JPS6486439A - Lamp for ultraviolet illuminant - Google Patents

Lamp for ultraviolet illuminant

Info

Publication number
JPS6486439A
JPS6486439A JP24480587A JP24480587A JPS6486439A JP S6486439 A JPS6486439 A JP S6486439A JP 24480587 A JP24480587 A JP 24480587A JP 24480587 A JP24480587 A JP 24480587A JP S6486439 A JPS6486439 A JP S6486439A
Authority
JP
Japan
Prior art keywords
lamp
power
constitution
secured
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24480587A
Other languages
Japanese (ja)
Inventor
Takashi Inushima
Shigenori Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP24480587A priority Critical patent/JPS6486439A/en
Publication of JPS6486439A publication Critical patent/JPS6486439A/en
Pending legal-status Critical Current

Links

Landscapes

  • Discharge Lamp (AREA)

Abstract

PURPOSE:To aim at improvement in shortwave long light, especially ultraviolet light intensity in and around 190nm by using a ceramic electric conductor for a power making electrode installed in a luminous bulb. CONSTITUTION:Mercury and proper pressure buffer gas are sealed in a tube body inner part 2, and power is impressed on a ultraviolet luminous lamp 1, installing respective electrodes 3 of LaB6 at both ends, from a power source 7 through a lead wire 4. At this time, in order to prevent discharge from going to instability due to a load resistance component or the like of the lamp 1, a matcher 6 is installed next to the power source 7, thereby adopting impedance matching with load. With this constitution, such shortwave long ultraviolet light that has not secured ample intensity in the past can be secured, so that it is made widely usable in industrial fields, especially a semiconductor manufacturing field.
JP24480587A 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant Pending JPS6486439A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24480587A JPS6486439A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24480587A JPS6486439A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Publications (1)

Publication Number Publication Date
JPS6486439A true JPS6486439A (en) 1989-03-31

Family

ID=17124204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24480587A Pending JPS6486439A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Country Status (1)

Country Link
JP (1) JPS6486439A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009055123A1 (en) 2009-12-22 2011-06-30 Osram Gesellschaft mit beschränkter Haftung, 81543 Ceramic electrode for a high-pressure discharge lamp

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009055123A1 (en) 2009-12-22 2011-06-30 Osram Gesellschaft mit beschränkter Haftung, 81543 Ceramic electrode for a high-pressure discharge lamp
WO2011085839A2 (en) 2009-12-22 2011-07-21 Osram Gesellschaft mit beschränkter Haftung Ceramic electrode for a high-pressure discharge lamp
US8581493B2 (en) 2009-12-22 2013-11-12 Osram Ag Ceramic electrode for a high-pressure discharge lamp

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