JPS6472043A - Growth rate monitoring apparatus and method for molecular beam epitaxy - Google Patents
Growth rate monitoring apparatus and method for molecular beam epitaxyInfo
- Publication number
- JPS6472043A JPS6472043A JP63204913A JP20491388A JPS6472043A JP S6472043 A JPS6472043 A JP S6472043A JP 63204913 A JP63204913 A JP 63204913A JP 20491388 A JP20491388 A JP 20491388A JP S6472043 A JPS6472043 A JP S6472043A
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- light
- thin film
- substrate
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9424787A | 1987-09-08 | 1987-09-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6472043A true JPS6472043A (en) | 1989-03-16 |
Family
ID=22244004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63204913A Pending JPS6472043A (en) | 1987-09-08 | 1988-08-19 | Growth rate monitoring apparatus and method for molecular beam epitaxy |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0307096A3 (ja) |
JP (1) | JPS6472043A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09121065A (ja) * | 1995-10-25 | 1997-05-06 | Nec Corp | 超格子構造磁性膜及びその製造方法 |
JP2011247870A (ja) * | 2010-04-28 | 2011-12-08 | Hamamatsu Photonics Kk | X線光電子分光装置およびx線光電子分光方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106769889A (zh) * | 2017-01-04 | 2017-05-31 | 南京大学 | 一种集成生长与测量的分子束外延生长系统 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4159919A (en) * | 1978-01-16 | 1979-07-03 | Bell Telephone Laboratories, Incorporated | Molecular beam epitaxy using premixing |
US4434025A (en) * | 1981-06-04 | 1984-02-28 | Robillard Jean J | Controlling crystallinity and thickness of monocrystalline layer by use of an elliptically polarized beam of light |
GB2130716A (en) * | 1982-11-26 | 1984-06-06 | Philips Electronic Associated | Method of determining the composition of an alloy film grown by a layer-by layer process |
-
1988
- 1988-08-16 EP EP19880307595 patent/EP0307096A3/en not_active Withdrawn
- 1988-08-19 JP JP63204913A patent/JPS6472043A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09121065A (ja) * | 1995-10-25 | 1997-05-06 | Nec Corp | 超格子構造磁性膜及びその製造方法 |
JP2011247870A (ja) * | 2010-04-28 | 2011-12-08 | Hamamatsu Photonics Kk | X線光電子分光装置およびx線光電子分光方法 |
Also Published As
Publication number | Publication date |
---|---|
EP0307096A2 (en) | 1989-03-15 |
EP0307096A3 (en) | 1990-12-05 |
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