JPS647810B2 - - Google Patents

Info

Publication number
JPS647810B2
JPS647810B2 JP56042347A JP4234781A JPS647810B2 JP S647810 B2 JPS647810 B2 JP S647810B2 JP 56042347 A JP56042347 A JP 56042347A JP 4234781 A JP4234781 A JP 4234781A JP S647810 B2 JPS647810 B2 JP S647810B2
Authority
JP
Japan
Prior art keywords
adsorption tower
regeneration
gas
heated
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56042347A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57159521A (en
Inventor
Ikuo Shimokawabe
Tetsuro Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56042347A priority Critical patent/JPS57159521A/ja
Publication of JPS57159521A publication Critical patent/JPS57159521A/ja
Publication of JPS647810B2 publication Critical patent/JPS647810B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP56042347A 1981-03-25 1981-03-25 Apparatus for supplying hot regenerated gas to adsorbing tower Granted JPS57159521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56042347A JPS57159521A (en) 1981-03-25 1981-03-25 Apparatus for supplying hot regenerated gas to adsorbing tower

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56042347A JPS57159521A (en) 1981-03-25 1981-03-25 Apparatus for supplying hot regenerated gas to adsorbing tower

Publications (2)

Publication Number Publication Date
JPS57159521A JPS57159521A (en) 1982-10-01
JPS647810B2 true JPS647810B2 (enExample) 1989-02-10

Family

ID=12633488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56042347A Granted JPS57159521A (en) 1981-03-25 1981-03-25 Apparatus for supplying hot regenerated gas to adsorbing tower

Country Status (1)

Country Link
JP (1) JPS57159521A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4359107A4 (en) * 2021-06-23 2025-11-26 Entegris Inc GAS TREATMENT SYSTEMS AND METHODS
TW202513139A (zh) * 2022-03-11 2025-04-01 美商恩特葛瑞斯股份有限公司 氣體處理系統及方法

Also Published As

Publication number Publication date
JPS57159521A (en) 1982-10-01

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