JPWO2004112970A1 - Eddy current type liquid atomization nozzle - Google Patents

Abstract

A hollow body 2 having a gas outlet 201 at the front and a gas inlet 202 at the side, and a liquid passage inserted into the body 2 from the rear and connecting the front liquid outlet 301 and the rear liquid inlet 316 to the inside. A gas passage 7 is formed between the body 2 and the member 3 so as to communicate the gas inlet 202 and the outlet 201, and the liquid outlet 301 cooperates with the body 2 on the outer periphery of the front end portion of the member 3. A swirling groove 304 that generates a swirling vortex is formed in front of the nozzle 1, and the swirling vortex crushes and atomizes the liquid ejected from the liquid outlet 301. The body 2 and the member 3 are made of fluororesin, and the gas inlet 202 A flow path configuration in which fluororesin flow path component members 5, 15, 4, 4 A are fitted to the liquid inlet 316, the fitting portion is fixed and sealed by welding, and is fixed to the gas inlet 202 and the liquid inlet 316. Inner peripheral surface 15a of the member, 03a and the inner peripheral surface 7a of the nozzle 1 side of the gas passage 7 and the liquid passage 8, thereby continuously 8a the flush. There are no recesses or screwed portions in which fluid-containing substances can adhere and accumulate in the fluid introduction path of the nozzle 1, and impurities are not mixed in the sprayed liquid fine particles.

Description

  The present invention relates to a nozzle for atomizing and spraying a liquid, and more particularly to a vortex type liquid atomizing nozzle suitable for semiconductor manufacturing, thin film precision coating, medical analysis, scientific analysis and the like.

  Nozzles for atomizing and spraying liquids have been used in a wide variety of industrial fields such as painting, granulation, combustion, spraying glaze in the ceramic industry, and thin film precision coatings such as magnetic disks.

  In particular, vortex atomization nozzles proposed in JP-A-4-21551, JP-A-4-59023, etc., that is, a high-speed eddy current is generated in the gas introduced into the nozzle, Nozzles that pulverize and atomize liquids are widely used in various industrial fields because they can obtain desired ultrafine particles precisely and stably.

  However, since the material of the atomizing nozzle has been limited to metal such as stainless steel, high-strength brass, brass, etc., the liquid passes through the nozzle when atomizing an acidic or alkaline liquid. In the process, there was a concern that metal ions would be eluted.

  Furthermore, since the conventional nozzle made of metal is heavy, it has been pointed out that it causes an extra load on various members to which the nozzle is attached, and a reduction in weight has been demanded.

  Therefore, there is no elution of metal ions, and furthermore, there are provided chemical resin atomization nozzles that are characterized by chemical resistance and heat resistance, and have realized weight reduction. A significant atomization nozzle (Patent Document 1 below) has been proposed in order to expand versatility.

As shown in FIG. 7, a hollow synthetic resin nozzle body a having a gas injection port a1 opened forward and a gas introduction port a2 opened laterally is inserted into the nozzle body a from the rear. A liquid synthetic resin liquid passage member b that is integrated and has a liquid outlet b1 that opens to the front and faces the gas injection port a1 and a liquid inlet b2 that opens to the rear; and a front end portion of the liquid passage member b A swirling groove b2 that generates a high-speed swirling vortex having a focal point in front of the liquid spout b1 is formed on the outer periphery in cooperation with the inner region of the cusp of the nozzle body a, and is ejected from the liquid inlet b1. The liquid is crushed and atomized by the high-speed swirling vortex c of the gas ejected from the gas ejection port a1. Reference numeral d denotes a gas supply tube (air tube), which is connected to an attachment e inserted into the gas introduction port a2. Reference numeral f denotes a liquid supply tube, which is connected to an attachment g inserted into the liquid introduction port b2.
Japanese Patent Laid-Open No. 11-66307 (whole specification, FIGS. 1 to 4)

  However, in the nozzle described above, since the attachments e and g are screwed and integrated with the gas introduction port a2 of the nozzle body a and the gas introduction port b2 of the liquid passage member b, respectively, the liquid passage provided in the nozzle In the gas passage, the concave portion b3 and the screwing portions b4 and a4 are exposed. For this reason, the flow is stagnation in the recess b3 and the screwed portions b4 and a4, and the contained substances in the fluid (liquid and gas) staying in the stagnation portion accumulate on the recess b3 and the screwed portions b4 and a4 and change over time (deterioration). There is a possibility that this may be mixed as an impurity in the fine particles of the liquid to be sprayed, and there is a problem that this nozzle cannot be employed when used in, for example, a semiconductor manufacturing facility.

  The present invention has been made in view of the above-mentioned problems of the prior art, and its purpose is to prevent elution of metal ions, and further to provide chemical resistance and heat resistance characteristics, and in the fine particles of the liquid to be sprayed. An object of the present invention is to provide a vortex type liquid atomization nozzle that is light in weight without being mixed with impurities.

In order to achieve the above object, in the vortex atomization nozzle according to claim 1, a hollow synthetic resin nozzle body having a gas injection port opened forward and a gas introduction port opened laterally;
The nozzle body is inserted and integrated into the nozzle body from behind, and a liquid passage is formed in the liquid passage in which the liquid jet opening facing the gas jet opening is opened forward and the liquid inlet opening is opened in the rear. A hollow synthetic resin liquid passage member,
Between the nozzle body inner region and the liquid passage member, a gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined, and the front end portion outer periphery of the liquid passage member is A swirling groove that generates a high-speed swirling vortex having a focal point in front of the liquid ejection port is formed in cooperation with the inner region of the cusp of the nozzle body, and the liquid ejected from the liquid ejection port is the gas ejection In the vortex type liquid atomization nozzle that is crushed and atomized by the high-speed swirling vortex jetted from the mouth,
The nozzle body and the liquid passage member are made of fluororesin,
Each of the gas inlet and the liquid inlet is fitted with a cylindrical fluid feed path constituent member made of fluororesin, and the fitting portion is fixed and sealed by welding, respectively.
The inner peripheral surface of the fluid feed path constituent member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or liquid passage on the nozzle side are configured to be flush with each other.

  (Operation) The insertion portion between the nozzle body and the liquid passage member is sealed by a sealing means such as an O-ring, sheet packing, or welding, and the gas introduction port and the liquid introduction port and the respective fluid supply path constituent members Are fixed and sealed by welding, respectively, and the gas tightness of the gas inlet and the liquid inlet of the nozzle is secured.

  Since the nozzle body, liquid passage member and each fluid supply path component are made of fluororesin, the entire area around the nozzle including the nozzle can be reduced in weight, and as with conventional metal nozzles, It does not elute metal ions in a certain liquid, has excellent chemical resistance and drug resistance, and can be used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis and the like.

  In addition, the inner peripheral surface of the fluid feed path constituent member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the nozzle-side gas passage or liquid passage are flush with each other, and the gas at the gas inlet As seen in the prior art, the introduction path and the liquid introduction path at the liquid introduction port do not have a concave portion or a threaded portion that causes a stagnation and in which the contained substances in the fluid collected in the stagnation portion are liable to adhere and accumulate. . For this reason, the flow of the gas and the liquid introduced from the fluid supply path constituting member to the gas inlet and the liquid inlet of the nozzle does not stagnate at the gas inlet and the liquid inlet, and the gas passage and the liquid passage in the nozzle. The liquid and the contained substances in the gas are not mixed as impurities in the sprayed liquid fine particles that are smoothly guided to the gas injection port and the liquid injection port via the .

  The insertion portion between the nozzle body and the liquid passage member is provided with a portion such as a screwing portion or a fitting portion, which is exposed in the gas passage of the nozzle. Gas (containing material) that is almost non-viscous compared to, is less likely to adhere and accumulate on these parts, and these parts (screwed part and fitting part) are on the opposite side of the gas injection port across the gas inlet Since it is in a position that hardly functions as a gas passage, there is almost no possibility that the gas-containing substance adheres to and accumulates on the screwed portion or the fitting portion in the insertion portion between the nozzle body and the liquid passage member.

  According to a second aspect of the present invention, the fluid supply path constituting member according to the first aspect is constituted by a fluororesin fluid supply tube. That is, in claim 2, in the vortex atomization nozzle according to claim 1, a fluororesin tube for feeding pressurized gas supplied from a gas supply source is directly fixed (fitted) to the gas inlet. And a fluororesin tube for feeding the liquid supplied from the liquid supply source is directly fixed (fitted and welded fixed) to the liquid inlet.

  (Operation) Not only the gas inlet and liquid inlet of the nozzle, but also the supply path (gas supply tube) for supplying the pressurized gas supplied from the gas supply source to the gas inlet and the liquid supply source Even in the supply path (liquid supply tube) for supplying the liquid to be supplied to the liquid inlet, there is no portion where the contained substance in the fluid adheres and accumulates. What has changed over time (deteriorated or denatured) in the gas is never mixed in as impurities.

  Further, in claims 3 and 4, one of the fluid supply path constituting members according to claim 1 is constituted by a fluororesin fluid feed tube, and the other fluid feed path constituting member is made of a fluororesin. It is comprised with the attachment made from a fluororesin which connected the tube for fluid supply of this so that attachment or detachment was possible. That is, in claim 3, in the vortex atomization nozzle according to claim 1, a fluororesin tube for feeding pressurized gas supplied from a gas supply source is directly fixed (fitted) to the gas inlet. And a fluororesin attachment to which a fluororesin liquid feeding tube is detachably connected is fixed (fitted and welded fixed) to the liquid inlet.

(Operation) Since the liquid feed tube can be easily inserted into and removed from the attachment fixed to the liquid inlet of the nozzle, the connection with the attachment of the liquid feed tube can be released if necessary. It is possible to clean the tube connection portion of the attachment where there is a possibility that the contained material may adhere and accumulate.
Moreover, the other liquid can be atomized by connecting another liquid supply tube extending from another liquid supply source to the attachment.

  According to a fourth aspect of the present invention, in the vortex atomization nozzle according to the first aspect, a fluororesin tube for feeding a liquid supplied from a liquid supply source is directly fixed (fitted and fitted) to the liquid inlet. And a fluororesin attachment to which a gas feeding tube is detachably connected is fixed (fitted and welded fixed) to the gas inlet.

  (Operation) Since the gas supply tube can be easily inserted into and removed from the attachment fixed to the gas inlet of the nozzle, the connection with the attachment of the gas supply tube is released as necessary. It is possible to clean the tube connection portion of the attachment where there is a possibility that the contained material may adhere and accumulate.

  In addition, by connecting another gas supply tube extending from another gas supply source to the attachment, the liquid can be atomized using another gas.

  According to a fifth aspect of the present invention, in the vortex atomization nozzle according to the first aspect, a fluororesin attachment to which a fluororesin gas supply tube is detachably connected is fixedly fitted (fitted) to the gas introduction port. And a fluororesin attachment to which a fluororesin liquid feeding tube is detachably connected is fixed (fitted and welded fixed) to the liquid inlet.

  (Operation) Since the liquid feed tube and the gas feed tube can be easily inserted into and removed from each attachment fixed to the nozzle, the attachment of the liquid feed tube and the gas feed tube can be performed as necessary. And the tube connection part of the attachment that may contain and deposit substances contained in the fluid can be cleaned.

  Also, by connecting another liquid supply tube extending from another liquid supply source or another gas supply tube extending from another gas supply source to the respective attachments, other liquids can be made fine or other The liquid can be made into fine particles using this gas.

  In Claim 6, In the vortex atomization nozzle according to any one of Claims 1 to 5, an insertion hole communicating with the gas injection port is provided at a rear end portion of the nozzle body, and the insertion hole In addition, the liquid passage member is screwed and fixed through an O-ring serving as a sealing means.

  (Operation) By simply screwing the nozzle body and the liquid passage member in the direction in which the liquid passage member is inserted into the insertion hole, the nozzle can be easily fixed and integrated as a nozzle. Air tightness in the insertion hole of the nozzle body by inserting the liquid passage member can be secured by an O-ring which is a sealing means.

  According to the first aspect, since the nozzle body, the liquid passage member, and the respective fluid supply path constituent members are made of a fluororesin, it is easy to handle as a nozzle due to weight reduction, and a metal is contained in the liquid to be atomized. Since ions do not elute, they can be widely used in a wide range of fields such as semiconductor manufacturing, pharmaceutical manufacturing, pharmaceutical manufacturing, medical equipment, and scientific analysis.

  Further, the flow of the gas and liquid introduced into the gas introduction port and the liquid introduction port of the nozzle, respectively, does not stagnate at the gas introduction port and the liquid introduction port, and passes through the gas passage and the liquid passage in the nozzle. Since the liquid fine particles sprayed from the nozzles are smoothly guided to the nozzles, and the substances contained in the liquid or gas are aged (deteriorated or denatured), they do not mix as impurities, so no impurities are mixed. Ultrafine atomization of liquid becomes possible.

  According to the second aspect of the present invention, there are fluids in the gas supply path from the gas supply tube to the gas ejection port of the nozzle and the liquid supply path from the liquid supply tube to the liquid ejection port of the nozzle. Since there is no site where the contained material may adhere and deposit, it is possible to make ultrafine particles of the liquid in which impurities are not reliably mixed.

  According to the third aspect, since the liquid supply tube can be easily detached from the attachment, the sprayed liquid fine particles can be appropriately washed by appropriately washing the tube connecting portion of the attachment in which the contained substance in the liquid may adhere and deposit. It is possible to cope with the contamination of impurities into the liquid and to change the liquid supply source together with the liquid supply tube to cope with various liquid fine particles.

  According to the fourth aspect, since the gas supply tube can be easily detached from the attachment, the sprayed liquid fine particles can be appropriately washed by appropriately washing the tube connecting portion of the attachment in which the substance contained in the gas may adhere and deposit. It is possible to cope with the mixing of impurities into the inside, and it is possible to cope with the atomization of liquid using various gases by replacing the gas supply source together with the gas supply tube.

  According to the fifth aspect, since the liquid feeding tube and the gas feeding tube can be easily detached from the attachment, by appropriately washing the tube connecting portion of the attachment in which the contained substance in the fluid may adhere and deposit. In addition to coping with impurities, the liquid supply source can be replaced with the liquid supply tube, and the gas supply source can be replaced with the gas supply tube to support the atomization of various liquids using various gases. it can.

  According to the sixth aspect of the present invention, since the structure is very simple and the liquid passage member can be screwed together by interposing an O-ring in the insertion hole of the nozzle body, the nozzle can be easily integrated. Is also easy.

  Next, preferred embodiments of the present invention will be described based on examples.

  1 to 4 show a liquid atomization nozzle according to a first embodiment of the present invention, FIG. 1 is a longitudinal sectional view of the nozzle, FIG. 2 is an exploded perspective view showing a component configuration of the nozzle, and FIG. FIG. 4 is a partial perspective view showing the configuration of the upper end portion (front end portion) of the liquid passage member forming the high-speed vortex generator, and FIG. 4 is a simplified example showing a specific embodiment when the liquid is atomized using the nozzle. FIG.

  In these drawings, reference numeral 1 denotes a nozzle body of a liquid atomizing nozzle, and the external configuration thereof is a hollow fluororesin nozzle body 2 having a tapered tapered point 203 and the nozzle body 2. A fluororesin liquid passage member 3 screwed inside, and a fluororesin gas feed tube 15 is directly connected to the nozzle body 2, while the liquid passage member 3 has A fluororesin liquid feeding tube 5 is connected via a fluororesin attachment 4.

  The nozzle body 2 includes a gas introduction port 202 formed by hollowing out a hollow outer peripheral portion 207 that opens in the front-rear direction, and an opening formed at the tip of the pointed head 203, the gas body A gas injection port 201 for injecting the gas A introduced from the introduction port 202 to the outside of the front, and an opening formed at the rear end of the body 2 for inserting the core-like liquid passage member 3 An outer appearance is configured from the hole 205 and a pair of concave flat portions 204 (see FIG. 2) formed to face the outer peripheral portion 207 of the nozzle body 2. In addition, the pair of concave flat portions 204 sandwich the atomizing nozzle 1 with a gripping member so that it can be easily fixed to a peripheral member, or can be easily gripped by a spanner to facilitate nozzle assembly. Is provided.

  Next, an external configuration of the liquid passage member 3 will be described with reference to FIGS.

  The liquid passage member 3 is inserted and integrated into the hollow interior of the nozzle body 2 to define an air passage 7 in cooperation with the inside of the nozzle body 2. 8 is formed.

  That is, the liquid passage member 3 includes a cylindrical pipe portion 305 that becomes the passage 8 for the liquid R, an opening formed at the front end portion of the pipe portion 305, and the liquid jet outlet 301 that discharges the liquid R to the outside. Surrounded by the ring portion 302, a ring portion 302 provided with a plurality of vortex forming grooves 304 that vortex the gas A and is provided in a ring shape in the circumferential direction of the tube portion 305 at a position slightly behind the jet nozzle 301. Formed in the inner region so as to communicate with the vortex forming groove 304, and is provided around the ring-shaped groove 303 that opens forward and the rear of the pipe 305, and on the inner periphery of the insertion hole 205 of the nozzle body 2. A male threaded portion 308 screwed into the formed female threaded portion 206, a step portion 310 for mounting an O-ring projecting in the circumferential direction behind the male threaded portion 308, and a nozzle formed further behind the stepped portion 310. Part welded with body 2 And a flange portion 312 formed of, formed in the rearmost end portion, the liquid introduction port 316 is composed of the spanner grip portion 314 provided. Reference numeral 312 a is a flat spanner hanging portion provided on the outer peripheral surface of the flange portion 312.

  Reference numeral 317 is an O-ring interposed between the nozzle body 2 and the liquid passage member 3 (the step part 310), and is compressed in the insertion direction (left and right direction in FIG. 1), so By increasing the pressure contact force of the threaded portions 206 and 308, the relative rotation of the two and the third is restrained, and the insertion hole 205 is sealed. Reference numeral 318 denotes a welded portion which acts to ensure the insertion and fixation between the nozzle body 2 and the liquid passage member 3 and the sealing of the insertion hole 205. It should be noted that since the fixing between the nozzle body 2 and the liquid passage member 3 and the sealing of the insertion hole 205 are sufficient only by the screwing portions 206 and 308 and the O-ring 317, the welding portion 318 is not necessarily required. is not.

  On the other hand, the attachment 4 is formed in a cylindrical shape as a whole, and a liquid passage 401 is formed therein, and a cylindrical front extending portion 403 extending in front of the attachment base portion 402 in the longitudinal center portion. A cylindrical rear extension 404 extending rearward of the attachment base 402, a cylindrical tube insertion sleeve 405 housed in a form that is prevented from rotating in the rear extension 404, and a rear extension 404 It is comprised with the nut 406 in which the internal thread 406a screwed together with the external thread 404a provided in the outer periphery of this was formed.

  Then, the front extension 403 of the attachment 4 is fitted into the liquid introduction port 316 of the liquid passage member 3, and the peripheral portion of the liquid introduction port 316 is welded to fix the attachment 4 to the liquid passage member 3. And the fitting part (liquid inlet 316) is sealed, and the liquid passage 8 of the liquid passage member 3 and the liquid passage 401 of the attachment 4 communicate with each other. Reference numeral 410 indicates a welded portion. In particular, as shown in FIG. 1, the inner peripheral surface 403 a of the front extension 403 of the attachment 4 (the inner peripheral surface of the liquid passage 401) 403 and the inner peripheral surface 8 a of the liquid passage 8 of the liquid passage member 3 are continuous with each other. In the liquid introduction path of the liquid introduction port 316, as seen in the prior art, the flow is caused to stagnate and the contained substances in the fluid collected in the stagnation part are liable to adhere and accumulate. There is no joint. For this reason, the liquid introduced from the liquid passage 401 of the attachment 4 to the liquid inlet 316 of the nozzle is smoothly guided to the front liquid ejection port 301 through the liquid passage 8 without stagnation in the middle. In the sprayed liquid fine particles, the substances contained in the liquid R that are aged (deteriorated or denatured) are not mixed as impurities.

  Further, the tube insertion sleeve 405 can be inserted into the distal end portion of the tube 5 using a special jig, and the inner peripheral surface of the inserted sleeve 405 and the inner peripheral surface of the tube 5 are substantially flush. Become. Then, the sleeve 405 connected to the tube 5 is inserted into the rear extension 404 of the attachment 4, and the nut 406 is tightened, so that the tip of the liquid supply tube 5 is inserted into the tube as shown in FIG. The sleeve can be held in the form gripped by the outer peripheral surface of the sleeve 405 and the inner peripheral surface of the rearward extending portion 404, whereby the liquid supply tube 5 can be connected and integrated with the rear end portion of the attachment 4. On the other hand, by loosening the nut 406, the connection of the liquid supply tube 5 with the sleeve 405 can be released, and the liquid supply tube 5 with the sleeve 405 can be easily removed from the rear end of the attachment 4. .

  Further, the connection portion between the attachment 4 and the liquid supply tube 5 has a step portion that causes a stagnation of the liquid flow, such as a step 401 a between the liquid passage 401 of the attachment 4 and the inner peripheral surface of the sleeve 405. Although it exists, the liquid supply tube 5 can be easily inserted into and removed from the attachment 4 integrated with the nozzle 1, so that the connection of the sleeve-equipped liquid supply tube 5 with the attachment 4 is released as necessary. And what is necessary is just to wash | clean the tube connection part of the attachment 4 in which the containing substance in a liquid may adhere and deposit.

  Further, as shown in FIG. 1, a gas feeding tube 15 made of a fluororesin is directly fixed to the gas introduction port 202 of the nozzle body 2. That is, the distal end portion of the gas supply tube 15 extending from the gas supply source is fitted into the gas introduction port 202, and the fitting portion is fixed and sealed by welding, so that the gas introduction tube 15 and the gas introduction are introduced. The port 202 communicates with the gas inlet port 202 and the gas tightness of the gas inlet port 202 is ensured. Reference numeral 320 indicates a welded portion. In particular, the inner peripheral surface 15a of the gas supply tube 15 and the inner peripheral surface 7a of the gas passage 7 on the nozzle 1 side are configured to be flush with each other. As can be seen in the art, there are no recesses or screwed portions that cause the stagnation of the flow and in which the contained substances in the gas collected in the stagnation portion tend to adhere and accumulate. For this reason, the gas introduced into the gas inlet port 202 of the nozzle from the gas supply tube 15 is smoothly guided to the front gas injection port 201 through the gas passage 7 without stagnation in the middle. What is contained in the gas A in the sprayed liquid fine particles that is aged (deteriorated or denatured) is not mixed as an impurity.

  The screw passages 206 and 308 between the nozzle body 2 and the liquid passage member 3 are exposed in the gas passage 7, but the gas (containing material) having almost no viscosity compared to the liquid (containing material) is present. The screwing portions 206 and 308 are unlikely to adhere to and accumulate on these portions, and the screwing portions 206 and 308 are on the opposite side of the gas injection port 201 with the gas introduction port 202 interposed therebetween and are in a position that hardly functions as the gas passage 7. There is almost no possibility that a gas-containing substance adheres to and accumulates on 206 and 308. Therefore, the presence of the screwing portions 206 and 308 does not cause a contamination of the sprayed liquid fine particles as the impurities contained in the gas A are aged.

  As described above, in addition to the nozzle body 2 and the liquid passage member 3 constituting the nozzle 1, the attachment 4, the liquid feeding tube 5 and the gas feeding tube 15 are also made of a fluororesin, so that the liquid to be atomized In addition to not eluting metal ions (for example, iron ions, copper ions, aluminum ions, etc.) into R, the entire area around the nozzle including the nozzle body 1 is reduced in weight, as well as chemical resistance and pharmaceutical resistance. It has excellent manufacturing and drug resistance and can be widely used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, pharmaceutical manufacturing, medical equipment, scientific analysis, and the like.

  Furthermore, since the sleeve-equipped liquid delivery tube 5 is easy to attach and detach, connecting the sleeve-provided liquid delivery tube extending from another liquid supply source to the attachment 4 makes it easy to atomize other liquids. It can correspond to.

  Here, the internal structure of the atomization nozzle 1 according to the present embodiment will be described with reference to FIGS.

  A region surrounded by the inner peripheral wall 205 of the nozzle body 2 and the pipe portion 305 of the liquid passage member 3 forms a gas passage 7 through which the gas A introduced from the gas introduction hole 202 passes, and passes through the gas passage 7. Thus, the gas A moves forward (upward in FIG. 3) and is converted into a high-speed vortex gas (T) through a high-speed vortex generator W described below.

  The high-speed eddy current generating portion W includes a vortex forming groove 304 formed in the ring portion 302 of the liquid passage member 3, a ring-shaped groove portion 303 communicating with the vortex flow forming groove 304, and the gas injection port 201 from the ring-shaped groove portion 303. And the inner peripheral wall of the pointed head 203 of the nozzle body 2, and these members and the region cooperate to generate the high-speed vortex gas T.

  The eddy current forming grooves 304 are formed by being spirally cut in the ring portion 302. In this embodiment, the eddy current forming grooves 304 are formed at a regular interval of six places.

  Due to the shape characteristics of the vortex forming groove 304, the gas A that has traveled (ascended in FIG. 3) in the gas passage 7 (see FIG. 3) is rectified into an averaged air flow in the high-speed vortex generator W. It is converted into a high-speed vortex gas T having a substantially conical shape (tapered) going forward (upward in FIG. 3) and ejected from the gas ejection port 201.

  Then, at the position of the focal point F shown in FIG. 1, the liquid R discharged from the liquid outlet 301 is crushed in contact with the high-speed vortex gas T to be atomized liquid Rm and sprayed forward.

  Hereinafter, with reference to FIG. 4, in the case of atomizing the liquid R using the atomizing nozzle 1 of the present embodiment, an embodiment of a method of feeding each of the liquid R and the gas A into the nozzle 1 will be described. .

  First, a necessary amount of the liquid (pure water) R to be atomized sent from the liquid supply tube 5 to the nozzle 1 is stored in the liquid tank 504. Then, the liquid (pure water) R is filtered from the tank 504 by the strainer 503, and then the amount of liquid (pure water) R is adjusted by the liquid feed adjustment valve (orifice or electromagnetic valve) 501 by the pressure of the liquid feed pump 502. To send. Reference numeral 505 denotes a return pipe that returns excess liquid (pure water) R to the liquid tank 504 again in the liquid feed adjustment process.

  On the other hand, the gas (air) A for atomizing the liquid (pure water) is sent from the air compressor 903 through the on-off valve 902 and the pressure fine adjustment valve 901 into the nozzle 1 through the gas introduction hole 202 of the nozzle 1. .

  The method of feeding each of the liquid (pure water) R and the gas (air) A to the nozzle 1 is not limited to the above embodiment, and the liquid tank 504 is pressurized with the gas introduced from the air compressor 903. Also, a tank pressurization system or the like in which liquid is sent to the nozzle 1 via a pressure regulating valve can be adopted.

FIG. 5 is a longitudinal sectional view of a liquid atomizing nozzle according to the second embodiment of the present invention.
In the first embodiment described above, the gas supply tube 15 is directly fixed to the gas inlet 202 of the nozzle 1 by welding, and the liquid supply is supplied to the attachment 4 fixed to the liquid inlet 316 of the nozzle 1 by welding. Although the supply tube 5 is connected so as to be inserted and removed, in this second embodiment, the fluororesin attachment 4A fixed to the gas introduction 202 of the nozzle 1 is used for gas supply made of fluororesin. The tube 15 is connected so that it can be inserted and removed. Reference numeral 320 indicates a welded portion.

  That is, the attachment 4A includes a gas passage 401A that is bent and penetrated at a right angle, a cylindrical front extension 403A that extends forward of the attachment base 402A, and a cylindrical side that extends to the side of the attachment base 402A. The extension portion 404A, the tube insertion sleeve 405A housed in a form that is prevented from rotating inside the side extension portion 404A, and the female screw that is screwed into the male screw 404a provided on the outer periphery of the side extension portion 404A It is composed of a nut 406A formed with 406a.

  Then, the front extension portion 403A of the attachment 4A is fitted into the gas introduction port 202, the peripheral portion of the gas introduction port 202 is welded, the fitting portion is fixed and sealed, and the gas of the attachment 4A The passage 401A communicates with the gas passage 7 of the nozzle 1. In particular, the inner peripheral surface 403a of the front extension 403A of the attachment 4A (the inner peripheral surface of the gas passage 401A) 403 and the inner peripheral surface 7a of the gas passage 7 of the nozzle 1 are configured to be flush with each other. The gas guided from the gas passage 401A to the gas passage 7 of the nozzle 1 is smoothly guided to the front gas injection port 201 without stagnation in the middle.

  Further, a tube insertion sleeve 405A is inserted and integrated with the tip of the gas supply tube 15 using a special jig, so that the inner peripheral surface of the tube 15 and the inner peripheral surface of the sleeve 405 are substantially flush with each other. Then, the sleeve 405A is inserted into the rear extension 404A of the attachment 4A and the nut 406A is tightened, so that the distal end of the gas supply tube 15 is attached to the outer peripheral surface of the tube insertion sleeve 405A as shown in FIG. In this way, the gas feeding tube 15 can be connected and integrated with the rear end portion of the attachment 4A.

  On the other hand, by loosening the nut 406A, the connection of the sleeve-fitted gas supply tube 15 can be released, and the sleeve-fitted gas supply tube 15 can be easily removed from the rear end of the attachment 4A. For this reason, the connecting portion between the attachment 4A and the gas supply tube 15 has a step portion that causes a stagnation of the gas flow, such as a step 401b between the gas passage 401A of the attachment 4A and the inner peripheral surface of the sleeve 405A. However, if necessary, the connection with the attachment 4A of the sleeve-fitted gas supply tube 15 is released, and the tube connection part of the attachment 4A where the contained substance in the gas may adhere and accumulate is washed. Good.

  Further, since the sleeve-fitted gas supply tube 15 can be easily inserted into and detached from the attachment 4A, by replacing the sleeve-fitted gas supply tube 15 with another gas supply tube extending from another gas supply source, Other gases can be used to atomize the liquid.

  Further, in the second embodiment, the welded portion 318 provided in the first embodiment is not provided, and the fixing and sealing between the nozzle body 2 and the liquid passage member 3 are performed in the nozzle body 2. And the threaded portions 206 and 308 between the liquid passage member 3 and the O-ring 317.

  Others are the same as those in the first embodiment described above, and the same reference numerals are given to omit redundant description.

  FIG. 6 is a longitudinal sectional view of a liquid atomizing nozzle according to a third embodiment of the present invention.

  In the first and second embodiments described above, the fixing means for the insertion portion between the nozzle body 2 and the liquid passage member 3 is composed of at least the screwing portions 206 and 308 and the O-ring 317. In the embodiment, the insertion portion between the nozzle body 2 and the liquid passage member 3 is fixed and sealed only by the welding portion 312.

  That is, the inner peripheral surface of the nozzle body 2 and the outer peripheral surface of the liquid passage member 3 are not provided with the female screw portion 206 and the male screw portion 308, and only the step portions 209 and 309 that are axially engaged with each other are provided. ing.

  Furthermore, in the first embodiment described above, the gas feeding tube 15 is directly fixed to the gas inlet 202 of the nozzle 1, and is used for liquid feeding to the attachment 4 fixed to the liquid inlet 316 of the nozzle 1. Although the tube 5 is connected so that it can be inserted and removed, in the third embodiment, the liquid supply tube 5 is also directly fixed to the liquid inlet 316 of the nozzle 1.

  That is, the distal end portion of the liquid supply tube 5 made of fluororesin extending from the liquid supply source is fitted into the liquid inlet 316, and the fitting portion is fixed and sealed by welding, so that the liquid supply tube 5 The inside and the liquid inlet 316 are continuous, and the air tightness of the liquid inlet 316 is secured. In particular, the inner peripheral surface 5a of the liquid supply tube 5 and the inner peripheral surface 8a of the liquid passage 8 on the nozzle 1 side are configured to be flush with each other, so that the liquid on the nozzle 1 side from the liquid supply tube 5 is configured. The liquid guided to the passage 8 is smoothly guided to the front liquid outlet 301 without stagnation on the way.

  Others are the same as those in the first embodiment described above, and the same reference numerals are given to omit redundant description.

FIG. 1 is a longitudinal sectional view of a liquid atomizing nozzle according to a first embodiment of the present invention.
FIG. 2 is an exploded perspective view showing a component configuration of the atomization nozzle.
FIG. 3 is a partial perspective view showing a configuration of an upper end portion (front end portion) of a liquid passage member that forms a high-speed vortex generator.
FIG. 4 is a simplified layout diagram showing a specific embodiment when the liquid is atomized using the nozzle.
FIG. 5 is a longitudinal sectional view of a liquid atomizing nozzle according to a second embodiment of the present invention.
FIG. 6 is a longitudinal sectional view of a liquid atomizing nozzle according to a third embodiment of the present invention.
FIG. 7 is a longitudinal sectional view of a conventional liquid atomizing nozzle.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Atomization nozzle body 2 Nozzle body 3 Liquid passage member 4 Attachment for connection of liquid supply tube 4A Attachment for connection of gas supply tube 5 Liquid supply tube 5a Inner peripheral surface of liquid supply tube 7 Gas passage 7a Inner peripheral surface of gas passage 8 Liquid passage 8a Inner peripheral surface of liquid passage 15 Gas supply tube 15a Inner peripheral surface of gas supply tube 201 Gas injection port 202 Gas introduction hole 203 Pointed head 206, 308 Nozzle body Threaded portion 301 which is a fixing means between the liquid passage members 301 Liquid ejection port 309 Liquid passage pipe 316 Liquid inlet 317 O-ring 318, 320, 410 which is a sealing means between the nozzle body and the liquid passage member W High-speed vortex Generator 403a Gas (liquid) inner peripheral surface 50 of the gas (liquid) passage tube attachment for attachment Air compressor is a liquid tank 903 the gas source is a liquid source

[0003]
The nozzle body is inserted and integrated into the nozzle body from behind, and a liquid passage is formed in the liquid passage in which the liquid jet opening facing the gas jet opening is opened forward and the liquid inlet opening is opened in the rear. A hollow synthetic resin liquid passage member,
Between the nozzle body inner region and the liquid passage member, a gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined, and the front end portion outer periphery of the liquid passage member is A swirling groove that generates a high-speed swirling vortex having a focal point in front of the liquid ejection port is formed in cooperation with the inner region of the cusp of the nozzle body, and the liquid ejected from the liquid ejection port is the gas ejection In the vortex type liquid atomization nozzle that is crushed and atomized by the high-speed swirling vortex jetted from the mouth,
The nozzle body and the liquid passage member are made of fluororesin,
The gas introduction port and the liquid introduction port are inserted and fitted with cylindrical fluid supply path constituting members made of fluororesin to the positions where the respective leading ends abut against each other, and the fitting portions are respectively welded. With a fixed and sealed structure,
The inner peripheral surface of the fluid feed path constituent member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or liquid passage on the nozzle side are configured to be flush with each other.
(Operation) The insertion portion between the nozzle body and the liquid passage member is sealed by a sealing means such as an O-ring, sheet packing, or welding, and the gas introduction port and the liquid introduction port are supplied with respective fluids. The fitting part with the path constituent member is fixed and sealed by welding, respectively, and the gas tightness of the gas inlet and the liquid inlet of the nozzle is ensured.
Since the nozzle body, the liquid passage member, and the respective fluid supply path constituent members are made of fluororesin, the entire periphery of the nozzle including the nozzle can be reduced in weight and, as in the case of a conventional metal nozzle, fine particles It does not elute metal ions into the liquid that is the target of conversion, has excellent chemical resistance and drug resistance, and is used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis, etc. Can do.
In addition, the inner peripheral surface of the fluid feed path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the nozzle-side gas passage or the liquid passage are continuous with each other, and the gas introduction The gas inlet path at the mouth and the liquid inlet path at the liquid inlet

Claims (6)

A hollow synthetic resin nozzle body in which a gas injection port is opened forward and a gas introduction port is opened laterally;
The nozzle body is inserted and integrated into the nozzle body from behind, and a liquid passage is formed in the liquid passage in which the liquid jet opening facing the gas jet opening is opened forward and the liquid inlet opening is opened in the rear. A hollow synthetic resin liquid passage member,
Between the nozzle body inner region and the liquid passage member, a gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined, and the front end portion outer periphery of the liquid passage member is A swirling groove that generates a high-speed swirling vortex having a focal point in front of the liquid ejection port is formed in cooperation with the inner region of the cusp of the nozzle body, and the liquid ejected from the liquid ejection port is the gas ejection In the vortex type liquid atomization nozzle that is crushed and atomized by the high-speed swirling vortex jetted from the mouth,
The nozzle body and the liquid passage member are made of fluororesin,
Each of the gas inlet and the liquid inlet is fitted with a cylindrical fluid supply path constituting member made of fluororesin, and the fitting portion is fixed and sealed by welding, respectively.
The inner peripheral surface of the fluid feed path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or the liquid passage on the nozzle side are continuous with each other. Vortex atomization nozzle. A fluororesin tube for feeding pressurized gas supplied from a gas supply source is directly fixed to the gas introduction port, and fluorine for feeding liquid supplied from a liquid supply source is attached to the liquid introduction port. The vortex atomization nozzle according to claim 1, wherein the resin tube is directly fixed. A fluororesin tube for feeding pressurized gas supplied from a gas supply source is directly fixed to the gas inlet, and a fluororesin liquid feed tube can be inserted into and removed from the liquid inlet. The vortex atomization nozzle according to claim 1, wherein a fluororesin attachment connected to the nozzle is fixed. A fluororesin tube for feeding a liquid supplied from a liquid supply source is directly fixed to the liquid introduction port, and a fluororesin is connected to the gas introduction port so that a gas feeding tube can be inserted and removed. The vortex atomization nozzle according to claim 1, wherein a manufactured attachment is fixed. A fluorine resin attachment is connected to the gas introduction port so that a gas supply tube made of fluororesin can be inserted and removed, and a liquid supply tube made of fluororesin is inserted into and removed from the liquid introduction port. The vortex atomizing nozzle according to claim 1, wherein a fluorine resin attachment that can be connected is fixed. An insertion hole communicating with the gas passage is provided at a rear end portion of the nozzle body, and the liquid passage member is screwed and fixed to the insertion hole via an O-ring serving as a sealing means. The atomization nozzle in any one of Claims 1-5 characterized by these.

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