JPS6472151A - Diazo type photosensitive composition - Google Patents

Diazo type photosensitive composition

Info

Publication number
JPS6472151A
JPS6472151A JP22805087A JP22805087A JPS6472151A JP S6472151 A JPS6472151 A JP S6472151A JP 22805087 A JP22805087 A JP 22805087A JP 22805087 A JP22805087 A JP 22805087A JP S6472151 A JPS6472151 A JP S6472151A
Authority
JP
Japan
Prior art keywords
compd
contg
diazo
heteroatom
solubility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22805087A
Other languages
English (en)
Inventor
Hiroyuki Obitani
Shozo Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP22805087A priority Critical patent/JPS6472151A/ja
Publication of JPS6472151A publication Critical patent/JPS6472151A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/016Diazonium salts or compounds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
JP22805087A 1987-09-11 1987-09-11 Diazo type photosensitive composition Pending JPS6472151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22805087A JPS6472151A (en) 1987-09-11 1987-09-11 Diazo type photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22805087A JPS6472151A (en) 1987-09-11 1987-09-11 Diazo type photosensitive composition

Publications (1)

Publication Number Publication Date
JPS6472151A true JPS6472151A (en) 1989-03-17

Family

ID=16870416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22805087A Pending JPS6472151A (en) 1987-09-11 1987-09-11 Diazo type photosensitive composition

Country Status (1)

Country Link
JP (1) JPS6472151A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5506089A (en) * 1993-03-09 1996-04-09 The Chromaline Corporation Photosensitive resin composition
CN101813887A (zh) * 2010-04-12 2010-08-25 东莞市三联科技实业有限公司 一种提高重氮感光胶热稳定性的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5506089A (en) * 1993-03-09 1996-04-09 The Chromaline Corporation Photosensitive resin composition
CN101813887A (zh) * 2010-04-12 2010-08-25 东莞市三联科技实业有限公司 一种提高重氮感光胶热稳定性的方法

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