JPS6476781A - Two-dimensional light position detecting element - Google Patents

Two-dimensional light position detecting element

Info

Publication number
JPS6476781A
JPS6476781A JP23342087A JP23342087A JPS6476781A JP S6476781 A JPS6476781 A JP S6476781A JP 23342087 A JP23342087 A JP 23342087A JP 23342087 A JP23342087 A JP 23342087A JP S6476781 A JPS6476781 A JP S6476781A
Authority
JP
Japan
Prior art keywords
sections
surface layer
divided
type
collecting electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23342087A
Other languages
Japanese (ja)
Other versions
JPH07118551B2 (en
Inventor
Akihiko Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP23342087A priority Critical patent/JPH07118551B2/en
Publication of JPS6476781A publication Critical patent/JPS6476781A/en
Publication of JPH07118551B2 publication Critical patent/JPH07118551B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Light Receiving Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)

Abstract

PURPOSE:To obtain a two-dimensional light position detecting element capable of detecting an incident position of a light spot with high accuracy even if the incident position is near a collecting electrode, by dividing surface layers including collecting electrodes provided at the opposite ends thereof into a plurality of linear sections, and connecting each set of divided collecting electrodes by a current measurement means. CONSTITUTION:A P-type first surface layer on the top face of a single-crystal silicon is divided into three sections 21, 22 and 23 while a second N-type surface layer on the rear face is also divided into three sections 31, 32 and 33, and an I-type photovoltaic layer 1 is interposed between them, so that a P-I-N photovoltaic element is constituted therebetween. The P-type surface layer sections 21-23 as well as the N-type surface layer sections 31-33 have a width (b) of 1.00mm and are arrayed in parallel with a space (c) of 0.05mm. Collecting electrodes 41, 51, 42, 52, 43, 53 are provided at the opposite ends of the surface layer sections 21-23, while collecting electrodes 61, 71, 62, 72, 63, 73 are provided at the opposite ends of the second surface layer sections 31-33. These electrodes are divided into four sets which are connected to ampere meters 91-94 through connections 81-84, respectively. According to such construction of the element in which the P- and N-type surface layers are divided into three sections, an error which would occur in detecting a position on a diagonal line passing the origin O can be decreased to 1/3 with respect to prior arts.
JP23342087A 1987-09-17 1987-09-17 Two-dimensional optical position detector Expired - Fee Related JPH07118551B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23342087A JPH07118551B2 (en) 1987-09-17 1987-09-17 Two-dimensional optical position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23342087A JPH07118551B2 (en) 1987-09-17 1987-09-17 Two-dimensional optical position detector

Publications (2)

Publication Number Publication Date
JPS6476781A true JPS6476781A (en) 1989-03-22
JPH07118551B2 JPH07118551B2 (en) 1995-12-18

Family

ID=16954777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23342087A Expired - Fee Related JPH07118551B2 (en) 1987-09-17 1987-09-17 Two-dimensional optical position detector

Country Status (1)

Country Link
JP (1) JPH07118551B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019058844A1 (en) * 2017-09-20 2019-03-28 浜松ホトニクス株式会社 Position detection sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956778A (en) * 1982-09-27 1984-04-02 Toshiba Corp Position detector for semiconductor device
JPS6319884A (en) * 1986-07-14 1988-01-27 Nissan Motor Co Ltd Light position detecting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956778A (en) * 1982-09-27 1984-04-02 Toshiba Corp Position detector for semiconductor device
JPS6319884A (en) * 1986-07-14 1988-01-27 Nissan Motor Co Ltd Light position detecting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019058844A1 (en) * 2017-09-20 2019-03-28 浜松ホトニクス株式会社 Position detection sensor
JP2019057564A (en) * 2017-09-20 2019-04-11 浜松ホトニクス株式会社 Position detection sensor
US10819932B2 (en) 2017-09-20 2020-10-27 Hamamatsu Photonics K.K. Position detector sensor

Also Published As

Publication number Publication date
JPH07118551B2 (en) 1995-12-18

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