JPS648664A - Solid-state image sensing device and manufacture thereof - Google Patents
Solid-state image sensing device and manufacture thereofInfo
- Publication number
- JPS648664A JPS648664A JP62163782A JP16378287A JPS648664A JP S648664 A JPS648664 A JP S648664A JP 62163782 A JP62163782 A JP 62163782A JP 16378287 A JP16378287 A JP 16378287A JP S648664 A JPS648664 A JP S648664A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrodes
- insulating
- etching
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
PURPOSE:To ensure sufficient breakdown strength characteristic and to obtain stable low smear characteristics by removing by etching a second insulating layer at a slope so that a photosensitive pixel is recessed, and protecting, in this case, a first insulating layer by using an etching stopper layer formed between the first and second insulating layers to eliminate erosion. CONSTITUTION:A silicon nitride film (Si3N4) 15 having high optical transparency through insulating films 12, 13, 14 on a first transfer electrode 8, a second transfer electrode 9 and an N<+> type impurity region 4, and the film 15 performs as an etching stopper when the insulating film above the region 4 is removed by etching. An optical shielding film 11 is formed on an oxide film 10 above the first and second electrodes 8, 9, also formed at the sides of the electrodes 8, 9, and the ends are arrived at the film 15. The film 15 is formed between the electrodes 8, 9 and the film 11. Thus, an incident oblique light to a section except a photoelectric conversion region can be largely reduced, and smear phenomenon due to the oblique incident light can be accordingly decreased.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62163782A JPS648664A (en) | 1987-06-30 | 1987-06-30 | Solid-state image sensing device and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62163782A JPS648664A (en) | 1987-06-30 | 1987-06-30 | Solid-state image sensing device and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648664A true JPS648664A (en) | 1989-01-12 |
Family
ID=15780610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62163782A Pending JPS648664A (en) | 1987-06-30 | 1987-06-30 | Solid-state image sensing device and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648664A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0456273A (en) * | 1990-06-25 | 1992-02-24 | Matsushita Electron Corp | Solid-state image pickup device |
JPH04225566A (en) * | 1990-12-27 | 1992-08-14 | Matsushita Electron Corp | Solid state image sensor |
US5351081A (en) * | 1990-11-16 | 1994-09-27 | Sony Corporation | Solid-state imaging device having a light barrier layer |
JPH0745808A (en) * | 1993-07-30 | 1995-02-14 | Nec Corp | Solid-state image pickup device |
JPH07122721A (en) * | 1993-10-21 | 1995-05-12 | Nec Corp | Solid-state image pickup element and its manufacture |
-
1987
- 1987-06-30 JP JP62163782A patent/JPS648664A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0456273A (en) * | 1990-06-25 | 1992-02-24 | Matsushita Electron Corp | Solid-state image pickup device |
US5351081A (en) * | 1990-11-16 | 1994-09-27 | Sony Corporation | Solid-state imaging device having a light barrier layer |
KR100223503B1 (en) * | 1990-11-16 | 1999-10-15 | 이데이 노부유끼 | Solid-state image sensing device |
JPH04225566A (en) * | 1990-12-27 | 1992-08-14 | Matsushita Electron Corp | Solid state image sensor |
JPH0745808A (en) * | 1993-07-30 | 1995-02-14 | Nec Corp | Solid-state image pickup device |
JPH07122721A (en) * | 1993-10-21 | 1995-05-12 | Nec Corp | Solid-state image pickup element and its manufacture |
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