JPS6478696A - Laser beam machine - Google Patents

Laser beam machine

Info

Publication number
JPS6478696A
JPS6478696A JP62238569A JP23856987A JPS6478696A JP S6478696 A JPS6478696 A JP S6478696A JP 62238569 A JP62238569 A JP 62238569A JP 23856987 A JP23856987 A JP 23856987A JP S6478696 A JPS6478696 A JP S6478696A
Authority
JP
Japan
Prior art keywords
optical axis
luminous flux
objective lens
glass plate
laser luminous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62238569A
Other languages
Japanese (ja)
Inventor
Sunao Murata
Kinya Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62238569A priority Critical patent/JPS6478696A/en
Publication of JPS6478696A publication Critical patent/JPS6478696A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To improve laser beam machining accuracy by providing an optical shifting means to shift a main beam of a laser luminous flux in the vertical direction so that it passes an optical axis of an objective lens corresponding to movement of the objective lens. CONSTITUTION:When the optical axis LX2 of the objective lens 3 is deviated by the dislocation quantity DIF in the axial direction to the optical axis LX1 of the laser luminous flux LB1, a system control part turns a parallel glass plate 21X for correcting the X position of an optical shifting part 21 in the arrow e1 direction. At this time, the laser luminous flux LB1 made incident on the parallel glass plate 21X is refracted at the time of passing the parallel glass plate 21X and the laser luminous flux LB1 emitted from the parallel glass plate 21X is shifted in the vertical direction up to the position where its optical axis is coincident with the optical axis LX2 of the objective lens 3. By this method, the main beam of the machining laser luminous flux is always projected on the work surface vertically and the machining accuracy can be improved.
JP62238569A 1987-09-21 1987-09-21 Laser beam machine Pending JPS6478696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62238569A JPS6478696A (en) 1987-09-21 1987-09-21 Laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238569A JPS6478696A (en) 1987-09-21 1987-09-21 Laser beam machine

Publications (1)

Publication Number Publication Date
JPS6478696A true JPS6478696A (en) 1989-03-24

Family

ID=17032171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62238569A Pending JPS6478696A (en) 1987-09-21 1987-09-21 Laser beam machine

Country Status (1)

Country Link
JP (1) JPS6478696A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011282A (en) * 1989-11-16 1991-04-30 Amada Company, Limited Laser beam path alignment apparatus for laser processing machines

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011282A (en) * 1989-11-16 1991-04-30 Amada Company, Limited Laser beam path alignment apparatus for laser processing machines

Similar Documents

Publication Publication Date Title
EP0154279A3 (en) Laser beam scanning device and marking system
JPS57192929A (en) Projector provided with automatic focusing function
JPS57179954A (en) Optical type disc player
US3840739A (en) Apparatus and method for tracking a raised edge without shadow interference
JPS6478696A (en) Laser beam machine
JPS6473721A (en) Charged particle beam exposure device
JPS6448238A (en) Optical system driving device
ATE136400T1 (en) BEAM CLARIFIER WITH HIGH PRECISION
JPS6421728A (en) Optical head
JPS574393A (en) Optical axis adjusting device of laser beam for laser welding machine
JPS5284748A (en) Device for finely adjusting position at which laser light is focused
JPS5767815A (en) Measuring method for position of reflector using light
JPS57159285A (en) Laser working device
SU972293A1 (en) Optical electronic device for automatic lens centering
JPS51131338A (en) Photobeam scanning device
JPS57210308A (en) Focus detecting device
JPS5759326A (en) Method for detection of image-forming position and device thereof
SU1552004A1 (en) Optical sensor of object displacements
JPS57192808A (en) Centering device
JPS52123642A (en) Optical path adjuster for laser beams
JPS6468611A (en) Displacement measuring instrument
JPS6044805A (en) Welding line tracking sensor
JPS5720972A (en) Positioning device for extremely close interval of information retrieval device
JPS5786862A (en) Copying machine
JPS57106806A (en) Device for positioning