JPS56140639A - Inspecting device for semiconductor substrate - Google Patents

Inspecting device for semiconductor substrate

Info

Publication number
JPS56140639A
JPS56140639A JP4432580A JP4432580A JPS56140639A JP S56140639 A JPS56140639 A JP S56140639A JP 4432580 A JP4432580 A JP 4432580A JP 4432580 A JP4432580 A JP 4432580A JP S56140639 A JPS56140639 A JP S56140639A
Authority
JP
Japan
Prior art keywords
concave parts
plates
specified position
shaped concave
inspection table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4432580A
Other languages
Japanese (ja)
Inventor
Yukihisa Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4432580A priority Critical patent/JPS56140639A/en
Publication of JPS56140639A publication Critical patent/JPS56140639A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To readily establish an inspection table at a specified position by arranging two sheets of movable flat plates so that V-shaped concave parts provided on both plates face to each other. CONSTITUTION:The flat plate 1 and 1' are arranged at different levels so that the V-shaped concave parts 1a and 1'a face to each other and a cylindrical member 2 is located between the concave parts 1a and 1'a. When the flat plates 1 and 1' are moved in the direction of arrows A and B by a power means, the cylindrical member 2 can be positioned at a specified position without fail. The member 2 is fixed to a lower part 3' of a part 3a which is fitted for XY table and the like for the inspection table. In this constitution, the inspection table can be readily established at a specified position by the one-dimension movement of two falt plates having the V-shaped concave parts.
JP4432580A 1980-04-04 1980-04-04 Inspecting device for semiconductor substrate Pending JPS56140639A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4432580A JPS56140639A (en) 1980-04-04 1980-04-04 Inspecting device for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4432580A JPS56140639A (en) 1980-04-04 1980-04-04 Inspecting device for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS56140639A true JPS56140639A (en) 1981-11-04

Family

ID=12688338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4432580A Pending JPS56140639A (en) 1980-04-04 1980-04-04 Inspecting device for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS56140639A (en)

Similar Documents

Publication Publication Date Title
ATE35619T1 (en) ALIGNMENT DEVICE, ALIGNMENT AND ADJUSTMENT OF ARTIFICIAL LEGS.
JPS6428829A (en) Lead frame conveyer for automatic wire bonder and method of replacing the same
JPS55135251A (en) Chain driving device
BE839150A (en) CENTERING DEVICE FOR SHEETS OF GLASS ON THE PLATE OF A MACHINE
ES2049845T3 (en) DEVICE FOR TAKING FLAT LEAVES WITH DEFLECTION WITH TURBULENT AIR FLOW.
JPS56140639A (en) Inspecting device for semiconductor substrate
ES2037225T3 (en) GAS CURRENT DISTRIBUTION AND DIFFUSION APPARATUS.
DE3586173D1 (en) DAYLIGHT CONTROL DEVICE.
JPS56164938A (en) Jig for testing fatigue of brittle material
JPS5369069A (en) Warpage measuring device of base plates
JPS546186A (en) Wire-cut processing method and apparatus
JPS5727231A (en) Micro-moving device
JPS57176732A (en) Positioning mechanism for integrated circuit
SU756741A1 (en) DEVICE FOR ELECTRO-EROSION PERFORATION OF PRODUCTS
JPS5337890A (en) Distributor
DE59902628D1 (en) Device for computer-controlled shaping of sheet metal
JPS56138678A (en) Heat exchanging device
JPS6440183A (en) Electrode device for resistance welding machine
JPS5322477A (en) Measuring jig
JPS6449973A (en) Optical current transformer
JPS57115843A (en) Testing device for wafer
JPS5733238A (en) Clamping structure of frp spring plates
JPS5714488A (en) Ultrasonic depositing method
JPS5343296A (en) Device for grinding upper and lower surfaces of a throw away chip
JPS5630237A (en) Positioning attachment of cap for annular fluorescent lamp