JPS6482519A - Vapor growth device - Google Patents
Vapor growth deviceInfo
- Publication number
- JPS6482519A JPS6482519A JP23883087A JP23883087A JPS6482519A JP S6482519 A JPS6482519 A JP S6482519A JP 23883087 A JP23883087 A JP 23883087A JP 23883087 A JP23883087 A JP 23883087A JP S6482519 A JPS6482519 A JP S6482519A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- rotor
- gas
- purge gas
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To turn a susceptor rotor smoothly at all times by blowing off a purge gas into a clearance between a susceptor body and a rotary sliding section for the susceptor rotor. CONSTITUTION:A purge gas fed from a purge-gas introducing pipe 17 is discharged to bearing sections 16 for each susceptor rotor 3 through a purge gas introducing groove 14, a path for a shaft 2 and a distributing path 19 for a susceptor 1. Consequently, a clearance between the susceptor 1 and the susceptor rotor 3 is filled with the purge gas, and the purge gas is discharged onto the surface of the susceptor 1, and discharged from a discharge gas port 12 together with a reaction gas. Accordingly, the reaction gas is not flowed into the susceptor 1, and the rotation and revolution of a crystal substrate 4 are conducted smoothly at all times, thus growing a uniform crystal film on the crystal substrate.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23883087A JPS6482519A (en) | 1987-09-25 | 1987-09-25 | Vapor growth device |
US07/181,091 US5002011A (en) | 1987-04-14 | 1988-04-13 | Vapor deposition apparatus |
GB8808825A GB2206608B (en) | 1987-04-14 | 1988-04-14 | Vapor deposition apparatus |
US07/639,182 US5151133A (en) | 1987-04-14 | 1991-01-09 | Vapor deposition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23883087A JPS6482519A (en) | 1987-09-25 | 1987-09-25 | Vapor growth device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6482519A true JPS6482519A (en) | 1989-03-28 |
Family
ID=17035908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23883087A Pending JPS6482519A (en) | 1987-04-14 | 1987-09-25 | Vapor growth device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6482519A (en) |
-
1987
- 1987-09-25 JP JP23883087A patent/JPS6482519A/en active Pending
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