JPS6474428A - Pressure measuring instrument - Google Patents

Pressure measuring instrument

Info

Publication number
JPS6474428A
JPS6474428A JP23099087A JP23099087A JPS6474428A JP S6474428 A JPS6474428 A JP S6474428A JP 23099087 A JP23099087 A JP 23099087A JP 23099087 A JP23099087 A JP 23099087A JP S6474428 A JPS6474428 A JP S6474428A
Authority
JP
Japan
Prior art keywords
temperature
pressure
pressure measuring
circuit
compensates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23099087A
Other languages
English (en)
Inventor
Munenori Iwami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP23099087A priority Critical patent/JPS6474428A/ja
Publication of JPS6474428A publication Critical patent/JPS6474428A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP23099087A 1987-09-17 1987-09-17 Pressure measuring instrument Pending JPS6474428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23099087A JPS6474428A (en) 1987-09-17 1987-09-17 Pressure measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23099087A JPS6474428A (en) 1987-09-17 1987-09-17 Pressure measuring instrument

Publications (1)

Publication Number Publication Date
JPS6474428A true JPS6474428A (en) 1989-03-20

Family

ID=16916506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23099087A Pending JPS6474428A (en) 1987-09-17 1987-09-17 Pressure measuring instrument

Country Status (1)

Country Link
JP (1) JPS6474428A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102478444A (zh) * 2010-11-26 2012-05-30 益科博能源科技（上海）有限公司 真空管路真空度检测方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4519918Y1 (ja) * 1966-02-11 1970-08-11
JPS5580030A (en) * 1978-12-14 1980-06-16 Mitsubishi Keikinzoku Kogyo Kk Pirani gauge
JPS55120141A (en) * 1979-03-08 1980-09-16 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of measuring pressure in pressure reducing vapor phase growing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4519918Y1 (ja) * 1966-02-11 1970-08-11
JPS5580030A (en) * 1978-12-14 1980-06-16 Mitsubishi Keikinzoku Kogyo Kk Pirani gauge
JPS55120141A (en) * 1979-03-08 1980-09-16 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of measuring pressure in pressure reducing vapor phase growing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102478444A (zh) * 2010-11-26 2012-05-30 益科博能源科技（上海）有限公司 真空管路真空度检测方法

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