JPS6476657A - Cylinder driving mechanism for vacuum valve - Google Patents

Cylinder driving mechanism for vacuum valve

Info

Publication number
JPS6476657A
JPS6476657A JP23301887A JP23301887A JPS6476657A JP S6476657 A JPS6476657 A JP S6476657A JP 23301887 A JP23301887 A JP 23301887A JP 23301887 A JP23301887 A JP 23301887A JP S6476657 A JPS6476657 A JP S6476657A
Authority
JP
Japan
Prior art keywords
cylinder
vacuum
driving
sensors
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23301887A
Other languages
Japanese (ja)
Inventor
Toshinori Shinooka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP23301887A priority Critical patent/JPS6476657A/en
Publication of JPS6476657A publication Critical patent/JPS6476657A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To perform the automatic control of a vacuum device by automating the operation of a vacuum valve with a linear cylinder linearly driving a spline shaft, a rotary cylinder rotatively driving it, and position sensors. CONSTITUTION:A linear cylinder 30 linearly driving a drive shaft 10 penetrating a vacuum column is arranged on the same axis as the drive shaft 10 via a spline shaft 20. A rotary cylinder 35 rotatively driving the drive shaft 10 is driven by gears 21, 22 engaged at 1:1. Sensors 26, 27, 37, 37' detect the operation quantities in response to the horizontal shift quantity of an eccentric cam arranged in a vacuum partition wall and the cam rotation quantity. The operation signals of these sensors are sent to a cylinder drive control device via a connector 39. The linear shift and rotary drive of the eccentric cam are performed automatically and stably via a cylinder driving mechanism with such a simple structure to allow the automatic control of a vacuum device.
JP23301887A 1987-09-17 1987-09-17 Cylinder driving mechanism for vacuum valve Pending JPS6476657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23301887A JPS6476657A (en) 1987-09-17 1987-09-17 Cylinder driving mechanism for vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23301887A JPS6476657A (en) 1987-09-17 1987-09-17 Cylinder driving mechanism for vacuum valve

Publications (1)

Publication Number Publication Date
JPS6476657A true JPS6476657A (en) 1989-03-22

Family

ID=16948521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23301887A Pending JPS6476657A (en) 1987-09-17 1987-09-17 Cylinder driving mechanism for vacuum valve

Country Status (1)

Country Link
JP (1) JPS6476657A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05201429A (en) * 1991-05-03 1993-08-10 New Jersey Mach Inc Label affixing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05201429A (en) * 1991-05-03 1993-08-10 New Jersey Mach Inc Label affixing device

Similar Documents

Publication Publication Date Title
JPS54150857A (en) Full automatic washing machine
TW226342B (en) Liquid injection device
US4050324A (en) Transmission gear mechanism
JPS6458630A (en) Method of driving double bellows distributing unit and drive assembly
JPS6476657A (en) Cylinder driving mechanism for vacuum valve
JPS6477781A (en) Improved plate valve for internal gear device
JPS57163732A (en) Control apparatus of automatic speed change gear
JPS545165A (en) Friction-type stepless change gear
JPS57116140A (en) Controlling apparatus for amount of sucked air for engine
JPS648109A (en) Delivering device for article
JPS54151258A (en) Shift apparatus
JPS57151516A (en) Reciprocating conveyer
ES262059U (en) Gas-adjusting device
JPS6445928A (en) Fuel injection amount control device for engine
JPS5675675A (en) Automatic opening and closing original pressure-fixing device
JPS53140462A (en) Speed adjusting device
JPS5719118A (en) Crude material supplying equipment for rotary type thread rolling machine
JPS5592596A (en) Shifter
SU984807A1 (en) Apparatus for coolecting parts to magazines
JPS6487948A (en) Remote control device for transmission
JPS645629A (en) Detection device for transfer amount of rocking transfer type roll feeder
JPS57210225A (en) Cooker
JPS55132449A (en) Power transmission device for tractor
JPS57114059A (en) Controller for lock-up clutch in torque converter for automatic speed change device
JPS5440427A (en) Sector shaft turning mechanism for steerimg gear system