JPS6484792A - Manufacture of ceramic multilayer substrate - Google Patents

Abstract

PURPOSE:To effectively bake a ceramic multilayer substrate and to bake it under optimum conditions by a method wherein a partial pressure of steam in an atmosphere is controlled by means ot concentration of a specific gas component in exhaust fumes during a process to remove a binder. CONSTITUTION:A specimen 9 is baked in an electric furnace 3, and this process is constituted by three steps. During a first step, an organic binding agent is decomposed thermally and removed. During a second step, residual carbon is removed; during a third step, a sintering operation and a cooling operation are executed. The first step is executed within a range between a and b; a temperature is raised at a speed of 2-6 deg.C/min; an atmosphere is composed of dry nitrogen. The second step is executed within a range between b and c by using steam; this step is held for an X hour until concentration of CO, CO2 and CnHn is exhaust fumes reaches 5ppm or less. X is to be set at a value of 0-5 for a methacrylate-based organic compound. An atmosphere is composed of wet nitrogen; a partial pressure of steam is controlled by means of concentration of CO, CO2 and CnHn. The third step is executed within a range between c and f in Figure 2. Because a softening point of glass used is 810 deg.C, a sintering operation is executed at 900 deg.C for one hour.