JPS64958A - Optical processing device - Google Patents

Optical processing device

Info

Publication number
JPS64958A
JPS64958A JP15547987A JP15547987A JPS64958A JP S64958 A JPS64958 A JP S64958A JP 15547987 A JP15547987 A JP 15547987A JP 15547987 A JP15547987 A JP 15547987A JP S64958 A JPS64958 A JP S64958A
Authority
JP
Japan
Prior art keywords
processing
processed
supplying
fluid
plural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15547987A
Other languages
Japanese (ja)
Other versions
JPH01958A (en
Inventor
Tomoko Sato
Takayoshi Oosakaya
Kuniaki Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP15547987A priority Critical patent/JPS64958A/en
Publication of JPH01958A publication Critical patent/JPH01958A/en
Publication of JPS64958A publication Critical patent/JPS64958A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To uniformize processing over the entire surface of a material to be processed and to improve processing efficiency by providing a fluid supplying part opened with plural supplying ports for supplying processing fluid to the material to be processed in a processing chamber.
CONSTITUTION: A lamp chamber 17 where a light emitting source 20 of prescribed light is positioned, the processing chamber 18 where the material 10 to be processed is positioned, and the fluid supplying part 25 opened with the plural supplying ports 27 for supplying the processing fluid 13 in the form of showers to the material 10 to be processed in the processing 18 are provided. The processing fluid 13 is, therefore, supplied in the form of the showers through the plural supplying ports 27 to the surface of the material 10 to be processed. The processing is thereby uniformized over the entire surface of the material 10 to be processed and the processing efficiency in the optical processing is improved.
COPYRIGHT: (C)1989,JPO&Japio
JP15547987A 1987-06-24 1987-06-24 Optical processing device Pending JPS64958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15547987A JPS64958A (en) 1987-06-24 1987-06-24 Optical processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15547987A JPS64958A (en) 1987-06-24 1987-06-24 Optical processing device

Publications (2)

Publication Number Publication Date
JPH01958A JPH01958A (en) 1989-01-05
JPS64958A true JPS64958A (en) 1989-01-05

Family

ID=15606949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15547987A Pending JPS64958A (en) 1987-06-24 1987-06-24 Optical processing device

Country Status (1)

Country Link
JP (1) JPS64958A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115813A (en) * 2014-12-15 2016-06-23 東京エレクトロン株式会社 Light irradiation device
KR20180112075A (en) * 2016-03-28 2018-10-11 엑손모빌 케미칼 패턴츠 인코포레이티드 Method for transalkylation of aromatic fluids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115813A (en) * 2014-12-15 2016-06-23 東京エレクトロン株式会社 Light irradiation device
KR20180112075A (en) * 2016-03-28 2018-10-11 엑손모빌 케미칼 패턴츠 인코포레이티드 Method for transalkylation of aromatic fluids

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