JPS6465264A - Peep window device - Google Patents
Peep window deviceInfo
- Publication number
- JPS6465264A JPS6465264A JP22256687A JP22256687A JPS6465264A JP S6465264 A JPS6465264 A JP S6465264A JP 22256687 A JP22256687 A JP 22256687A JP 22256687 A JP22256687 A JP 22256687A JP S6465264 A JPS6465264 A JP S6465264A
- Authority
- JP
- Japan
- Prior art keywords
- see
- turning member
- plates
- hole
- window frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To enable the exchange of the see-through plates of a peep window during the operation of a vessel body by inserting respectively plural see-through plates freely attachably and detachably from both sides into the through-hole of a turning member mounted via a window frame body to the aperture of the vessel body. CONSTITUTION:The window frame body 12 contg. a slit disk 13 is mounted on the aperture 11a of the vessel body 11 of a thin film forming device, etc. The turning member 14 having the through-hole 14b is supported freely turnable via face-to-face contact, etc., into this window frame body 12. The respectively plural see-through plates 16a, 17a, 16b, 17b are inserted into the through-hole 14b from both sides and are mounted freely attachably and detachably on the turning member 14 by means of annular fastening parts 18a, 18b. Light shielding glass 19 is further mounted on the outside thereof via a space A interposed therebetween. The inside of the above- mentioned space A is evacuated to a vacuum by a vacuum pump 23 and thereafter, the turning member 14 is turned 180 deg. around the axis 14a when the transparency of the see-through plate 17a is degraded by the deposit of vapor deposition, etc. The atmospheric pressure is then restored in the space A and the glass 19 is removed, following which the plate 17a or the like is exchanged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22256687A JPS6465264A (en) | 1987-09-04 | 1987-09-04 | Peep window device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22256687A JPS6465264A (en) | 1987-09-04 | 1987-09-04 | Peep window device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6465264A true JPS6465264A (en) | 1989-03-10 |
Family
ID=16784468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22256687A Pending JPS6465264A (en) | 1987-09-04 | 1987-09-04 | Peep window device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6465264A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
| CN101954259A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum chamber viewing window device and vacuum chamber with same |
| CN106167891A (en) * | 2016-08-31 | 2016-11-30 | 南昌凯迅光电有限公司 | A kind of adjustable full angle evaporation mechanism form |
-
1987
- 1987-09-04 JP JP22256687A patent/JPS6465264A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
| CN101954259A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum chamber viewing window device and vacuum chamber with same |
| CN106167891A (en) * | 2016-08-31 | 2016-11-30 | 南昌凯迅光电有限公司 | A kind of adjustable full angle evaporation mechanism form |
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