JPS6476724A - High pressure jet cleaning apparatus - Google Patents
High pressure jet cleaning apparatusInfo
- Publication number
- JPS6476724A JPS6476724A JP23202987A JP23202987A JPS6476724A JP S6476724 A JPS6476724 A JP S6476724A JP 23202987 A JP23202987 A JP 23202987A JP 23202987 A JP23202987 A JP 23202987A JP S6476724 A JPS6476724 A JP S6476724A
- Authority
- JP
- Japan
- Prior art keywords
- article
- high pressure
- nozzle
- relative speeds
- pressure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain a high pressure jet cleaning apparatus which can obtain uniform cleaning effect by equalizing high pressure water amount per unit angle for receiving an article to be cleaned and secured on a rotary cleaning table and relative speeds at its rotary center and its periphery. CONSTITUTION:The minimum condition for cleaning the whole face of an article 1 to be cleaned needs at least one revolution of the article 1 while a nozzle 4 moves at the spot diameter (d) of high pressure water. However, since the distances from the rotating center O are different at the points of r1 and r2, the quantities of the high pressure waters per unit angle are different. Therefore, the scanning velocity of the nozzle 4 is decelerated from the rotating center of the article 1 toward the outer periphery. However, if the rotating speed of the article 1 is constant, the angular velocity directly under the nozzle 4 becomes v1= r1omega, v2 =r2omega, and the relative speeds of the high pressure water and the article 1 are varied. Then, the rotating speed of the article 1 is accelerated or decelerated according to the position of the nozzle 4. Thus, since the angular velocities become the same, the relative speeds become the same at any surfaces of the article 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23202987A JPS6476724A (en) | 1987-09-18 | 1987-09-18 | High pressure jet cleaning apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23202987A JPS6476724A (en) | 1987-09-18 | 1987-09-18 | High pressure jet cleaning apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6476724A true JPS6476724A (en) | 1989-03-22 |
Family
ID=16932851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23202987A Pending JPS6476724A (en) | 1987-09-18 | 1987-09-18 | High pressure jet cleaning apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6476724A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0322428A (en) * | 1989-06-19 | 1991-01-30 | Nec Kyushu Ltd | Manufacturing apparatus for semiconductor device |
JP2014154776A (en) * | 2013-02-12 | 2014-08-25 | Toshiba Corp | Substrate processing apparatus |
US9511394B2 (en) | 2011-09-09 | 2016-12-06 | Olympus Corporation | Cleaning apparatus |
JP2017216416A (en) * | 2016-06-02 | 2017-12-07 | 株式会社ディスコ | Washing device |
-
1987
- 1987-09-18 JP JP23202987A patent/JPS6476724A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0322428A (en) * | 1989-06-19 | 1991-01-30 | Nec Kyushu Ltd | Manufacturing apparatus for semiconductor device |
US9511394B2 (en) | 2011-09-09 | 2016-12-06 | Olympus Corporation | Cleaning apparatus |
JP2014154776A (en) * | 2013-02-12 | 2014-08-25 | Toshiba Corp | Substrate processing apparatus |
JP2017216416A (en) * | 2016-06-02 | 2017-12-07 | 株式会社ディスコ | Washing device |
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