JPS6488344A - Instrument for measuring nitrogen oxide - Google Patents
Instrument for measuring nitrogen oxideInfo
- Publication number
- JPS6488344A JPS6488344A JP24858987A JP24858987A JPS6488344A JP S6488344 A JPS6488344 A JP S6488344A JP 24858987 A JP24858987 A JP 24858987A JP 24858987 A JP24858987 A JP 24858987A JP S6488344 A JPS6488344 A JP S6488344A
- Authority
- JP
- Japan
- Prior art keywords
- gaseous sample
- converter
- gas
- flow passage
- supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To exactly determine the NO, NO2 and NOX in a gaseous sample in the state of maintaining the supply of the gaseous sample to an NO2-NO converter by providing the NO2-NO converter as well as a chemiluminescent NO detecting part, bypass flow passage and stop valve, etc. CONSTITUTION:The measurement is executed when the stop valve 7 is held shut and is held open. The NO is first supplied while said valve is held shut. This gaseous sample is then introduced into the NO2-NO converter 3 where the NO2 is converted to the NO and the concn. of the NO in the conversion gas is detected 4. The value of the detection signal in this case is the value corresponding to the total value of the NO and the NO2. The pressure of the supply gas is constant and, therefore, the NO2-NO-contg. gas is introduced into the converter 3 when the gaseous sample is similarly supplied in the state of opening the valve 7. The gaseous sample is further added to the gas in a gas flow passage 5 in a bypass flow passage 6 and is supplied to a detector 4. The NO, NO2 and NOX in the gaseous sample are thus exactly determined while the supply of the gaseous sample to the converter 3 is maintained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24858987A JP2600198B2 (en) | 1987-09-30 | 1987-09-30 | Nitrogen oxide measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24858987A JP2600198B2 (en) | 1987-09-30 | 1987-09-30 | Nitrogen oxide measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6488344A true JPS6488344A (en) | 1989-04-03 |
| JP2600198B2 JP2600198B2 (en) | 1997-04-16 |
Family
ID=17180369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24858987A Expired - Lifetime JP2600198B2 (en) | 1987-09-30 | 1987-09-30 | Nitrogen oxide measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2600198B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001047009A3 (en) * | 1999-12-21 | 2002-01-31 | Lam Res Corp | Method and apparatus for detecting the endpoint of a photoresist stripping process |
| CN114018848A (en) * | 2021-11-16 | 2022-02-08 | 无锡时和安全设备有限公司 | Visual nitrogen oxide conversion system |
-
1987
- 1987-09-30 JP JP24858987A patent/JP2600198B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001047009A3 (en) * | 1999-12-21 | 2002-01-31 | Lam Res Corp | Method and apparatus for detecting the endpoint of a photoresist stripping process |
| US6451158B1 (en) | 1999-12-21 | 2002-09-17 | Lam Research Corporation | Apparatus for detecting the endpoint of a photoresist stripping process |
| US7077971B2 (en) | 1999-12-21 | 2006-07-18 | Lam Research Corporation | Methods for detecting the endpoint of a photoresist stripping process |
| CN114018848A (en) * | 2021-11-16 | 2022-02-08 | 无锡时和安全设备有限公司 | Visual nitrogen oxide conversion system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2600198B2 (en) | 1997-04-16 |
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