the concave grooves 4 and the like having a fine dimension of about 5 μm or less can be accurately formed for laser processing.
Next, a method of manufacturing the scratch inspection reference gauge 1 having the above structure will be described with reference to the flowcharts of FIGS. 3 to 6 and FIG. This manufacturing method generally includes a first step to a fourth step.
First, the first step will be described. After the first piece 2 and the second piece 3 are formed as a block body having a predetermined shape, as shown in FIG. 3, the joining surfaces 2a and 3a of the first piece 2 and the second piece 3 are finished. To do. In order to integrally bond the first piece 2 and the second piece 3 by diffusion bonding, which will be described later, it is necessary that the bonding surfaces 2a and 3a of the two pieces be finished with high accuracy. For example, it is desirable to finish below ILS. Various finishing methods are employed, and known techniques can be applied to these finishing methods.
Next, the second step will be described. As shown in FIG. 4, for example, a groove 4 or the like is formed on the joint surface 2a of the first piece 2 by laser processing or the like. This concave groove 4 corresponds to the maintenance standard as described above. In FIG. 4, a rectangular concave groove 4 or the like is formed, but the present invention is not limited to this, and is not limited to various shapes or single rows, and parallel, multiple layers, and overlapping shapes are also employed. Further, in this example, the groove 4 or the like is formed only on the first piece 2 side, but it may be formed on the second piece 3 side, and is formed on both the first piece 2 and the second piece 3. May be. Further, as described above, the concave groove 4 is formed in a form corresponding to the maintenance standard. However, since a part of the concave groove 4 may be deformed by diffusion bonding described later, this deformation allowance is taken into account. Sometimes it is necessary to make it. This deformation allowance is mainly required from experience.
Next, the third step will be described. In general, the main purpose of diffusion bonding is to unite the bonding surfaces closely without gaps, and therefore the concave groove 4 may be deformed or completely eliminated during diffusion bonding. A third step is performed in order to substantially hold the groove 4 or the like in the laser processed state. This step is to prevent the concave groove 4 and the like from being deformed during diffusion bonding, that is, not affected by diffusion bonding. Note that, as described in the flowchart of FIG. 7, there is a step whether or not an oxidation process has already been performed between the second step and the third step. This is because the oxidation process may be automatically performed during the processing of the concave grooves 4 in the second step. As specific means, as shown in FIG. 5, fine carbon 5 is inserted into the groove 4 (FIG. 5a), or the portion of the groove 4 is oxidized (FIG. 5 (6)). Thus, the oxide layer 6 is formed. Thereby, the form of the concave grooves 4 can be maintained.
Next, the fourth step will be described with reference to FIG. This step is a diffusion bonding process. Diffusion bonding is performed by a HIP (Hot Isostatic Pressing) apparatus and is a known technique. Specifically, the first piece 2 and the second piece 3 are joined and united, vacuum-sealed with a capsule 7, and this is put into a HIP apparatus to perform HIP processing. Specifically, it is performed by pressing by vacuum heating or high-frequency heating. By performing the HIP process corresponding to the piece shape, the first piece 2 and the second piece 3 are diffusion-bonded and integrated. Here, by removing the capsule 7 and finishing it, the desired scratch inspection reference gauge 1 is manufactured.
Although the scratch inspection reference gauge 1 is manufactured by the above-described process, there is know-how that is not disclosed for the manufacturing process, and thus, it is possible to form the scratch inspection reference gauge 1 having any shape and high accuracy. Of course, the shape of the first piece 2 and the second piece 3 and the shape of the concave grooves 4 are not limited to those shown in the drawing.
FIG. 8 shows a scratch inspection reference gauge 1a ((a)) when the first piece 2 and the second piece 3 are welded together. The scratch inspection reference gauge 1a includes a welded inspection piece (cross section B-B (b)) and a boundary surface (cross section C-C (c)) as shown in FIG. And a base material (cross section DD (d)), and each cut surface is formed by performing the process according to the flowchart shown in FIG. Thereby, the flaw inspection in the welded portion, which has been impossible in the past, can be accurately performed.

本発明によって製作されるキズ検査用基準ゲージは全ての構造物や建造物のキズ検査の基準ゲージとして使用され、その使用範囲は極めて広い。特に、高精度,高品質の保持を必要とする原子力関係や宇宙開発機器等の安全管理に対しては極めて有効であり、広い範囲で使用され、安全性確保のツールとして極めて有用のものとし使用される。また、本発明によるキズ検査用基準ゲージは使用者に販売されて利用されるが、製造側で販売管理する必要がある。よってキズ検査用基準ゲージにはその材質,シリアルナンバ等の管理に必要な表示が刻印やエッチング等により表示され製作者側でこれを基にしてIT手法等を用いて管理される。  The reference gauge for scratch inspection manufactured according to the present invention is used as a reference gauge for scratch inspection of all structures and buildings, and its use range is extremely wide. In particular, it is extremely effective for safety management of nuclear power and space development equipment that requires high accuracy and high quality, and is used in a wide range and is extremely useful as a tool for ensuring safety. Is done. Further, the scratch inspection reference gauge according to the present invention is sold to a user and used, but it is necessary to manage the sales on the manufacturing side. Therefore, a display necessary for managing the material, serial number, etc. is displayed on the reference gauge for scratch inspection by engraving, etching, etc., and is managed by the manufacturer using the IT method based on this.

Claims (6)

金属,非金属,貴金属,合金,セラミックス,複合材等の同一材料又は異種材料からなる第1及び第2のピースの接合面や端面に検査対象物のキズに関する維持基準に対応する凹溝や細線,細条(以下、凹溝等という)を単列,並列,複層並列,重ね,複層重ねに形成してなるキズ検査用基準ゲージの製造方法であって、該製造方法は、前記第1のピース及び第2のピースの接合面を所定粗さに仕上げる第1のステップと、前記第1のピース及び第2のピースの一方又は双方の接合面や端面の一部に前記凹溝等を形成する第2のステップと、前記凹溝等を拡散接合しにくい処理を施す第3のステップと、前記第1のピースと第2のピースの接合面を接合せしめてこれ等をHIP装置内に入れて拡散接合又は高周波加熱接合を行う第4のステップとからなることを特徴とするキズ検査用基準ゲージの製造方法。Concave grooves and fine wires corresponding to the maintenance standards related to scratches on the inspection object on the joint surfaces and end surfaces of the first and second pieces made of the same or different materials such as metals, non-metals, precious metals, alloys, ceramics, composites, etc. , A method for manufacturing a reference gauge for scratch inspection, in which strips (hereinafter referred to as concave grooves) are formed in a single row, in parallel, in multiple layers in parallel, in layers, in layers. A first step of finishing the joining surface of the first piece and the second piece to a predetermined roughness, and the concave groove or the like on a part of one or both of the joining surface or the end surface of the first piece or the second piece. A second step of forming a groove, a third step of performing a process that makes it difficult to diffusely bond the concave grooves, and the like, by joining the joining surfaces of the first piece and the second piece, In the fourth step, diffusion bonding or high-frequency heating bonding is performed. Method for producing a scratch test reference gauge, characterized by comprising a. 前記第3のステップにおける前記凹溝等の拡散接合しにくい処理が、前記凹溝等内を酸化処理するものからなることを特徴とする請求項1に記載のキズ検査用基準ゲージの製造方法。2. The method for manufacturing a reference gauge for scratch inspection according to claim 1, wherein the treatment that makes it difficult to perform diffusion bonding such as the concave groove in the third step includes oxidizing the inside of the concave groove or the like. 前記酸化処理が、炭素,コウミョウタン,鉛,薬剤,火力,水,油等の処理を行うものからなることを特徴とする請求項2に記載のキズ検査用基準ゲージの製造方法。3. The method for producing a reference gauge for scratch inspection according to claim 2, wherein the oxidation treatment comprises treatment of carbon, bryomycota, lead, chemicals, thermal power, water, oil or the like. 前記凹溝等の形成が、レーザ,電子ビーム,放電加工,ウオータジェット,エッチング,アーク加工によることを特徴とする請求項1乃至3のいずれかに記載のキズ検査用基準ゲージの製造方法。The method for manufacturing a reference gauge for scratch inspection according to any one of claims 1 to 3, wherein the formation of the concave groove or the like is performed by laser, electron beam, electric discharge machining, water jet, etching, or arc machining. 前記第1のピース及び第2のピースは検査対象物の構成と同一の材料及びその組み合わせからなることを特徴とする請求項1乃至4のいずれかに記載のキズ検査用基準ゲージの製造方法。The method for manufacturing a reference gauge for scratch inspection according to any one of claims 1 to 4, wherein the first piece and the second piece are made of the same material and combination as the structure of the inspection object. 前記第1のピースと第2のピースとの結合が溶接結合により形成されたものであり、前記凹溝等が溶接接合面,その境界面,母材に形成されるものであることを特徴とする請求項1乃至5のいずれかに記載のキズ検査用基準ゲージの製造方法。The connection between the first piece and the second piece is formed by welding connection, and the concave groove or the like is formed on a weld joint surface, a boundary surface thereof, or a base material. A method for manufacturing a reference gauge for scratch inspection according to any one of claims 1 to 5.
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