JPH06296937A - Bubbling cleaner - Google Patents

Abstract

PURPOSE:To obtain an excellent cleaning effect by fractionating a gas injected from a gas. injection port with a high-speed vortex injected from a liq. injection port to forcedly mix and diffuse the gas and forming a forced circulating current freed from the superfine-particle bubble in a water tank. CONSTITUTION:A cleaning soln. suction port 13 and a cleaning soln. discharge port 14 are provided to the side wall of a water tank 10, in which various works W to be cleaned such as semiconductor parts are suspended, one end of a circulating pipe 12 having a diaphragm pump 16 is extended into a cleaning tank 15 provided with a filter 17 for filtering the cleaning soln. sucked from the suction port 13, and the other end is connected to an ejector-type vortex gas-liq. mixture injection nozzle 30 furnished to the discharge port 14. The cleaning water is injected from the annular liq. injection port of the nozzle 30 formed in a revolution state to form a high-speed vortex, the gas injected from the gas injection port is fractionated, forcedly mixed and diffused by the vortex, and a superfine-particle bubble is dispersed in the cleaning water current.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bubbling cleaning device for cleaning an object to be cleaned by applying ultrafine particles to the object to be cleaned in a water tank.

[0002]

2. Description of the Related Art Freon has been generally used for cleaning semiconductor parts, watch parts, glass parts, plastic parts and the like. However, since the use of CFCs has been abolished in view of pollution problems such as the possibility of destroying the ozone layer, new cleaning technology has become necessary.

As a cleaning device which does not use chlorofluorocarbon, there is known a so-called bubbling cleaning device in which air bubbles are blown to an object to be cleaned contained in a water tank, and cleaning is performed by utilizing the dirt entrapping action of the bubbles and the dirt bursting action of the bubbles. Has been.

[0004]

However, in this type of device, since the diameter of bubbles generated in the water tank is relatively large, there is a problem that bubbles cannot penetrate into the minute gaps and a sufficient cleaning effect cannot be expected. It was The present invention has been made in view of the above-mentioned problems of the prior art, and its object is to form a forced circulation flow in a water tank by injecting a gas into a cleaning liquid in a state of ultrafine particles, and to be dispersed in the forced circulation flow. An object of the present invention is to provide a bubbling cleaning device having an excellent cleaning effect by applying the ultrafine particles of air bubbles to an object to be cleaned.

[0005]

In a bubbling cleaning device according to a first aspect of the present invention, there is provided a water tank which is filled with cleaning water and accommodates an object to be cleaned, and a water tank which is provided in the water tank or on the wall of the water tank and which is minute in the water tank. A bubbling cleaning device comprising: a gas-liquid mixture injection nozzle that forms a forced circulation flow in which bubbles are dispersed, the gas injection port opening the injection nozzle forward, and surrounding the gas injection port. An annular swirl chamber formed at a position, and a swirl guide hole that extends spirally in the annular swirl chamber, introduces the supplied cleaning water into the swirl chamber at high speed, and forms a high-speed swirl flow in the swirl chamber. And a ring-shaped liquid jet port formed at a position surrounding the gas jet port of the swirl chamber to jet and form a tapered conical high-speed swirl flow in front of the gas jet port.

In a bubbling cleaning device according to a second aspect of the present invention, in the bubbling cleaning device according to the first aspect, the gas ejection port of the injection nozzle communicates with the atmosphere through an air pipe, and the liquid from the liquid ejection port is discharged. A negative pressure region is formed in front of the gas ejection port along with the ejection, and the negative pressure is used to suck air out forward from the gas ejection port.

[0007]

The high-speed swirling flow of the cleaning liquid formed in the swirl chamber is jetted from the annular liquid jet port to the front of the gas jet port to form a tapered conical high-speed swirl flow in front of the nozzle in the water tank. Then, the gas ejected from the gas ejection port is crushed by coming into contact with the high-speed swirl flow of the cleaning water that is ejected from the liquid ejection port and is formed around the gas, is forcibly mixed and diffused, and ultrafine particulate bubbles are present in front of the nozzle. A swirling flow of the wash water in which is dispersed is formed. Then, in the water tank, a forced circulation flow in which bubbles are dispersed is formed by the operation of the nozzle, and the ultrafine particles dispersed in the circulation flow come into contact with the object to be cleaned in the water tank to wash dirt.

In the second aspect, the liquid-air mixture injection nozzle is
When the liquid is ejected from the liquid ejection port, the negative pressure formed in front of the gas ejection port is used to suck and eject the gas. There is no need to pump gas to the outlet.

[0009]

Embodiments of the present invention will now be described with reference to the drawings. 1 to 4 show an embodiment of the present invention.
2 is an overall schematic view of the bubbling cleaning device, FIG. 2 is a plan view of the device, FIG. 3 is an enlarged front view of an ejector type vortex flow type gas-liquid mixture injection nozzle which is a main part of the device, and FIG. 4 is a vertical section of the nozzle. FIG. 5 is a sectional view taken along line IV-IV shown in FIG. 3, and FIG. 5 is a perspective view of a swirl guide hole forming portion in which swirl guide holes are formed.

In these drawings, reference numeral 10 is a water tank filled with a cleaning liquid, and an object W to be cleaned is accommodated in the water tank 10 by being suspended. Reference numeral 12 (1
2a and 12b) are cleaning water circulation pipes provided between the cleaning liquid suction port 13 and the cleaning liquid discharge port 14 provided on the side wall of the water tank 10, and one end of the pipe 12 is a purification tank 15 provided adjacent to the water tank 10. And the other end of the pipe 12 is connected to an ejector-type vortex-type gas-liquid mixture injection nozzle (hereinafter, simply referred to as a nozzle) 30 provided at the discharge port 14. A diaphragm pump 16 is provided in the middle of the circulation pipe 12.
Is provided, and the wash water in the water tank 10 is supplied to the circulation pipe 1
It circulates through 2.

In the septic tank 15, there is provided a filter 17 for filtering the wash water sucked from the suction port 13. Reference numeral 18 is an air vent pipe for discharging the air generated in the septic tank 15. In the middle of the circulation pipe 12b between the nozzle 30 and the pump 16, a wash water injection port 20 that opens into the water tank 10 is provided, and the wash water circulated by the circulation pipe 12 is discharged from both the nozzle 30 and the injection port 20. It is supplied into the water tank 10. Reference numeral 22 denotes a circulating cleaning water amount adjusting valve which is supplied to the nozzle 30.

Reference numeral 24 is an air suction pipe for supplying air to the nozzle 30, and a filter 26 is provided at an upper end opening of the air suction pipe 24. The filter 26 is used for preventing dust from entering in general cleaning, and is a semiconductor. Cleaning the parts is effective for removing bacteria such as bacteria. Reference numeral 28 is a valve for adjusting the amount of suction air supplied to the nozzle 30, and adjusts the amount of air that is negatively sucked into the gas ejection port 32, that is, the amount of air ejected from the gas ejection port 32. Reference numeral 29 is a drain for discharging the cleaning water. Reference numeral H is a heater for maintaining the cleaning water in the water tank 10 at a predetermined temperature that is optimum for cleaning.

As shown in FIGS. 3 and 5, the injection nozzle 30 has a gas ejection port 32 having a circular cross section and communicating with the air suction pipe 24, and an annular swirl chamber 34 surrounding the gas ejection port 32. , A plurality of swirl guide holes 36 spirally extending from the cylindrical circulation wash water supply chamber 35 extending in the front-rear direction to the swirl chamber 34, and an annular liquid formed on the side of the swirl chamber 34 facing the gas ejection port 32. The injection port 38 has a structure formed in the nozzle casing 31.

A pipe connecting portion 31a, which is connected to the circulation pipe 12b and communicates with the wash water supply chamber 35, is formed at a side portion of the nozzle casing 31, and an air suction pipe 24 is provided at a rear end portion of the nozzle casing 31. Is provided with an air supply chamber 33a. As shown in FIGS. 3 to 5, the swirl guide hole 36 spirally extends from the wash water supply chamber 35 to the forward swirl chamber 34.
A high-speed water stream is formed when passing through 6. In the swirl chamber 34, a swirl water flow is formed by the high-speed water flow pumped by the swirl guide hole 36, and the high-speed swirl water flow is jetted from the narrowed annular liquid jet port 38 toward the front of the gas jet port 32,
A tapered cone-shaped high-speed vortex whose focus is O is formed (see FIGS. 1, 2, and 4).

Since the core 33 having the gas ejection port 32 formed therein is housed in the nozzle casing 31, the cleaning water supply chamber 35, the swirl guide hole 36, the swirl chamber 34, and the liquid ejection port 38.
Is formed, and the annular liquid ejection port 38 opens toward a point on the axis L. Therefore, the high-speed swirling flow ejected from the liquid ejecting port 38 becomes a tapered conical high-speed swirling flow having a point O on the axis L as the focal point.

On the other hand, the gas outlet 32 is used as the air suction pipe 2.
4 is communicated with the atmosphere through 4, and a negative pressure is generated in the gas ejection port 32 when the cleaning water is ejected from the liquid ejection port 38, so that the negative pressure causes the air to be sucked and ejected from the gas ejection port 32. (See the white arrow in Fig. 4). And gas outlet 3
The air sucked and ejected from No. 2 comes into contact with a conical high-speed vortex flow jet-formed from the liquid jet port 38, is crushed, forcedly mixed and diffused, and dispersed as ultrafine-particle-like bubbles.

Reference numeral 39 is a fastening nut screwed with a male screw 39a formed on the outer periphery of the front end portion of the nozzle casing 31, and the nut 39 and the step portion 3 on the nozzle casing side.
By sandwiching the side wall of the water tank 10 with 9b, the nozzle 30 can be fixed to the side wall of the water tank 10. As described above, in the bubbling cleaning device according to the present embodiment, the air ejected by suction from the gas ejection port 32 comes into contact with the conical high-speed vortex of the cleaning water ejected from the annular liquid ejection port 38, and is crushed and forced. By mixing and diffusing, a circulating flow as shown by a white arrow in FIGS. 1 and 2 in which ultrafine particle bubbles, which cannot be obtained by the conventional apparatus, are dispersed is formed. Then, in the flow of the circulation flow, the bubbles are circulated and rise due to the buoyancy.
Contact with and clean dirt. That is, since the air bubbles dispersed in the circulating wash water are in the form of ultrafine particles, which has never been obtained in the past, the contact area between the air bubbles and the object to be cleaned is large, and it is presumed that the cleaning effect is extremely high.

Further, in the apparatus of this embodiment, since the air is sucked by the ejector system, an energy source such as a blower for supplying the air is unnecessary, which leads to a saving of energy consumption. Further, for the construction of the device of this embodiment, it is sufficient to install the compact ejector type vortex type gas-liquid mixture injection nozzle 30 shown in this embodiment at the circulating liquid discharge port of the circulation pipe in the conventional bubbling cleaning device. Construction is also very easy.

In the above-described embodiment, the air is self-supplied by the ejector system utilizing the negative pressure generated by the liquid injection. However, the blower is provided in the air suction pipe 24 to force the air to blow out the gas. You may make it supply to 32. 6 and 7 show a second embodiment of the present invention, and FIG. 6 shows a front view of an ejector type vortex flow type gas-liquid mixture injection nozzle which is a main part of a bubbling cleaning device.
Shows a vertical sectional view of the nozzle.

In the injection nozzle 30 of the first embodiment described above, a plurality of swirl guide holes 36 extending in a spiral shape and having a relatively small flow passage area extend to the swirl chamber 34, and further the swirl chamber 34.
The flow passage area of the liquid injection port 38 provided in the above was also formed to be relatively small. However, on the present implementation side, one swirl guide hole 46 having a relatively large flow passage area extends to the swirl chamber 34, and the swirl flow is further increased. The liquid ejection port 38 is formed by the flow passage 48 extending from the chamber 34 in a conical shape having a relatively large flow passage area, and has a structure in which clogging is less likely to occur due to the larger flow passage area. That is, as shown in FIGS. 6 and 7, even if the flow passage area of the liquid ejection port 38 is formed large, the atomization of bubbles to the same extent as in the first embodiment can be achieved, so that the cleaning effect is the same as that of the first embodiment. It is not inferior to the examples. Others are the same as those in the first embodiment, and the description thereof will be omitted by giving the same reference numerals.

FIG. 8 is a plan view of a bubbling cleaning device which is another embodiment of the present invention. In the above-described embodiment, the water tank 10 is provided with one nozzle 30, but in the present embodiment, two nozzles 30 are arranged side by side and one nozzle is operated at a predetermined time interval. , And a circulation flow (see symbols F ₁ and F ₂ ) in opposite directions are formed to enhance the cleaning effect.

Further, as shown in FIG. 9, many nozzles 30 are provided.
May be provided on the side wall of the water tank with different installation positions to further enhance the cleaning effect. Further, the cleaning effect may be enhanced by combining the valve ring cleaning device shown in the above-described various embodiments with a conventionally known ultrasonic cleaning technique.

[0023]

As is apparent from the above description, according to the bubbling cleaning device of the present invention, the gas ejected from the gas ejection port is crushed by the high-speed vortex flow ejected from the liquid ejection port and forcedly mixed and diffused. In the water tank, a forced circulation flow in which ultrafine particles are dispersed is formed. For this reason, the ultrafine particle bubbles capable of ensuring a large contact area with the object to be cleaned can surely remove the dirt in the minute gaps of the object to be cleaned, and a remarkable cleaning effect can be achieved.

According to the second aspect, since the nozzle has the ejector structure, there is no need for an air pressure feeding means such as a blower or a pump to the gas ejection port, which is effective in saving energy.

[Brief description of drawings]

FIG. 1 is an overall schematic diagram of a bubbling cleaning device that is an embodiment of the present invention.

FIG. 2 is a plan view of the device.

FIG. 3 is a front view of an ejector-type vortex-type gas-liquid mixture injection nozzle that is a main part of a bubbling cleaning device.

FIG. 4 is a vertical sectional view of the nozzle (a sectional view taken along line IV-IV shown in FIG. 3).

FIG. 5 is a perspective view of a turning guide hole forming portion.

FIG. 6 is a front view of an ejector type vortex flow type gas-liquid mixture injection nozzle which is a main part of another embodiment of the present invention.

FIG. 7 is a vertical sectional view of the nozzle.

FIG. 8 is a plan view of a bubbling cleaning device which is still another embodiment of the present invention.

FIG. 9 is a plan view of a bubbling cleaning device which is still another embodiment of the present invention.

[Explanation of symbols]

 10 Water Tank 12 (12a, 12b) Wash Water Circulation Pipe 13 Wash Water Suction Port 14 Wash Water Discharge Port 16 Pump 24 Air Suction Pipe 30 Ejector-type Vortex-type Mixture Injection Nozzle 31 Nozzle Casing 32 Gas Jet 33 Core 34 Vortex Chamber 36,46 Swirl guide hole 38 Liquid jet port

Claims (2)

[Claims] 1. A water tank filled with cleaning water and containing an object to be cleaned, and a gas-liquid mixture provided in the water tank or on the wall of the water tank to form a forced circulation flow in which micro bubbles are dispersed in the water tank. A bubbling cleaning device comprising: an injection nozzle, wherein the injection nozzle has a gas ejection port that opens forward, an annular vortex chamber formed at a position surrounding the gas ejection port, and the annular ring. A swirl extending into the swirl chamber, the supplied cleaning water is introduced into the swirl chamber at high speed, and a swirl guide hole that forms a high-speed swirl flow in the swirl chamber, and is formed at a position surrounding the gas ejection port of the swirl chamber, A bubbling cleaning device comprising: an annular liquid ejection port for ejecting and forming a tapered conical high-speed vortex in front of a gas ejection port. 2. The gas ejection port of the ejection nozzle is communicated with the atmosphere through an air pipe, and the gas ejection port is formed by a negative pressure formed in front of the gas ejection port as the liquid is ejected from the liquid ejection port. The bubbling cleaning device according to claim 1, wherein air is sucked and ejected forward from the device.