JPS64958A - Optical processing device - Google Patents
Optical processing deviceInfo
- Publication number
- JPS64958A JPS64958A JP15547987A JP15547987A JPS64958A JP S64958 A JPS64958 A JP S64958A JP 15547987 A JP15547987 A JP 15547987A JP 15547987 A JP15547987 A JP 15547987A JP S64958 A JPS64958 A JP S64958A
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processed
- supplying
- fluid
- plural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To uniformize processing over the entire surface of a material to be processed and to improve processing efficiency by providing a fluid supplying part opened with plural supplying ports for supplying processing fluid to the material to be processed in a processing chamber.
CONSTITUTION: A lamp chamber 17 where a light emitting source 20 of prescribed light is positioned, the processing chamber 18 where the material 10 to be processed is positioned, and the fluid supplying part 25 opened with the plural supplying ports 27 for supplying the processing fluid 13 in the form of showers to the material 10 to be processed in the processing 18 are provided. The processing fluid 13 is, therefore, supplied in the form of the showers through the plural supplying ports 27 to the surface of the material 10 to be processed. The processing is thereby uniformized over the entire surface of the material 10 to be processed and the processing efficiency in the optical processing is improved.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15547987A JPS64958A (en) | 1987-06-24 | 1987-06-24 | Optical processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15547987A JPS64958A (en) | 1987-06-24 | 1987-06-24 | Optical processing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01958A JPH01958A (en) | 1989-01-05 |
JPS64958A true JPS64958A (en) | 1989-01-05 |
Family
ID=15606949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15547987A Pending JPS64958A (en) | 1987-06-24 | 1987-06-24 | Optical processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64958A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016115813A (en) * | 2014-12-15 | 2016-06-23 | 東京エレクトロン株式会社 | Light irradiation device |
KR20180112075A (en) * | 2016-03-28 | 2018-10-11 | 엑손모빌 케미칼 패턴츠 인코포레이티드 | Method for transalkylation of aromatic fluids |
-
1987
- 1987-06-24 JP JP15547987A patent/JPS64958A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016115813A (en) * | 2014-12-15 | 2016-06-23 | 東京エレクトロン株式会社 | Light irradiation device |
KR20180112075A (en) * | 2016-03-28 | 2018-10-11 | 엑손모빌 케미칼 패턴츠 인코포레이티드 | Method for transalkylation of aromatic fluids |
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