JPS6468631A - Manufacture of pressure sensor - Google Patents

Abstract

PURPOSE:To improve a yield and to reduce a cost by making a thick metallic diaphragm which is displaced according to pressure flex an assembling process wherein the metallic diaphragm is clamped and held between a case and a lid across an O ring. CONSTITUTION:The case 1 is mounted on a jig 5 so that the projection 5b of a case assembling jig 5 is fitted in a fitting hole 1a, the O ring 2 is fitted in the O ring groove 1c of the case 1, and the diaphragm 3 is put in the recessed part 1d of the case 1. Then a downward load W is placed to press the diaphragm, thereby pressing the outer periphery of the lid 4 in the inner periphery 1e of the case 1. Then the diaphragm deforms in a upward concave spherical shape and the external edge part is pressed out against the O ring 2. When the lid 4 is further pressed down, the O ring is pressed and the external edge part of the diaphragm is clamped between the case 1 and lid 4 and fixed. Then when negative pressure is applied to the circular part of a molding jig 6, the diaphragm 3 is brought into tight contact with the upper end spherical part of the jig 6, so the diaphragm is easily shaped uniformly at the time of the assembly.