JPS6472578A - Stabilization of laser wavelength and wavelength stabilized laser - Google Patents

Stabilization of laser wavelength and wavelength stabilized laser

Info

Publication number
JPS6472578A
JPS6472578A JP22921787A JP22921787A JPS6472578A JP S6472578 A JPS6472578 A JP S6472578A JP 22921787 A JP22921787 A JP 22921787A JP 22921787 A JP22921787 A JP 22921787A JP S6472578 A JPS6472578 A JP S6472578A
Authority
JP
Japan
Prior art keywords
wavelength
laser
oscillator
laser beam
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22921787A
Other languages
English (en)
Inventor
Hitoshi Wakata
Takeo Haruta
Haruhiko Nagai
Hajime Nakatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22921787A priority Critical patent/JPS6472578A/ja
Publication of JPS6472578A publication Critical patent/JPS6472578A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency
JP22921787A 1987-09-11 1987-09-11 Stabilization of laser wavelength and wavelength stabilized laser Pending JPS6472578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22921787A JPS6472578A (en) 1987-09-11 1987-09-11 Stabilization of laser wavelength and wavelength stabilized laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22921787A JPS6472578A (en) 1987-09-11 1987-09-11 Stabilization of laser wavelength and wavelength stabilized laser

Publications (1)

Publication Number Publication Date
JPS6472578A true JPS6472578A (en) 1989-03-17

Family

ID=16888660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22921787A Pending JPS6472578A (en) 1987-09-11 1987-09-11 Stabilization of laser wavelength and wavelength stabilized laser

Country Status (1)

Country Link
JP (1) JPS6472578A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214186A (ja) * 1987-12-28 1989-08-28 Lambda Physik Forschungs & Entwickl Gmbh レーザー・ビームの周波数を安定させる方法と装置
JPH0312975A (ja) * 1989-06-12 1991-01-21 Nikon Corp レーザ発振装置及びレーザ発振装置を用いた露光装置、露光方法
WO2011070898A1 (ja) 2009-12-11 2011-06-16 国立大学法人九州大学 炭化珪素の研磨液及びその研磨方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214186A (ja) * 1987-12-28 1989-08-28 Lambda Physik Forschungs & Entwickl Gmbh レーザー・ビームの周波数を安定させる方法と装置
JPH0312975A (ja) * 1989-06-12 1991-01-21 Nikon Corp レーザ発振装置及びレーザ発振装置を用いた露光装置、露光方法
WO2011070898A1 (ja) 2009-12-11 2011-06-16 国立大学法人九州大学 炭化珪素の研磨液及びその研磨方法

Similar Documents

Publication Publication Date Title
US4905243A (en) Method and apparatus for stabilizing the frequency of a laser beam
KR910006307B1 (ko) 레이저 파장의 안정화 방법 및 파장 안정화 장치
US5081635A (en) Apparatus for controlling output from an excimer laser device
CA2553410A1 (en) Gas detection method and gas detection device
KR20060061371A (ko) 기체 검출 방법 및 기체 검출기 장치
DE59300075D1 (de) Anordnung zur Stabilisierung der Wellenlänge des von einer Laserdiode abgegebenen Lichstrahles und Laser-Interferometer.
ES433878A1 (es) Sistema laser con longitud de onda estabilizada.
JPS6472578A (en) Stabilization of laser wavelength and wavelength stabilized laser
JPS6465424A (en) Spectrophotometer
US3924950A (en) Atomic absorption spectroscopy with background correction
ATE106556T1 (de) Farbsteuerung.
JPS6482527A (en) Exposure device
JPS6488326A (en) Parameter measurement for system comprising semiconductor laser
ES2127955T3 (es) Procedimiento y dispositivo de determinacion de la absorcion de una radiacion electromagnetica por un gas.
US4504145A (en) Apparatus capable of measurement of profile of emission line spectrum
JPS6446995A (en) Semiconductor laser light source apparatus
JPH0740181Y2 (ja) レーザ周波数特性測定装置並びに核装置を利用した可変周波数光源
JP2611264B2 (ja) 波長安定化レーザ
JPH02257026A (ja) レーザ周波数安定度測定装置
JPS5693385A (en) Method for controlling wavelength of light emitted from diode laser
JPS5362992A (en) Oscillation wavelength stabilization method of semiconductor laser
JPS55141772A (en) Laser device
KR940010168B1 (ko) 2부분 광다이오드의 간섭무늬 이동검지에 의한 펄스형 레이저의 주파수 안정화 방법과 장치
JPH10111243A (ja) 分光分析装置
SU1303207A1 (ru) Устройство дл контрол температуры при обработке материалов