JPS648911B2 - - Google Patents

Info

Publication number

JPS648911B2

JPS648911B2 JP631183A JP631183A JPS648911B2 JP S648911 B2 JPS648911 B2 JP S648911B2 JP 631183 A JP631183 A JP 631183A JP 631183 A JP631183 A JP 631183A JP S648911 B2 JPS648911 B2 JP S648911B2

Authority

JP

Japan

Prior art keywords

heating element

planar heating

hollow

layer

heat

Prior art date

1983-01-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000010438 heat treatment Methods 0.000 claims description 60
• 239000010410 layer Substances 0.000 claims description 53
• 239000000758 substrate Substances 0.000 claims description 21
• 239000011810 insulating material Substances 0.000 claims description 14
• 239000002184 metal Substances 0.000 claims description 13
• 229910052751 metal Inorganic materials 0.000 claims description 13
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
• 229910052845 zircon Inorganic materials 0.000 claims description 9
• GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims description 9
• 239000011247 coating layer Substances 0.000 claims description 5
• 239000012777 electrically insulating material Substances 0.000 claims description 5
• LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 4
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 4
• 238000007751 thermal spraying Methods 0.000 claims description 3
• 229910052878 cordierite Inorganic materials 0.000 claims description 2
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 claims description 2
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 2
• 239000010419 fine particle Substances 0.000 claims description 2
• 229910052839 forsterite Inorganic materials 0.000 claims description 2
• 239000002241 glass-ceramic Substances 0.000 claims description 2
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 claims description 2
• 239000000395 magnesium oxide Substances 0.000 claims description 2
• 229910052863 mullite Inorganic materials 0.000 claims description 2
• -1 steatite Chemical compound 0.000 claims description 2
• 229910052582 BN Inorganic materials 0.000 claims 1
• PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
• 238000000034 method Methods 0.000 description 10
• 238000010292 electrical insulation Methods 0.000 description 8
• 239000002245 particle Substances 0.000 description 7
• 238000009413 insulation Methods 0.000 description 5
• 238000007750 plasma spraying Methods 0.000 description 5
• 239000011521 glass Substances 0.000 description 4
• 239000000203 mixture Substances 0.000 description 3
• 229910052573 porcelain Inorganic materials 0.000 description 3
• 229910052796 boron Inorganic materials 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000000843 powder Substances 0.000 description 2
• 239000011347 resin Substances 0.000 description 2
• 229920005989 resin Polymers 0.000 description 2
• 230000000630 rising effect Effects 0.000 description 2
• 230000035939 shock Effects 0.000 description 2
• 239000010935 stainless steel Substances 0.000 description 2
• 229910001220 stainless steel Inorganic materials 0.000 description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
• 229910002061 Ni-Cr-Al alloy Inorganic materials 0.000 description 1
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
• QGQFOJGMPGJJGG-UHFFFAOYSA-K [B+3].[O-]N=O.[O-]N=O.[O-]N=O Chemical compound [B+3].[O-]N=O.[O-]N=O.[O-]N=O QGQFOJGMPGJJGG-UHFFFAOYSA-K 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 230000000996 additive effect Effects 0.000 description 1
• 229910045601 alloy Inorganic materials 0.000 description 1
• 239000000956 alloy Substances 0.000 description 1
• 238000013459 approach Methods 0.000 description 1
• 239000010953 base metal Substances 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 238000010411 cooking Methods 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000012772 electrical insulation material Substances 0.000 description 1
• 239000003779 heat-resistant material Substances 0.000 description 1
• 239000011796 hollow space material Substances 0.000 description 1
• 238000007731 hot pressing Methods 0.000 description 1
• 230000000873 masking effect Effects 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 229910001120 nichrome Inorganic materials 0.000 description 1
• 238000005488 sandblasting Methods 0.000 description 1
• 238000005507 spraying Methods 0.000 description 1
• 230000003746 surface roughness Effects 0.000 description 1
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1