JPS649419U - - Google Patents
Info
- Publication number
- JPS649419U JPS649419U JP10173287U JP10173287U JPS649419U JP S649419 U JPS649419 U JP S649419U JP 10173287 U JP10173287 U JP 10173287U JP 10173287 U JP10173287 U JP 10173287U JP S649419 U JPS649419 U JP S649419U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- control unit
- motor
- abnormality
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000005856 abnormality Effects 0.000 claims 2
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Protection Of Static Devices (AREA)
- Stopping Of Electric Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173287U JPS649419U (enExample) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173287U JPS649419U (enExample) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS649419U true JPS649419U (enExample) | 1989-01-19 |
Family
ID=31330996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10173287U Pending JPS649419U (enExample) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS649419U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230711A (ja) * | 1989-03-03 | 1990-09-13 | Canon Inc | 露光装置の監視方法 |
| JPH02270317A (ja) * | 1989-04-12 | 1990-11-05 | Canon Inc | 半導体露光装置 |
-
1987
- 1987-07-03 JP JP10173287U patent/JPS649419U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230711A (ja) * | 1989-03-03 | 1990-09-13 | Canon Inc | 露光装置の監視方法 |
| JPH02270317A (ja) * | 1989-04-12 | 1990-11-05 | Canon Inc | 半導体露光装置 |