JPS6489533A - Wafer supporting device - Google Patents
Wafer supporting deviceInfo
- Publication number
- JPS6489533A JPS6489533A JP62247266A JP24726687A JPS6489533A JP S6489533 A JPS6489533 A JP S6489533A JP 62247266 A JP62247266 A JP 62247266A JP 24726687 A JP24726687 A JP 24726687A JP S6489533 A JPS6489533 A JP S6489533A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- base plate
- supporting device
- linking
- roof plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To improve service life by forming a roof plate and a base plate while linking and fixing more than two disc-shaped members with linking and fixing members, respectively. CONSTITUTION:A wafer supporting device is so formed that a roof plate 11 and a base plate 12 consisting of two disc-shaped members, respectively are linked and fixed with linking and fixing members. Such wafer supporting device 10 holds a wafer 4 by lowering the base plate 12 and lifting the roof plate 11, and inserting an end of the wafer 4 into a groove 6 formed at a predetermined position in a supporting member 2, and then places the wafer in a thermal treatment furnace for a thermal treatment. According to the constitution, the strengths of the roof plate 11 and base plate 12 are increased while the resistance against deflection, distortion, and deformation, etc., being further increased, whereby the service life of a port 10 can be improved and manufacturing costs can be reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62247266A JPS6489533A (en) | 1987-09-30 | 1987-09-30 | Wafer supporting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62247266A JPS6489533A (en) | 1987-09-30 | 1987-09-30 | Wafer supporting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489533A true JPS6489533A (en) | 1989-04-04 |
Family
ID=17160917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62247266A Pending JPS6489533A (en) | 1987-09-30 | 1987-09-30 | Wafer supporting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489533A (en) |
-
1987
- 1987-09-30 JP JP62247266A patent/JPS6489533A/en active Pending
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