JPS649419U - - Google Patents
Info
- Publication number
- JPS649419U JPS649419U JP10173287U JP10173287U JPS649419U JP S649419 U JPS649419 U JP S649419U JP 10173287 U JP10173287 U JP 10173287U JP 10173287 U JP10173287 U JP 10173287U JP S649419 U JPS649419 U JP S649419U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- control unit
- motor
- abnormality
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000005856 abnormality Effects 0.000 claims 2
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本案の一実施例の説明図、第２図は本
案の一実施例のモータ制御回路用＋５Ｖ電源電圧
の変化によるモータ回転用＋１５Ｖ電源電圧の変
化のタイミングチヤートである。
１……レテイクル自動交換ユニツトフレーム、
２……レテイクルマガジン、３……フオーク、４
……フオーク前後モータ、６……ガイド、５……
フオーク上下モータ、７……モータ回転用＋１５
Ｖ電源、８……モータ制御回路用＋５Ｖ電源、９
……＋５Ｖ監視回路、１０……モータ駆動回路、
１１……モータ制御回路。
FIG. 1 is an explanatory diagram of one embodiment of the present invention, and FIG. 2 is a timing chart of changes in the +15V power supply voltage for motor rotation due to changes in the +5V power supply voltage for the motor control circuit in one embodiment of the present invention. 1... Reticle automatic exchange unit frame,
2... Reticle Magazine, 3... Folk, 4
...Fork front and rear motor, 6...Guide, 5...
Fork vertical motor, 7...+15 for motor rotation
V power supply, 8... +5V power supply for motor control circuit, 9
... +5V monitoring circuit, 10 ... motor drive circuit,
11...Motor control circuit.
Claims (1)
御する制御部より成る縮小投影露光装置において
、制御部電源の異常を監視する回路を設け制御部
電源が異常の場合、監視回路により異常を検出し
、駆動電源を切断することを特徴とする縮小投影
露光装置。 In a reduction projection exposure apparatus consisting of a drive unit such as a motor and a control unit that controls the drive unit such as a motor, a circuit is provided to monitor the abnormality of the control unit power supply, and if the control unit power supply is abnormal, the abnormality is detected by the monitoring circuit. , a reduction projection exposure apparatus characterized in that a driving power supply is cut off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173287U JPS649419U (en) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10173287U JPS649419U (en) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS649419U true JPS649419U (en) | 1989-01-19 |
Family
ID=31330996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10173287U Pending JPS649419U (en) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS649419U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230711A (en) * | 1989-03-03 | 1990-09-13 | Canon Inc | Semiconductor exposing apparatus |
| JPH02270317A (en) * | 1989-04-12 | 1990-11-05 | Canon Inc | Semiconductor exposing device |
-
1987
- 1987-07-03 JP JP10173287U patent/JPS649419U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230711A (en) * | 1989-03-03 | 1990-09-13 | Canon Inc | Semiconductor exposing apparatus |
| JPH02270317A (en) * | 1989-04-12 | 1990-11-05 | Canon Inc | Semiconductor exposing device |
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