JPS6482611A - Crystal growth method - Google Patents

Crystal growth method

Info

Publication number
JPS6482611A
JPS6482611A JP24171987A JP24171987A JPS6482611A JP S6482611 A JPS6482611 A JP S6482611A JP 24171987 A JP24171987 A JP 24171987A JP 24171987 A JP24171987 A JP 24171987A JP S6482611 A JPS6482611 A JP S6482611A
Authority
JP
Japan
Prior art keywords
oxide film
substrate
thermal oxide
layer
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24171987A
Other languages
English (en)
Other versions
JPH0779086B2 (ja
Inventor
Junji Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP24171987A priority Critical patent/JPH0779086B2/ja
Publication of JPS6482611A publication Critical patent/JPS6482611A/ja
Publication of JPH0779086B2 publication Critical patent/JPH0779086B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP24171987A 1987-09-25 1987-09-25 結晶成長方法 Expired - Fee Related JPH0779086B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24171987A JPH0779086B2 (ja) 1987-09-25 1987-09-25 結晶成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24171987A JPH0779086B2 (ja) 1987-09-25 1987-09-25 結晶成長方法

Publications (2)

Publication Number Publication Date
JPS6482611A true JPS6482611A (en) 1989-03-28
JPH0779086B2 JPH0779086B2 (ja) 1995-08-23

Family

ID=17078518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24171987A Expired - Fee Related JPH0779086B2 (ja) 1987-09-25 1987-09-25 結晶成長方法

Country Status (1)

Country Link
JP (1) JPH0779086B2 (ja)

Also Published As

Publication number Publication date
JPH0779086B2 (ja) 1995-08-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees