JPS6468988A - Carbonic acid gas laser device - Google Patents

Carbonic acid gas laser device

Info

Publication number
JPS6468988A
JPS6468988A JP62225205A JP22520587A JPS6468988A JP S6468988 A JPS6468988 A JP S6468988A JP 62225205 A JP62225205 A JP 62225205A JP 22520587 A JP22520587 A JP 22520587A JP S6468988 A JPS6468988 A JP S6468988A
Authority
JP
Japan
Prior art keywords
microwave
dielectric
carbonic acid
plasma
acid gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62225205A
Other languages
Japanese (ja)
Other versions
JP2566583B2 (en
Inventor
Kenji Yoshizawa
Junichi Nishimae
Masakazu Taki
Yoshihiro Ueda
Tadashi Yanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP22520587A priority Critical patent/JP2566583B2/en
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to EP88101007A priority patent/EP0280044B1/en
Priority to DE3855896T priority patent/DE3855896T2/en
Priority to DE3856348T priority patent/DE3856348T2/en
Priority to EP95108095A priority patent/EP0674471B1/en
Priority to KR1019880000551A priority patent/KR910002239B1/en
Priority to US07/147,726 priority patent/US4890294A/en
Publication of JPS6468988A publication Critical patent/JPS6468988A/en
Application granted granted Critical
Publication of JP2566583B2 publication Critical patent/JP2566583B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • H01J37/32339—Discharge generated by other radiation using electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Abstract

PURPOSE:To produce microwave discharge plasma into even one both spacially and secularly and to make possible a high-efficiency and large-output laser operation by a method wherein carbonic acid gas laser gas is encapsulated between a conductor wall constituting part of a microwave circuit and a dielectric opposed to this conductor wall, the dielectric is used as a microwave incident window, a mode of a microwave having an electric field component vertical to the boundary between the dielectric and generated plasma is incided and a microwave which is excited is turned into a pulse, whose quiescent period is shorter than the thermal time constant of the carbonic acid gas laser gas. CONSTITUTION:A mode of a microwave having an electric field component vertical to the boundary between a dielectric 25 and plasma is formed by a microwave circuit. As the dielectric 25 and a conductor wall 24 oppose to each other, an electric field to penetrate the plasma is formed and spacially even discharge plasma is generated. Here, an exciting power supply 4 rectifies an AC power supply 40, the DC is converted into a high-frequency AC by a DC-AC inverter circuit 44, the voltage of the AC is boosted, the AC is rectified by a halfwave voltage multiplying circuit 44 to generate a highvoltage pulsating current, a magnetron 3 is excited and pulses microwaves, whose quiescent time is shorter sufficiently than the thermal time constant of the carbonic acid gas laser gas, are generated.
JP22520587A 1987-01-26 1987-09-10 Carbon dioxide laser device Expired - Lifetime JP2566583B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP22520587A JP2566583B2 (en) 1987-09-10 1987-09-10 Carbon dioxide laser device
DE3855896T DE3855896T2 (en) 1987-01-26 1988-01-23 Plasma device
DE3856348T DE3856348T2 (en) 1987-01-26 1988-01-23 Laser plasma device
EP95108095A EP0674471B1 (en) 1987-01-26 1988-01-23 Laser Plasma apparatus
EP88101007A EP0280044B1 (en) 1987-01-26 1988-01-23 Plasma apparatus
KR1019880000551A KR910002239B1 (en) 1987-01-26 1988-01-25 Laser system
US07/147,726 US4890294A (en) 1987-01-26 1988-01-25 Plasma apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22520587A JP2566583B2 (en) 1987-09-10 1987-09-10 Carbon dioxide laser device

Publications (2)

Publication Number Publication Date
JPS6468988A true JPS6468988A (en) 1989-03-15
JP2566583B2 JP2566583B2 (en) 1996-12-25

Family

ID=16825624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22520587A Expired - Lifetime JP2566583B2 (en) 1987-01-26 1987-09-10 Carbon dioxide laser device

Country Status (1)

Country Link
JP (1) JP2566583B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0380584A (en) * 1989-08-24 1991-04-05 Mitsubishi Heavy Ind Ltd Oscillation device of carbon dioxide gas laser
CN104848761A (en) * 2015-05-21 2015-08-19 苏州市吴中区胥口广博模具加工厂 Hand-operated half ring detection mechanism of automobile throttle pedal detection apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0380584A (en) * 1989-08-24 1991-04-05 Mitsubishi Heavy Ind Ltd Oscillation device of carbon dioxide gas laser
CN104848761A (en) * 2015-05-21 2015-08-19 苏州市吴中区胥口广博模具加工厂 Hand-operated half ring detection mechanism of automobile throttle pedal detection apparatus

Also Published As

Publication number Publication date
JP2566583B2 (en) 1996-12-25

Similar Documents

Publication Publication Date Title
JPS6433896A (en) Microwave discharge light source device
EP0493623A4 (en) High frequency heating equipment
CA2051017A1 (en) Ac/dc power converting apparatus
RU2002128612A (en) METHOD OF ELECTROLYTIC OXIDATION FOR PRODUCING CERAMIC COATING ON THE SURFACE OF METAL
JPS56163830A (en) Pulse power source
JPS6447279A (en) Voltage converter
HK1040163B (en) Method and apparatus for making smoked food
EP0289032A3 (en) Magnetron feeding apparatus and method of controlling the same
CA2206276A1 (en) Discharge lamp lighting device
MY124993A (en) Driving circuit of a dc microwave oven and method of controlling the same
JPS6416261A (en) High voltage dc source
EP0286678A4 (en) X-ray tomograph.
JPS6468988A (en) Carbonic acid gas laser device
JPS6423589A (en) Method and apparatus for controlling power supply for laser
RU2002110956A (en) POWER DEVICE FOR LIGHTING INSTALLATION USING A MICROWAVE AND LIGHTING INSTALLATION USING A MICROWAVE (OPTIONS)
JPS57156680A (en) Inverter device
EP0365077B1 (en) Microwave oven with timer device
JPH01225091A (en) High-frequency heating device
EP0287676A1 (en) Rf power source apparatus
JPS5511653A (en) Frequency converting device
JPS5563597A (en) Inverter device
JPS5574377A (en) Modulator for pulse width modulation inverter
SU1343533A1 (en) D.c. electric drive
GB2236921A (en) Electronic ballast circuit for gas discharge lamp
RU1798886C (en) Shf pulse generator having tunable power