JPS6476781A - Two-dimensional light position detecting element - Google Patents
Two-dimensional light position detecting elementInfo
- Publication number
- JPS6476781A JPS6476781A JP23342087A JP23342087A JPS6476781A JP S6476781 A JPS6476781 A JP S6476781A JP 23342087 A JP23342087 A JP 23342087A JP 23342087 A JP23342087 A JP 23342087A JP S6476781 A JPS6476781 A JP S6476781A
- Authority
- JP
- Japan
- Prior art keywords
- sections
- surface layer
- divided
- type
- collecting electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Light Receiving Elements (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Abstract
PURPOSE:To obtain a two-dimensional light position detecting element capable of detecting an incident position of a light spot with high accuracy even if the incident position is near a collecting electrode, by dividing surface layers including collecting electrodes provided at the opposite ends thereof into a plurality of linear sections, and connecting each set of divided collecting electrodes by a current measurement means. CONSTITUTION:A P-type first surface layer on the top face of a single-crystal silicon is divided into three sections 21, 22 and 23 while a second N-type surface layer on the rear face is also divided into three sections 31, 32 and 33, and an I-type photovoltaic layer 1 is interposed between them, so that a P-I-N photovoltaic element is constituted therebetween. The P-type surface layer sections 21-23 as well as the N-type surface layer sections 31-33 have a width (b) of 1.00mm and are arrayed in parallel with a space (c) of 0.05mm. Collecting electrodes 41, 51, 42, 52, 43, 53 are provided at the opposite ends of the surface layer sections 21-23, while collecting electrodes 61, 71, 62, 72, 63, 73 are provided at the opposite ends of the second surface layer sections 31-33. These electrodes are divided into four sets which are connected to ampere meters 91-94 through connections 81-84, respectively. According to such construction of the element in which the P- and N-type surface layers are divided into three sections, an error which would occur in detecting a position on a diagonal line passing the origin O can be decreased to 1/3 with respect to prior arts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23342087A JPH07118551B2 (en) | 1987-09-17 | 1987-09-17 | Two-dimensional optical position detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23342087A JPH07118551B2 (en) | 1987-09-17 | 1987-09-17 | Two-dimensional optical position detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6476781A true JPS6476781A (en) | 1989-03-22 |
JPH07118551B2 JPH07118551B2 (en) | 1995-12-18 |
Family
ID=16954777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23342087A Expired - Fee Related JPH07118551B2 (en) | 1987-09-17 | 1987-09-17 | Two-dimensional optical position detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07118551B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019058844A1 (en) * | 2017-09-20 | 2019-03-28 | 浜松ホトニクス株式会社 | Position detection sensor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956778A (en) * | 1982-09-27 | 1984-04-02 | Toshiba Corp | Position detector for semiconductor device |
JPS6319884A (en) * | 1986-07-14 | 1988-01-27 | Nissan Motor Co Ltd | Light position detecting device |
-
1987
- 1987-09-17 JP JP23342087A patent/JPH07118551B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956778A (en) * | 1982-09-27 | 1984-04-02 | Toshiba Corp | Position detector for semiconductor device |
JPS6319884A (en) * | 1986-07-14 | 1988-01-27 | Nissan Motor Co Ltd | Light position detecting device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019058844A1 (en) * | 2017-09-20 | 2019-03-28 | 浜松ホトニクス株式会社 | Position detection sensor |
JP2019057564A (en) * | 2017-09-20 | 2019-04-11 | 浜松ホトニクス株式会社 | Position detection sensor |
US10819932B2 (en) | 2017-09-20 | 2020-10-27 | Hamamatsu Photonics K.K. | Position detector sensor |
Also Published As
Publication number | Publication date |
---|---|
JPH07118551B2 (en) | 1995-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |