JPS6476022A - Optical deflection controller - Google Patents

Optical deflection controller

Info

Publication number
JPS6476022A
JPS6476022A JP62232280A JP23228087A JPS6476022A JP S6476022 A JPS6476022 A JP S6476022A JP 62232280 A JP62232280 A JP 62232280A JP 23228087 A JP23228087 A JP 23228087A JP S6476022 A JPS6476022 A JP S6476022A
Authority
JP
Japan
Prior art keywords
laser light
vibration
center
fluctuation
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62232280A
Other languages
Japanese (ja)
Inventor
Tatsuhiko Touki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62232280A priority Critical patent/JPS6476022A/en
Publication of JPS6476022A publication Critical patent/JPS6476022A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To reduce the fluctuation of the vibration center in an optical deflection scanning element by executing a correction control against the fluctuation of the amplitude center of a laser and a vibrated laser light beam caused by unstableness, a mechanical fluctuation and an optical fluctuation of an electric circuit. CONSTITUTION:In order to monitor a laser light 10 which is reduced by a slit 29 and is vibrated by a galvanomirror 1, it is allowed to branch by a half mirror 13, and by detecting the vibration center of its laser light 10, the vibration center of the galvanomirror 1 is controlled. That is, the laser light 10 which is allowed to branch is enlarged by a lens 14 and an oscillatory wave of the laser light is converted to an electric signal by a detector 15, an amplitude center value is derived by a vibration amplitude center position detecting circuit 16, and a potentiometer for controlling the mirror vibration center of a galvanomirror driving circuit by using this vibration center value is controlled by a control circuit 17. In such a way, the vibration center can be stabilized when the laser light 10 which is brought to vibration amplitude by the galvanometer is emitted to an optical sample surface 12.
JP62232280A 1987-09-18 1987-09-18 Optical deflection controller Pending JPS6476022A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62232280A JPS6476022A (en) 1987-09-18 1987-09-18 Optical deflection controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62232280A JPS6476022A (en) 1987-09-18 1987-09-18 Optical deflection controller

Publications (1)

Publication Number Publication Date
JPS6476022A true JPS6476022A (en) 1989-03-22

Family

ID=16936754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62232280A Pending JPS6476022A (en) 1987-09-18 1987-09-18 Optical deflection controller

Country Status (1)

Country Link
JP (1) JPS6476022A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139015A (en) * 1983-01-31 1984-08-09 Nec Corp Galvanomirror scanning system
JPS62188334A (en) * 1986-02-14 1987-08-17 Hitachi Ltd Inspection apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139015A (en) * 1983-01-31 1984-08-09 Nec Corp Galvanomirror scanning system
JPS62188334A (en) * 1986-02-14 1987-08-17 Hitachi Ltd Inspection apparatus

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