JPS647752U - - Google Patents
Info
- Publication number
- JPS647752U JPS647752U JP10304787U JP10304787U JPS647752U JP S647752 U JPS647752 U JP S647752U JP 10304787 U JP10304787 U JP 10304787U JP 10304787 U JP10304787 U JP 10304787U JP S647752 U JPS647752 U JP S647752U
- Authority
- JP
- Japan
- Prior art keywords
- contact
- holder
- injection chamber
- chamber
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000002513 implantation Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304787U JPS647752U (enExample) | 1987-07-04 | 1987-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304787U JPS647752U (enExample) | 1987-07-04 | 1987-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS647752U true JPS647752U (enExample) | 1989-01-17 |
Family
ID=31333510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10304787U Pending JPS647752U (enExample) | 1987-07-04 | 1987-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS647752U (enExample) |
-
1987
- 1987-07-04 JP JP10304787U patent/JPS647752U/ja active Pending
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