JPS642354U - - Google Patents
Info
- Publication number
- JPS642354U JPS642354U JP9753687U JP9753687U JPS642354U JP S642354 U JPS642354 U JP S642354U JP 9753687 U JP9753687 U JP 9753687U JP 9753687 U JP9753687 U JP 9753687U JP S642354 U JPS642354 U JP S642354U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- shaft
- sample
- vacuum vessel
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9753687U JPS642354U (enExample) | 1987-06-25 | 1987-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9753687U JPS642354U (enExample) | 1987-06-25 | 1987-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642354U true JPS642354U (enExample) | 1989-01-09 |
Family
ID=30964575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9753687U Pending JPS642354U (enExample) | 1987-06-25 | 1987-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642354U (enExample) |
-
1987
- 1987-06-25 JP JP9753687U patent/JPS642354U/ja active Pending