JPS6486516A - Heating furnace - Google Patents

Heating furnace

Info

Publication number
JPS6486516A
JPS6486516A JP24249887A JP24249887A JPS6486516A JP S6486516 A JPS6486516 A JP S6486516A JP 24249887 A JP24249887 A JP 24249887A JP 24249887 A JP24249887 A JP 24249887A JP S6486516 A JPS6486516 A JP S6486516A
Authority
JP
Japan
Prior art keywords
phase
heater
currents
secondary side
phase transformer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24249887A
Other languages
Japanese (ja)
Other versions
JPH0738379B2 (en
Inventor
Toshiaki Obayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP24249887A priority Critical patent/JPH0738379B2/en
Publication of JPS6486516A publication Critical patent/JPS6486516A/en
Publication of JPH0738379B2 publication Critical patent/JPH0738379B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To reduce currents that flow through a cable connecting an intermediate terminal for a heater and a three-phase transformer, and to use the cable having a small sectional area by shifting the phase of currents that flow in a center zone or end zones on both sides of the heater by 180 deg.. CONSTITUTION:First and second intermediate terminals 3, 4 are connect ed respectively at one ends of first and third secondary side windings 13, 15 for a three phase transformer 7, and connected to a second secondary side winding 14 for the three-phase transformer 7 while phase is shifted from conventional devices-for example, phase is shifted at 180 deg. in polarity. Both ends 5, 6 of a heater 2 are connected at the other ends of the first and third secondary side windings 13, 15. Accordingly, the first and second intermediate terminals 3, 4 are connected to the second secondary side winding 14 for the three-phase transformer 7 while polarity is reversed from conventional devices, the phase of currents IB flowed through a center zone B in the heater 2 is shifted at 180 deg.-that is, the phase is inverted, thus reducing the magnitude of currents 11, 12 flowed through cables 11, 12 connecting the first and second intermediate terminals 3, 4 and the three-phase transformer 7 as shown in vector diagrams.
JP24249887A 1987-09-29 1987-09-29 heating furnace Expired - Lifetime JPH0738379B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24249887A JPH0738379B2 (en) 1987-09-29 1987-09-29 heating furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24249887A JPH0738379B2 (en) 1987-09-29 1987-09-29 heating furnace

Publications (2)

Publication Number Publication Date
JPS6486516A true JPS6486516A (en) 1989-03-31
JPH0738379B2 JPH0738379B2 (en) 1995-04-26

Family

ID=17089984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24249887A Expired - Lifetime JPH0738379B2 (en) 1987-09-29 1987-09-29 heating furnace

Country Status (1)

Country Link
JP (1) JPH0738379B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098427A1 (en) * 2009-02-27 2010-09-02 株式会社アルバック Vacuum heating device, vacuum heat treatment method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098427A1 (en) * 2009-02-27 2010-09-02 株式会社アルバック Vacuum heating device, vacuum heat treatment method
JP5202723B2 (en) * 2009-02-27 2013-06-05 株式会社アルバック Vacuum heating device, vacuum heat treatment method
US8693854B2 (en) 2009-02-27 2014-04-08 Ulvac, Inc. Vacuum heating device and vacuum heat treatment method

Also Published As

Publication number Publication date
JPH0738379B2 (en) 1995-04-26

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