JPS646503U - - Google Patents

Info

Publication number
JPS646503U
JPS646503U JP10219487U JP10219487U JPS646503U JP S646503 U JPS646503 U JP S646503U JP 10219487 U JP10219487 U JP 10219487U JP 10219487 U JP10219487 U JP 10219487U JP S646503 U JPS646503 U JP S646503U
Authority
JP
Japan
Prior art keywords
tool microscope
pattern shapes
parts
ccd camera
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10219487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10219487U priority Critical patent/JPS646503U/ja
Publication of JPS646503U publication Critical patent/JPS646503U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP10219487U 1987-07-02 1987-07-02 Pending JPS646503U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10219487U JPS646503U (US20030220297A1-20031127-C00074.png) 1987-07-02 1987-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10219487U JPS646503U (US20030220297A1-20031127-C00074.png) 1987-07-02 1987-07-02

Publications (1)

Publication Number Publication Date
JPS646503U true JPS646503U (US20030220297A1-20031127-C00074.png) 1989-01-13

Family

ID=31331879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10219487U Pending JPS646503U (US20030220297A1-20031127-C00074.png) 1987-07-02 1987-07-02

Country Status (1)

Country Link
JP (1) JPS646503U (US20030220297A1-20031127-C00074.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210263A (ja) * 1990-01-16 1991-09-13 Matsushita Electric Ind Co Ltd 気泡水流発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210263A (ja) * 1990-01-16 1991-09-13 Matsushita Electric Ind Co Ltd 気泡水流発生装置

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