JPS647263U - - Google Patents

Info

Publication number
JPS647263U
JPS647263U JP9917187U JP9917187U JPS647263U JP S647263 U JPS647263 U JP S647263U JP 9917187 U JP9917187 U JP 9917187U JP 9917187 U JP9917187 U JP 9917187U JP S647263 U JPS647263 U JP S647263U
Authority
JP
Japan
Prior art keywords
holder
vertical cvd
quartz
support rod
bring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9917187U
Other languages
English (en)
Other versions
JPH057240Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987099171U priority Critical patent/JPH057240Y2/ja
Publication of JPS647263U publication Critical patent/JPS647263U/ja
Application granted granted Critical
Publication of JPH057240Y2 publication Critical patent/JPH057240Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案石英ホルダを用いた縦形ＣＶＤ
装置の一例を示す簡略斜視図、第２図は本考案石
英ホルダの一実施例と反応管、ボートの位置関係
を示す横断面図、第３図は従来の石英ホルダの一
例と反応管、ボートの位置関係を示す横断面図で
ある。 １……反応管、２……石英ホルダ、３……支持
棒、４……切り欠き。

Claims (1)

    【実用新案登録請求の範囲】
  1. 縦形ＣＶＤ装置に用いられる石英ホルダにおい
    て、このホルダを支持する石英ボートの支持棒の
    位置をホルダの中心部に寄せるために必要な切り
    欠きを設けてなる縦形ＣＶＤ膜用石英ホルダ。
JP1987099171U 1987-06-26 1987-06-26 Expired - Lifetime JPH057240Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (ja) 1987-06-26 1987-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (ja) 1987-06-26 1987-06-26

Publications (2)

Publication Number Publication Date
JPS647263U true JPS647263U (ja) 1989-01-17
JPH057240Y2 JPH057240Y2 (ja) 1993-02-24

Family

ID=31326079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987099171U Expired - Lifetime JPH057240Y2 (ja) 1987-06-26 1987-06-26

Country Status (1)

Country Link
JP (1) JPH057240Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107843A (ja) * 1983-11-16 1985-06-13 Tekunisuko:Kk 組立式支持具
JPS61247048A (ja) * 1985-04-24 1986-11-04 Nec Corp 縦型拡散炉用ボ−ト
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマｃｖｄ装置の放電電極

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107843A (ja) * 1983-11-16 1985-06-13 Tekunisuko:Kk 組立式支持具
JPS61247048A (ja) * 1985-04-24 1986-11-04 Nec Corp 縦型拡散炉用ボ−ト
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマｃｖｄ装置の放電電極

Also Published As

Publication number Publication date
JPH057240Y2 (ja) 1993-02-24

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