JPS649419U - - Google Patents

Info

Publication number
JPS649419U
JPS649419U JP10173287U JP10173287U JPS649419U JP S649419 U JPS649419 U JP S649419U JP 10173287 U JP10173287 U JP 10173287U JP 10173287 U JP10173287 U JP 10173287U JP S649419 U JPS649419 U JP S649419U
Authority
JP
Japan
Prior art keywords
power supply
control unit
motor
abnormality
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10173287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10173287U priority Critical patent/JPS649419U/ja
Publication of JPS649419U publication Critical patent/JPS649419U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Protection Of Static Devices (AREA)
  • Stopping Of Electric Motors (AREA)
JP10173287U 1987-07-03 1987-07-03 Pending JPS649419U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10173287U JPS649419U (enrdf_load_stackoverflow) 1987-07-03 1987-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10173287U JPS649419U (enrdf_load_stackoverflow) 1987-07-03 1987-07-03

Publications (1)

Publication Number Publication Date
JPS649419U true JPS649419U (enrdf_load_stackoverflow) 1989-01-19

Family

ID=31330996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10173287U Pending JPS649419U (enrdf_load_stackoverflow) 1987-07-03 1987-07-03

Country Status (1)

Country Link
JP (1) JPS649419U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02230711A (ja) * 1989-03-03 1990-09-13 Canon Inc 露光装置の監視方法
JPH02270317A (ja) * 1989-04-12 1990-11-05 Canon Inc 半導体露光装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02230711A (ja) * 1989-03-03 1990-09-13 Canon Inc 露光装置の監視方法
JPH02270317A (ja) * 1989-04-12 1990-11-05 Canon Inc 半導体露光装置

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