JPS6472151A - Diazo type photosensitive composition - Google Patents
Diazo type photosensitive compositionInfo
- Publication number
- JPS6472151A JPS6472151A JP22805087A JP22805087A JPS6472151A JP S6472151 A JPS6472151 A JP S6472151A JP 22805087 A JP22805087 A JP 22805087A JP 22805087 A JP22805087 A JP 22805087A JP S6472151 A JPS6472151 A JP S6472151A
- Authority
- JP
- Japan
- Prior art keywords
- compd
- contg
- diazo
- heteroatom
- solubility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22805087A JPS6472151A (en) | 1987-09-11 | 1987-09-11 | Diazo type photosensitive composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22805087A JPS6472151A (en) | 1987-09-11 | 1987-09-11 | Diazo type photosensitive composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6472151A true JPS6472151A (en) | 1989-03-17 |
Family
ID=16870416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22805087A Pending JPS6472151A (en) | 1987-09-11 | 1987-09-11 | Diazo type photosensitive composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6472151A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5506089A (en) * | 1993-03-09 | 1996-04-09 | The Chromaline Corporation | Photosensitive resin composition |
CN101813887A (zh) * | 2010-04-12 | 2010-08-25 | 东莞市三联科技实业有限公司 | 一种提高重氮感光胶热稳定性的方法 |
-
1987
- 1987-09-11 JP JP22805087A patent/JPS6472151A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5506089A (en) * | 1993-03-09 | 1996-04-09 | The Chromaline Corporation | Photosensitive resin composition |
CN101813887A (zh) * | 2010-04-12 | 2010-08-25 | 东莞市三联科技实业有限公司 | 一种提高重氮感光胶热稳定性的方法 |
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