JPS6489533A - Wafer supporting device - Google Patents

Wafer supporting device

Info

Publication number
JPS6489533A
JPS6489533A JP62247266A JP24726687A JPS6489533A JP S6489533 A JPS6489533 A JP S6489533A JP 62247266 A JP62247266 A JP 62247266A JP 24726687 A JP24726687 A JP 24726687A JP S6489533 A JPS6489533 A JP S6489533A
Authority
JP
Japan
Prior art keywords
wafer
base plate
supporting device
linking
roof plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62247266A
Other languages
Japanese (ja)
Inventor
Akira Jogo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP62247266A priority Critical patent/JPS6489533A/en
Publication of JPS6489533A publication Critical patent/JPS6489533A/en
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To improve service life by forming a roof plate and a base plate while linking and fixing more than two disc-shaped members with linking and fixing members, respectively. CONSTITUTION:A wafer supporting device is so formed that a roof plate 11 and a base plate 12 consisting of two disc-shaped members, respectively are linked and fixed with linking and fixing members. Such wafer supporting device 10 holds a wafer 4 by lowering the base plate 12 and lifting the roof plate 11, and inserting an end of the wafer 4 into a groove 6 formed at a predetermined position in a supporting member 2, and then places the wafer in a thermal treatment furnace for a thermal treatment. According to the constitution, the strengths of the roof plate 11 and base plate 12 are increased while the resistance against deflection, distortion, and deformation, etc., being further increased, whereby the service life of a port 10 can be improved and manufacturing costs can be reduced.
JP62247266A 1987-09-30 1987-09-30 Wafer supporting device Pending JPS6489533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62247266A JPS6489533A (en) 1987-09-30 1987-09-30 Wafer supporting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247266A JPS6489533A (en) 1987-09-30 1987-09-30 Wafer supporting device

Publications (1)

Publication Number Publication Date
JPS6489533A true JPS6489533A (en) 1989-04-04

Family

ID=17160917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247266A Pending JPS6489533A (en) 1987-09-30 1987-09-30 Wafer supporting device

Country Status (1)

Country Link
JP (1) JPS6489533A (en)

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